晶圆生产系统物流人员配置的仿真及优化
摘要
半导体由于需求量的迅猛增加以及工艺技术的更新,价格越来越便宜,半导体行业竞争也日趋激烈。为了满足市场的巨大需求量,半导体企业不断地扩建厂房,增加机器设备,招聘大量从业人员。而现代制造企业要想获得成功,必须重视企业内部的生产物流。生产物流是企业生产过程的重要构成因素,生产物流不流畅,会导致产品生产周期延长,生产成本增加,企业经济利益受损。如果企业的生产物流水平较高,能实现生产物流的效率最大化、成本最小化以及企业生产系统利益最大化。合理的厂区物流人员配置不仅能够提高企业的生产物流水平,还有助于企业削减人力成本,提高生产效率,增加企业的竞争力。
本文通过调研天津某晶圆制造点胶车间的生产物流系统,利用仿真软件ExtendSim,建立了晶圆制造点胶车间生产物流系统仿真模型。运行仿真模型,通过分析仿真结果,提出了两种针对物流搬运人员配置的改进优化方案,两种改进方案最后的仿真结果验证了改进措施的可行性。论文的主要研究内容如下：
(1)通过分析产业现状和研究现状,提出研究晶圆制造点胶作业车间的物流搬运人员配置问题具有较强的实际意义。
(2)通过阐述生产物流和物流系统仿真等相关理论知识,得出采用物流系统仿真手段研究复杂的生产物流系统问题优势巨大的结论,为接下来的研究工作奠定了理论基础。
(3)对天津某LED半导体芯片晶圆制造点胶作业车间的生产物流系统的作业流程、车间物流方式、设施布置、系统构成等进行系统研究,分析了该LED芯片晶圆制造点胶作业车间的生产物流系统存在的主要问题。
(4)利用仿真软件ExtendSim,对该LED芯片晶圆制造点胶作业车间的生产物流系统进行了建模与仿真。针对现实的生产系统的复杂性,对实际系统做了合理的简化和抽象假设,建立了各工序的仿真子模型。验证了所建立的LED芯片晶圆制造点胶作业车间的生产物流系统仿真模型的合理性和正确性。
(5)运行仿真模型,分析仿真结果,发现在现有物流搬运人员配置的情况下,物流搬运人员存在富余的情况,遂提出两种改进方案。两种改进方案最后的仿真结果验证了改进方案的可行性和正确性。
Due to the rapid increase of demand for semiconductors and the technology of updates, the price of semiconductors is cheaper and cheaper, and the semiconductor industry is highly competitive. In order to meet the huge demand, the enterprise extended the plant, Increased the equipment, employ staff continually. The modern manufacturing enterprise want to be successful, they must pay attention to the production logistics. Because the production logistics is the important component of production process factors in the enterprise, if the Production logistics not fluent, the cycle time of the product will be extended, and the cost of product will be increased too. If the level of production logistics level is to be higher, the enterprise can make the efficiency of production logistics maximization, the cost minimization and the profit to maximization. The reasonable labor allocation can not only improve the enterprise production logistics, also help enterprises to cut staffing costs, improve the production efficiency, increase the competition ability of the enterprise.
Through investigated a wafer fabrication glue workshop production logistics system in TianJin, using the simulation software ExtendSim, the paper established the simulation model of the wafer fabrication glue workshop production logistics system. Operating the simulation model, through the analysis of the simulation results, put forward two for material handling personnel allocation improvement optimization scheme, the two improved scheme last the simulation results verify the feasibility of improving measures. The content of the paper is as follows:
(1) Through the analysis of the present situation and the present situation in the industry, and then the wafer fabrication glue process of the plant of the personnel with material handling problems which is of great practical significance.
(2) Through stating the related theory knowledge of production logistics and logistics system simulation, realize that the simulation have huge advantage in researching in the production logistics system. It will lay the theoretical foundation for the next research work.
(3) Do some research in the technical process, the logistics mode in workshop, the facilities layout, and the system structure about production logistics system of the LED chips of wafer manufacturing glue process workshop, and point out the main problem in the production logistics system of the LED chips wafer fabrication glue process workshop.
(4) Through using the simulation software of ExtendSim, build the simulation model of the production logistics system in the LED chips wafer fabrication glue process workshop. Because of the complexity of the practical production system, this paper make reasonable simplified and abstract hypothesis to the actual system, and build the sub-models, and verify the simulation model of the LED chip wafer fabrication glue job-shop production logistics system is reasonable and accuracy.
