模板电解加工群孔基础研究及应用
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摘要
在21世纪的航空航天、电子、仪器、纺织、印刷、医疗器械和汽车等工业领域中,以微小群孔为关键结构的零部件使用越来越广泛,例如光纤连接器、喷丝板、电子显微光栅、微喷嘴、过滤网,冷气导管和印刷电路板等。目前,加工微小群孔的方法主要有:机械加工、激光加工、电火花加工、掩模电解加工和电子束加工。但这些加工方式或多或少均存在着一些问题,机械加工易产生内应力和毛刺;激光加工效率高,但其加工后的孔壁有再铸层和微裂纹;在电火花加工中工具电极有损耗;掩模电解加工工艺复杂。
针对在金属薄板上一次加工密集性群孔,本文提出了一种新颖的加工群孔技术,即模板电解加工技术。该技术为群孔加工提供了一种新的思路。
本文围绕模板电解加工技术进行了基础研究,并利用该技术进行了航空发动机上导向叶片内前、后冷气导管的加工,主要内容包括以下几个方面:
(1)提出了模板电解加工技术。该技术是基于电化学阳极溶解理论,利用模板的选区限制工件蚀除的区域,在工件上加工出与模板上图案相似结构的一种特种加工工艺。本文选用的模板是具有特定镂空图案的薄板,与工件相互独立,两者可分离。加工时,将具有某种图案的模板紧贴于工件,并保持模板与工件之间无缝隙,防止电解液渗入到模板与工件之间,造成杂散腐蚀。该技术具有独特的电流场特性,是一种简单易行、低成本的金属微结构制造技术。
(2)根据模板电解加工的特点,构建了模板电解加工试验系统。该系统主要包括以下几个部分:模板制作单元、电解液系统、夹具装备和电源等,实现了快速、有效地加工群孔,满足了实际加工的需要。
(3)根据电场基本理论,建立了三种加工方式(有导电层式模板电解加工、双阴极式模板电解加工以及屏蔽式模板电解加工)的电场模型。基于该电场模型,利用有限元技术分析工件蚀除表面的电流密度分布规律,并对加工过程进行模拟和试验验证,优选出加工精度最高的加工方式,即双阴极式模板电解加工方式。在其基础上,进一步探讨了双阴极式模板电解加工电参数和模板参数对加工精度的影响。
(4)采用了主动分流侧流式双向进液电解液流动方式。通过建立不可压缩流场模型,对在正流/侧流进液方式下加工区内的流速、压力分布进行了分析和试验验证。与传统正流式加工相比,分流正流式使加工区内流速分布更均匀,避免了中心区流速过低的现象。探讨了主动式/被动式双向进液侧流加工区内的流场特性,结果表明主动式加工区内流速、压力分布均匀、加工稳定,加工出群孔孔径一致性高。同时对具有蛇形流道的模板电解加工进行探讨,对利用分块式模板在大面积金属薄板上加工密集性群孔进行了可行性研究,并获得了孔径一致性较好的结构。
(5)基于模板电解加工的特点,采用了辅助阳极法和增大模板上小孔开口角度的方法来提高孔的加工精度。过程分析和试验表明,辅助阳极法加工有利于减小孔锥度,提高加工精度;模板上小孔的开口角度对工件蚀除形貌有较大的影响,增大模板上小孔的开口角度,可减小孔的锥度,大幅度提高孔径的一致性。
(6)模板电解加工技术应用于某型航空发动机上导向叶片内前、后冷气导管的研制。针对冷气导管加工精度要求高、无毛刺、低成本和批量生产的要求,采用了双阴极主动分流式模板电解加工技术,加工出符合设计要求的产品,精度控制在0.06mm以内。
Structures of multiple micro-holes are applied widely in the field of aviation, space, electronics, instrument, textile, printing, medical, and automobile, such as optical fiber connector, spinneret, electron microscopic grating, micro-nozzle, filter screen, cooling holes in jet turbine and printed circuit boards. Various techniques have been developed to produce multiple micro-holes in different ways such as mechanical drilling, laser beam machining (LBM), electrical discharge machining (EDM), through mask electrochemical micromachining (TMEMM) and electron beam machining (EBM). Each of methods has its inherent disadvantages for machined micro-holes in sheet metal. Mechanical drilling presents several problems related to internal stress and a burr. LBM has the advantage of high machining efficiency, and but it causes the formation of heat-affected zones and microcracks on the workpiece. The tool electrode wear takes place during the EDM process. TMEMM involves many working procedure.
A novel processing method, electrochemical machining (ECM) using mask, is presented in order to manufacture multiple micro-holes in sheet metal at the same time. The thesis would provide a new idea for the fabrication of multiple holes.
