温控形状记忆合金驱动无阀微泵的基础研究
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摘要
在现代工业中,对体积小、重量轻和高力能密度运动及位置控制直线执行器的要求越来越高。现在,越来越多的功能材料可以用于产生机械运动,利用新型功能材料制造各种执行机构的研究受到人们的广泛关注。形状记忆合金(SMA)因大功重比、集驱动传动和传感于一身、变形大等优点使得它在微小型应用领域具有独特的应用前景。
本文首先总结了SMA的晶体结构和变形机理,给出了SMA的马氏体结构和本构关系。对50.8%Ni-Ti材料进行静态实验研究,分析了SMA材料的应力、应变、温度之间的关系,以此为理论基础,对不同结构内嵌式记忆合金执行器形变模型与性能作了研究。
其次,分析了Ni-Ti形状记忆合金弹簧的通电电流、变形速度和位移、相变温度之间的关系,并对差动式形状记忆合金弹簧驱动器的工作原理做了阐述,设计制作了并列型差动式形状记忆合金执行器,选择电脉冲加热和液体冷却方式驱动。实验得出,该执行器输出力和位移比较大,且机构简单控制方便,通电电流在不破坏材料晶体结构范围内,位移及变形速率随着电流的增大而增加,加上合适的冷却措施,可作为不同频率要求的驱动源。差动式SMA执行器通过结构上的创新,不仅大大提高了SMA执行器的工作频率和输出力矩,而且有效减小了运行功耗。
最后,设计了一种并列型差动式SMA执行器驱动的无阀泵系统。差动式SMA执行器可以有效减小材料的非线性和宽滞后带来的影响,提高工作频率和输出力。本文详细论述了差动式SMA执行器驱动的无阀泵的结构和运行原理,泵体结构的最优参数设计,设计并制作了一台差动式SMA执行器驱动的无阀泵实验样机,对样机进行了流场有限元分析,并进行了初步的实验研究。分析和实验结果验证了差动式SMA执行器驱动的无阀泵的可行性。
Precision motion and position control actuators which can provide greater forces and torques within given volume and weight are in great need in modern industry. Nowadays, more and more functional materials can be adopted to generate mechanical moving. New kinds of actuators based on smart materials are paid more attention to. NiTi Shape Memory Alloy would have unique latent application in miniature or small scale robot because of some merits, such as great power rate, integration between sense and actuators, large strain etc.
In this thesis, the crystal structure and shape variation mechanism of SMA are analyzed. The Martensite structure and the constitutive relation of SMA are presented. In this dissertation some main research works are presented as following: 50.8at%-Ni-Ti memory alloy is chosen for the best general property by the comparison with other several present smart materials in actuating properties. The relationships among strain, stress, and temperature and phase transformation of shape memory alloy (SMA) are presented as base theory of development and application of embedded SMA actuator.
Next, the relationships among current, strain rate, displacement, phase transition temperature and working principle of the differential SMA spring actuator are discussed, and the operation principle of the differential SMA actuator is described also. A parallel-type differential SMA actuator are designed and made and its characteristics are studied, PWM electrical heating and liquid cooling are chosen for actuator in order to get best operation frequency for differential actuators. The experiments showed that, the actuator can output great force and displacement with a simple structure and control system. Displacement and deformation rate rise with the increase of current in a certain range. The differential SMA actuator with a special structure can operate on higher frequency, provide greater force and have a high efficiency.
Finally, in this thesis, a valveless pump driven by the parallel-type differential SMA actuator is proposed. The design principle of the differential SMA actuator and the one-way flow mechanism and structure design of the valveless pump has been analyzed. A prototype and the control system have been developed successfully. The analysis of flow field has been finished, and the preliminary test has been taken. The feasibility of the operation principle and design method of the valveless pump driven by the SMA actuator has been proved by the analysis and test results.
