基于DMD的微小型近红外光谱仪系统研究
摘要
随着光谱仪技术的飞速发展,微小型近红外光谱仪以其体积小、成本低、快速高效、在线检测等特点,成为了现代检测仪器的研究热点。本文提出基于DMD(数字微镜)新原理的微小型近红外光谱仪研究,具有重要理论意义与实际应用价值。
论文在分析研究国内外微小型近红外光谱仪发展的基础上,提出一种基于DMD面阵的单探测器微小型近红外光谱仪系统方案;开展了基于DMD的微小型近红外光谱仪分光成像系统的设计与优化、系统结构设计与微结构加工、装调、标定等关键技术研究;研制出基于DMD的微小型近红外光谱仪原理样机,测试结果表明,光谱仪波长范围为1000-1780nm、分辨力小于20nm。论文的主要研究工作是:
①在分析国内外微小型近红外光谱仪光学系统的基础上,提出了基于DMD新原理的微小型近红外光谱仪系统方案;
②在研究数字微镜的工作原理与特点的基础上,确定了光谱仪的光学系统方案以及相应的光学元器件;采用ZEMAX光学设计软件进行光源和分光成像系统设计及优化,实现了系统的像差校正和光学系统的小型化;
③从衍射限制、空间采样率以及光栅谱面等方面进行了系统优化设计,获得狭缝宽度最优值;采用MATLAB数学软件建立DMD的光学模型,进行了仿真与实验,完成了编码误差的校正;
④完成了微小型近红外光谱仪的微结构设计与加工、原理样机装调以及波长标定,测试结果表明:波长范围1000-1780nm,光谱分辨力小于20nm。
Under the rapid development of the spectrometer technology, NIR Miniature spectrometer, which is compact, low-cost, fast, online detecting, becomes the research hot spot of the modern detective device. At present, the key points of the miniature spectrometer are controlling the core device, enhancing SNR, decreasing the price. To solve the problems, this paper focus on the research of NIR Miniature spectrometer based on digital micro mirror device(DMD), which has significant value on science and practical application.
According to the analysis of the miniature spectrometer both International and domestic, a NIR Miniature spectrometer based on DMD is proposed with a single detector. Both light system and dispersed system of the NIR Miniature spectrometer is designed and optimized. The research on the fabrication and calibration is carried out. Finally, the prototype is developed successfully. The paper mainly covers work as following.
①After the study of NIR Miniature spectrometer both home and aboard, propose the scheme of the NIR Miniature spectrometer system.
②On the based of the principle and specialties of the micro mirror arrays, propose the structure of the NIR Miniature spectrometer. Choose optical component. Use ZEMAX optical software to design and optimize the light system and the dispersed system. The aberration is reduced.
③In order to improve the resolution of this spectrometer, this paper gives the analysis of the new effects which is caused by micro structure, and optimal values of the key factors.
④Finish the fabrication and calibration of the prototype. Its range of wavelength is 1000-1780nm, the resolution is less than 20nm, and the absolute error is 3nm.
论文在分析研究国内外微小型近红外光谱仪发展的基础上,提出一种基于DMD面阵的单探测器微小型近红外光谱仪系统方案;开展了基于DMD的微小型近红外光谱仪分光成像系统的设计与优化、系统结构设计与微结构加工、装调、标定等关键技术研究;研制出基于DMD的微小型近红外光谱仪原理样机,测试结果表明,光谱仪波长范围为1000-1780nm、分辨力小于20nm。论文的主要研究工作是:
①在分析国内外微小型近红外光谱仪光学系统的基础上,提出了基于DMD新原理的微小型近红外光谱仪系统方案;
②在研究数字微镜的工作原理与特点的基础上,确定了光谱仪的光学系统方案以及相应的光学元器件;采用ZEMAX光学设计软件进行光源和分光成像系统设计及优化,实现了系统的像差校正和光学系统的小型化;
③从衍射限制、空间采样率以及光栅谱面等方面进行了系统优化设计,获得狭缝宽度最优值;采用MATLAB数学软件建立DMD的光学模型,进行了仿真与实验,完成了编码误差的校正;
④完成了微小型近红外光谱仪的微结构设计与加工、原理样机装调以及波长标定,测试结果表明:波长范围1000-1780nm,光谱分辨力小于20nm。
Under the rapid development of the spectrometer technology, NIR Miniature spectrometer, which is compact, low-cost, fast, online detecting, becomes the research hot spot of the modern detective device. At present, the key points of the miniature spectrometer are controlling the core device, enhancing SNR, decreasing the price. To solve the problems, this paper focus on the research of NIR Miniature spectrometer based on digital micro mirror device(DMD), which has significant value on science and practical application.
