多自由度精密磁悬浮定位平台的设计与研究
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摘要
针对国内微电子制造行业对于精密定位装备的迫切需求,本文研制出一种多自由度磁悬浮精密定位平台。在结构设计的基础上,重点开展了系统建模与控制策略的研究。
本文提出了一种TU形结构的精密磁悬浮定位平台,并对其进行了机械结构和磁路的设计与分析,运用Maxwell3D进行了磁场和悬浮力的有限元分析,运用Patran/Nastran进行了模态分析。该平台包括悬浮系统和水平位移系统。
建立了悬浮系统的动力学模型,针对悬浮系统具有多变量、非线性、强耦合的特点,提出一种改进自抗扰控制策略,实现解耦和抑制扰动,该策略不仅可以对系统内部和外部扰动进行观测和补偿,以实现解耦控制,而且克服了常规自抗扰控制器的非线性误差反馈控制律中非线性函数不平滑性,提高系统控制品质。仿真对比分析和试验测试表明,本文提出的这种改进自抗扰控制策略应用到悬浮系统控制中,系统响应平滑,扰动作用时波动幅度小、恢复时间短,且动子水平位置变化对悬浮系统的影响得到了有效抑制。
建立了水平位移系统的动力学模型,然后对其采用状态反馈解耦控制进行研究,研究表明状态反馈解耦控制性能受动子水平位置变化影响较大。因此,本文还提出一种改进自抗扰控制策略进行水平位移系统解耦控制,并探索出相关参数整定规则。理论和仿真对比分析表明,采用改进自抗扰控制,可使水平位移系统具有定位精度高、响应速度快、鲁棒性好等优点。
在进行相关理论研究的基础上,研制出试验样机,并进行了性能测试,其定位精度达到1μm,能够满足微电子制造行业亚微米级定位指标的要求。
According to the urgent demand of the precision positioning equipment in the field of domestic micro-electronic manufacturing, a multi-DOF magnetic levitation precision positioning platform is developed in this paper. On the basis of the structure design, the study of the system modeling and control strategies is developed emphatically.
In this paper, a new precision magnetic levitation positioning platform based on TU structure is put forward. Aim at the platform, the analysis and design on the mechanical structure and magnetic circuit are also given. Furthermore, Maxwell3D is used in finite element analysis of magnetic field and levitation force. In the modal analysis, Patran/Nastran is intruduced. This proposed platform can be divided into levitation system and horizontal displacement system.
The dynamic model of levitation system is established in this paper. In view of the levitation system with multi-variable, nonlinear, strong coupling characteristics, the article puts forward an improved auto-disturbances-rejection control(ADRC) strategy to realize decoupling and disturbance rejection.Through this control strategy, the internal and external disturbance of the system can be observed and compensated. Then, the decoupling control can be realized. In addition, this improved ADRC overcome the non-smooth character of nonlinear function in nonlinear state error feedback(NLSEF) of conventional ADRC and improve the system control quality. Comparative analysis of the simulation and test results show that when the proposed improved auto-disturbances-rejection control strategy is applied to levitation system control, the system has smooth system response, small disturbance fluctuation range, short recovery time while disturbance is in use, and the influence caused by the mover's horizontal position changes on the levitation system has been effectively restrained.
The dynamic model of horizontal displacement system is established. Then, the study based on state feedback decoupling control is carried on. The study indicates that state feedback decoupling control performance is greatly influenced by the position change of the mover. Therefore, another kind of improved ADRC used in horizontal displacement decoupling control is proposed and the parameter setting rules is discussed in this paper. Theoretical and simulation comparison analysis show that the improved auto-disturbances-rejection control can make the horizontal displacement system have the characteristics of higher positioning precision, fast response and good robustness etc.
Based on the related theoretical research, the experimental prototype is produced, and its performance is testified. The positioning accuracy is1μm, this can meet the submicron degree positioning requirements in microelectronics manufacturing industry.
本文提出了一种TU形结构的精密磁悬浮定位平台,并对其进行了机械结构和磁路的设计与分析,运用Maxwell3D进行了磁场和悬浮力的有限元分析,运用Patran/Nastran进行了模态分析。该平台包括悬浮系统和水平位移系统。
建立了悬浮系统的动力学模型,针对悬浮系统具有多变量、非线性、强耦合的特点,提出一种改进自抗扰控制策略,实现解耦和抑制扰动,该策略不仅可以对系统内部和外部扰动进行观测和补偿,以实现解耦控制,而且克服了常规自抗扰控制器的非线性误差反馈控制律中非线性函数不平滑性,提高系统控制品质。仿真对比分析和试验测试表明,本文提出的这种改进自抗扰控制策略应用到悬浮系统控制中,系统响应平滑,扰动作用时波动幅度小、恢复时间短,且动子水平位置变化对悬浮系统的影响得到了有效抑制。
建立了水平位移系统的动力学模型,然后对其采用状态反馈解耦控制进行研究,研究表明状态反馈解耦控制性能受动子水平位置变化影响较大。因此,本文还提出一种改进自抗扰控制策略进行水平位移系统解耦控制,并探索出相关参数整定规则。理论和仿真对比分析表明,采用改进自抗扰控制,可使水平位移系统具有定位精度高、响应速度快、鲁棒性好等优点。
在进行相关理论研究的基础上,研制出试验样机,并进行了性能测试,其定位精度达到1μm,能够满足微电子制造行业亚微米级定位指标的要求。
According to the urgent demand of the precision positioning equipment in the field of domestic micro-electronic manufacturing, a multi-DOF magnetic levitation precision positioning platform is developed in this paper. On the basis of the structure design, the study of the system modeling and control strategies is developed emphatically.
In this paper, a new precision magnetic levitation positioning platform based on TU structure is put forward. Aim at the platform, the analysis and design on the mechanical structure and magnetic circuit are also given. Furthermore, Maxwell3D is used in finite element analysis of magnetic field and levitation force. In the modal analysis, Patran/Nastran is intruduced. This proposed platform can be divided into levitation system and horizontal displacement system.
The dynamic model of levitation system is established in this paper. In view of the levitation system with multi-variable, nonlinear, strong coupling characteristics, the article puts forward an improved auto-disturbances-rejection control(ADRC) strategy to realize decoupling and disturbance rejection.Through this control strategy, the internal and external disturbance of the system can be observed and compensated. Then, the decoupling control can be realized. In addition, this improved ADRC overcome the non-smooth character of nonlinear function in nonlinear state error feedback(NLSEF) of conventional ADRC and improve the system control quality. Comparative analysis of the simulation and test results show that when the proposed improved auto-disturbances-rejection control strategy is applied to levitation system control, the system has smooth system response, small disturbance fluctuation range, short recovery time while disturbance is in use, and the influence caused by the mover's horizontal position changes on the levitation system has been effectively restrained.
The dynamic model of horizontal displacement system is established. Then, the study based on state feedback decoupling control is carried on. The study indicates that state feedback decoupling control performance is greatly influenced by the position change of the mover. Therefore, another kind of improved ADRC used in horizontal displacement decoupling control is proposed and the parameter setting rules is discussed in this paper. Theoretical and simulation comparison analysis show that the improved auto-disturbances-rejection control can make the horizontal displacement system have the characteristics of higher positioning precision, fast response and good robustness etc.
Based on the related theoretical research, the experimental prototype is produced, and its performance is testified. The positioning accuracy is1μm, this can meet the submicron degree positioning requirements in microelectronics manufacturing industry.
引文
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