本文首先总结了SMA的晶体结构和变形机理,给出了SMA的马氏体结构和本构关系。对50.8%Ni-Ti材料进行静态实验研究,分析了SMA材料的应力、应变、温度之间的关系,以此为理论基础,对不同结构内嵌式记忆合金执行器形变模型与性能作了研究。
其次,分析了Ni-Ti形状记忆合金弹簧的通电电流、变形速度和位移、相变温度之间的关系,并对差动式形状记忆合金弹簧驱动器的工作原理做了阐述,设计制作了并列型差动式形状记忆合金执行器,选择电脉冲加热和液体冷却方式驱动。实验得出,该执行器输出力和位移比较大,且机构简单控制方便,通电电流在不破坏材料晶体结构范围内,位移及变形速率随着电流的增大而增加,加上合适的冷却措施,可作为不同频率要求的驱动源。差动式SMA执行器通过结构上的创新,不仅大大提高了SMA执行器的工作频率和输出力矩,而且有效减小了运行功耗。
最后,设计了一种并列型差动式SMA执行器驱动的无阀泵系统。差动式SMA执行器可以有效减小材料的非线性和宽滞后带来的影响,提高工作频率和输出力。本文详细论述了差动式SMA执行器驱动的无阀泵的结构和运行原理,泵体结构的最优参数设计,设计并制作了一台差动式SMA执行器驱动的无阀泵实验样机,对样机进行了流场有限元分析,并进行了初步的实验研究。分析和实验结果验证了差动式SMA执行器驱动的无阀泵的可行性。
Precision motion and position control actuators which can provide greater forces and torques within given volume and weight are in great need in modern industry. Nowadays, more and more functional materials can be adopted to generate mechanical moving. New kinds of actuators based on smart materials are paid more attention to. NiTi Shape Memory Alloy would have unique latent application in miniature or small scale robot because of some merits, such as great power rate, integration between sense and actuators, large strain etc.
In this thesis, the crystal structure and shape variation mechanism of SMA are analyzed. The Martensite structure and the constitutive relation of SMA are presented. In this dissertation some main research works are presented as following: 50.8at%-Ni-Ti memory alloy is chosen for the best general property by the comparison with other several present smart materials in actuating properties. The relationships among strain, stress, and temperature and phase transformation of shape memory alloy (SMA) are presented as base theory of development and application of embedded SMA actuator.
Next, the relationships among current, strain rate, displacement, phase transition temperature and working principle of the differential SMA spring actuator are discussed, and the operation principle of the differential SMA actuator is described also. A parallel-type differential SMA actuator are designed and made and its characteristics are studied, PWM electrical heating and liquid cooling are chosen for actuator in order to get best operation frequency for differential actuators. The experiments showed that, the actuator can output great force and displacement with a simple structure and control system. Displacement and deformation rate rise with the increase of current in a certain range. The differential SMA actuator with a special structure can operate on higher frequency, provide greater force and have a high efficiency.
Finally, in this thesis, a valveless pump driven by the parallel-type differential SMA actuator is proposed. The design principle of the differential SMA actuator and the one-way flow mechanism and structure design of the valveless pump has been analyzed. A prototype and the control system have been developed successfully. The analysis of flow field has been finished, and the preliminary test has been taken. The feasibility of the operation principle and design method of the valveless pump driven by the SMA actuator has been proved by the analysis and test results.
引文
[1]苏海东.执行器的分类与发展.机械工程与自动化,2004,7(1):17-18.
[2]袁月峰.形状记忆合金驱动器设计及控制研究:(硕士学位论文).辽宁:辽宁工程技术大学,2003.
[3]赵寿根,程伟.压电陶瓷材料电学性能参数测量研究.压电与声光,2005,27(2):200-202.
[4]朱子健,陈仁文.智能材料在微机械中的应用及发展.航空精密制造技术,2003,8(3):4-8.
[5]杨凯,辜承林.形状记忆合金电机研究与应用中的若干新发展.微电机,2000,33(2):32-35.
[6]杨杰,吴月华.形状记忆合金及其应用.合肥:中国科技大学出版社,1993.
[7]胡自力,熊克,王鑫伟.NiTi形状记忆合金的性能测试与表征.材料工程,2003,8:28-32.
[8]富莉.铁基形状记忆合金的开发与应用[J].国外金属材料,1991,3:4-10.
[9]刘蓉生.形状记忆合金的应用研究现状[J].机械工程与自动化,24(2):48-50.
[10]李明冬.偏动式双程SMA驱动器工作机理与能量转换研究[J].机械设计与研究,2000,16(12):23-28.
[11]吴根华.形状记忆合金及其应用.安庆师范学院学报,2004,10(4):20-23.
[12]肖恩忠.形状记忆合金的应用现状与发展趋势.潍坊学院学报,2005,4:10-14.
[13]贸志荣,王芳,周敬恩.NiTi合金的形状记忆效应及其工程应用研究进展.材料热处理学报,2005,26(5):21-27.