According to the analysis of the miniature spectrometer both International and domestic, a NIR Miniature spectrometer based on DMD is proposed with a single detector. Both light system and dispersed system of the NIR Miniature spectrometer is designed and optimized. The research on the fabrication and calibration is carried out. Finally, the prototype is developed successfully. The paper mainly covers work as following.
①After the study of NIR Miniature spectrometer both home and aboard, propose the scheme of the NIR Miniature spectrometer system.
②On the based of the principle and specialties of the micro mirror arrays, propose the structure of the NIR Miniature spectrometer. Choose optical component. Use ZEMAX optical software to design and optimize the light system and the dispersed system. The aberration is reduced.
③In order to improve the resolution of this spectrometer, this paper gives the analysis of the new effects which is caused by micro structure, and optimal values of the key factors.
④Finish the fabrication and calibration of the prototype. Its range of wavelength is 1000-1780nm, the resolution is less than 20nm, and the absolute error is 3nm.
引文
[1]李亚萍,张广军,李庆波.空间双光路红外CO2气体传感器及其测量模型.光学精密工程[J].2009.17(1):14-19.
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[3]范世福,光谱技术和光谱仪器的近期发展[J].现代仪器.2007.2: 1-5.
[4]袁洪福等.一种新型在线近红外光谱分析仪的研制[J].分析化学.2004.32(2): 255-261.
[5]褚小立,王艳斌,陆婉珍.近红外光谱仪国内外现状与展望[J].分析仪器.2007.4: 1-4.
[6]严衍禄.近红外光谱分析技术与应用[M].轻工业出版社.2005.1: 10-13.
[7] Day.D.R.,Butler.M.A.,Smith.M.C.,et al.Diffractive-MEMS implementation of a Hadamard near-infrared spectrometer[C].TRANSDUCERS '05.The 13th International Conference on Volume 2.5-9 June 2005:1246-1249.
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[10] G.B.Hocker,D.Youngner,et al.A Programmable MEMS Diffraction Grating For Synthetic Spectra[J].SAND2000-0975C,Jun 07 2000:1-6.
[11] M . B . Sinclair , M . A . Butler , et al . Synthetic Infrared Spectra[J] . Optics Letters.1997.22:1036-1040.
[12] M.Kraft,A.Kenda,A.Frank,et al.Single-detector micro-electro-mechanical scanning grating spectrometer.Anal Bioanal Chem [J].2006(386): 1259-1266.
[13] M.B.Sinclair,K.B.Pfeifer,M.A.Butler,S.D.Senteria,E.R.Deutsch,D.Youngner,E.Cabuz,G.B.Hocker.A MEMS-Based Correlation Radiometer[J].Proceedings of SPIE.vol.5348.San Jose.CA.2004:55-60.
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[15] Olav Solgaard,Robert L.Byer,David A.B.Miller.Diffraction-Based Optical Filtering: Theory And Implementation With MEMS[J].Stanford University.Dec 2004:86-92.
[16] R.F.Wolffenbuttel.Mems-based optical mini-and microspectrometers for the visible and infrared spectral range[J].J.Micromech Microeng.2005.15:S145-S152.
[17] A.Kenda,W.Scherf.A Compact Spectrometer based on a Micromachined TorsionalMirrorDevice[J].2004 IEEE.1312-1316.
