纳米三坐标测量机测控系统关键技术研究
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摘要
近年来纳米三维测量技术引起了广泛关注。由新型加工技术如MEMS,LIGA制备的微型工件往往具有介观尺度的大小,而具有纳米级的精度要求。传统的三坐标测量机(CMM)不具备如此高精度的测量能力;一些新型的测头,如SPM,只具有单轴测量能力。在此背景下,纳米三坐标测量机(nano-CMM)的概念应运而生。
本文基于一种低成本的纳米三坐标测量机,提出一系列与控制有关的关键技术,包括高精度位移传感器的研发使用、信号在线修正和细分技术、自适应运动控制技术、非接触和接触式测头的标定和控制技术、多轴同动控制技术研究以及系统软件开发构想。
本研究开发并改进了一种新型的高精度位移传感器线性衍射光栅干涉仪(LDGI,Linear Diffraction Grating Interferometer),以多普勒相移为原理,利用全息光栅产生衍射,通过一系列分光、转折和偏振,使±1级衍射光发生干涉,通过解相位可以获得位移信息。通过对信号进行实时修正和细分,LDGI可获得小于1nm的分辨率。通过和激光干涉仪的比对实验,该系统在15毫米测量范围内,重复性在10nm以内。
为了兼顾测量效率和驱动分辨率,同时考虑简化结构要求,本研究采用一种基于压电陶瓷元件的超声波马达HR4(Nanomotion Co.)作为驱动器,通过整合其不同速度的三种驱动模式,实现多级驱动。为确保系统的稳定性,本文提出一种基于BP神经网络的PID速度控制策略。该控制策略以LDGI作为反馈,不仅可以获得稳定的驱动速度,还可以长时间锁定位置,以补偿机械元件的变形和压电陶瓷元件的蠕变效应。实验发现,该控制策略可获得1纳米的定位稳定性。
测头的标定和控制是本文涉及的另一项关键技术。使用HR4和LDGI,可对非接触测头进行标定,并可以对工件表面形貌进行扫描。对于接触式纳米测头,由于灵敏度极高,且响应范围很窄,本文提出了一种二次触发的控制,即高速逼近,中速一次触发和低速二次触发的整合。结合一个高灵敏度的开关电路,该控制策略可对测头的触发重复性、预行程等关键参数进行标定,也可以用于实际触发控制。实验证明,该策略可以获得10nm以内的定位重复性。
基于以上关键技术,多轴同动的控制技术被开发。此外,纳米三坐标测量机系统软件构架也在本文中提出。
综上所述,本文的主要工作及创新点包括:
1、高容许度和稳定性的光栅干涉测量技术。
2、基于超声波马达和光栅干涉技术的纳米定位控制技术。
3、用于纳米测量的光栅信号实时处理技术。
4、纳米三坐标测量机测头的标定控制和触发控制技术。
5、纳米级精度的两轴同动控制技术。
In recent years, nano 3D measurement has received a great deal of attention. Many fine components recently fabricated by micro system processes, such as MEMS, LIGA or micro machining, are in overall dimensions within meso scale and required accuracy of nanometer scale. Conventional coordinate measuring machines (CMM) are no longer capable of 3D measurements of these fine parts. Some advanced probes, such as SPM, are capable for only 1D sensing to nanometre resolution. Under this background the concept of nano-CMM has been proposed.
With a low-cost nano-CMM a series of key technologies are proposed, including high-resolution sensor development, real-time signal correction and subdivision, robust motion control scheme, non-contact and touch-trigger probe calibration and control, two-axis synchronous control and the idea of system software development.
A high-resolution displacement sensor LDGI (Linear Diffraction Grating Interferometer) based on the grating Doppler effect, is developed and improved in this study. With a series of polarization and split effects, properly interfering these two light beams leads to modulation similar to Doppler frequency shift, which can be translated to displacement measurement via phase decoding. With real-time signal correction and subdivision, the resolution can reach 1nm. By calibration experiments with laser interferometer, in the travel length of 20mm, the repeatability LDGI is proved within 10nm.
For the driving resolution and efficiency, as well as the simplification requirement, a piezoelement-based ultrasonic motor HR4 (Nanomotion Co.) is employed in this study. By integrating three driving modes of HR4, a multi-scale system is built. For the system stability, a BPNN (Back-Propagation Neural Network)-based PID control scheme is developed to generate low-speed motion. With the LDGI feedback, the control system can not only get a stable motion but can also compensate the deformation of the mechanic system and creep effect of the piezoelements. This control scheme can thus lock the target position for long time. Experiments show that the stability of this positioning control is within 1nm.
Probe control and calibration are also the key points in this study. With the system of HR4 and LDGI, the calibration of non-contact probes can be carried out. Besides, a surface scanning software is developed in this way. For touch-trigger probes, because of the high sensitivity and narrow responsible range, conventional trigger control method cannot work. A double-trigger method is developed, that is, high speed for approaching, medium speed for first trigger, and low speed for second trigger. With a high-sensitivity switching circuit, the key parameters such as pretravel length and trigger repeatability can be calibrated exactly. This method can also be used for practical trigger control. Experiments show that with this double-trigger method the repeatability is within 10nm.
Based on the above key technologies multi-axis motion control is developed. Besides, the systematic software is studied.
