基于激光多普勒技术的微机电系统运动检测
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摘要
本课题研究了利用激光多普勒技术测量微型振子、马达等微机电器件的瞬时速度、加速度、转速、角加速度等运动参数的方法。
论文在前期探索基础上,从测量光路、信号处理电路和信号处理软件等三方面对差动多普勒测量系统进行了改进。采用锁相环电路对信号进行解调,并添加了微机电器件运动方向的辨向电路。通过时频分析,建立了一种能够在时间和频率上同时表示信号的能量或者强度的分布,并在此基础上提取信号中所包含的特征信息的信号处理方法。综合考虑激光的透镜变换、像差和实际需求等因素,采用非球面透镜聚焦,实验获得了微米级测量光斑。
搭建了可同时测量微机电器件的面内和离面运动的激光多普勒检测系统,该系统能检测微机电系统的瞬时运动速度、转速、角加速度和位移等运动参数,可用于MEMS器件的高阶振动测量。提出了一种用于微机电系统模态分析的试验方法,该方法可用于确定谐振器结构的模态参数如固有频率、阻尼和振型。
设计了微定位系统,同时加入CCD摄像监测光路,使测量光斑能准确定位于被测点。制作了微机电系统驱动控制系统,可驱动不同结构参数的微机电器件。
通过对一系列微机电系统谐振器样品、微型马达、加速度校准仪等被测物的成功检测,表明本测量系统可用于微机电系统的运动检测。
Micro-electro-mechanical system (MEMS) has been widely used in national defense, high-tech, life science, communication and intelligence technology. The measurements of MEMS have become the bottle neck factor in its development. In this project, a method for measuring dynamic parameters, such as velocity, acceleration, angular velocity, angular acceleration, of the MEMS resonator and the micro motor etc., based on laser Doppler technology is investigated.
Based on the early work, the measurement system, including optical diagram, signal processing circuit and data analysis program has been improved. A phase-locked loop is applied to demodulate the signal and a circuit discriminating MEMS motion direction is introduced.
A study on the method of laser Doppler signal processing is carried out. Wavelet filters are used and the time-frequency analysis method is applied. A distribution function which shows the signal energy or intensity in time domain and in frequency domain simultaneously is forwarded. The dynamic characteristics of MEMS are extracted from the output of the optical system. By taken care of the actual transformation functions, aberrations of the lenses and practical requirements to the laser spot an optical spot with tens of micrometers diameter is obtained by using aspheric lenses. The methods used here improve the resolution and accuracy of the whole system effectively.
A laser Doppler system for measuring the in-plane transient motion and the out-of-plane vibration simultaneously is set up. The dynamic parameters of the MEMS, such as velocity, angular velocity, angular acceleration, displacement, etc., can be measured. High-order vibrations of the MEMS can be also measured by the system. A special modal experimentalion method is introuduced to obtain resonator modal parameters, such as natural frequency, vibration shape, etc.
A position micro adjustment system with a CCD camera is designed to place the light spot accurately. In the mean time, a MEMS driving system is developed to drive Micro-electro-mechanical Systems with different parameters.
Experiments on measuring the motion characteristics of the MEMS resonators have been conducted. Experimental results show that the system can be used to measure Micro-electro-mechanical System motion.
论文在前期探索基础上,从测量光路、信号处理电路和信号处理软件等三方面对差动多普勒测量系统进行了改进。采用锁相环电路对信号进行解调,并添加了微机电器件运动方向的辨向电路。通过时频分析,建立了一种能够在时间和频率上同时表示信号的能量或者强度的分布,并在此基础上提取信号中所包含的特征信息的信号处理方法。综合考虑激光的透镜变换、像差和实际需求等因素,采用非球面透镜聚焦,实验获得了微米级测量光斑。
搭建了可同时测量微机电器件的面内和离面运动的激光多普勒检测系统,该系统能检测微机电系统的瞬时运动速度、转速、角加速度和位移等运动参数,可用于MEMS器件的高阶振动测量。提出了一种用于微机电系统模态分析的试验方法,该方法可用于确定谐振器结构的模态参数如固有频率、阻尼和振型。
设计了微定位系统,同时加入CCD摄像监测光路,使测量光斑能准确定位于被测点。制作了微机电系统驱动控制系统,可驱动不同结构参数的微机电器件。
通过对一系列微机电系统谐振器样品、微型马达、加速度校准仪等被测物的成功检测,表明本测量系统可用于微机电系统的运动检测。
Micro-electro-mechanical system (MEMS) has been widely used in national defense, high-tech, life science, communication and intelligence technology. The measurements of MEMS have become the bottle neck factor in its development. In this project, a method for measuring dynamic parameters, such as velocity, acceleration, angular velocity, angular acceleration, of the MEMS resonator and the micro motor etc., based on laser Doppler technology is investigated.
Based on the early work, the measurement system, including optical diagram, signal processing circuit and data analysis program has been improved. A phase-locked loop is applied to demodulate the signal and a circuit discriminating MEMS motion direction is introduced.
A study on the method of laser Doppler signal processing is carried out. Wavelet filters are used and the time-frequency analysis method is applied. A distribution function which shows the signal energy or intensity in time domain and in frequency domain simultaneously is forwarded. The dynamic characteristics of MEMS are extracted from the output of the optical system. By taken care of the actual transformation functions, aberrations of the lenses and practical requirements to the laser spot an optical spot with tens of micrometers diameter is obtained by using aspheric lenses. The methods used here improve the resolution and accuracy of the whole system effectively.
