基于直线电机的微细电火花加工系统及其关键技术研究
|
摘要
微小型化是现代工业产品一个非常重要的发展方向。微细电火花加工技术因其非接触加工、材料适应性广、没有宏观作用力等优点,在微小零件的加工中具有独特的优势。微细电火花加工方法不仅能加工微细轴、微细孔、微细槽等简单结构,还能加工复杂形状的微小三维零件。微细电火花加工技术目前已经成为微细加工领域一个非常重要的研究方向,受到国内外学者的广泛重视。
精密的微细电火花加工装备是开展微细电火花加工技术研究的基础。国外微细电火花加工机床已进入工业应用和商业销售阶段,但制造费用仍非常昂贵。国内微细电火花加工装备的研制相对落后,而国外的机床对我国严格禁运。因此,自主研制高性能的微细电火花加工装备和相应的加工工艺具有重大的现实意义。
本文首先分析了微细电火花加工的特点及其对加工装备的要求,设计、研制了一套基于直线电机的微细电火花加工系统。该加工系统由机械系统和控制系统两部分组成,机械系统包括直线电机伺服机构、精密旋转主轴、高精度花岗岩机床本体和工作台、微细轴磨削装置等;控制系统包括控制计算机、微能脉冲电源、放电状态检测系统、运动控制器、电机驱动器、CCD机器视觉显微系统等几个部分。
伺服机构及其控制系统是微细电火花加工系统的重要组成部分。本文分析对比了多种伺服机构的性能和优缺点,采用了基于直线电机的伺服机构,提出并实现了基于直线电机的伺服控制策略。该伺服系统具有分辨率高、精度高、速度高、响应快等优点,能够有效提高电火花加工的加工效率、降低电极相对损耗率。
针对微细电火花分层铣削加工,提出了分层策略、电极运动轨迹规划方法、电极损耗补偿策略等,开发了微细电火花铣削加工专用CAM软件,解决了微细电火花铣削加工中的技术难题。
对块电极电火花磨削(Block Electrode Discharge Grinding,简称BEDG)微细轴的方法进行了深入的研究,采用径向进给和轴向进给相结合的方法,加工出直径5μm微细轴。提出了刃口电极电火花磨削(Edge Electrode Discharge Grinding,简称EEDG)微细轴的方法,该方法比线电极磨削(Wire Electrode Discharge Grinding,简称WEDG)方法加工速度快,工艺稳定性好,而且装置简单,操作简单,加工质量好。采用该方法成功地加工出直径3.5μm的微细轴。
进行了大量的微细电火花加工工艺实验,系统研究了电参数、主轴转速和工作液类型对加工效率、电极相对损耗率及工件表面粗糙度的影响,得到一系列工艺规律。在微细电火花加工系统上进行了大量的加工实验,成功地加工出直径8μm的微细孔,宽度为15μm的微细槽、微细梁等结构。利用微细电火花铣削加工专用CAM软件生成的数控代码,在微细电火花加工系统上加工出微细齿轮、微细鼠标等微细三维结构,验证了微细电火花加工系统的微三维结构加工能力和CAM软件的正确性、实用性。
Miniaturization is one of the most important trends of industrial production. Micro electro-discharge machining (EDM) gives it the ability to machine many difficult-to-cut materials. Its unique advantages of non-contact and less-cutting-force are useful in micro machining field. Micro-EDM is not only applied to machining micro-shafts, micro-holes and micro slots, but also to machining 3D micro structures and micro freeform. Therefore, micro-EDM has become one of the most important branches in the field of micro machining and receives worldwide attention.
Precise micro-EDM system is the essential equipment for micro-EDM research. Nowdays, Micro-EDM machines have stepped into the stage of industry application and commercial distribution in some developed countries, whereas, these machines are prohibited goods to our country. Thus, it is urgent for us to develop high performance micro-EDM equipments.
Based on the analysis of the features and the requirement of the equipment of micro-EDM, a set of micro-EDM system based on linear motor is developed. It composed of a mechanical system and a control system. The mechanical system consists of a precise granite body and a worktable, a three-dimensional servo mechanism based on linear motor, a precise rotary spindle and a discharge grinding unit, etc. The control system includes a control computer, a RC pulse generator, a discharge detecting circuitry, a motion controller, motor drivers and a CCD microscopic vision system, etc.
Servo mechanism and its control system play an important role in micro-EDM system. The properties of many types of servo mechanism are discussed, and linear motor is adopted in the micro-EDM system because of its excellent performance of high resolution, high precision, high speed and quick response. The servo mechanism and control system can improve the machining efficiency and decrease relative electrode wear ratio of micro EDM.
As to ED-milling, slicing strategy, arrange method of tool path and method to compensate electrode wear are proposed in this dissertation. A special CAM software package for ED-milling 3D micro structures is developed.
Electrode manufacturing technique is the fundamental of micro-EDM, hence is systematically investigated in the dissertation. Micro shaft with a diameter of 5μm is achieved by block electrode discharge grinding (BEDG). A new tool manufacturing method named edge electrode discharge grinding (EEDG) is presented in this dissertation. EEDG is proved to be more effective than WEDG because of its simple structure, low cost, quick setting, high machining efficiency and good surface quality. Micro shaft with a diameter of 3.5μm is manufactured by using this method.
Extensive processing experiments have been conducted on this micro EDM system. The effect of electrical parameters, spindle speed and dielectric on machining efficiency, relative electrode wear rate and surface roughness has been systematically investigated, and many micro-EDM machining rules have been achieved. A great number of experiments have been carried out on this micro-EDM system, the results show that micro shaft with a diameter of 3.5μm, micro hole with a diameter of 8μm and micro slot and micro slit with a width of 15μm can be obtained steadily. With the aid of the special CAM software package for ED-milling, 3D micro structures such as micro gear, micro mouse are machined on this micro-EDM system. The micro machining capability of this micro-EDM system and the performance of the CAM software packages are verified by these experiments.
