面向微型光谱仪的MOEMS光栅光调制器研究
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摘要
MOEMS(Micro-Opto-Electro-Mechanical Systems微光机电系统)技术是MEMS领域的一个重要研究方向。基于MOEMS技术的微型光谱仪已经成为光谱分析仪器发展的一个重要方向。本论文面向微型光谱仪的需求,开展了MOEMS光栅光调制器关键技术研究,具有明确的应用背景和科学意义。
本论文在分析总结国内外几种典型MOEMS光调器的基础上,提出了一种结构简单、驱动电压低、又具有哈达玛变换功能的MOEMS光栅光调制器,建立了相应的等效模型;研究了光栅光调制器的光、机、电特性;确定了器件结构参数,进行了器件仿真分析,完成了器件的工艺流程设计及加工流片;开发了基于FPGA的器件驱动控制系统,进行了原理器件的参数测试与功能实验验证。主要研究工作是:
①在对比分析国内外MOEMS光调制器件工作特点的基础上,针对微小型光谱仪的需求,提出了一种MOEMS光栅光调制器新结构;
②阐述了MOEMS光栅光调制器的工作原理,基于标量光学理论进行了MOEMS光栅光调制器的光学特性理论分析,建立了器件的等效机电模型,研究了器件的静态、动态机电特性;
③确定了MOEMS光栅光调制器的结构参数,完成了基于曲折梁、分布式电极等结构设计;采用Coventor Ware专业软件对器件进行了有限元仿真;
④基于中电24所的加工工艺规范,开展了多晶硅结构工艺流程以及基于Al膜保护的牺牲层释放工艺研究;确定了Al膜结构的光栅光调制器工艺流程并进行了加工流片;
⑤开发了基于FPGA的光栅光调制器驱动控制系统,搭建了相应的实验系统,测试了器件的动、静态特性参数;从原理上验证了器件全开关、扫描选通以及哈达玛编码模式的光调制功能。
MOEMS (Micro-Opto-Electro-Mechanical Systemsis) is an important research area of MEMS technology which has the advantages of low cost, high integrated and reliable. MOEMS-based micro spectrometer has become one of the main development trend in the field of spectroscopy. In this thesis, the technologies of micro spectroscopy-specific Grating Light Modulator (GLM) have been studied, which has importanr scientific significance and pratical value.
On the basis of comparative analyze of some typical MOEMS light modulators, a novel Grating Light Modulator is presented with the advantages of simple structure, low drive voltage. More than that, it also can realize the modulation of Hadamard Transform. By establishing the elecromechanical model, the optical characteristics and electromechanical behavior of the GLM were studied. The parameters and structure were designed, and the simulation had been taken for finite element method analyzes by using professional software. The work of fabricate processes were also completed. The FPGA-based drive control system for GLM array was accomplished. According building the experimental platform, the device testing experiment was taken, and modulate functions were demonstrated.
The main work of this thesis is as following:
①Through comparative analyze, the operating principles of many kinds of MOEMS-based light modulators were summarizied. A novel Grating Light Modulator for micro spectroscopy was presented.
②The principle of GLM was introduced. The optical characteristics was anlayized by adoping scalar diffraction theory.By building a mathematic model, electromechanical characters were studied.
③On the basis of theoretical analysis, the structural parameters were defined. The design of Serpentine flexure and distributed electrodes were adopted The simulation had been taken for finite element method analyzes by Coventor Ware.
④With considering actual fabrication technology of CETC No.24, the research of Polysilicon process was explored, and the problem of Al protect during sacrificial etching was also studied. Finally the GLM was fabricated by Al process.
⑤The FPGA-based drive control system for GLM array was developed. According building the experimental platform, some relative parameters were verified, and the light modulation functions were demonstrated.
本论文在分析总结国内外几种典型MOEMS光调器的基础上,提出了一种结构简单、驱动电压低、又具有哈达玛变换功能的MOEMS光栅光调制器,建立了相应的等效模型;研究了光栅光调制器的光、机、电特性;确定了器件结构参数,进行了器件仿真分析,完成了器件的工艺流程设计及加工流片;开发了基于FPGA的器件驱动控制系统,进行了原理器件的参数测试与功能实验验证。主要研究工作是:
①在对比分析国内外MOEMS光调制器件工作特点的基础上,针对微小型光谱仪的需求,提出了一种MOEMS光栅光调制器新结构;
②阐述了MOEMS光栅光调制器的工作原理,基于标量光学理论进行了MOEMS光栅光调制器的光学特性理论分析,建立了器件的等效机电模型,研究了器件的静态、动态机电特性;
③确定了MOEMS光栅光调制器的结构参数,完成了基于曲折梁、分布式电极等结构设计;采用Coventor Ware专业软件对器件进行了有限元仿真;
④基于中电24所的加工工艺规范,开展了多晶硅结构工艺流程以及基于Al膜保护的牺牲层释放工艺研究;确定了Al膜结构的光栅光调制器工艺流程并进行了加工流片;
⑤开发了基于FPGA的光栅光调制器驱动控制系统,搭建了相应的实验系统,测试了器件的动、静态特性参数;从原理上验证了器件全开关、扫描选通以及哈达玛编码模式的光调制功能。
MOEMS (Micro-Opto-Electro-Mechanical Systemsis) is an important research area of MEMS technology which has the advantages of low cost, high integrated and reliable. MOEMS-based micro spectrometer has become one of the main development trend in the field of spectroscopy. In this thesis, the technologies of micro spectroscopy-specific Grating Light Modulator (GLM) have been studied, which has importanr scientific significance and pratical value.
On the basis of comparative analyze of some typical MOEMS light modulators, a novel Grating Light Modulator is presented with the advantages of simple structure, low drive voltage. More than that, it also can realize the modulation of Hadamard Transform. By establishing the elecromechanical model, the optical characteristics and electromechanical behavior of the GLM were studied. The parameters and structure were designed, and the simulation had been taken for finite element method analyzes by using professional software. The work of fabricate processes were also completed. The FPGA-based drive control system for GLM array was accomplished. According building the experimental platform, the device testing experiment was taken, and modulate functions were demonstrated.
The main work of this thesis is as following:
①Through comparative analyze, the operating principles of many kinds of MOEMS-based light modulators were summarizied. A novel Grating Light Modulator for micro spectroscopy was presented.
②The principle of GLM was introduced. The optical characteristics was anlayized by adoping scalar diffraction theory.By building a mathematic model, electromechanical characters were studied.
③On the basis of theoretical analysis, the structural parameters were defined. The design of Serpentine flexure and distributed electrodes were adopted The simulation had been taken for finite element method analyzes by Coventor Ware.
④With considering actual fabrication technology of CETC No.24, the research of Polysilicon process was explored, and the problem of Al protect during sacrificial etching was also studied. Finally the GLM was fabricated by Al process.
⑤The FPGA-based drive control system for GLM array was developed. According building the experimental platform, some relative parameters were verified, and the light modulation functions were demonstrated.
引文
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