Basic researches have been carried out, and tube for air coolant in guide vane of a new aeroengine is machined by the technique. This dissertation consists of six sections. The main contents are as follows:
(1) The ECM using mask is proposed. According to theories of electrochemical anodic dissolution, the mask pattern will be transferred to the workpiece in an electrolytic cell. During the machining process, the stencil mask is closely clung to the surface of the workpiece rather than bonded to the workpiece. The proposed microstructure fabrication technique offers some unique advantages over other technology such as electric field distribution and the fashion of electrolyte flow, simple and easy implementation and low cost.
(2) On the basis of analyzing the characteristics of the proposed technology, the experimental system has been set up which consists of mask fabrication unit, electrolyte circulating system, electrode holder and power supply. The microstructures with multiple micro-holes are fabricated fast and efficiently which fulfills the requirements of the actual processing.
(3) Based on the theories of electric field, three models of electric field in interelectrode gap are built respectively. Finite Element Method is used to solve the model, and analysis of current density distribution on the workpiece surface is carried out. For better understanding the process, the dissolving process is analyzed and numerical simulation is verified experimentally. The three machining mode are observed comparatively, and the best mode, (ECM using a dual cathode), is selected out. The current density distribution is possibly influenced by the following parameters: thickness of the copper sheet, thickness of insulation layer, hole diameter, hole space and applied voltage. In this thesis, the influences of five parameters on the machining accuracy are discussed during EMM using a dual cathode.
(4) An electrolyte flow mode, active distributary mode, was proposed. An incompressible flow field mode describing the distribution of electrolyte flow in the interelectrode gap is developed and verified at positive flow or side stream. A new electrolyte flow mode is named as the beam positive flow which is established and analyzed. Compared with the traditional positive flow, the flow mode overcomes low velocity in the center of processing zone results in a uniform distribution of electrolyte flow. The results show that the side stream mode of active distributary improves the holes diameter consistency and machining accuracy contracted to the side stream mode of passive ditributary. A two-dimensional incompressible flow field mode of serpentine channel is carried out, and microstructure with good uniformity of diameters is obtained.
(5) According to characteristics of ECM using mask, two process methods were presented to improve the machining accuracy. The effects of auxiliary anode and mask wall angle on the machining accuracy are discussed. The holes taper is decreased by using the auxiliary anode. The process analysis and experiment results show that mask wall angle has great influence on the eroded workpiece surface topography. The holes diameter consistency is greatly improved, and the holes taper are reduced with the mask wall angle increasing.
6) ECM using a dual cathode and the active distributary mode of flow field are applied in the development of a certain tube for air coolant in guide vane of an aeroengine. Because the requirement of high machining accuracy, no burr, low cost and mass production of the tube for air coolant, it was difficult to be machined by other technology. The results revealed that the machining accuracy could be improved to 0.06mm with the technology.
针对在金属薄板上一次加工密集性群孔,本文提出了一种新颖的加工群孔技术,即模板电解加工技术。该技术为群孔加工提供了一种新的思路。
本文围绕模板电解加工技术进行了基础研究,并利用该技术进行了航空发动机上导向叶片内前、后冷气导管的加工,主要内容包括以下几个方面:
(1)提出了模板电解加工技术。该技术是基于电化学阳极溶解理论,利用模板的选区限制工件蚀除的区域,在工件上加工出与模板上图案相似结构的一种特种加工工艺。本文选用的模板是具有特定镂空图案的薄板,与工件相互独立,两者可分离。加工时,将具有某种图案的模板紧贴于工件,并保持模板与工件之间无缝隙,防止电解液渗入到模板与工件之间,造成杂散腐蚀。该技术具有独特的电流场特性,是一种简单易行、低成本的金属微结构制造技术。
(2)根据模板电解加工的特点,构建了模板电解加工试验系统。该系统主要包括以下几个部分:模板制作单元、电解液系统、夹具装备和电源等,实现了快速、有效地加工群孔,满足了实际加工的需要。
(3)根据电场基本理论,建立了三种加工方式(有导电层式模板电解加工、双阴极式模板电解加工以及屏蔽式模板电解加工)的电场模型。基于该电场模型,利用有限元技术分析工件蚀除表面的电流密度分布规律,并对加工过程进行模拟和试验验证,优选出加工精度最高的加工方式,即双阴极式模板电解加工方式。在其基础上,进一步探讨了双阴极式模板电解加工电参数和模板参数对加工精度的影响。
(4)采用了主动分流侧流式双向进液电解液流动方式。通过建立不可压缩流场模型,对在正流/侧流进液方式下加工区内的流速、压力分布进行了分析和试验验证。与传统正流式加工相比,分流正流式使加工区内流速分布更均匀,避免了中心区流速过低的现象。探讨了主动式/被动式双向进液侧流加工区内的流场特性,结果表明主动式加工区内流速、压力分布均匀、加工稳定,加工出群孔孔径一致性高。同时对具有蛇形流道的模板电解加工进行探讨,对利用分块式模板在大面积金属薄板上加工密集性群孔进行了可行性研究,并获得了孔径一致性较好的结构。
(5)基于模板电解加工的特点,采用了辅助阳极法和增大模板上小孔开口角度的方法来提高孔的加工精度。过程分析和试验表明,辅助阳极法加工有利于减小孔锥度,提高加工精度;模板上小孔的开口角度对工件蚀除形貌有较大的影响,增大模板上小孔的开口角度,可减小孔的锥度,大幅度提高孔径的一致性。
(6)模板电解加工技术应用于某型航空发动机上导向叶片内前、后冷气导管的研制。针对冷气导管加工精度要求高、无毛刺、低成本和批量生产的要求,采用了双阴极主动分流式模板电解加工技术,加工出符合设计要求的产品,精度控制在0.06mm以内。