精密的微细电火花加工装备是开展微细电火花加工技术研究的基础。国外微细电火花加工机床已进入工业应用和商业销售阶段,但制造费用仍非常昂贵。国内微细电火花加工装备的研制相对落后,而国外的机床对我国严格禁运。因此,自主研制高性能的微细电火花加工装备和相应的加工工艺具有重大的现实意义。
本文首先分析了微细电火花加工的特点及其对加工装备的要求,设计、研制了一套基于直线电机的微细电火花加工系统。该加工系统由机械系统和控制系统两部分组成,机械系统包括直线电机伺服机构、精密旋转主轴、高精度花岗岩机床本体和工作台、微细轴磨削装置等;控制系统包括控制计算机、微能脉冲电源、放电状态检测系统、运动控制器、电机驱动器、CCD机器视觉显微系统等几个部分。
伺服机构及其控制系统是微细电火花加工系统的重要组成部分。本文分析对比了多种伺服机构的性能和优缺点,采用了基于直线电机的伺服机构,提出并实现了基于直线电机的伺服控制策略。该伺服系统具有分辨率高、精度高、速度高、响应快等优点,能够有效提高电火花加工的加工效率、降低电极相对损耗率。
针对微细电火花分层铣削加工,提出了分层策略、电极运动轨迹规划方法、电极损耗补偿策略等,开发了微细电火花铣削加工专用CAM软件,解决了微细电火花铣削加工中的技术难题。
对块电极电火花磨削(Block Electrode Discharge Grinding,简称BEDG)微细轴的方法进行了深入的研究,采用径向进给和轴向进给相结合的方法,加工出直径5μm微细轴。提出了刃口电极电火花磨削(Edge Electrode Discharge Grinding,简称EEDG)微细轴的方法,该方法比线电极磨削(Wire Electrode Discharge Grinding,简称WEDG)方法加工速度快,工艺稳定性好,而且装置简单,操作简单,加工质量好。采用该方法成功地加工出直径3.5μm的微细轴。
进行了大量的微细电火花加工工艺实验,系统研究了电参数、主轴转速和工作液类型对加工效率、电极相对损耗率及工件表面粗糙度的影响,得到一系列工艺规律。在微细电火花加工系统上进行了大量的加工实验,成功地加工出直径8μm的微细孔,宽度为15μm的微细槽、微细梁等结构。利用微细电火花铣削加工专用CAM软件生成的数控代码,在微细电火花加工系统上加工出微细齿轮、微细鼠标等微细三维结构,验证了微细电火花加工系统的微三维结构加工能力和CAM软件的正确性、实用性。
Miniaturization is one of the most important trends of industrial production. Micro electro-discharge machining (EDM) gives it the ability to machine many difficult-to-cut materials. Its unique advantages of non-contact and less-cutting-force are useful in micro machining field. Micro-EDM is not only applied to machining micro-shafts, micro-holes and micro slots, but also to machining 3D micro structures and micro freeform. Therefore, micro-EDM has become one of the most important branches in the field of micro machining and receives worldwide attention.
Precise micro-EDM system is the essential equipment for micro-EDM research. Nowdays, Micro-EDM machines have stepped into the stage of industry application and commercial distribution in some developed countries, whereas, these machines are prohibited goods to our country. Thus, it is urgent for us to develop high performance micro-EDM equipments.
Based on the analysis of the features and the requirement of the equipment of micro-EDM, a set of micro-EDM system based on linear motor is developed. It composed of a mechanical system and a control system. The mechanical system consists of a precise granite body and a worktable, a three-dimensional servo mechanism based on linear motor, a precise rotary spindle and a discharge grinding unit, etc. The control system includes a control computer, a RC pulse generator, a discharge detecting circuitry, a motion controller, motor drivers and a CCD microscopic vision system, etc.
Servo mechanism and its control system play an important role in micro-EDM system. The properties of many types of servo mechanism are discussed, and linear motor is adopted in the micro-EDM system because of its excellent performance of high resolution, high precision, high speed and quick response. The servo mechanism and control system can improve the machining efficiency and decrease relative electrode wear ratio of micro EDM.
As to ED-milling, slicing strategy, arrange method of tool path and method to compensate electrode wear are proposed in this dissertation. A special CAM software package for ED-milling 3D micro structures is developed.
Electrode manufacturing technique is the fundamental of micro-EDM, hence is systematically investigated in the dissertation. Micro shaft with a diameter of 5μm is achieved by block electrode discharge grinding (BEDG). A new tool manufacturing method named edge electrode discharge grinding (EEDG) is presented in this dissertation. EEDG is proved to be more effective than WEDG because of its simple structure, low cost, quick setting, high machining efficiency and good surface quality. Micro shaft with a diameter of 3.5μm is manufactured by using this method.
Extensive processing experiments have been conducted on this micro EDM system. The effect of electrical parameters, spindle speed and dielectric on machining efficiency, relative electrode wear rate and surface roughness has been systematically investigated, and many micro-EDM machining rules have been achieved. A great number of experiments have been carried out on this micro-EDM system, the results show that micro shaft with a diameter of 3.5μm, micro hole with a diameter of 8μm and micro slot and micro slit with a width of 15μm can be obtained steadily. With the aid of the special CAM software package for ED-milling, 3D micro structures such as micro gear, micro mouse are machined on this micro-EDM system. The micro machining capability of this micro-EDM system and the performance of the CAM software packages are verified by these experiments.
引文
1王振龙.微细加工技术.国防工业出版社. 2005:1~16
2苑伟政,马炳和.微机械与微细加工技术.西北工业大学出版社. 2000:1~12
3林忠华,胡国清,刘文艳.微机电系统的发展及其应用.纳米技术与精密工程. 2004, 2(2): 117~123
4段润保,赵砚江,毛言理.微机械(MEMS)与微细加工技术.河北理工学院学报. 2004, 26(2): 34~40
5潘洋宇,李迎,王拴虎.微型机械技术和应用前景.兵工自动化. 2003,22(5):12~14
6 Xi-Qing Sun, T. Masuzawa, M. Fujino. Micro Ultrasonic Machining and its applications in MEMS. Sensors and Actuators A, 1996,57:159~164
7段润保,赵砚江,毛言理.微机械(MEMS)与微细加工技术.河北理工学院学报. 2004,26(2):34~40
8赵慧,韩俊伟,张尚盈等.六自由度并联机器人动力学分析和计算.济南大学学报(自然科学版). 2003,17(2):114~117
9温诗柱,李娜.微型机械与纳米机械学研究.中国机械工程. 1996,7(2):17~21
10洪永强,蒋红霞.微电子机械系统及微机械加工工艺.电子加工工艺. 2003,24(5):185~188