A laser Doppler system for measuring the in-plane transient motion and the out-of-plane vibration simultaneously is set up. The dynamic parameters of the MEMS, such as velocity, angular velocity, angular acceleration, displacement, etc., can be measured. High-order vibrations of the MEMS can be also measured by the system. A special modal experimentalion method is introuduced to obtain resonator modal parameters, such as natural frequency, vibration shape, etc.
A position micro adjustment system with a CCD camera is designed to place the light spot accurately. In the mean time, a MEMS driving system is developed to drive Micro-electro-mechanical Systems with different parameters.
Experiments on measuring the motion characteristics of the MEMS resonators have been conducted. Experimental results show that the system can be used to measure Micro-electro-mechanical System motion.
引文
[1] Cimoo Song, Byeoungju Ha, Sukhan Lee, Micromachined inertial sensor, Proceeding of 1999 IEEE International Conference on Intelligent Robots and Systems,1999:1049-1056
[2] Gerry Smith, The application of microtechnology to sensors for the automotive industry, Microelectronics, 1996, 28(4): 371-379
[3] Cornel Marxer, Christian Thio, Marc-Alexia Gretillat, Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications, Journal of Microelectromechanical Systems, 1997, 6(3):277-285
[4] Richard S Muller, Kam Y Lau, Surface-micromachined microoptical elements and systems, Proceedings of IEEE, 1998, 86(7):1705-1720
[5] Aksyuk V A, Pardo F, Carrx D, Beam-steering micromirrors for large optical cross-connects, Journal of Lightwave Technology, 2003, 21(3):634-642
[6] Gabriel Kaigham J, Microelectromechanical systems(MEMS) tutorial, International Test Conference, 1998: 432-441
[7] 金翠云,基于机器微视觉的 MEMS 平面微运动测试技术的研究:[硕士学位论文],天津,天津大学,2003
[8] Marcel W. Pruessner, Todd T. King, Daniel P. Kelly, Rohit Grover, Lynn C. Calhoun, Reza Ghodssi, Mechanical property measurement of InP-based MEMS for optical communications, Sensors and Actuators A , 2003, 105: 190-200
[9] Biao Li, Xiaosong Tang, Huimin Xie, Xin Zhang, Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system, Sensors and Actuators A, 2004,111: 57-62
[10] Taechung Yi and Chang-Jin Kim, Measurement of mechanical properties for MEMS materials, Meas. Sci. Technol. 1999, 10: 706-716
[11] Beth L. Pruitt, Woo-Tae Park, Thomas W. Kenny, Measurement system for low force and small displacement contacts, Journal of Microelectromechanical Systems, 2004, 13(2):220-229
[12] 王琪民, 微型机械导论, 合肥: 中国科学技术大学出版社, 2003
[13] Freeman D M, Aranyosi A J, Gordon M J, Hong S S, Multidimensional motion analysis of MEMS using computer microvision, Hilton Head, SC, Dig. Solid State Sensor & Actuator Workshop, 1998:150-155
[14] Davis C Quentin, Karu Z Zoher, Freeman D M, Equivalence of subpixel motion estimators based on optical flow and block matching, International symposium on computer vision, Coral Gables, Florida, November 21-23, 1995
[15] Davis C Q, Freeman D M, Using a light microscope to measure motions with nanometer accuracy, Optical Engineering, 1998, 37: 1299-1304
[16] Christian Rembe, Rishi Kant, Richard S Muller, Optical measurement methods to study dynamic behavior in MEMS, Proceedings of SPIE - The International Society for Optical Engineering, 2001: 127-137
[17] Freeman D M, Davis C Q, Using video microscopy to characterizemicromechanical systems, Proceedings of IEEE/LEOS, International Conference on Optical MEMS, 1998: 9-10
[18] Daniel J Burns, Herbert F Helbig, A system for automatic electrical and optical characterization of microelectromechanical devices, Journal of Microelectromechanical System, 1999, 8(4): 473-482
[19] Rembe C, Tibken B, Hofer E P, Analysis of the dynamics in microactuators using high-speed cine photomicrography, Journal of Microelectromechanical Systems, 2001, 10(3): 137-145
[20] Rembe C, Aschemann H, Wiesche S aus der, Hofer E P, Debéda H, Mohr J, Wallrabe U, Testing and improvement of Micro-optical switch dynamics, Microelectronics Reliability, 2001, 41: 471-480
[21] Norman F Smith, Daneller M Tanner, Scot E Swanson, Samuel L Miller, Non-destructive resonant frequency measurement on MEMS actuators, IEEE, 2001: 99-105