From the above, this thesis includes the innovative points as follow:
1. Grating interferometry with high tolerance and stability.
2. Nanopositioning control based on ultrasonic motor and grating interferometry.
3. Grating signal process for nanomesurement.
4. Calibration and trigger control for nano-CMM probe.
5. Multi-axis nanopositioning control based on ultrasonic motor and grating intreferometry.
本文基于一种低成本的纳米三坐标测量机,提出一系列与控制有关的关键技术,包括高精度位移传感器的研发使用、信号在线修正和细分技术、自适应运动控制技术、非接触和接触式测头的标定和控制技术、多轴同动控制技术研究以及系统软件开发构想。
本研究开发并改进了一种新型的高精度位移传感器线性衍射光栅干涉仪(LDGI,Linear Diffraction Grating Interferometer),以多普勒相移为原理,利用全息光栅产生衍射,通过一系列分光、转折和偏振,使±1级衍射光发生干涉,通过解相位可以获得位移信息。通过对信号进行实时修正和细分,LDGI可获得小于1nm的分辨率。通过和激光干涉仪的比对实验,该系统在15毫米测量范围内,重复性在10nm以内。
为了兼顾测量效率和驱动分辨率,同时考虑简化结构要求,本研究采用一种基于压电陶瓷元件的超声波马达HR4(Nanomotion Co.)作为驱动器,通过整合其不同速度的三种驱动模式,实现多级驱动。为确保系统的稳定性,本文提出一种基于BP神经网络的PID速度控制策略。该控制策略以LDGI作为反馈,不仅可以获得稳定的驱动速度,还可以长时间锁定位置,以补偿机械元件的变形和压电陶瓷元件的蠕变效应。实验发现,该控制策略可获得1纳米的定位稳定性。
测头的标定和控制是本文涉及的另一项关键技术。使用HR4和LDGI,可对非接触测头进行标定,并可以对工件表面形貌进行扫描。对于接触式纳米测头,由于灵敏度极高,且响应范围很窄,本文提出了一种二次触发的控制,即高速逼近,中速一次触发和低速二次触发的整合。结合一个高灵敏度的开关电路,该控制策略可对测头的触发重复性、预行程等关键参数进行标定,也可以用于实际触发控制。实验证明,该策略可以获得10nm以内的定位重复性。
基于以上关键技术,多轴同动的控制技术被开发。此外,纳米三坐标测量机系统软件构架也在本文中提出。
综上所述,本文的主要工作及创新点包括:
1、高容许度和稳定性的光栅干涉测量技术。
2、基于超声波马达和光栅干涉技术的纳米定位控制技术。
3、用于纳米测量的光栅信号实时处理技术。
4、纳米三坐标测量机测头的标定控制和触发控制技术。
5、纳米级精度的两轴同动控制技术。
In recent years, nano 3D measurement has received a great deal of attention. Many fine components recently fabricated by micro system processes, such as MEMS, LIGA or micro machining, are in overall dimensions within meso scale and required accuracy of nanometer scale. Conventional coordinate measuring machines (CMM) are no longer capable of 3D measurements of these fine parts. Some advanced probes, such as SPM, are capable for only 1D sensing to nanometre resolution. Under this background the concept of nano-CMM has been proposed.
With a low-cost nano-CMM a series of key technologies are proposed, including high-resolution sensor development, real-time signal correction and subdivision, robust motion control scheme, non-contact and touch-trigger probe calibration and control, two-axis synchronous control and the idea of system software development.
A high-resolution displacement sensor LDGI (Linear Diffraction Grating Interferometer) based on the grating Doppler effect, is developed and improved in this study. With a series of polarization and split effects, properly interfering these two light beams leads to modulation similar to Doppler frequency shift, which can be translated to displacement measurement via phase decoding. With real-time signal correction and subdivision, the resolution can reach 1nm. By calibration experiments with laser interferometer, in the travel length of 20mm, the repeatability LDGI is proved within 10nm.
For the driving resolution and efficiency, as well as the simplification requirement, a piezoelement-based ultrasonic motor HR4 (Nanomotion Co.) is employed in this study. By integrating three driving modes of HR4, a multi-scale system is built. For the system stability, a BPNN (Back-Propagation Neural Network)-based PID control scheme is developed to generate low-speed motion. With the LDGI feedback, the control system can not only get a stable motion but can also compensate the deformation of the mechanic system and creep effect of the piezoelements. This control scheme can thus lock the target position for long time. Experiments show that the stability of this positioning control is within 1nm.
Probe control and calibration are also the key points in this study. With the system of HR4 and LDGI, the calibration of non-contact probes can be carried out. Besides, a surface scanning software is developed in this way. For touch-trigger probes, because of the high sensitivity and narrow responsible range, conventional trigger control method cannot work. A double-trigger method is developed, that is, high speed for approaching, medium speed for first trigger, and low speed for second trigger. With a high-sensitivity switching circuit, the key parameters such as pretravel length and trigger repeatability can be calibrated exactly. This method can also be used for practical trigger control. Experiments show that with this double-trigger method the repeatability is within 10nm.
Based on the above key technologies multi-axis motion control is developed. Besides, the systematic software is studied.
From the above, this thesis includes the innovative points as follow:
1. Grating interferometry with high tolerance and stability.
2. Nanopositioning control based on ultrasonic motor and grating interferometry.
3. Grating signal process for nanomesurement.
4. Calibration and trigger control for nano-CMM probe.
5. Multi-axis nanopositioning control based on ultrasonic motor and grating intreferometry.
引文
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