[14]马超.形状记忆材料的应用与发展.辽宁化工,2006,35(1):31-33.
[15]Suorsa I,Pagounis E.Magnetic Field-induced Stress in the Ni-Mn-Ga Magnetic Shape Memory Alloy[J].Journal of Applied Physics,2004,95(9):4958-4961.
[16]杨凯,辜承林.21世纪的新型功能材料-形状记忆合金.金属功能材料,2004,11(6):35-39.
[17]杨凯,辜承林.新型SMA驱动技术.机械工程与自动化,2000,27(6):1-3.
[18]王军武.智能材料驱动器的研究与应用.武汉工业大学学报,2000,22(4):4-6.
[19]C.Zhang,R.H.Zee,and P.E.Thoma.Development of Ni-Ti Based Shape Memory Alloys for Actuation and Control.In Proc.Intersoc.Energy Conversion Engineering Conf,1996:239-244.
[20]王金辉,徐峰,阎绍泽.SMA弹簧驱动器驱动机理及实验.清华大学学报,2003,43(2):188-191.
[21]徐祖耀.铁基形状记忆合金[J].上海金属,1993,2(15):1-10.
[22]Wang F E,Buehler W J,Pichart S J.Crystal Structure and Unique "Martensitic" Transition in TiNi[J].Journal of Applied Physics,1963,4(36):3232-3239.
[23]KaJiwara S,Owen W S.Substructure of Austenite Formed by a Paritial Reverse Martensitic Transformation in an Fe-Pt Alloy[J].Metall.Trans.1973,4:1988-1992.
[24]Sato A.Sunaga Y,Mori T.Contribution of the γ→ε Transformation to the Plastic Deformation of Stainless Steel Single Crystal[J].Acta Metail,1977,25:627-634.
[25]刘庆锁.形状记忆合金及其工程应用[J],天津理工学院学报,2001,17(3):68-72.
[26]刘永红,杨毅,贾宝贤.NiTi形状记忆合金弹簧电热驱动特性.机械工程材料,2000,24(4):27-31.
[27]Danny Grant,Vincent Hayward.Design of Shape Memory Alloy Actuator with High Strain and Variable Structure Control.IEEE International Conference on Robotics and Automation.IEEE Control Systems,1998:65-70.
[28]Danny Grant,Vincent Hayward.Variable Structure Control of Shape Memory Alloy Actuators.IEEE Control Systems,1997:80-88.
[29]Alexandra Lu,Danny Grant,Vincent Hayward.Design and Comparison of High Strain Shape Memory Alloy Actuators.Proceedings of the 1997 IEEE International Conference on Robotics and Automation Albuquerque,1997:260-265.
[30]Byungkyu Kim,Sunghak Lee,Jong Heong Park,et al.Design and Fabrication of A Locomotive Mechanism for Capsule-Type Endoscopes Using Shape Memory Alloys(SMA).IEEE/ASME Transactions on Mechatronics,2005,10(1):77-86.
[31]S.Guo,Kin Ji Asaka.A New Type of Micropump for Bio-Medical Application.International Journal of Nonlinear Sciences and Nnmerical,2002,10(3):794-799.
[32]Shuxing Guo,Toshio Fukuda.A Novel Type of Micropump for Biomedical Application.Proceedings of 2004 International Conference on Information Acquisition:532-537.
[33]李津荣,翁铭庆.人工心脏研究进展.国外医学生物医学工程分册,2000,23(2):103-106.
[34]王晓宏.形状记忆合金驱动主动变形结构的设计与制作:(硕士学位论文).哈尔滨:哈尔滨工业大学,2003.
[35]李尚荣.NiTi记忆合金动态特性实验研究及其在仿生机器鱼上的应用:(博士学位论文).合肥:中国科学技术大学,2006.
[36]K Tanaka,A Thermomechanical Sketch of Shape Memory Effect:One-Dimensional Tensile Behavior.Res.Mechanica,1986:Vol.18:251-263.
[37]杨凯,辜承林,严新荣.基于内嵌式SMA电机的柔性机械手研制[J].中国电机工程学报,2002,22(12):74-80.
[38]杨凯,辜承林,严新荣.改进型平面弯曲ESMAA的设计与优化[J].中国电机工程学报,2007,27(6):45-48.