[22] Christian Rembe, Richard S Muller, Measurement system for full three-dimensional motion characterization of MEMS, Journal of Microelectromechanical System, 2002, 11(5): 479-487
[23] Matthew R Hart, Robert A Conant, Kam Y Lau, Richard S Muller, Stroboscopic interferometer system for dynamic MEMS characterization, Journal of Microelectromechanical Systems, 2000, 9(4): 409-418
[24] Hart M R, Conant R A, Lau K Y, Muller R S, Time-resolved measurement of optical MEMS using stroboscopic interferometry, Proc. Transducers ’99 , Sendai, Japan, 1999: 470-473
[25] Christian Rembe, Lilac Muller, Richard S Muller, Roger T Howe, Full three-dimensional motion characterization of a gimbaled electrostatic microactuator, 39th Annual Reliability Physics Symposium, 2001: 91-98
[26] Freeman D M, Aranyosi A J, Gordon M J, Hong S S, Multidimensional motion analysis of MEMS using computer microvision, Solid-State Sensor and Actuator Workshop, 1998: 150-155
[27] Hemmert W, Mermelstein M S, Freeman D M, Nanometer resolution of three-dimensional motions using video interference microscopy, 20th IEEE International Conference on Micro Electro Mechanical Systems, IEEE, 1999: 302-308
[28] Petitgrand S, Yahiaoui R, Danaie K, et al., 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope, Optics and Lasers in Engineering, 2001, 36: 77-101
[29] Aswendta P , Schmidta C D , Zielkeb D , ESPI Solution for non-contacting MEMS-on-wafer testing, Optics and Lasers in Engineering , 2003, 40 (5/6): 501-515
[30] Aebischer H A , Mazza E, Measurement of the nanometer deformation field in metallic microbars with microscopic ESPI, Proc. SPIE , 1997, 3098 : 400-410
[31] Kurth S, Interference microscopic techniques for dynamic testing of MEMS, Annual Research Report 2002, Chemnitz University of Technology, Germany
[32] Petra Aswendt, Micromotion analysis by deep-UV speckle interferometry, Proc.SPIE 2003, 5145: 17-22
[33] Petra Aswendt, Claus-Dieter Schmidt, Dirk Zielke, Inspection system for MEMS characterization on wafer level using ESPI, Proc. SPIE 2001, 4400: 43-50
[34] 王涛,王晓东,王立鼎,刘冲,MEMS 中微结构动态测试技术进展, 中国机械工程,2005,16(1):83-88
[35] Lee C W, Zhang X M, Tjin S C , et al, Nano–scale displacement measurement of MEMS devices using fiber optic interferometry, Proc. SPIE, 2003, 5145: 196-201
[36] Donati S, Norgia M, Annovazzi Lodi V, Merlo S, Measurement of MEMS mechanical parameters by injection interferometry, Proc, of International Conference on Optical MEMS, Sheraton Kauai, USA, 2000: 89-90
[37] Valerio Annovazzi-Lodi, Sabina Merlo, Michele Norgia, Comparison of capacitive and feedback-interferometric measurements on MEMS, Journal of Microelectromechanical Systems, 2001, 10 (3): 327-335
[38] Erik Novak, Der-shen Wan, Paul Unruh, Joanna Schmit, Dynamic MEMS measurement using a strobe interferometric system with combined coherence sensing and phase information, Proceedings of the International Conference on MEMS, NANO and Smart Systems, 2003: 285-288
[39] http://www.veeco.com.cn/
[40] Marc P Georges, Philippe C Lemaire, Real-time stroboscopic holographic interferometry using sillenite crystals for the quantitative analysis of vibrations, Optics Communications, 1998, 145: 249-257
[41] Christian Rembe, Rishi Kant, Richard S Muller, Optical Measurement Methods to Study Dynamic Behavior in MEMS, Proceedings of SPIE - The International Society for Optical Engineering, 2001: 127-137
[42] Ngoi B K A, Venkatakrishnan K, Two-axis-scanning Laser Doppler Vibrometer for Microstructure, Optics Communications, 2000, 182: 175-185
[43] 钟莹,微机电系统谐振器面内运动检测的激光多普勒方法:[博士学位论文], 天津:天津大学,2005
[44] 丁浩,赵浩,瞿荣辉,方祖捷,微机械运动的光纤干涉测量,红外与激光工程,1997,26(5):54-58
[45] 瞿荣辉,丁浩,微机械部件运动的光学测量,功能材料与器件学报,1998, 4(2):141-144
[46] 张二星,微型机械运动参数测试仪光学机械系统研究,光学精密工程,1996,4(2): 48-52
[47] 王佳,激光测振仪用于微梁和 AFM 探针振动测量,航空计测技术,1996,15(3):3-6
[48] 康新,董萼良,裘安萍,何小元,振动式微机械陀螺动态特性光学测试,光学学报,2006,26(2):202-206
[49] 蒋明,杨福俊,董萼良,郑翔,何小元,基于高速摄像的双线性振动陀螺力学特性分析,光学精密工程,2004,14(1):121-126
[50] 谢勇君,白金鹏,史铁林,刘胜,MEMS 三维静动态测试系统,光电子·激光,2005,16(5):570-574
[51] Drain L E, The laser Doppler technique, New York, John Wiley, 1980
[52] [英]瓦切西威克兹 B E,鲁德 M J 著,徐枋同等译,激光多普勒测量,水利出版社出版社,1980
[53] 沈熊,蓬勃发展的激光多普勒测速技术,实验力学,1987,2(2):123-126