11潘洋宇,李迎,王拴虎.微型机械技术和应用前景.兵工自动化. 2003,22(5):12~14
12林忠华,胡国清,刘文艳.微机电系统的发展及其应用.纳米技术与精密工程. 2004,2(2):117~123
13王琪民.微型机械导论.中国科学技术大学出版社, 2003:1~53
14段润保,赵砚江,毛言理.微机械(MEMS)与微细加工技术.河北理工学院学报. 2004,26(2):34~40
15 http://www.mmc.or.jp/info/magazine/14e/act/14/fan1.htm. Web page of Micromachine Center
16孙雅洲,梁迎春,董申.微小型化机床的研制.哈尔滨工业大学学报. 2005,37(5):591~593
17孙雅洲,张庆春,高强,梁迎春.微细铣削毛刺形成研究.现代制造工程.2006,(4):69~72
18孙雅洲,王蕊,陈时锦,程凯,梁迎春.微型机床的结构动态特性分析.机械设计与制造. 2005,(1):94~95
19 Chris J Morgan, R Ryan Vallance, Eric R Marsh. Micro Machining Glass with Polycrystalline Diamond Tools Shaped by Micro Electro Discharge Machining. Journal of Micromechanics and Microengineering. 2004,(14):1687~1692
20 Eckart Uhlmann, Sascha Piltz, Kai Schauer. Micro Milling of Sintered Tungsten–copper Composite Materials. Journal of Materials Processing Technology. 2005,(167):402~407
21 W. Wang, S.H. Kweon, S.H. Yang. A Study on Roughness of the Micro-end-milled Surface Produced by a Miniatured Machine Tool. Journal of Material Processing Technology. 2005,(162~163):702~708
22 M.T. Zaman, A. Senthil Kumar, M. Rahman, S. Sreeram. A Three-Dimensional Analytical Cutting Force Model for Micro End Milling Operation. International Journal of Machine Tool & Manufacture. 2006, (460):353~366
23 Chee Keong Ng, Shreyes N. Melkote, M. Rahmanb, A. Senthil Kumar. Experimental Study of Micro- and Mano- Scale Cutting of Aluminum 7075-T6. International Journal of Machine Tool & Manufacture. 2006, (46):929~936
24 M. Tanaka. Development of Desktop Machining Microfactory. RIKEN Review, 2001,(34):46~49
25 Z. Lu, Takeshi Yoneyama. Micro Cutting in the Micro Lathe Turning System. International Journal of Machine Tools & Manufacutre. 1999,(39):1171~1183
26贾宝贤,王振龙,赵万生.微细切削加工与微机械制造.机床制造. 2003, 41(8): 7~11
27 E W Becher, W Ehrfeld, P Hagmann, et al. Fabrication of Microstructures with High Aspect Ratios and Great Structural Height by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding ( LIGA Process ) . Microelectronic Engineering. 1986,(2):232~256
28 Laurence Singleton, Peter Detemple, Holger Lowe. Variants of the LIGA Technology for the Production of Plastic Microcomponents. Proceeding of SPIE. 2003,(4945):112~121
29 Laurence Singleton, Peter Detemple, Ines Frese, et al. Plastic Micro-optical Components with the LIGA Technology. Proceeding of SPIE. 2003,(4984):29~37
30 Wenmin Qu, Christian Wenzel, Gerald Gerlach. Fabrication of a 3D Differential-capacitive Acceleration Sensor by UV-LIGA. Sensors and Actuators. 1999,(77):14~20
31 F. Munnik, F. Benninger, S. Mikhailov, et al. High Aspect Ratio, 3D Structuring of Photoresist Materials by Ion Beam LIGA. Microelectronic Engineering. 2003,(67~68):96~103
32 L. Tunna, W. O’Neill, A. Khan, et al. Analysis of Laer Micro Drilled Holes Through Aluminium for Micro-manufacturing Applications. Optics and Lasers in Engineering. 2005,(43):937~950
33 V. Lendraitis, M. Brikas, V. Snitka, et al. Fabrication of Actuator for Nanopositioning Using Laser Micro-machining. Microelectronic Engineering. 2006,(83):1212~1215
34 C.S. Lim, M.H. Hong, A. Senthil Kumar, et al. Fabrication of Concave Micro Lens Array Using Laser Patterning and Isotropic Etching. International Journal of Machine Tools & Manufacture. 2006,(46):552~558
35 W. Perrie, A. Rushton, M. Gill, et al. Femtosecond Laser Micro-structuring of Alumina Ceramic. Applied Surface Science. 2005,(248):213~217
36 Sandra Zoppel, Maria Farsari, Robert Merz, et al. Laser Micro Machining of 3C-SiC Single Crystals. Microelectronic Engineering. 2006,(83):1400~1402
37 Peter Heryl, Thomas Olschewski, Roelof W. Wijnaendts. Manufacturing of 3D Structures for Micro-tools Using Laser Ablation. Microelectronic Engineering. 2001,(57~58):775~780
38 Mark Heaton. Laser Machining for Smooth Continuous 3-D Contouring for Micro Airflow Blades. Proc. of SPIE, 2003,(5824):216~223
39 Kock M, Kirchner V, Schuster R. Electrochemical micromachining with ultrashort voltage pulses versatile method with lithographical precision. Electrochimica Acta. 2003,48:3213~3219
40 Se Hyun Ahn, Shi Hyoung Ryu, Deok Ki Choi, Chong Nam Chu. Electro-chemical Micro Drilling Using Ultra Short Pulses. Precision Engineering. 2004,(28):129~134
41 D Zhu, K Wang, J M Yang. Design of electrode profile in electrochemical manufacturing process. CIRP Annals 2003, 52(1)169~172
42 Y.J Xue, D. Zhu, F. Zhao. Electrodeposition and mechanical properties of Ni-La2O3 nanocomposites. Journal of Materials Science, 2004, 39: 4063-4066
43 X.H. Li, Z.L. Wang, W.S. Zhao. Research on Electrochemical Micromachining System and Related Techniques. Key Engineering Materials. 2006,(315-316):731~735
44李小海.微细电解加工系统及其工艺技术研究.哈尔滨工业大学博士学位论文. 2006:81~100
45 K.P. Rajurkar, Z.Y. Wang, A. Kuppattan. Micro Removal of Ceramic Material (Al2O3) in the Precision Ultrasonic Machining. Precision Engineering. 1999,(23):73~78
46 Deng Jianxin, Lee Taichiu. Ultrasonic Machining of Alumina-based Ceramic Composites. Journal of the European Ceramic Society. 2002,(22):1235~1241
47 K. Egashira, K. Mizutani and T. Nagao. Ultrasonic Vibration Drilling of Microholes in Glass. Annals of the CIRP. 2002,51(1):339~342
48 X. Q. Sun, T. masuzawa, M. Fujino. Micro. Ultrasonic and Self-Aligned Multilayer Machining/Assembly Technologies for 3Dmicromachines. IEEE. 1996,(124):312~317