(5) Operation the simulation model, and analyse the simulation results, find that the allocation of the existing logistics handling personnel exists the surplus. So the paper proposed two improvement plans. At last, the improvement. Plan of simulation results verify the correctness and feasibility of the improvement measures.
本文通过调研天津某晶圆制造点胶车间的生产物流系统,利用仿真软件ExtendSim,建立了晶圆制造点胶车间生产物流系统仿真模型。运行仿真模型,通过分析仿真结果,提出了两种针对物流搬运人员配置的改进优化方案,两种改进方案最后的仿真结果验证了改进措施的可行性。论文的主要研究内容如下：
(1)通过分析产业现状和研究现状,提出研究晶圆制造点胶作业车间的物流搬运人员配置问题具有较强的实际意义。
(2)通过阐述生产物流和物流系统仿真等相关理论知识,得出采用物流系统仿真手段研究复杂的生产物流系统问题优势巨大的结论,为接下来的研究工作奠定了理论基础。
(3)对天津某LED半导体芯片晶圆制造点胶作业车间的生产物流系统的作业流程、车间物流方式、设施布置、系统构成等进行系统研究,分析了该LED芯片晶圆制造点胶作业车间的生产物流系统存在的主要问题。
(4)利用仿真软件ExtendSim,对该LED芯片晶圆制造点胶作业车间的生产物流系统进行了建模与仿真。针对现实的生产系统的复杂性,对实际系统做了合理的简化和抽象假设,建立了各工序的仿真子模型。验证了所建立的LED芯片晶圆制造点胶作业车间的生产物流系统仿真模型的合理性和正确性。
(5)运行仿真模型,分析仿真结果,发现在现有物流搬运人员配置的情况下,物流搬运人员存在富余的情况,遂提出两种改进方案。两种改进方案最后的仿真结果验证了改进方案的可行性和正确性。
Due to the rapid increase of demand for semiconductors and the technology of updates, the price of semiconductors is cheaper and cheaper, and the semiconductor industry is highly competitive. In order to meet the huge demand, the enterprise extended the plant, Increased the equipment, employ staff continually. The modern manufacturing enterprise want to be successful, they must pay attention to the production logistics. Because the production logistics is the important component of production process factors in the enterprise, if the Production logistics not fluent, the cycle time of the product will be extended, and the cost of product will be increased too. If the level of production logistics level is to be higher, the enterprise can make the efficiency of production logistics maximization, the cost minimization and the profit to maximization. The reasonable labor allocation can not only improve the enterprise production logistics, also help enterprises to cut staffing costs, improve the production efficiency, increase the competition ability of the enterprise.
Through investigated a wafer fabrication glue workshop production logistics system in TianJin, using the simulation software ExtendSim, the paper established the simulation model of the wafer fabrication glue workshop production logistics system. Operating the simulation model, through the analysis of the simulation results, put forward two for material handling personnel allocation improvement optimization scheme, the two improved scheme last the simulation results verify the feasibility of improving measures. The content of the paper is as follows:
(1) Through the analysis of the present situation and the present situation in the industry, and then the wafer fabrication glue process of the plant of the personnel with material handling problems which is of great practical significance.
(2) Through stating the related theory knowledge of production logistics and logistics system simulation, realize that the simulation have huge advantage in researching in the production logistics system. It will lay the theoretical foundation for the next research work.
(3) Do some research in the technical process, the logistics mode in workshop, the facilities layout, and the system structure about production logistics system of the LED chips of wafer manufacturing glue process workshop, and point out the main problem in the production logistics system of the LED chips wafer fabrication glue process workshop.
(4) Through using the simulation software of ExtendSim, build the simulation model of the production logistics system in the LED chips wafer fabrication glue process workshop. Because of the complexity of the practical production system, this paper make reasonable simplified and abstract hypothesis to the actual system, and build the sub-models, and verify the simulation model of the LED chip wafer fabrication glue job-shop production logistics system is reasonable and accuracy.
(5) Operation the simulation model, and analyse the simulation results, find that the allocation of the existing logistics handling personnel exists the surplus. So the paper proposed two improvement plans. At last, the improvement. Plan of simulation results verify the correctness and feasibility of the improvement measures.
引文
[1]http://news.imosi.com/news/20120322/41588.shtml.