[54] Bruce E Truax,Frank C Demarest,Gary E Sommargren,Laser Doppler velocimeter for velocity and length measurements of moving surfaces,Applied Optics,1984,23(1): 67-73
[55] Hong Tan, Real-time laser Doppler and phase Doppler signal processors, Optics and Lasers in Engineering, 1992, 17(4): 229-240
[56] Petr Chylek, Ramaswamy V, Simultaneous determination of refractive index and size of spherical dielectric particles from lights catering data, Applied Optics, 1983, 22(15): 2302-2307
[57] Aikele M, Bauer K, Ficker W, et al., Resonant accelerometer with self-test, Sensors and Actuators, 2001, 92(A): 161-167
[58] Beeby Steve P, Ensell Graham, Baker Brian R, et al., Micromachined silicon resonant strain gauges fabricated using SOI wafer technology, Journal of Microelectromechanical Systems, 2000, 9(1): 104-110
[59] Ashwin A Seshia, Moorthi Palaniapan, Trey A Roessig, et al, A vacuum packaged surface micromachined resonant accelerometer, Journal of Microelectromechanical Systems, 2002, 11(6): 784-793
[60] Kun Wang, Clark T-C Nguyen, High-order micromechanical electronic filters, Proceedings of 1997 IEEE International Micro Electro Mechanical Systems Workshop, 1997: 25-30
[61] Clark T-C Nguyen, Communications applications of microelectromechanical systems, Proceedings of 1998 Sensors Expo, 1998: 447-455
[62] 徐礼华,黄君,结构试验模态的计算机仿真分析,华中科技大学学报,2005, 22(3):5-9
[63] Anthony B Stanbridge, Milena Martarelli, David J Ewins, Measuring area vibration mode shapes with a continuous-scan LDV, Measurement, 2004, 35: 181-189
[64] James S. Burdess, Alun J. Harris, David Wood, Robert J. Pitcher, David Glennie, A system for the dynamic characterization of microstructures, Journal of Microelectromechanical Systems, 1997, 6(4): 322-328
[65] 张素侠,刘习军,贾启芬等,矩形弹性壳液耦合系统的模态试验分析,机械强度,2004,26(6):615-619
[66] 李德葆,陆秋海,工程振动试验分析,北京:清华大学出版社,2004
[67] 傅志方,振动模态分析与参数辨识,北京:机械工业出版社,1990
[68] Ozdoganlar O B, Hansche B D, Carne T G, Experimental modal analysis for Microsystems, presented at IMAC’21, Kissimmee, FL, and in Proc. of 21st International Modal Analysis Conference (IMAC), 2003: 215-223
[69] Yuanfang Chou, Lichung Wang, On the modal testing of microstructures: its theoretical approach and experimental setup, ASME Journal of Vibration and Acoustics, 2001,123(1): 104-109
[70] James S Burdess, Alun J Harris, David Wood, Robert J Pitcher, David Glennie, A system for the dynamic characterization of microstructures, Journal of Microelectromechanical Systems, 1997, 6(4): 322-328
[71] Hong Vu-Manh, Masato Abe, Yozo Fujino, Kiyoyuki Kaito, The eigensystem realization algorithm for ambient vibration measurement using laser Doppler vibrometers, Proceedings of the American Control Conference, Arlington, 2001, 435-440
[72] [德]杜斯特 F,梅林 A,怀特洛 J H 著,沈雄,许宏庆,周作元译,激光多普勒测速技术的原理与实践,北京:科学出版社,1992
[73] 沈熊,激光多普勒测速技术及应用,北京:清华大学出版社,2004
[74] 孙长库,叶声华,激光测量技术,天津:天津大学出版社,2000
[75] Lading L, Differential Doppler Heterodyning Technique, Applied Optics, 1971, 10(8): 1743-1749
[76] Eric M Lawrence, Kevin E Speller, Duli Yu, MEMS characterization using laser Doppler Vibrometry, Proceedings of SPIE, Conference on Reliability, Testing, and Characterization of MEMS/MOEMS II, 2003, 4980: 51-62
[77] 杜振辉,武斌,李志刚,谢艳,蒋诚志,激光多普勒效应微纳测量技术的研究,纳米技术与精密工程,2004,2(3):221-224
[78] Hakan Urey, Spot size, depth-of-focus, and diffraction ring intensity formulas for truncated Gaussian beams, Applied Optics, 2004, 43(3):620-625
[79] 郁道银,谈恒英,工程光学,北京:机械工业出版社,2003
[80] Gordon R L, Forbes G. W, Optimal resolution with extreme depth of focus, Optics Communications, 1998, 150: 277–286
[81] 周炳琨,高以智,激光原理,北京:国防工业出版社,2004
[82] 张以谟,应用光学,北京:机械工业出版社,1988
[83] 蒋诚志,计量光学,北京:计量出版社,1989
[84] Buchhave P, George W K, Lumley J L, The measurement of turbulence with the laser Doppler anemometer, Annual Review of Fluid Mechanics, 1979, 11:8-13
[85] Xiaoyun Xiong, Songnian Zhao, Feng Wen, Detection of the Doppler frequency shift in acoustic remote sensing systems, IEEE Transactions on Geoscience and Remote Sensing, 1995, 33(3):523-527
[86] 万心平,张阙盛,集成锁相环路,北京:人民出版社,1995
[87] 张祥,白廷柱,图像实时处理中的高性能锁相环,光学技术,1999,(1):32-33
[88] http://www.ti.com