49 Z.Y. Yu, K.P. Rajurkar, A. Tandon. Study of 3D Micro-ultrasonic Machining. Journal of Manufacturing Science and Engineering. 2004, (126):727~732
50 K.H. Ho, S.T. Newman, S. Rahimifard, et al. State of the Art in Wire Electrical Discharge Machining (WEDM). International Journal of Machine Tools & Manufacture. 2004,(44):1247~1459
51 Yunn-Shiuan Liao, Shun-Tong Chen, Chang-Sheng Lin. Development of a High Precision Tabletop Versatile CNC Wire-EDM for Making Intricate Micro Parts. Journal of Micromechanics and Microengineering. 2005,(15):245~253
52 J. Wang, B. Ravami. Computer Aided Contouring Operation for Traveling Wire Electric Discharge Machining (EDM). Computer-Aided Design. 2003,(35):925~934
53 F. Klocke, D. Lung, D. Thomaidis, et al. Using Ultra Thin Electrodes to Produce Micro-parts with Wire-EDM. Journal of Materials Processing Technology. 2004,(149):579~584
54 Mu-Tian Yan, Pin-Hsum Huang. Accuracy Improvement of Wire-EDM by Real-time Wire Tension Control. International Journal of Machine Tools &Manufacture. 2004,(44):807~814
55 Mu-Tian Yan, Chen-Wei Huang, Chi-Cheng Fang, et al. Development of a Prototype Micro-Wire-EDM Machine. Journal of Materials Processing Technology. 2004,(149):99~105
56 AN Lu-ling, WANG Wei, ZHOU Lai-shui, et al. Four-axis Wire-EDM Simulation of Complicated Models. Transactions of Nanjing University of Aeronautics & Astronautics. 2005,22(4):322~328
57 Heeren Paul-Henri's, Reynaerts Dominiek, Van Brussel Hendrik . Micro-Structuring of Silicon by Electro-discharge Machining (EDM) - part I: Theory.Sensors and Actuators, A: Physical.1997,60(5):212~218
58 T. Masuzawa, M. Fujino, K. Kobayashi.Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34(1):431~434
59汤泽隆,真柄卓司,今井祥人,左藤达志.小徑電极を用いた微細创成放電加工(第2报).型技術. 1997,12(8):104~105
60真柄卓司,汤泽隆.微細创成放電加工技术の开発.型技術. 1996,11(5):78~84
61汤泽隆,真柄卓司.小徑電极を用いた微細创成放電加工(第2报).型技術. 1997,12(8):104~105
62 Song Xiaozhong, Reynaerts Dominiek, Meeusen Wim, Brussel Hendrik. Investigation of Micro-EDM for Silicon Microstructure Fabrication. Society of Photo-Optical Instrumentation Engineers. 1999, 3(3680):792~799
63 Ehrfeld Wolfgang, Lehr Heinz, et al. Microelectro Eischarge Machining as a Technology in Micromachining. Proceedings of SPIE - The International Society for Optical Engineering. 1996,2879(10):332~337
64 H. M. Chow, B. H. Yan, F. Y .Huang. Micro Slit Machining Using Electro-Discharge Machining with a Modified Disk Electrode (RDM). Journal of Materials Processing Technology. 1999,(91):161~166
65 Jing-Dae Huang, Chia-Lung Kuo. Pin-plate Micro Assembly by Integrating Micro-EDM and Nd-YAG Laser. International Journal of Machine Tools & Manufacture. 2004,(24):1455~1464
66 J. Schmidt, J. Fleischer, M. Knoll, Electrodes for Micro-EDM, in: Proceedings of the EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment. Paris. 2003:177~179
67 G. Cusanelli, A. Hessler-Wyser, F. Bobard, R. Demellayer, R. Perez. Microstructure at Submicron Scales of the White Layer Produced by EDM Technique. Journal of Materials Processing Technology. 2004,(149):280~295
68 Chien-Cheng Liu. Microstructure and Tool Electrode Erosion in EDMed of TiN/Si3N4 Composites. Materials Science and Engineering. 2003,(A363):221~227
69 Jun Qu, Laura Riester, Albert J. Shih, Ronald O. Scattergood. Nanoindentation Characterization of Surface Layers of Electrical Discharge Machined WC-Co. Materials Science and Engineering. 2003,(A344):125~131
70 D.T. Pham, S.S. Dimov, S. Bigot, A. Ivanov, K. Popov. Micro-EDM——Recent Developments and Research Issues. Journal of Materials Processing Technology. 2004,(149):50~57
71 K.H. Ho, S.T. Newman, State of the Art Electrical Discharge Machining (EDM). International Journal of Machine Tools & Manufacture. 2003,(43): 1287~1300
72刘晋春,赵家齐,赵万生.特种加工.机械工业出版社, 2004:1~3
73 Mohri N, Saito N, Higashi M. A New Process of Finish Machining on Free Surface by EDM Methods. Annals of the CIRP. 1991, 40(1):207～210
74 P. Pecas, E. Henriques. Influence of Silicon Powder-mixed Dielectric on Conventional Electrical Discharge Machining. International Journal of Machine Tools & Manufacture. 2003,(43):1465~1471
75 H.K. Kansal, Sehijpal Singh, P. Kumar. Parametric Optimization of Powder Mixed Electrical Eischarge Machining by Response Surface Methodology. Journal of Materials Processing Technology. 2005,(169):427~436
76 Tzeng Yih-fong, Chen Fu-chen. Investigation into Some Surface Characteristics of Electrical Discharge Machined SKD-11 Using Power-Suspension Dielectric Oil. Journal of Materials Processing Technology. 2005,(170):385~391
77 F. Klocke, D. Lung, G. Antonoglou, et al. The Effects of Powder Suspended Dielectrics on the Thermal Influenced Zone by Electro Discharge Machining with Small Discharge Energies. Journal of Materials Processing Technology. 2004,(149):191~197
78国枝正典,吉田政弘.気中放電加工.精密工学会誌 . 1998,64(12):1735~1738
79 ZhanBo Yu, Takahashi Jun, Kunieda Masanori. Dry Electrical Discharge Machining of Cemented Carbide. Journal of Materials Processing Technology. 2004, 149:353~357
80 B.Y. Zhang, J. Takahashi, M. Kunieda. Dry Electrical Discharge Machining of Cemented Carbide. Journal of Materials Processing Technology. 2004,(149):353–357.