[18] Jefferson E.Odhner,Amberst.Compact Spectrometer[P].US 7233394B2.Jun.19.2007: 1-9.
[19] B.Kim,J.Sinibaldi,and G.Karunasiri.MEMS SCANNING DIFFRACTION GRATING SPECTROMETER[J].2006 IEEE.46-47.
[20] S.Grabarnik,R.F.Wolffenbuttel,et al.Microspectrometer with a concave grating fabricated in a MEMS technology[C].Proceedings of the EurosensorsⅩⅩⅢconference.2009:401-404.
[21]向贤毅,温志渝,龙再川,等.微小型近红外光谱仪分析系统的研制.光谱学与光谱分析[J].2009.9(8):2286-2290.
[22] M.Kraft,A.Kenda,et al.Hand-Held high-speed spectrometers based on Micro Electro Mechanical components[C].Proceedings of the Symposium on Photonics Technologies for 7th Framework Program.October 2006:12-14 .
[23] Feiwen Lee,Fook Siong Chau,et al.A MEMS-based resonant-scanning lamellar grating Fourier transformmicro-spectrometer with laser reference system[J],Sensors and Actuators A.2009 (149): 221–228.
[24] http://wenku.baidu.com/view/2933bfe9856a561252d36f11.html[EB/OL].
[25]张志伟.微小型光纤光谱仪.生命科学仪器[J].2006.4(8): 51-55.
[26] To-style photodetector/amplifier[Z].www.ecosystems.com.
[27] DLP Discoery 4100 .55”XGA Type X Starter Kit[Z].www.dlpdiscovery.com.
[28]吴国安,光谱仪器设计[M].科学出版社.1978.11:69-123.
[29]陈伟民,胡松,温志渝,等.微小型光谱仪光谱带宽及象元分辨力的讨论.压电与声光[J].2000.22(3): 149-151.
[30]讯技光电科技(上海)有限公司.ZEMAX学习秘笈[M].讯技光电科技(上海)有限公司.2005:221-244.
[31]吴晓红.工程光学基础[M].湖北高职“十一五”规划教材.2008: 37-43.
[32]王之江,徐文东.光学设计.中国科学院上海光学精密机械研究所[M].2009:57-67.
[33] ZEMAX-chinese-Manual[Z].www.photic.net.
[34]赵伟星.使用ZEMAX进行准直镜头设[Z].www.wavelab-sci.com.cn.
[35] Optical Glass data sheets[Z].SCHOTT.09 2009.
[36]陈自宽,母国光等.光电成像系统中的光学传递函数[J].光学技术.1998.01.1: 57-62.
[37]贾辉,姚勇.微小型光栅光谱仪光学系统的特点与光谱分辨力的提高[J].光谱线与光谱分析.2007.08.27(8):1653-1656.
[38]冯玉涛,向阳.谱线弯曲对成像光谱仪辐射信号采集的影响.光学精密工程[J].2009, 17(1):20-25.
[39] JIA Hui,YAO Yong.Analysis of Corresponding Changes of two Dimensional Hadamard Spectral Images Caused by Imperfect Encoding Templates and Their Position Errors.ACTA PHOTONICA SINICA[J].2007(36):294-300.
[40] Zhou Jinsong,Lu Qunbo,Xiangli Bin.Analysis and Revision on Spectra Al iasing of Hadamard Transform Spectral Imager.ACTA PHOTONICA SINICA[J].2005(34):1519-1521.
[41] JIA Hui,LI Fu-tian.Design and fabrication of encoding template for Hadamard transform imaging spectrometer.Opto-Electronic Engineering[J].2003(30): 53-58.
[42]吕乃光.傅里叶光学[M].北京:机械工业出版社.2006:92~106.
[43]祝绍箕.衍射光栅[M].浙江大学出版社.1986:20-28.
[44]杨怀栋,陈科新,黄星月,何庆声等.光栅光谱仪的整体建模与分析[J].光谱学与光谱分析.2009.01.29(1):281-284.