[89] Karsten Plamanny, Holger Zellmerz, Jurgen Czarske, Andreas Tunnermann, Directional discrimination in laser Doppler anemometry (LDA) without frequency shifting using twinned optical fibres in the receiving optics, Meas. Sci. Technol., 1998, 9:1840–1846
[90] Edson T. Shimizu, Directional discrimination in the self-mixing type laser Doppler velocimeter, Applied Optics, 1987, 26(21): 4541-4544
[91] 张国雄,金篆芷,测控电路,机械工业出版社,2001: 199-200
[92] 聂鲁燕,裘祖荣,幺春娟,洪昕,微装配中微靶球的三维移动,制造技术与机床,2006,(2):73-76
[93] http://www.jk-stage.com
[94] http://www.startsh.com
[95] Guangya Zhou, Philip Dowd, Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators, Journal of Micromechanics andMicroengineering, 2003, 13: 178-183
[96] William C Tang, Tu-Cuong H Nguyen, Roger T Howe, Laterally driven polysilicon resonant microstructures, Sensors and Actuators, 1989, 20(1): 53-59
[97] William C Tang, Martin G Lim, Roger T Howe, Electrostatic comb drive levitation and control method, Journal of Micromechanical System, 1992, 4(1): 170-178
[98] 周顺,李明,周百令,王寿荣,振动轮式微机械陀螺仪闭环驱动控制方法研究,传感器技术,1992,12:256-261
[99] ttp://www.apexmicrotech.com
[100] 卢文生,赵振民,新颖的精密陀螺电源,黑龙江科技学院学报,2002, 12(3):11-13
[101] 周亮,姚英学,低波纹度快速响应压电陶瓷驱动电源的研制,压电与声光,2000,22 (4):237-239
[102] Yufeng Zhang, Zhenyu Guo, Weilian Wang, Side He, Ting Lee, Murray Loew, A comparison of the wavelet and short-time Fourier transforms for Doppler spectral analysis, Medical Engineering & Physics, 2003, 25: 547-557
[103] ?nan Güler, Firat Hardalac, Serdar Müldür, Determination of aorta failure with the application of FFT, AR and wavelet methods to Doppler technique, Computers in Biology and Medicine, 2001, 31: 229-238
[104] Elif Derya Ubeyli, ?nan G?ler, Spectral broadening of ophthalmic arterial Doppler signals using STFT and wavelet transform, Computers in Biology and Medicine, 2004, 34: 345-354
[105] 汪源源,多普勒信号分析技术的比较研究,复旦学报(自然科学版),1996, 35(1):53-61
[106] 史习智,信号处理与软计算,北京:高等教育出版社,2003
[107] 胡广书,现代信号处理教程,北京:清华大学出版社,2004
[108] 张绪省,孙金玮,赵新明,用时频分析方法分析非平稳信号,宇航计测技术,1995,15(5):34-41
[109] 丁康,平稳和非平稳振动信号的若干处理方法及发展,振动工程学报, 2003,16(1):1-10
[110] 杜浩藩,丛爽, 基于 MATIJAB 小波去噪方法的研究,计算机仿真,2003, 20(7):119-122
[111] 董长虹,Matlab 小波分析工具箱原理与应用,北京:国防工业出版社, 2004
[112] 胡昌华,基于 MATLAB 的系统分析与设计—时频分析,西安:西安电子科技大学出版社,2002
[113] 胡昌华,张军波,基于 Matlab 的系统分析与设计—小波分析,西安:西安电子科大出版社,2001
[114] 易日,使用 ANSYS6.1 进行结构力学分析,北京:北京大学出版社,2002
[115] 傅志方,华宏星,模态分析理论与应用,上海:上海交通大学出版社, 2000
[116] Yoon Shik Hong, Jong Hyun Lee, Soo Hyun Kim, A laterally driven symmetric micro-resonator for gyroscopic applications, Journal of micromechanics and microengineering, 2000, (10): 452-458
[117] 诸德超,刑誉峰,工程振动基础,北京:北京航空航天大学出版社,2004
[118] 许本文,焦群英,机械振动与模态分析基础,北京:机械工业出版社,1998
[119] 刘习军,贾启芬,工程振动理论与测试技术,北京:高等教育出版社,2004
[2] Gerry Smith, The application of microtechnology to sensors for the automotive industry, Microelectronics, 1996, 28(4): 371-379
[3] Cornel Marxer, Christian Thio, Marc-Alexia Gretillat, Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications, Journal of Microelectromechanical Systems, 1997, 6(3):277-285
[4] Richard S Muller, Kam Y Lau, Surface-micromachined microoptical elements and systems, Proceedings of IEEE, 1998, 86(7):1705-1720
[5] Aksyuk V A, Pardo F, Carrx D, Beam-steering micromirrors for large optical cross-connects, Journal of Lightwave Technology, 2003, 21(3):634-642
[6] Gabriel Kaigham J, Microelectromechanical systems(MEMS) tutorial, International Test Conference, 1998: 432-441
[7] 金翠云,基于机器微视觉的 MEMS 平面微运动测试技术的研究:[硕士学位论文],天津,天津大学,2003
[8] Marcel W. Pruessner, Todd T. King, Daniel P. Kelly, Rohit Grover, Lynn C. Calhoun, Reza Ghodssi, Mechanical property measurement of InP-based MEMS for optical communications, Sensors and Actuators A , 2003, 105: 190-200
[9] Biao Li, Xiaosong Tang, Huimin Xie, Xin Zhang, Strain analysis in MEMS/NEMS structures and devices by using focused ion beam system, Sensors and Actuators A, 2004,111: 57-62
[10] Taechung Yi and Chang-Jin Kim, Measurement of mechanical properties for MEMS materials, Meas. Sci. Technol. 1999, 10: 706-716
[11] Beth L. Pruitt, Woo-Tae Park, Thomas W. Kenny, Measurement system for low force and small displacement contacts, Journal of Microelectromechanical Systems, 2004, 13(2):220-229
[12] 王琪民, 微型机械导论, 合肥: 中国科学技术大学出版社, 2003