81 M. Kunieda, Y. Miyoshi, T. Takaya, N. Nakajima, Yu ZhanBo, M. Yoshida. High Speed 3D Milling by Dry EDM. Annals of the CIRP. 2003,52(1):147~150
82鈴木正彦,毛利尚武,齋藤長男.放電加工による金属表面の改質.精密工学会誌. 1987,53(2):243~247
83 Z.L.Wang, Y.Fang, P.N.Wu, W.S.Zhao, K.Cheng. Surface Modification Process by Electrical Discharge Machining with Ti Powder Green Compact Electrode. Journal of Materials Processing Technology. 2002,129(11):139~142
84 Z.L. Wang, Y. Fang, W.S. Zhao, K.Cheng. A Surface Modification Method by Using EDM. Key Engineering Materials. 2004,(259-260):592-595
85 W.S. Zhao, Y. Fang, Z.L. Wang, L.H.Li. A Surface Modification Method by EDM and Its Application to Cutting Tools. Materials Science Forum. 2004,(471-472):750~754
86 N. Mohri, Y. Fukuzawa, T. Tani, N. Saito, K. Furutani. Assisting Electrode Method for Machining Insulating Ceramics. Annals of the CIRP. 1996, 45(1): 201~204
87 N. Mohri, Y. Fukusima, Y. Fukuzawa, T. Tani, N. Saito. Layer Generation Process on Work-piece in Electrical Discharge Machining. Annals. of CIRP. 2003,53(1):151~154
88 Apiwat Muttamara, Yasushi Fukuzawa, Naotake Mohri, Takayuki Tani. Probability of Precision Micro-machining of Insulating Si3N4 Ceramics by EDM. Journal of Materials Processing Technology. 2003,(140):243~247
89 Fukuzawa Y, Tani T, Mohri N. Micro Hole Electrical Discharge Machining on Insulating Ceramics with Pipe Electrode. International Journal of Electrical Machining. 2003(8):57~61
90 C. Diver, J. Atkinson, H.J. Helml, L. Li. Micro-EDM Drilling of Tapered Holes for Industrial Applications. Journal of Materials Processing Technology. 2004,(149):296~303
91 Chia-Lung Kuo, Jing-Dae Huang. Fabrication of Series-pattern Micro-disk Electrode and Its Application in Machining Micro-slit of Less Than 10μm. International Journal of Machine Tool & Manufacture. 2004,(44):545~553
92 Feng-Tsai Weng, R.F. Shyu, Chen-siang Hsu. Fabrication of Micro-Electrodes by Multi-EDM Grinding Process. Journal of Materials Processing Technology. 2003,(140):332~334
93 Junfeng Bao, Zhonghui Cao, Ye Yuan, et al. A Non-silicon Micro-machining Based Scalable Fiber Optic Switch. Sensors and Actuators. 2004,(A116):209~214
94 H.S. Lim, Y.S. Wong, M. Rahman, et al. A study on the Machining of High Aspect Ratio Micro-structures Using Micro-EDM. Journal of Materials Processing Technology. 2003,(140):318~325
95 T. Masuzawa, M. Fujino, K. Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34(1):431~434
96増沢隆久,山本正樹,藤野正俊.ワイヤ放電研削法とEDMを用いたマイクロ打拔きシステム.機械技術. 1989, 37(5):37~41
97 T. Masuzawa, M. Yamamoto, M. Fujino. A Micropunching System Using Wire-EDG. Proceedings of ISEM. 1989:86~89
98 T. Masuzawa, M. Fujino and K. Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34(1):431~434
99 K. Kawata, T. Masaki, T. Sato T. Masuzawa. Accuracy of Micro Electro Discharge Machining. Proceedings of International Conference on Precision Engineering’97. Tapei. 1997:597~602
100 T. Masuzawa. State of the Art of Micromachining. Annals of the CIRP. 2000,49(2):473~488
101 K. Egashira, T. Masuzawa, M. Fujino, X. Q. Sun. Application of USM to Micromachining by on-the-Machine Tool Fabrication. International Journal of Electrical Machining. 1997,(2):31~36
102 K. Egashira, T. Masuzawa. Microultrasonic Machining by the Application of Workpiece Vibration. Annals of the CIRP. 1999,48(1):131~134
103 J. Fleischer, T. Masuzawa, J. Schmidt, M. Knoll. New Applications for Micro-EDM. Journal of Materials Processing Technology. 2004,(149):246~249
104 Choo J H, Yeo S H, Tan F F. Flexible Tooling for Localized ElectrochemicalDeposition with Wire Electro Discharge Grinding. Microsystem Technologies. 2004,(10):127~136
105贾宝贤,胡富强,王振龙,等.线电极电火花磨削技术在微细加工中的应用.电加工与模具. 2006,(增刊):22~25
106 Nachiappan Ravi, Xue Chuan. The Effects of Electro-discharge Machining Block Electrode Method for Microelectrode. Journal of micromechanics and microengineering. 2002,(12):532~540
107 Nachiappan Ravi, Han Huang. Fabrication of Symmetrical Section Microfeatures Using the Electro-discharge Machining Block Electrode Method. Journal of micromechanics and microengineering. 2002,(12):905~910
108 W.S. Zhao, B.X. Jia, Z.L. Wang, etc. Study on Block Electrode Discharge Grinding of Micro Rods. Key Engineering Materials. 2006,(304~305):201~205
109贾宝贤,王振龙,赵万生.用块电极轴向进给法电火花磨削微细轴.电加工与模具. 2004(2):26~29
110 Mohri N., Takezawa H., Furutani K., Ito Y., Sata T. A New Process of Additive and Removal Machining by EDM with a Thin Electrode. Annals of the CIRP. 2000,49(1):123~126
111曹国辉,王振龙,迟关心,郭永丰,赵万生.基于单脉冲放电的钨微细电极快速成形方法及其应用研究.机械工程学报. 2003,39(7):43~47
112 W.S. Zhao, G.H. Cao, Z.L. Wang and G.X. Chi. Primary Study on Instantaneous Fabricating Mechanism of Tungsten Microelectrode Based on Single Discharge and Its Application. Key Engineering Materials. 2004,(259-260):496~501
113 Minoru Yamazaki, Takemi Suzuki, Noritoshi Mori, Masanori Kunieda, EDM of Micro-rods by Self-drilled Holes. Journal of Materials Processing Technology. 2004,(149):134~138
114 Ken’ichi Takahata, Y. B. Gianchandani. Batch Mode Micro-Electro-Discharge Machining. Journal of Microelectromechanical Systems. 2002, (4):102~111