[2]黄丹,严隽薇,乔非.基于Petri网的半导体生产线建模[J].算机工程与应用,2004,140(35)：192-195.
[3]张怀,江志斌.基于EOPN的晶圆制造系统实时调度仿真平台[J].上海交通大学学报,2009(4)：11-13.
[4]邵志芳,钱省三,刘仲英.基于Petri net的半导体代工系统建模及案例研究[J].导体技术,2006(31)：810-814.
[5]闵春燕,王岩峰.仿真技术在半导体和集成电路生产流程优化中的应用[J].半导体技术,2003(11)：31-33.
[6]顾华平,莫锦秋.仿真技术在半导体生产调度中的应用[J].机械与电子,2010(2)：11-13.
[7]王恒,张志胜.采用CONW IP投料系统的晶圆制造交货期设置方法[J].工业工程,2009(12)：21-24.
[8]彭海波,应保胜,陈馨.基于Petri网的柔性制造系统建模的调度算[J].中国土程机械学报,2008(4)：65-69.
[9]O Rose. Estimation of the cycle time distribution of a wafer fabrication a simple simulation model[J]. Semiconductor Manufacturing Operational Modeling and Simulation,2008(11): 133-138.
[10]Yi-Feng Hung, Leachman, R.C. A production planning methodology for semiconductor manufacturing based on iterative simulation and linear programming calculations[J]. Semiconductor Manufacturing,2006(9):257-269.
[11]A.I.Sivakumar, Optimization of cycle time and utilization insemiconductor test manufacturing using simulation based on near-real-time scheduling system[J]. Proceedings of the Simulation,2009(8):727-735.
[12]Lin J T, Wang F K, Yang C J. The performance of the number of vehicle in a dynamic connecting transport AMHS[J]. International Journal of Production Research,2005,43 (11):2263-2276.
[13]Kuo Y, Yang T, Peter B A. Simulation meta model development using uniform design and neural networks for automated material handling system in semiconductor wafer fabrication[J]. Simulation Modeling Pratice and Theory,2007,15(8):1002-1015.
[14]胡红云,林希.我国制造企业生产物流的发展现状问题与对策[J].重庆科技学院学报 (社会科学版),2011(2)：23-25.
[15]谭颖.生产制造企业生产物流问题分析及对策探讨[J].商场现代化,2008(9)：12-15.
[16]赵倩.生产物流系统规划分析与生产调度技术的研究现状与趋势[J].科技创新导报,2008(11)：7-9.
[17]王兴国.论制造企业生产物流的改进策略[J].物流工程与管理,2010(32)：45-48.
[18]Pandey P C, Prontep Khokhajaikiat. Performance modeling of Multistage production systems operating under hybrid push/pull control[J]. nternational Journal of Production Economics, 1996,43(1):17-28.
[19]李振飞,徐克林.基于HTCPN的分段生产物流系统建模与仿真案例研究[J].工业工程,2010(13)：43-47.
[20]孔令革,鲁建厦,詹燕.基于排队网络的生产物流瓶颈转移研究[J].浙江工业大学学报,2007(39)：23-26.
[21]刘远祥.计算机仿真在生产物流系统中应用分析[J].物流工程与管理,2009(32)：74-77.
[22]曹国安,王丽,万文杰.离散型制造企业车间生产物流系统的优化[J].合肥工业大学学报,2011(5)：34-36.
[23]何安静.现代化生产物流技术在机车制造业中的应用[J].电力机车与城轨车辆,2010(35)：83-85.
[24]Wang D, Xu, C. Hybrid push/pull production control strategy Simulation and its applications [J]. Reduction Planning and Control,1997,8(2):142-151.
[25]张伟,曹文彬.生产物流系统设施布置方案的评价[J].网络财富,2009(3)：24-27.
[26]朱华炳.造业生产物流系统规划与调度技术研究[D].合肥：合肥工业大学,2005.
[27]张晓萍,颜永年,吴耀华.现代生产物流及仿真[M].北京：清华大学出版社,1998.
[28]Manuel Laguna, Johan Marklund. Business Processing Modeling, Simulation and Design[J]. New Jersey: Prentice Hall,2004(6):11-14.
[29]肖田元,张燕云.系统仿真导论[M].北京：清华大学出版社,2000.
[30]钱威.纺织机械制造企业生产物流系统规划与仿真研究[D].山东：山东科技大学,2011.
