激光无导轨精密测量及定位系统的研究
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摘要
长度测量(又称位移测量)是机械行业测量中最基本、最重要的测量。在长度测量中,公认精度最高的基准是光的波长。以激光波长为长度基准进行位移测量,通常只能采用干涉法或衍射法,沿光的传播方向进行大尺寸的长度测量或定位测量仅能使用干涉法。该方法要求干涉光路不能中断,为此,光波干涉测量仪器沿测量运动方向都配有高精度机械导轨。导轨的长度取决于测量任务要求的量程。这一要求使激光干涉测长量程大的特点受到局限。
利用激光干涉技术在获得高精度的同时,降低对导轨的依赖,甚至不用导轨完成测量,是本课题的基本出发点和研究重点,也是本课题研究的目的。
主要研究工作及创新点如下:
1、通过对干涉测量基本特性的研究,结合对实用干涉测量仪——外差式双频激光干涉仪工作原理和测量系统的深入分析,研究了测量系统内可能实现“动态跟踪”的两种方法,提出了“激光束跟踪”和“靶镜跟踪”的方法。
2、对不同的跟踪方案,从跟踪速度、技术难度、实用性等方面进行理论分析和实验研究,提出一种外置式跟踪定位测量系统的技术方
西安理工大学博士学位论文
法,并进行了开发研究,取得了预期的研究结果。
3、针对测量任务的需要、工况与可行性,提出了“悬丝导航、靶
镜跟踪”的方法,并进行的理论和实验研究,取得了预期的效果。
4、提出了一种“双悬丝基准”的导航方法和系统方案,推导出用
双丝间距表示单丝悬垂量的关系。通过实验研究,验证了方法的可行性。
5.对多波丧激光绝对距离干涉测量技术的原理和研究现状及相关
的问题进行了较为深入细致的探讨,并提出了作者的见解和看法。
关键词:无导轨测量,跟踪测量,激光干涉,虚拟导轨
论文的研究得到了西安市科技攻关项目《无导轨精密测量、定位技
术研究》(项目编号:102一220291)的资助。
Displacement measurement is the most elementary and most important measurement in mechanical field. In displacement measurement, it is widely believed that light wavelength is the most precise criterion. Using the laser wavelength as the benchmark of displacement measurement, usually the interference or diffraction method be taken, in fact, the interference method is the only way that be taken to measure the large displacement or to orientation along the light transmission direction. Using interference system means that the light can' t be interrupted, therefore, real interferometers are all equipped with a precision mechanical guidance along the measuring direction and the guidance length depend on the measuring tasks, This is a disadvantage for laser interferometer to use on long distance measurement.Using laser interference technique, but reducing the dependence to mechanical guidance or even not use guidance is our aim.The main work and new ideas of this dissertation are in the following: 1. By researching the basic characteristics of interference measurement, and analyzing the interferometer' s working principle and measurement system of the heterodyne double frequency laser interferometer, this
dissertation researches the two dynamic tracking methods which can be realized possibly in measurement system and brings forward the tracking methods of laser beam tracking and target mirror tracking.2. Tracking speed, technical difficulties and practicability etc of different tracking method are considered, both theoretically and researched experimentally. Then technical planning of "outer placing tracking orientation measurement system" is put forward and developed, and the expected results are obtained.3. Dummy guiding track of catenary navigation with target mirror track is presented and researched theoretically and experimentally aiming at the requirement, scene and feasibility of measurement, and the expected results are obtained.4. The guidance method and the system structure of "double-catenary benchmark" are presented, and the single thread pendency expressed by distance between two catenaries is deduced. Experiment verified the feasibility of this method.5. Principle and disadvantage of multi-wavelength laser absolute distance interference measurement are gone deep into, and then the author present own opinions and views about these problems.
利用激光干涉技术在获得高精度的同时,降低对导轨的依赖,甚至不用导轨完成测量,是本课题的基本出发点和研究重点,也是本课题研究的目的。
主要研究工作及创新点如下:
1、通过对干涉测量基本特性的研究,结合对实用干涉测量仪——外差式双频激光干涉仪工作原理和测量系统的深入分析,研究了测量系统内可能实现“动态跟踪”的两种方法,提出了“激光束跟踪”和“靶镜跟踪”的方法。
2、对不同的跟踪方案,从跟踪速度、技术难度、实用性等方面进行理论分析和实验研究,提出一种外置式跟踪定位测量系统的技术方
西安理工大学博士学位论文
法,并进行了开发研究,取得了预期的研究结果。
3、针对测量任务的需要、工况与可行性,提出了“悬丝导航、靶
镜跟踪”的方法,并进行的理论和实验研究,取得了预期的效果。
4、提出了一种“双悬丝基准”的导航方法和系统方案,推导出用
双丝间距表示单丝悬垂量的关系。通过实验研究,验证了方法的可行性。
5.对多波丧激光绝对距离干涉测量技术的原理和研究现状及相关
的问题进行了较为深入细致的探讨,并提出了作者的见解和看法。
关键词:无导轨测量,跟踪测量,激光干涉,虚拟导轨
论文的研究得到了西安市科技攻关项目《无导轨精密测量、定位技
术研究》(项目编号:102一220291)的资助。
Displacement measurement is the most elementary and most important measurement in mechanical field. In displacement measurement, it is widely believed that light wavelength is the most precise criterion. Using the laser wavelength as the benchmark of displacement measurement, usually the interference or diffraction method be taken, in fact, the interference method is the only way that be taken to measure the large displacement or to orientation along the light transmission direction. Using interference system means that the light can' t be interrupted, therefore, real interferometers are all equipped with a precision mechanical guidance along the measuring direction and the guidance length depend on the measuring tasks, This is a disadvantage for laser interferometer to use on long distance measurement.Using laser interference technique, but reducing the dependence to mechanical guidance or even not use guidance is our aim.The main work and new ideas of this dissertation are in the following: 1. By researching the basic characteristics of interference measurement, and analyzing the interferometer' s working principle and measurement system of the heterodyne double frequency laser interferometer, this
dissertation researches the two dynamic tracking methods which can be realized possibly in measurement system and brings forward the tracking methods of laser beam tracking and target mirror tracking.2. Tracking speed, technical difficulties and practicability etc of different tracking method are considered, both theoretically and researched experimentally. Then technical planning of "outer placing tracking orientation measurement system" is put forward and developed, and the expected results are obtained.3. Dummy guiding track of catenary navigation with target mirror track is presented and researched theoretically and experimentally aiming at the requirement, scene and feasibility of measurement, and the expected results are obtained.4. The guidance method and the system structure of "double-catenary benchmark" are presented, and the single thread pendency expressed by distance between two catenaries is deduced. Experiment verified the feasibility of this method.5. Principle and disadvantage of multi-wavelength laser absolute distance interference measurement are gone deep into, and then the author present own opinions and views about these problems.
引文
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