Structures of multiple micro-holes are applied widely in the field of aviation, space, electronics, instrument, textile, printing, medical, and automobile, such as optical fiber connector, spinneret, electron microscopic grating, micro-nozzle, filter screen, cooling holes in jet turbine and printed circuit boards. Various techniques have been developed to produce multiple micro-holes in different ways such as mechanical drilling, laser beam machining (LBM), electrical discharge machining (EDM), through mask electrochemical micromachining (TMEMM) and electron beam machining (EBM). Each of methods has its inherent disadvantages for machined micro-holes in sheet metal. Mechanical drilling presents several problems related to internal stress and a burr. LBM has the advantage of high machining efficiency, and but it causes the formation of heat-affected zones and microcracks on the workpiece. The tool electrode wear takes place during the EDM process. TMEMM involves many working procedure.
A novel processing method, electrochemical machining (ECM) using mask, is presented in order to manufacture multiple micro-holes in sheet metal at the same time. The thesis would provide a new idea for the fabrication of multiple holes.
Basic researches have been carried out, and tube for air coolant in guide vane of a new aeroengine is machined by the technique. This dissertation consists of six sections. The main contents are as follows:
(1) The ECM using mask is proposed. According to theories of electrochemical anodic dissolution, the mask pattern will be transferred to the workpiece in an electrolytic cell. During the machining process, the stencil mask is closely clung to the surface of the workpiece rather than bonded to the workpiece. The proposed microstructure fabrication technique offers some unique advantages over other technology such as electric field distribution and the fashion of electrolyte flow, simple and easy implementation and low cost.
(2) On the basis of analyzing the characteristics of the proposed technology, the experimental system has been set up which consists of mask fabrication unit, electrolyte circulating system, electrode holder and power supply. The microstructures with multiple micro-holes are fabricated fast and efficiently which fulfills the requirements of the actual processing.
(3) Based on the theories of electric field, three models of electric field in interelectrode gap are built respectively. Finite Element Method is used to solve the model, and analysis of current density distribution on the workpiece surface is carried out. For better understanding the process, the dissolving process is analyzed and numerical simulation is verified experimentally. The three machining mode are observed comparatively, and the best mode, (ECM using a dual cathode), is selected out. The current density distribution is possibly influenced by the following parameters: thickness of the copper sheet, thickness of insulation layer, hole diameter, hole space and applied voltage. In this thesis, the influences of five parameters on the machining accuracy are discussed during EMM using a dual cathode.
(4) An electrolyte flow mode, active distributary mode, was proposed. An incompressible flow field mode describing the distribution of electrolyte flow in the interelectrode gap is developed and verified at positive flow or side stream. A new electrolyte flow mode is named as the beam positive flow which is established and analyzed. Compared with the traditional positive flow, the flow mode overcomes low velocity in the center of processing zone results in a uniform distribution of electrolyte flow. The results show that the side stream mode of active distributary improves the holes diameter consistency and machining accuracy contracted to the side stream mode of passive ditributary. A two-dimensional incompressible flow field mode of serpentine channel is carried out, and microstructure with good uniformity of diameters is obtained.
(5) According to characteristics of ECM using mask, two process methods were presented to improve the machining accuracy. The effects of auxiliary anode and mask wall angle on the machining accuracy are discussed. The holes taper is decreased by using the auxiliary anode. The process analysis and experiment results show that mask wall angle has great influence on the eroded workpiece surface topography. The holes diameter consistency is greatly improved, and the holes taper are reduced with the mask wall angle increasing.
6) ECM using a dual cathode and the active distributary mode of flow field are applied in the development of a certain tube for air coolant in guide vane of an aeroengine. Because the requirement of high machining accuracy, no burr, low cost and mass production of the tube for air coolant, it was difficult to be machined by other technology. The results revealed that the machining accuracy could be improved to 0.06mm with the technology.
引文
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