115彭良强,伊福廷,张菊芳.大面积微细结构的电火花加工.航空制造技术. 2002,(5):47~48
116邹丽芸,张院春,彭良强,等.基于LIGA技术的微细电火花加工优化研究.电加工与模具. 2004,(增刊):39~41
117彭良强.基于LIGA技术的微细电火花加工.机器工人. 2004,(1):26~28
118 Kai Egashira, Katsumi Mizutani. EDM at Low Open-Circuit Voltage. Journal of the Japan Society of Electrical Machining Engineers. 2003,37(85):18~23
119李文卓.微细电火花加工系统及其相关技术的研究.哈尔滨工业大学博士论文. 2002:68~72
120早川伸哉, ORI Ricardo Itiro,糸魚川文広,中村隆,松原十三生.微細放電付着加工による3次元形状創成法.精密工学会誌. 2000,66(12):1943~1947
121 Shinya Hayakawa, Ricardo Itiro Ori, Fumihiro Itoigawa, Takashi Nakamura, Tomio Matsubara. Fabrication of Microstructure Using EDM Deposition. ISEM XIIΙ. Bibao, 2001:783~793
122曹国辉,金柏冬,肖凯,等.空气中微细电火花沉积铜合金工艺方法.南京航空航天大学学报. 2005,37(增刊):77~80
123金柏冬,曹国辉,王振龙,等.空气中微细电火花沉积的工艺规律研究.中国机械工程. 2006,17(2):111~115
124刘志新.空气中电火花沉积与去除加工方法及其实验研究.哈尔滨工业大学硕士论文. 2004:16~28
125曹国辉.基于脉冲放电的若干微细加工方法及试验的研究.哈尔滨工业大学博士学位论文. 2004:19~33
126 Yu ZY, Masuzawa T, Fujino M. Micro-EDM for Three-dimensional Cavities Development of Uniform Wear Method. Annals of the CIRP 1998,47(1):169–172
127 Yu Zuyuan. Three Dimensional Micro-EDM Using Simple Electrodes. Disseration of the University of Tokyo. 1997,(352):149~155
128赵万生,王振龙,郭东明.国外特种加工技术的最新进展.电加工. 1999, (5):12~19
129 Zuyuan Yu,Takahisa Masuzawa,Masatoshi Fujino.3D Micro-EDM with Simply Shaped Electrode.Annals of the CIRP.1997,46(1):1~8
130 G. Thornell and S. Johansson. Microprocessing at the Fingertips. Journal of Micromechanics and microengineering. 1998,(8):251~262
131 K. Takahata, S. Aoki. Fine Surface Finishing Method for 3-Dimensional Micro Structures. MEMS’96. 1996:73~78
132 R. Dominiek, M. Wim, V. B. Hendrik. Production of Seismic Mass Suspensions in Silicon by Electro-Discharge Machining. Journal of Micromechanics and Microengineering. 1999,(9): 206~210
133 R. Dominiek, V. B. Hendrik, M. Wim. A Review on Micro Electro-Discharge Machining of Metal and Silicon. Proceedings of 1st EUPEN Conference, Bremen.1999:24~31
134 X. Song, R. Dominiek, M. Wim, B. Hendrik. Investigation of Micro-EDM for Silicon Microstructure Fabrication. Society of Photo-Optical Instrumentation Engineers. 1999,3680(3):792~799
135张勇.微细电火花加工系统及其工艺技术的研究.哈尔滨工业大学博士学位论文. 2004:48~77
136 http://www.mech.kuleuven.ac.be/pma/research/mpe/default_en.phtml Web-pages of Leuven University
137 J. Stampfl, R. Leitgeb, Y. Cheng, et al. Electro-Discharge Machining of Mesoscopic Parts with Electroplated Copper and hot-pressed Silver Tungsten Electrodes. Journal of Micromechanics and microengineering. 2000,(10): 1~6
138 Y. Cheng, J. Stampfl. Additive/Subtractive Material Processing for Mesoscopic Parts. Solid Freeform Fabrication Symposium, Austin, Texas. 1999:1~9
139李文卓.微细电火花加工系统及其相关技术的研究.哈尔滨工业大学博士论文. 2002:68~72
140 http://www.mech.kuleuven.ac.be/pma/research/mpe/default_en.phtml. Web-pages of Leuven University
141 http://www.sarix.com/sx100_e.htm. Web-pages of Sarix company
142 M. Rahman, H.S. Lim, K.S. Neo, A. Senthil Kumar. Tool-based Nanofinishing and Micromachining. Journal of Materials Processing Technology. 2006,(160):1~15
143 H.S. Lim, Y.S. Wong, M. Rahman, M.K. Edwin Lee. A Study on the Machining of High Aspect Ratio Micro-stuctrues Using Micro-EDM. Journal of Materials Processing Technology. 2003,(140):18~325
144 Ivano Beltrami, Cedric Joseph, Reymond Clavel, et al. Micro- and Nano Electric-discharge Machining. Journal of Materials Processing Technology. 2004,(149):263~265
145 T. Kurita, M. Hattori. Development of New-concept Desk Top Size Machine Tool. International Journal of Machine Tool & Manufacture. 2005,(45):959~965
146宋小中,刘正勋,高长水,等.电致伸缩型电火花微细加工伺服系统的研究.电加工.1995,(3):7~11
147 Yong Li, Min Guo, Zhaoying Zhou, Min Hu. Micro Electro Discharge Machine with an Inchworm Type of Micro Feed Mechanism. Precision Engineering. 2002, 26: 7~14
148李勇.蠕动式压电/电致伸缩微进给定位机构的研究进展.中国机械工程. 1999,10(12):1410~1412
149 W.S. Zhao, Y. Zhang, Z.L. Wang, B.X. Jia, F.Q. Hu, Z.Y. Li. Research On a Micro EDM Equipment and Its Application. Key Engineering Materials. 2004,(259-260):567~571
150张勇,王振龙,李志勇,杨洋,贾宝贤,胡富强,赵万生.微细电火花加工装置关键技术研究.机械工程学报. 2004,(9):175~179
151张勇,王振龙,胡富强,赵万生.微细电火花加工装置的设计与应用.微细加工技术. 2004,(6):55~59
152 B.X. Jia, Z.L. Wang, F.Q. Hu, X.H. Li, W.S. Zhao. Research on Multifunctional Micro Machining Equipment. Materials Science Forum. 2004, 471~472: 37~42
153杨洋.微细分层电火花加工CAD/CAM研究.哈尔滨工业大学博士学位论文. 2004:19~78
154霍孟友,张建华,艾兴.电火花放电加工间隙状态检测方法综述.电加工与模具. 2003,(3):18~20
2苑伟政,马炳和.微机械与微细加工技术.西北工业大学出版社. 2000:1~12
3林忠华,胡国清,刘文艳.微机电系统的发展及其应用.纳米技术与精密工程. 2004, 2(2): 117~123
4段润保,赵砚江,毛言理.微机械(MEMS)与微细加工技术.河北理工学院学报. 2004, 26(2): 34~40
5潘洋宇,李迎,王拴虎.微型机械技术和应用前景.兵工自动化. 2003,22(5):12~14
6 Xi-Qing Sun, T. Masuzawa, M. Fujino. Micro Ultrasonic Machining and its applications in MEMS. Sensors and Actuators A, 1996,57:159~164
7段润保,赵砚江,毛言理.微机械(MEMS)与微细加工技术.河北理工学院学报. 2004,26(2):34~40
8赵慧,韩俊伟,张尚盈等.六自由度并联机器人动力学分析和计算.济南大学学报(自然科学版). 2003,17(2):114~117
9温诗柱,李娜.微型机械与纳米机械学研究.中国机械工程. 1996,7(2):17~21
10洪永强,蒋红霞.微电子机械系统及微机械加工工艺.电子加工工艺. 2003,24(5):185~188
11潘洋宇,李迎,王拴虎.微型机械技术和应用前景.兵工自动化. 2003,22(5):12~14
12林忠华,胡国清,刘文艳.微机电系统的发展及其应用.纳米技术与精密工程. 2004,2(2):117~123
13王琪民.微型机械导论.中国科学技术大学出版社, 2003:1~53