[39]Singh K,Sirohi J,Chopra I.An Improved Shape Memory Alloy Actuator for Rotor Blade Tracking[J].Journal of Intelligent Material Systems and Structures,2003,14(12):767-786.
[40]Lin G,Yang D,Warrington R O.A Computational Model of the Shape Memory Alloys for the Design and Control of Micro Actuators.Micro Mechanical Systems,1992(40):171-181.
[41]李明东.形状记忆合金驱动器及在微小型移动机器人中的应用研究:(博士学位论文).上海:上海交通大学,2000.
[42]H.Minoru,T.Masanori,S.Hirofumi.Application of Shape Memory Alloy to Robotic Actuators.Journal of Robotic Systems,1985,Vol.2(1):3-25.
[43]M.Shahinpoor,G.Wang.Design,Modeling and Performance Evaluation of A Novel Large-Motion SMA Actuator.Proc.SPIE,1995.
[44]李明东.并联偏动式形状记忆合金蠕动机构.中国,ZL 992.26926.1,Ed.,2000.
[45]戴锅生,传热学(第二版).北京:高等教育出版社,1999:91-98.
[46]L.C.and R.C.A.Design of Shape Memory Alloy Actuators.Journal of Intelligent Material Systems and Structures,1997,Vol.8(4):317-322.
[47]谢海波,傅新,杨华勇.用于微量化学分析芯片的微型无阀泵流动特性分析与测试.仪器仪表学报,2004,25(2):168-173.
[48]杨林杰.压电式无阀微泵震动分析及流场数值计算:(硕士学位论文).秦皇岛:燕山大学,2005.
[49]谢海波,傅新,杨华勇.微型无阀泵流动特征仿真与试验研究.机械工程学报,2002,38(7):54-57.
[2]袁月峰.形状记忆合金驱动器设计及控制研究:(硕士学位论文).辽宁:辽宁工程技术大学,2003.
[3]赵寿根,程伟.压电陶瓷材料电学性能参数测量研究.压电与声光,2005,27(2):200-202.
[4]朱子健,陈仁文.智能材料在微机械中的应用及发展.航空精密制造技术,2003,8(3):4-8.
[5]杨凯,辜承林.形状记忆合金电机研究与应用中的若干新发展.微电机,2000,33(2):32-35.
[6]杨杰,吴月华.形状记忆合金及其应用.合肥:中国科技大学出版社,1993.
[7]胡自力,熊克,王鑫伟.NiTi形状记忆合金的性能测试与表征.材料工程,2003,8:28-32.
[8]富莉.铁基形状记忆合金的开发与应用[J].国外金属材料,1991,3:4-10.
[9]刘蓉生.形状记忆合金的应用研究现状[J].机械工程与自动化,24(2):48-50.
[10]李明冬.偏动式双程SMA驱动器工作机理与能量转换研究[J].机械设计与研究,2000,16(12):23-28.
[11]吴根华.形状记忆合金及其应用.安庆师范学院学报,2004,10(4):20-23.
[12]肖恩忠.形状记忆合金的应用现状与发展趋势.潍坊学院学报,2005,4:10-14.
[13]贸志荣,王芳,周敬恩.NiTi合金的形状记忆效应及其工程应用研究进展.材料热处理学报,2005,26(5):21-27.
[14]马超.形状记忆材料的应用与发展.辽宁化工,2006,35(1):31-33.
[15]Suorsa I,Pagounis E.Magnetic Field-induced Stress in the Ni-Mn-Ga Magnetic Shape Memory Alloy[J].Journal of Applied Physics,2004,95(9):4958-4961.
[16]杨凯,辜承林.21世纪的新型功能材料-形状记忆合金.金属功能材料,2004,11(6):35-39.
[17]杨凯,辜承林.新型SMA驱动技术.机械工程与自动化,2000,27(6):1-3.
[18]王军武.智能材料驱动器的研究与应用.武汉工业大学学报,2000,22(4):4-6.
[19]C.Zhang,R.H.Zee,and P.E.Thoma.Development of Ni-Ti Based Shape Memory Alloys for Actuation and Control.In Proc.Intersoc.Energy Conversion Engineering Conf,1996:239-244.
[20]王金辉,徐峰,阎绍泽.SMA弹簧驱动器驱动机理及实验.清华大学学报,2003,43(2):188-191.
[21]徐祖耀.铁基形状记忆合金[J].上海金属,1993,2(15):1-10.