[31]Thiesse F, Fleisch E. On the value of location information to lot scheduling in complex manufacturing processes [J]. International Journal of Production Economics,2008,112 (2): 532-547.
[32]邓可.基于多Agent的半导体生产线调度仿真系统[J].微型电脑应用,2010(26)：21-24.
[33]Yang, J W, Cheng H C, Chiang T C, Fu L C. Multi-objective lot scheduling and dynamic OHT routing in a 300-mm wafer Fab[J].2008 IEEE. International Conference on System, 2008(7):1608-1613.
[34]孟庆新.基于流程仿真的炼钢生产与物流的计划方法[D].沈阳：东北大学,2009.
[35]钱芝网.基于柔性生产的企业物流系统构建与仿真研究[D].江苏：江苏大学,2009.
[36]Elisa Cunha, Paula Barbosa Povoa, Assis Lopes. A Multi-echelon Systems'Simulation Model For Repairable And Consumable Items Management: A Case Study [J]. International Journal of Production Economics,2006(6):1-29.
[37]周海荣.离散制造企业生产物流系统建模与仿真[J].西南交通大学学报,2010(11)：13-15.
[38]董明,吴一帆,吴畅,侯文皓.随机需求下半导体生产车间的物流系统仿真优化[J].上海交通大学学报,2010(44)：25-28.
[39]赵晶英,陈英俊.铁锟车间生产物流系统的优化与仿真[J].现代制造工程,2012(2)：7-9.
[40]秦天保ExtendSim中文教材[M].上海：上海刃之砺信息科技有限公司,2008.
[41]Sato R. Analyzing Kanban and CONWIP controlled assembly systems [J]. Doctoral Program in Policy and Planning Sciences,2006(13):14-17.
[42]朱华炳.制造业生产物流系统规划与调度技术研究[D].合肥：合肥工业大学,2005.04.
[43]Brian Kernan, John Geraghty. A Multi-objective Genetic Algorithm For EXTEND[J]. The School of Mechanical & Manufacturing Engineering,1998(3):13-16.
[44]张文诺.基于Petri网的汽车生产物流流程仿真优化研究[D].长春：吉林大学,2007.05.
[2]黄丹,严隽薇,乔非.基于Petri网的半导体生产线建模[J].算机工程与应用,2004,140(35)：192-195.
[3]张怀,江志斌.基于EOPN的晶圆制造系统实时调度仿真平台[J].上海交通大学学报,2009(4)：11-13.
[4]邵志芳,钱省三,刘仲英.基于Petri net的半导体代工系统建模及案例研究[J].导体技术,2006(31)：810-814.
[5]闵春燕,王岩峰.仿真技术在半导体和集成电路生产流程优化中的应用[J].半导体技术,2003(11)：31-33.
[6]顾华平,莫锦秋.仿真技术在半导体生产调度中的应用[J].机械与电子,2010(2)：11-13.
[7]王恒,张志胜.采用CONW IP投料系统的晶圆制造交货期设置方法[J].工业工程,2009(12)：21-24.
[8]彭海波,应保胜,陈馨.基于Petri网的柔性制造系统建模的调度算[J].中国土程机械学报,2008(4)：65-69.
[9]O Rose. Estimation of the cycle time distribution of a wafer fabrication a simple simulation model[J]. Semiconductor Manufacturing Operational Modeling and Simulation,2008(11): 133-138.
[10]Yi-Feng Hung, Leachman, R.C. A production planning methodology for semiconductor manufacturing based on iterative simulation and linear programming calculations[J]. Semiconductor Manufacturing,2006(9):257-269.
[11]A.I.Sivakumar, Optimization of cycle time and utilization insemiconductor test manufacturing using simulation based on near-real-time scheduling system[J]. Proceedings of the Simulation,2009(8):727-735.
[12]Lin J T, Wang F K, Yang C J. The performance of the number of vehicle in a dynamic connecting transport AMHS[J]. International Journal of Production Research,2005,43 (11):2263-2276.
[13]Kuo Y, Yang T, Peter B A. Simulation meta model development using uniform design and neural networks for automated material handling system in semiconductor wafer fabrication[J]. Simulation Modeling Pratice and Theory,2007,15(8):1002-1015.
[14]胡红云,林希.我国制造企业生产物流的发展现状问题与对策[J].重庆科技学院学报 (社会科学版),2011(2)：23-25.