14段润保,赵砚江,毛言理.微机械(MEMS)与微细加工技术.河北理工学院学报. 2004,26(2):34~40
15 http://www.mmc.or.jp/info/magazine/14e/act/14/fan1.htm. Web page of Micromachine Center
16孙雅洲,梁迎春,董申.微小型化机床的研制.哈尔滨工业大学学报. 2005,37(5):591~593
17孙雅洲,张庆春,高强,梁迎春.微细铣削毛刺形成研究.现代制造工程.2006,(4):69~72
18孙雅洲,王蕊,陈时锦,程凯,梁迎春.微型机床的结构动态特性分析.机械设计与制造. 2005,(1):94~95
19 Chris J Morgan, R Ryan Vallance, Eric R Marsh. Micro Machining Glass with Polycrystalline Diamond Tools Shaped by Micro Electro Discharge Machining. Journal of Micromechanics and Microengineering. 2004,(14):1687~1692
20 Eckart Uhlmann, Sascha Piltz, Kai Schauer. Micro Milling of Sintered Tungsten–copper Composite Materials. Journal of Materials Processing Technology. 2005,(167):402~407
21 W. Wang, S.H. Kweon, S.H. Yang. A Study on Roughness of the Micro-end-milled Surface Produced by a Miniatured Machine Tool. Journal of Material Processing Technology. 2005,(162~163):702~708
22 M.T. Zaman, A. Senthil Kumar, M. Rahman, S. Sreeram. A Three-Dimensional Analytical Cutting Force Model for Micro End Milling Operation. International Journal of Machine Tool & Manufacture. 2006, (460):353~366
23 Chee Keong Ng, Shreyes N. Melkote, M. Rahmanb, A. Senthil Kumar. Experimental Study of Micro- and Mano- Scale Cutting of Aluminum 7075-T6. International Journal of Machine Tool & Manufacture. 2006, (46):929~936
24 M. Tanaka. Development of Desktop Machining Microfactory. RIKEN Review, 2001,(34):46~49
25 Z. Lu, Takeshi Yoneyama. Micro Cutting in the Micro Lathe Turning System. International Journal of Machine Tools & Manufacutre. 1999,(39):1171~1183
26贾宝贤,王振龙,赵万生.微细切削加工与微机械制造.机床制造. 2003, 41(8): 7~11
27 E W Becher, W Ehrfeld, P Hagmann, et al. Fabrication of Microstructures with High Aspect Ratios and Great Structural Height by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding ( LIGA Process ) . Microelectronic Engineering. 1986,(2):232~256
28 Laurence Singleton, Peter Detemple, Holger Lowe. Variants of the LIGA Technology for the Production of Plastic Microcomponents. Proceeding of SPIE. 2003,(4945):112~121
29 Laurence Singleton, Peter Detemple, Ines Frese, et al. Plastic Micro-optical Components with the LIGA Technology. Proceeding of SPIE. 2003,(4984):29~37
30 Wenmin Qu, Christian Wenzel, Gerald Gerlach. Fabrication of a 3D Differential-capacitive Acceleration Sensor by UV-LIGA. Sensors and Actuators. 1999,(77):14~20
31 F. Munnik, F. Benninger, S. Mikhailov, et al. High Aspect Ratio, 3D Structuring of Photoresist Materials by Ion Beam LIGA. Microelectronic Engineering. 2003,(67~68):96~103
32 L. Tunna, W. O’Neill, A. Khan, et al. Analysis of Laer Micro Drilled Holes Through Aluminium for Micro-manufacturing Applications. Optics and Lasers in Engineering. 2005,(43):937~950
33 V. Lendraitis, M. Brikas, V. Snitka, et al. Fabrication of Actuator for Nanopositioning Using Laser Micro-machining. Microelectronic Engineering. 2006,(83):1212~1215
34 C.S. Lim, M.H. Hong, A. Senthil Kumar, et al. Fabrication of Concave Micro Lens Array Using Laser Patterning and Isotropic Etching. International Journal of Machine Tools & Manufacture. 2006,(46):552~558
35 W. Perrie, A. Rushton, M. Gill, et al. Femtosecond Laser Micro-structuring of Alumina Ceramic. Applied Surface Science. 2005,(248):213~217
36 Sandra Zoppel, Maria Farsari, Robert Merz, et al. Laser Micro Machining of 3C-SiC Single Crystals. Microelectronic Engineering. 2006,(83):1400~1402
37 Peter Heryl, Thomas Olschewski, Roelof W. Wijnaendts. Manufacturing of 3D Structures for Micro-tools Using Laser Ablation. Microelectronic Engineering. 2001,(57~58):775~780
38 Mark Heaton. Laser Machining for Smooth Continuous 3-D Contouring for Micro Airflow Blades. Proc. of SPIE, 2003,(5824):216~223
39 Kock M, Kirchner V, Schuster R. Electrochemical micromachining with ultrashort voltage pulses versatile method with lithographical precision. Electrochimica Acta. 2003,48:3213~3219
40 Se Hyun Ahn, Shi Hyoung Ryu, Deok Ki Choi, Chong Nam Chu. Electro-chemical Micro Drilling Using Ultra Short Pulses. Precision Engineering. 2004,(28):129~134
41 D Zhu, K Wang, J M Yang. Design of electrode profile in electrochemical manufacturing process. CIRP Annals 2003, 52(1)169~172
42 Y.J Xue, D. Zhu, F. Zhao. Electrodeposition and mechanical properties of Ni-La2O3 nanocomposites. Journal of Materials Science, 2004, 39: 4063-4066
43 X.H. Li, Z.L. Wang, W.S. Zhao. Research on Electrochemical Micromachining System and Related Techniques. Key Engineering Materials. 2006,(315-316):731~735
44李小海.微细电解加工系统及其工艺技术研究.哈尔滨工业大学博士学位论文. 2006:81~100
45 K.P. Rajurkar, Z.Y. Wang, A. Kuppattan. Micro Removal of Ceramic Material (Al2O3) in the Precision Ultrasonic Machining. Precision Engineering. 1999,(23):73~78
46 Deng Jianxin, Lee Taichiu. Ultrasonic Machining of Alumina-based Ceramic Composites. Journal of the European Ceramic Society. 2002,(22):1235~1241
47 K. Egashira, K. Mizutani and T. Nagao. Ultrasonic Vibration Drilling of Microholes in Glass. Annals of the CIRP. 2002,51(1):339~342
48 X. Q. Sun, T. masuzawa, M. Fujino. Micro. Ultrasonic and Self-Aligned Multilayer Machining/Assembly Technologies for 3Dmicromachines. IEEE. 1996,(124):312~317