[13] Freeman D M, Aranyosi A J, Gordon M J, Hong S S, Multidimensional motion analysis of MEMS using computer microvision, Hilton Head, SC, Dig. Solid State Sensor & Actuator Workshop, 1998:150-155
[14] Davis C Quentin, Karu Z Zoher, Freeman D M, Equivalence of subpixel motion estimators based on optical flow and block matching, International symposium on computer vision, Coral Gables, Florida, November 21-23, 1995
[15] Davis C Q, Freeman D M, Using a light microscope to measure motions with nanometer accuracy, Optical Engineering, 1998, 37: 1299-1304
[16] Christian Rembe, Rishi Kant, Richard S Muller, Optical measurement methods to study dynamic behavior in MEMS, Proceedings of SPIE - The International Society for Optical Engineering, 2001: 127-137
[17] Freeman D M, Davis C Q, Using video microscopy to characterizemicromechanical systems, Proceedings of IEEE/LEOS, International Conference on Optical MEMS, 1998: 9-10
[18] Daniel J Burns, Herbert F Helbig, A system for automatic electrical and optical characterization of microelectromechanical devices, Journal of Microelectromechanical System, 1999, 8(4): 473-482
[19] Rembe C, Tibken B, Hofer E P, Analysis of the dynamics in microactuators using high-speed cine photomicrography, Journal of Microelectromechanical Systems, 2001, 10(3): 137-145
[20] Rembe C, Aschemann H, Wiesche S aus der, Hofer E P, Debéda H, Mohr J, Wallrabe U, Testing and improvement of Micro-optical switch dynamics, Microelectronics Reliability, 2001, 41: 471-480
[21] Norman F Smith, Daneller M Tanner, Scot E Swanson, Samuel L Miller, Non-destructive resonant frequency measurement on MEMS actuators, IEEE, 2001: 99-105
[22] Christian Rembe, Richard S Muller, Measurement system for full three-dimensional motion characterization of MEMS, Journal of Microelectromechanical System, 2002, 11(5): 479-487
[23] Matthew R Hart, Robert A Conant, Kam Y Lau, Richard S Muller, Stroboscopic interferometer system for dynamic MEMS characterization, Journal of Microelectromechanical Systems, 2000, 9(4): 409-418
[24] Hart M R, Conant R A, Lau K Y, Muller R S, Time-resolved measurement of optical MEMS using stroboscopic interferometry, Proc. Transducers ’99 , Sendai, Japan, 1999: 470-473
[25] Christian Rembe, Lilac Muller, Richard S Muller, Roger T Howe, Full three-dimensional motion characterization of a gimbaled electrostatic microactuator, 39th Annual Reliability Physics Symposium, 2001: 91-98
[26] Freeman D M, Aranyosi A J, Gordon M J, Hong S S, Multidimensional motion analysis of MEMS using computer microvision, Solid-State Sensor and Actuator Workshop, 1998: 150-155
[27] Hemmert W, Mermelstein M S, Freeman D M, Nanometer resolution of three-dimensional motions using video interference microscopy, 20th IEEE International Conference on Micro Electro Mechanical Systems, IEEE, 1999: 302-308
[28] Petitgrand S, Yahiaoui R, Danaie K, et al., 3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope, Optics and Lasers in Engineering, 2001, 36: 77-101
[29] Aswendta P , Schmidta C D , Zielkeb D , ESPI Solution for non-contacting MEMS-on-wafer testing, Optics and Lasers in Engineering , 2003, 40 (5/6): 501-515
[30] Aebischer H A , Mazza E, Measurement of the nanometer deformation field in metallic microbars with microscopic ESPI, Proc. SPIE , 1997, 3098 : 400-410
[31] Kurth S, Interference microscopic techniques for dynamic testing of MEMS, Annual Research Report 2002, Chemnitz University of Technology, Germany
[32] Petra Aswendt, Micromotion analysis by deep-UV speckle interferometry, Proc.SPIE 2003, 5145: 17-22
[33] Petra Aswendt, Claus-Dieter Schmidt, Dirk Zielke, Inspection system for MEMS characterization on wafer level using ESPI, Proc. SPIE 2001, 4400: 43-50
[34] 王涛,王晓东,王立鼎,刘冲,MEMS 中微结构动态测试技术进展, 中国机械工程,2005,16(1):83-88
[35] Lee C W, Zhang X M, Tjin S C , et al, Nano–scale displacement measurement of MEMS devices using fiber optic interferometry, Proc. SPIE, 2003, 5145: 196-201
[36] Donati S, Norgia M, Annovazzi Lodi V, Merlo S, Measurement of MEMS mechanical parameters by injection interferometry, Proc, of International Conference on Optical MEMS, Sheraton Kauai, USA, 2000: 89-90
[37] Valerio Annovazzi-Lodi, Sabina Merlo, Michele Norgia, Comparison of capacitive and feedback-interferometric measurements on MEMS, Journal of Microelectromechanical Systems, 2001, 10 (3): 327-335