[45]陈自宽,母国光等.光栅调制和积分抽样[J].光电工程.1999.06.26(3):32-38.
[46]邢德财.几种介质光栅的衍射特性的研究[D].四川大学硕士学位论文.2005.4:33-35.
[47]贾辉,李福田.阿达玛变换成像光谱仪编码模板的设计与制作[J].光电工程.2003.08.30 (4): 53-57.
[48]朱健强.光学加工[M].中国科学院上海光学精密机械研究所.2009:78-92.
[49] Avantes China[Z].www.avantes.com.cn.
[2]张军,陈星旦,朴仁官,等.用于食品成分分析的双探测器近红外光谱仪.光学精密工程[J].2008.16(6): 986-992.
[3]范世福,光谱技术和光谱仪器的近期发展[J].现代仪器.2007.2: 1-5.
[4]袁洪福等.一种新型在线近红外光谱分析仪的研制[J].分析化学.2004.32(2): 255-261.
[5]褚小立,王艳斌,陆婉珍.近红外光谱仪国内外现状与展望[J].分析仪器.2007.4: 1-4.
[6]严衍禄.近红外光谱分析技术与应用[M].轻工业出版社.2005.1: 10-13.
[7] Day.D.R.,Butler.M.A.,Smith.M.C.,et al.Diffractive-MEMS implementation of a Hadamard near-infrared spectrometer[C].TRANSDUCERS '05.The 13th International Conference on Volume 2.5-9 June 2005:1246-1249.
[8] Abraham McAllister,Malcolm Smith,et al.Apparatus And Method Providing A Hand-Held Spectrometer[P].US 20070194239A1.Aug.23.2007:1-9 .
[9] Abraham McAllister,Malcolm Smith,et al.Apparatus And Method Providing A Hand-Held Spectrometer[P].WO 2007089770A2.Aug 9.2007:1-32
[10] G.B.Hocker,D.Youngner,et al.A Programmable MEMS Diffraction Grating For Synthetic Spectra[J].SAND2000-0975C,Jun 07 2000:1-6.
[11] M . B . Sinclair , M . A . Butler , et al . Synthetic Infrared Spectra[J] . Optics Letters.1997.22:1036-1040.
[12] M.Kraft,A.Kenda,A.Frank,et al.Single-detector micro-electro-mechanical scanning grating spectrometer.Anal Bioanal Chem [J].2006(386): 1259-1266.
[13] M.B.Sinclair,K.B.Pfeifer,M.A.Butler,S.D.Senteria,E.R.Deutsch,D.Youngner,E.Cabuz,G.B.Hocker.A MEMS-Based Correlation Radiometer[J].Proceedings of SPIE.vol.5348.San Jose.CA.2004:55-60.
[14] M.A.Bulter,A.J.Ricco,M.B.Sinclair,S.D.Senturia.Oprical Apparatus for Forming Correlation Spectrometers and Optical Processors[P].US 5905571.May 18.1999:1-3.
[15] Olav Solgaard,Robert L.Byer,David A.B.Miller.Diffraction-Based Optical Filtering: Theory And Implementation With MEMS[J].Stanford University.Dec 2004:86-92.
[16] R.F.Wolffenbuttel.Mems-based optical mini-and microspectrometers for the visible and infrared spectral range[J].J.Micromech Microeng.2005.15:S145-S152.
[17] A.Kenda,W.Scherf.A Compact Spectrometer based on a Micromachined TorsionalMirrorDevice[J].2004 IEEE.1312-1316.
[18] Jefferson E.Odhner,Amberst.Compact Spectrometer[P].US 7233394B2.Jun.19.2007: 1-9.
[19] B.Kim,J.Sinibaldi,and G.Karunasiri.MEMS SCANNING DIFFRACTION GRATING SPECTROMETER[J].2006 IEEE.46-47.
[20] S.Grabarnik,R.F.Wolffenbuttel,et al.Microspectrometer with a concave grating fabricated in a MEMS technology[C].Proceedings of the EurosensorsⅩⅩⅢconference.2009:401-404.