[22]Wang F E,Buehler W J,Pichart S J.Crystal Structure and Unique "Martensitic" Transition in TiNi[J].Journal of Applied Physics,1963,4(36):3232-3239.
[23]KaJiwara S,Owen W S.Substructure of Austenite Formed by a Paritial Reverse Martensitic Transformation in an Fe-Pt Alloy[J].Metall.Trans.1973,4:1988-1992.
[24]Sato A.Sunaga Y,Mori T.Contribution of the γ→ε Transformation to the Plastic Deformation of Stainless Steel Single Crystal[J].Acta Metail,1977,25:627-634.
[25]刘庆锁.形状记忆合金及其工程应用[J],天津理工学院学报,2001,17(3):68-72.
[26]刘永红,杨毅,贾宝贤.NiTi形状记忆合金弹簧电热驱动特性.机械工程材料,2000,24(4):27-31.
[27]Danny Grant,Vincent Hayward.Design of Shape Memory Alloy Actuator with High Strain and Variable Structure Control.IEEE International Conference on Robotics and Automation.IEEE Control Systems,1998:65-70.
[28]Danny Grant,Vincent Hayward.Variable Structure Control of Shape Memory Alloy Actuators.IEEE Control Systems,1997:80-88.
[29]Alexandra Lu,Danny Grant,Vincent Hayward.Design and Comparison of High Strain Shape Memory Alloy Actuators.Proceedings of the 1997 IEEE International Conference on Robotics and Automation Albuquerque,1997:260-265.
[30]Byungkyu Kim,Sunghak Lee,Jong Heong Park,et al.Design and Fabrication of A Locomotive Mechanism for Capsule-Type Endoscopes Using Shape Memory Alloys(SMA).IEEE/ASME Transactions on Mechatronics,2005,10(1):77-86.
[31]S.Guo,Kin Ji Asaka.A New Type of Micropump for Bio-Medical Application.International Journal of Nonlinear Sciences and Nnmerical,2002,10(3):794-799.
[32]Shuxing Guo,Toshio Fukuda.A Novel Type of Micropump for Biomedical Application.Proceedings of 2004 International Conference on Information Acquisition:532-537.
[33]李津荣,翁铭庆.人工心脏研究进展.国外医学生物医学工程分册,2000,23(2):103-106.
[34]王晓宏.形状记忆合金驱动主动变形结构的设计与制作:(硕士学位论文).哈尔滨:哈尔滨工业大学,2003.
[35]李尚荣.NiTi记忆合金动态特性实验研究及其在仿生机器鱼上的应用:(博士学位论文).合肥:中国科学技术大学,2006.
[36]K Tanaka,A Thermomechanical Sketch of Shape Memory Effect:One-Dimensional Tensile Behavior.Res.Mechanica,1986:Vol.18:251-263.
[37]杨凯,辜承林,严新荣.基于内嵌式SMA电机的柔性机械手研制[J].中国电机工程学报,2002,22(12):74-80.
[38]杨凯,辜承林,严新荣.改进型平面弯曲ESMAA的设计与优化[J].中国电机工程学报,2007,27(6):45-48.
[39]Singh K,Sirohi J,Chopra I.An Improved Shape Memory Alloy Actuator for Rotor Blade Tracking[J].Journal of Intelligent Material Systems and Structures,2003,14(12):767-786.
[40]Lin G,Yang D,Warrington R O.A Computational Model of the Shape Memory Alloys for the Design and Control of Micro Actuators.Micro Mechanical Systems,1992(40):171-181.
[41]李明东.形状记忆合金驱动器及在微小型移动机器人中的应用研究:(博士学位论文).上海:上海交通大学,2000.
[42]H.Minoru,T.Masanori,S.Hirofumi.Application of Shape Memory Alloy to Robotic Actuators.Journal of Robotic Systems,1985,Vol.2(1):3-25.
[43]M.Shahinpoor,G.Wang.Design,Modeling and Performance Evaluation of A Novel Large-Motion SMA Actuator.Proc.SPIE,1995.
[44]李明东.并联偏动式形状记忆合金蠕动机构.中国,ZL 992.26926.1,Ed.,2000.
[45]戴锅生,传热学(第二版).北京:高等教育出版社,1999:91-98.
[46]L.C.and R.C.A.Design of Shape Memory Alloy Actuators.Journal of Intelligent Material Systems and Structures,1997,Vol.8(4):317-322.
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