[38] Erik Novak, Der-shen Wan, Paul Unruh, Joanna Schmit, Dynamic MEMS measurement using a strobe interferometric system with combined coherence sensing and phase information, Proceedings of the International Conference on MEMS, NANO and Smart Systems, 2003: 285-288
[39] http://www.veeco.com.cn/
[40] Marc P Georges, Philippe C Lemaire, Real-time stroboscopic holographic interferometry using sillenite crystals for the quantitative analysis of vibrations, Optics Communications, 1998, 145: 249-257
[41] Christian Rembe, Rishi Kant, Richard S Muller, Optical Measurement Methods to Study Dynamic Behavior in MEMS, Proceedings of SPIE - The International Society for Optical Engineering, 2001: 127-137
[42] Ngoi B K A, Venkatakrishnan K, Two-axis-scanning Laser Doppler Vibrometer for Microstructure, Optics Communications, 2000, 182: 175-185
[43] 钟莹,微机电系统谐振器面内运动检测的激光多普勒方法:[博士学位论文], 天津:天津大学,2005
[44] 丁浩,赵浩,瞿荣辉,方祖捷,微机械运动的光纤干涉测量,红外与激光工程,1997,26(5):54-58
[45] 瞿荣辉,丁浩,微机械部件运动的光学测量,功能材料与器件学报,1998, 4(2):141-144
[46] 张二星,微型机械运动参数测试仪光学机械系统研究,光学精密工程,1996,4(2): 48-52
[47] 王佳,激光测振仪用于微梁和 AFM 探针振动测量,航空计测技术,1996,15(3):3-6
[48] 康新,董萼良,裘安萍,何小元,振动式微机械陀螺动态特性光学测试,光学学报,2006,26(2):202-206
[49] 蒋明,杨福俊,董萼良,郑翔,何小元,基于高速摄像的双线性振动陀螺力学特性分析,光学精密工程,2004,14(1):121-126
[50] 谢勇君,白金鹏,史铁林,刘胜,MEMS 三维静动态测试系统,光电子·激光,2005,16(5):570-574
[51] Drain L E, The laser Doppler technique, New York, John Wiley, 1980
[52] [英]瓦切西威克兹 B E,鲁德 M J 著,徐枋同等译,激光多普勒测量,水利出版社出版社,1980
[53] 沈熊,蓬勃发展的激光多普勒测速技术,实验力学,1987,2(2):123-126
[54] Bruce E Truax,Frank C Demarest,Gary E Sommargren,Laser Doppler velocimeter for velocity and length measurements of moving surfaces,Applied Optics,1984,23(1): 67-73
[55] Hong Tan, Real-time laser Doppler and phase Doppler signal processors, Optics and Lasers in Engineering, 1992, 17(4): 229-240
[56] Petr Chylek, Ramaswamy V, Simultaneous determination of refractive index and size of spherical dielectric particles from lights catering data, Applied Optics, 1983, 22(15): 2302-2307
[57] Aikele M, Bauer K, Ficker W, et al., Resonant accelerometer with self-test, Sensors and Actuators, 2001, 92(A): 161-167
[58] Beeby Steve P, Ensell Graham, Baker Brian R, et al., Micromachined silicon resonant strain gauges fabricated using SOI wafer technology, Journal of Microelectromechanical Systems, 2000, 9(1): 104-110
[59] Ashwin A Seshia, Moorthi Palaniapan, Trey A Roessig, et al, A vacuum packaged surface micromachined resonant accelerometer, Journal of Microelectromechanical Systems, 2002, 11(6): 784-793
[60] Kun Wang, Clark T-C Nguyen, High-order micromechanical electronic filters, Proceedings of 1997 IEEE International Micro Electro Mechanical Systems Workshop, 1997: 25-30
[61] Clark T-C Nguyen, Communications applications of microelectromechanical systems, Proceedings of 1998 Sensors Expo, 1998: 447-455
[62] 徐礼华,黄君,结构试验模态的计算机仿真分析,华中科技大学学报,2005, 22(3):5-9
[63] Anthony B Stanbridge, Milena Martarelli, David J Ewins, Measuring area vibration mode shapes with a continuous-scan LDV, Measurement, 2004, 35: 181-189
[64] James S. Burdess, Alun J. Harris, David Wood, Robert J. Pitcher, David Glennie, A system for the dynamic characterization of microstructures, Journal of Microelectromechanical Systems, 1997, 6(4): 322-328
[65] 张素侠,刘习军,贾启芬等,矩形弹性壳液耦合系统的模态试验分析,机械强度,2004,26(6):615-619
[66] 李德葆,陆秋海,工程振动试验分析,北京:清华大学出版社,2004
[67] 傅志方,振动模态分析与参数辨识,北京:机械工业出版社,1990
[68] Ozdoganlar O B, Hansche B D, Carne T G, Experimental modal analysis for Microsystems, presented at IMAC’21, Kissimmee, FL, and in Proc. of 21st International Modal Analysis Conference (IMAC), 2003: 215-223
[69] Yuanfang Chou, Lichung Wang, On the modal testing of microstructures: its theoretical approach and experimental setup, ASME Journal of Vibration and Acoustics, 2001,123(1): 104-109
[70] James S Burdess, Alun J Harris, David Wood, Robert J Pitcher, David Glennie, A system for the dynamic characterization of microstructures, Journal of Microelectromechanical Systems, 1997, 6(4): 322-328
[71] Hong Vu-Manh, Masato Abe, Yozo Fujino, Kiyoyuki Kaito, The eigensystem realization algorithm for ambient vibration measurement using laser Doppler vibrometers, Proceedings of the American Control Conference, Arlington, 2001, 435-440