[15]谭颖.生产制造企业生产物流问题分析及对策探讨[J].商场现代化,2008(9)：12-15.
[16]赵倩.生产物流系统规划分析与生产调度技术的研究现状与趋势[J].科技创新导报,2008(11)：7-9.
[17]王兴国.论制造企业生产物流的改进策略[J].物流工程与管理,2010(32)：45-48.
[18]Pandey P C, Prontep Khokhajaikiat. Performance modeling of Multistage production systems operating under hybrid push/pull control[J]. nternational Journal of Production Economics, 1996,43(1):17-28.
[19]李振飞,徐克林.基于HTCPN的分段生产物流系统建模与仿真案例研究[J].工业工程,2010(13)：43-47.
[20]孔令革,鲁建厦,詹燕.基于排队网络的生产物流瓶颈转移研究[J].浙江工业大学学报,2007(39)：23-26.
[21]刘远祥.计算机仿真在生产物流系统中应用分析[J].物流工程与管理,2009(32)：74-77.
[22]曹国安,王丽,万文杰.离散型制造企业车间生产物流系统的优化[J].合肥工业大学学报,2011(5)：34-36.
[23]何安静.现代化生产物流技术在机车制造业中的应用[J].电力机车与城轨车辆,2010(35)：83-85.
[24]Wang D, Xu, C. Hybrid push/pull production control strategy Simulation and its applications [J]. Reduction Planning and Control,1997,8(2):142-151.
[25]张伟,曹文彬.生产物流系统设施布置方案的评价[J].网络财富,2009(3)：24-27.
[26]朱华炳.造业生产物流系统规划与调度技术研究[D].合肥：合肥工业大学,2005.
[27]张晓萍,颜永年,吴耀华.现代生产物流及仿真[M].北京：清华大学出版社,1998.
[28]Manuel Laguna, Johan Marklund. Business Processing Modeling, Simulation and Design[J]. New Jersey: Prentice Hall,2004(6):11-14.
[29]肖田元,张燕云.系统仿真导论[M].北京：清华大学出版社,2000.
[30]钱威.纺织机械制造企业生产物流系统规划与仿真研究[D].山东：山东科技大学,2011.
[31]Thiesse F, Fleisch E. On the value of location information to lot scheduling in complex manufacturing processes [J]. International Journal of Production Economics,2008,112 (2): 532-547.
[32]邓可.基于多Agent的半导体生产线调度仿真系统[J].微型电脑应用,2010(26)：21-24.
[33]Yang, J W, Cheng H C, Chiang T C, Fu L C. Multi-objective lot scheduling and dynamic OHT routing in a 300-mm wafer Fab[J].2008 IEEE. International Conference on System, 2008(7):1608-1613.
[34]孟庆新.基于流程仿真的炼钢生产与物流的计划方法[D].沈阳：东北大学,2009.
[35]钱芝网.基于柔性生产的企业物流系统构建与仿真研究[D].江苏：江苏大学,2009.
[36]Elisa Cunha, Paula Barbosa Povoa, Assis Lopes. A Multi-echelon Systems'Simulation Model For Repairable And Consumable Items Management: A Case Study [J]. International Journal of Production Economics,2006(6):1-29.
[37]周海荣.离散制造企业生产物流系统建模与仿真[J].西南交通大学学报,2010(11)：13-15.
[38]董明,吴一帆,吴畅,侯文皓.随机需求下半导体生产车间的物流系统仿真优化[J].上海交通大学学报,2010(44)：25-28.
[39]赵晶英,陈英俊.铁锟车间生产物流系统的优化与仿真[J].现代制造工程,2012(2)：7-9.
[40]秦天保ExtendSim中文教材[M].上海：上海刃之砺信息科技有限公司,2008.
[41]Sato R. Analyzing Kanban and CONWIP controlled assembly systems [J]. Doctoral Program in Policy and Planning Sciences,2006(13):14-17.
[42]朱华炳.制造业生产物流系统规划与调度技术研究[D].合肥：合肥工业大学,2005.04.
[43]Brian Kernan, John Geraghty. A Multi-objective Genetic Algorithm For EXTEND[J]. The School of Mechanical & Manufacturing Engineering,1998(3):13-16.
[44]张文诺.基于Petri网的汽车生产物流流程仿真优化研究[D].长春：吉林大学,2007.05.