[21]向贤毅,温志渝,龙再川,等.微小型近红外光谱仪分析系统的研制.光谱学与光谱分析[J].2009.9(8):2286-2290.
[22] M.Kraft,A.Kenda,et al.Hand-Held high-speed spectrometers based on Micro Electro Mechanical components[C].Proceedings of the Symposium on Photonics Technologies for 7th Framework Program.October 2006:12-14 .
[23] Feiwen Lee,Fook Siong Chau,et al.A MEMS-based resonant-scanning lamellar grating Fourier transformmicro-spectrometer with laser reference system[J],Sensors and Actuators A.2009 (149): 221–228.
[24] http://wenku.baidu.com/view/2933bfe9856a561252d36f11.html[EB/OL].
[25]张志伟.微小型光纤光谱仪.生命科学仪器[J].2006.4(8): 51-55.
[26] To-style photodetector/amplifier[Z].www.ecosystems.com.
[27] DLP Discoery 4100 .55”XGA Type X Starter Kit[Z].www.dlpdiscovery.com.
[28]吴国安,光谱仪器设计[M].科学出版社.1978.11:69-123.
[29]陈伟民,胡松,温志渝,等.微小型光谱仪光谱带宽及象元分辨力的讨论.压电与声光[J].2000.22(3): 149-151.
[30]讯技光电科技(上海)有限公司.ZEMAX学习秘笈[M].讯技光电科技(上海)有限公司.2005:221-244.
[31]吴晓红.工程光学基础[M].湖北高职“十一五”规划教材.2008: 37-43.
[32]王之江,徐文东.光学设计.中国科学院上海光学精密机械研究所[M].2009:57-67.
[33] ZEMAX-chinese-Manual[Z].www.photic.net.
[34]赵伟星.使用ZEMAX进行准直镜头设[Z].www.wavelab-sci.com.cn.
[35] Optical Glass data sheets[Z].SCHOTT.09 2009.
[36]陈自宽,母国光等.光电成像系统中的光学传递函数[J].光学技术.1998.01.1: 57-62.
[37]贾辉,姚勇.微小型光栅光谱仪光学系统的特点与光谱分辨力的提高[J].光谱线与光谱分析.2007.08.27(8):1653-1656.
[38]冯玉涛,向阳.谱线弯曲对成像光谱仪辐射信号采集的影响.光学精密工程[J].2009, 17(1):20-25.
[39] JIA Hui,YAO Yong.Analysis of Corresponding Changes of two Dimensional Hadamard Spectral Images Caused by Imperfect Encoding Templates and Their Position Errors.ACTA PHOTONICA SINICA[J].2007(36):294-300.
[40] Zhou Jinsong,Lu Qunbo,Xiangli Bin.Analysis and Revision on Spectra Al iasing of Hadamard Transform Spectral Imager.ACTA PHOTONICA SINICA[J].2005(34):1519-1521.
[41] JIA Hui,LI Fu-tian.Design and fabrication of encoding template for Hadamard transform imaging spectrometer.Opto-Electronic Engineering[J].2003(30): 53-58.
[42]吕乃光.傅里叶光学[M].北京:机械工业出版社.2006:92~106.
[43]祝绍箕.衍射光栅[M].浙江大学出版社.1986:20-28.
[44]杨怀栋,陈科新,黄星月,何庆声等.光栅光谱仪的整体建模与分析[J].光谱学与光谱分析.2009.01.29(1):281-284.
[45]陈自宽,母国光等.光栅调制和积分抽样[J].光电工程.1999.06.26(3):32-38.
[46]邢德财.几种介质光栅的衍射特性的研究[D].四川大学硕士学位论文.2005.4:33-35.
[47]贾辉,李福田.阿达玛变换成像光谱仪编码模板的设计与制作[J].光电工程.2003.08.30 (4): 53-57.
[48]朱健强.光学加工[M].中国科学院上海光学精密机械研究所.2009:78-92.
[49] Avantes China[Z].www.avantes.com.cn.