[72] [德]杜斯特 F,梅林 A,怀特洛 J H 著,沈雄,许宏庆,周作元译,激光多普勒测速技术的原理与实践,北京:科学出版社,1992
[73] 沈熊,激光多普勒测速技术及应用,北京:清华大学出版社,2004
[74] 孙长库,叶声华,激光测量技术,天津:天津大学出版社,2000
[75] Lading L, Differential Doppler Heterodyning Technique, Applied Optics, 1971, 10(8): 1743-1749
[76] Eric M Lawrence, Kevin E Speller, Duli Yu, MEMS characterization using laser Doppler Vibrometry, Proceedings of SPIE, Conference on Reliability, Testing, and Characterization of MEMS/MOEMS II, 2003, 4980: 51-62
[77] 杜振辉,武斌,李志刚,谢艳,蒋诚志,激光多普勒效应微纳测量技术的研究,纳米技术与精密工程,2004,2(3):221-224
[78] Hakan Urey, Spot size, depth-of-focus, and diffraction ring intensity formulas for truncated Gaussian beams, Applied Optics, 2004, 43(3):620-625
[79] 郁道银,谈恒英,工程光学,北京:机械工业出版社,2003
[80] Gordon R L, Forbes G. W, Optimal resolution with extreme depth of focus, Optics Communications, 1998, 150: 277–286
[81] 周炳琨,高以智,激光原理,北京:国防工业出版社,2004
[82] 张以谟,应用光学,北京:机械工业出版社,1988
[83] 蒋诚志,计量光学,北京:计量出版社,1989
[84] Buchhave P, George W K, Lumley J L, The measurement of turbulence with the laser Doppler anemometer, Annual Review of Fluid Mechanics, 1979, 11:8-13
[85] Xiaoyun Xiong, Songnian Zhao, Feng Wen, Detection of the Doppler frequency shift in acoustic remote sensing systems, IEEE Transactions on Geoscience and Remote Sensing, 1995, 33(3):523-527
[86] 万心平,张阙盛,集成锁相环路,北京:人民出版社,1995
[87] 张祥,白廷柱,图像实时处理中的高性能锁相环,光学技术,1999,(1):32-33
[88] http://www.ti.com
[89] Karsten Plamanny, Holger Zellmerz, Jurgen Czarske, Andreas Tunnermann, Directional discrimination in laser Doppler anemometry (LDA) without frequency shifting using twinned optical fibres in the receiving optics, Meas. Sci. Technol., 1998, 9:1840–1846
[90] Edson T. Shimizu, Directional discrimination in the self-mixing type laser Doppler velocimeter, Applied Optics, 1987, 26(21): 4541-4544
[91] 张国雄,金篆芷,测控电路,机械工业出版社,2001: 199-200
[92] 聂鲁燕,裘祖荣,幺春娟,洪昕,微装配中微靶球的三维移动,制造技术与机床,2006,(2):73-76
[93] http://www.jk-stage.com
[94] http://www.startsh.com
[95] Guangya Zhou, Philip Dowd, Tilted folded-beam suspension for extending the stable travel range of comb-drive actuators, Journal of Micromechanics andMicroengineering, 2003, 13: 178-183
[96] William C Tang, Tu-Cuong H Nguyen, Roger T Howe, Laterally driven polysilicon resonant microstructures, Sensors and Actuators, 1989, 20(1): 53-59
[97] William C Tang, Martin G Lim, Roger T Howe, Electrostatic comb drive levitation and control method, Journal of Micromechanical System, 1992, 4(1): 170-178
[98] 周顺,李明,周百令,王寿荣,振动轮式微机械陀螺仪闭环驱动控制方法研究,传感器技术,1992,12:256-261
[99] ttp://www.apexmicrotech.com
[100] 卢文生,赵振民,新颖的精密陀螺电源,黑龙江科技学院学报,2002, 12(3):11-13
[101] 周亮,姚英学,低波纹度快速响应压电陶瓷驱动电源的研制,压电与声光,2000,22 (4):237-239
[102] Yufeng Zhang, Zhenyu Guo, Weilian Wang, Side He, Ting Lee, Murray Loew, A comparison of the wavelet and short-time Fourier transforms for Doppler spectral analysis, Medical Engineering & Physics, 2003, 25: 547-557
[103] ?nan Güler, Firat Hardalac, Serdar Müldür, Determination of aorta failure with the application of FFT, AR and wavelet methods to Doppler technique, Computers in Biology and Medicine, 2001, 31: 229-238
[104] Elif Derya Ubeyli, ?nan G?ler, Spectral broadening of ophthalmic arterial Doppler signals using STFT and wavelet transform, Computers in Biology and Medicine, 2004, 34: 345-354
[105] 汪源源,多普勒信号分析技术的比较研究,复旦学报(自然科学版),1996, 35(1):53-61
[106] 史习智,信号处理与软计算,北京:高等教育出版社,2003
[107] 胡广书,现代信号处理教程,北京:清华大学出版社,2004
[108] 张绪省,孙金玮,赵新明,用时频分析方法分析非平稳信号,宇航计测技术,1995,15(5):34-41
[109] 丁康,平稳和非平稳振动信号的若干处理方法及发展,振动工程学报, 2003,16(1):1-10
[110] 杜浩藩,丛爽, 基于 MATIJAB 小波去噪方法的研究,计算机仿真,2003, 20(7):119-122
[111] 董长虹,Matlab 小波分析工具箱原理与应用,北京:国防工业出版社, 2004
[112] 胡昌华,基于 MATLAB 的系统分析与设计—时频分析,西安:西安电子科技大学出版社,2002
[113] 胡昌华,张军波,基于 Matlab 的系统分析与设计—小波分析,西安:西安电子科大出版社,2001
[114] 易日,使用 ANSYS6.1 进行结构力学分析,北京:北京大学出版社,2002
[115] 傅志方,华宏星,模态分析理论与应用,上海:上海交通大学出版社, 2000
[116] Yoon Shik Hong, Jong Hyun Lee, Soo Hyun Kim, A laterally driven symmetric micro-resonator for gyroscopic applications, Journal of micromechanics and microengineering, 2000, (10): 452-458
[117] 诸德超,刑誉峰,工程振动基础,北京:北京航空航天大学出版社,2004
[118] 许本文,焦群英,机械振动与模态分析基础,北京:机械工业出版社,1998
[119] 刘习军,贾启芬,工程振动理论与测试技术,北京:高等教育出版社,2004