49 Z.Y. Yu, K.P. Rajurkar, A. Tandon. Study of 3D Micro-ultrasonic Machining. Journal of Manufacturing Science and Engineering. 2004, (126):727~732
50 K.H. Ho, S.T. Newman, S. Rahimifard, et al. State of the Art in Wire Electrical Discharge Machining (WEDM). International Journal of Machine Tools & Manufacture. 2004,(44):1247~1459
51 Yunn-Shiuan Liao, Shun-Tong Chen, Chang-Sheng Lin. Development of a High Precision Tabletop Versatile CNC Wire-EDM for Making Intricate Micro Parts. Journal of Micromechanics and Microengineering. 2005,(15):245~253
52 J. Wang, B. Ravami. Computer Aided Contouring Operation for Traveling Wire Electric Discharge Machining (EDM). Computer-Aided Design. 2003,(35):925~934
53 F. Klocke, D. Lung, D. Thomaidis, et al. Using Ultra Thin Electrodes to Produce Micro-parts with Wire-EDM. Journal of Materials Processing Technology. 2004,(149):579~584
54 Mu-Tian Yan, Pin-Hsum Huang. Accuracy Improvement of Wire-EDM by Real-time Wire Tension Control. International Journal of Machine Tools &Manufacture. 2004,(44):807~814
55 Mu-Tian Yan, Chen-Wei Huang, Chi-Cheng Fang, et al. Development of a Prototype Micro-Wire-EDM Machine. Journal of Materials Processing Technology. 2004,(149):99~105
56 AN Lu-ling, WANG Wei, ZHOU Lai-shui, et al. Four-axis Wire-EDM Simulation of Complicated Models. Transactions of Nanjing University of Aeronautics & Astronautics. 2005,22(4):322~328
57 Heeren Paul-Henri's, Reynaerts Dominiek, Van Brussel Hendrik . Micro-Structuring of Silicon by Electro-discharge Machining (EDM) - part I: Theory.Sensors and Actuators, A: Physical.1997,60(5):212~218
58 T. Masuzawa, M. Fujino, K. Kobayashi.Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34(1):431~434
59汤泽隆,真柄卓司,今井祥人,左藤达志.小徑電极を用いた微細创成放電加工(第2报).型技術. 1997,12(8):104~105
60真柄卓司,汤泽隆.微細创成放電加工技术の开発.型技術. 1996,11(5):78~84
61汤泽隆,真柄卓司.小徑電极を用いた微細创成放電加工(第2报).型技術. 1997,12(8):104~105
62 Song Xiaozhong, Reynaerts Dominiek, Meeusen Wim, Brussel Hendrik. Investigation of Micro-EDM for Silicon Microstructure Fabrication. Society of Photo-Optical Instrumentation Engineers. 1999, 3(3680):792~799
63 Ehrfeld Wolfgang, Lehr Heinz, et al. Microelectro Eischarge Machining as a Technology in Micromachining. Proceedings of SPIE - The International Society for Optical Engineering. 1996,2879(10):332~337
64 H. M. Chow, B. H. Yan, F. Y .Huang. Micro Slit Machining Using Electro-Discharge Machining with a Modified Disk Electrode (RDM). Journal of Materials Processing Technology. 1999,(91):161~166
65 Jing-Dae Huang, Chia-Lung Kuo. Pin-plate Micro Assembly by Integrating Micro-EDM and Nd-YAG Laser. International Journal of Machine Tools & Manufacture. 2004,(24):1455~1464
66 J. Schmidt, J. Fleischer, M. Knoll, Electrodes for Micro-EDM, in: Proceedings of the EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment. Paris. 2003:177~179
67 G. Cusanelli, A. Hessler-Wyser, F. Bobard, R. Demellayer, R. Perez. Microstructure at Submicron Scales of the White Layer Produced by EDM Technique. Journal of Materials Processing Technology. 2004,(149):280~295
68 Chien-Cheng Liu. Microstructure and Tool Electrode Erosion in EDMed of TiN/Si3N4 Composites. Materials Science and Engineering. 2003,(A363):221~227
69 Jun Qu, Laura Riester, Albert J. Shih, Ronald O. Scattergood. Nanoindentation Characterization of Surface Layers of Electrical Discharge Machined WC-Co. Materials Science and Engineering. 2003,(A344):125~131
70 D.T. Pham, S.S. Dimov, S. Bigot, A. Ivanov, K. Popov. Micro-EDM——Recent Developments and Research Issues. Journal of Materials Processing Technology. 2004,(149):50~57
71 K.H. Ho, S.T. Newman, State of the Art Electrical Discharge Machining (EDM). International Journal of Machine Tools & Manufacture. 2003,(43): 1287~1300
72刘晋春,赵家齐,赵万生.特种加工.机械工业出版社, 2004:1~3
73 Mohri N, Saito N, Higashi M. A New Process of Finish Machining on Free Surface by EDM Methods. Annals of the CIRP. 1991, 40(1):207～210
74 P. Pecas, E. Henriques. Influence of Silicon Powder-mixed Dielectric on Conventional Electrical Discharge Machining. International Journal of Machine Tools & Manufacture. 2003,(43):1465~1471
75 H.K. Kansal, Sehijpal Singh, P. Kumar. Parametric Optimization of Powder Mixed Electrical Eischarge Machining by Response Surface Methodology. Journal of Materials Processing Technology. 2005,(169):427~436
76 Tzeng Yih-fong, Chen Fu-chen. Investigation into Some Surface Characteristics of Electrical Discharge Machined SKD-11 Using Power-Suspension Dielectric Oil. Journal of Materials Processing Technology. 2005,(170):385~391
77 F. Klocke, D. Lung, G. Antonoglou, et al. The Effects of Powder Suspended Dielectrics on the Thermal Influenced Zone by Electro Discharge Machining with Small Discharge Energies. Journal of Materials Processing Technology. 2004,(149):191~197
78国枝正典,吉田政弘.気中放電加工.精密工学会誌 . 1998,64(12):1735~1738
79 ZhanBo Yu, Takahashi Jun, Kunieda Masanori. Dry Electrical Discharge Machining of Cemented Carbide. Journal of Materials Processing Technology. 2004, 149:353~357
80 B.Y. Zhang, J. Takahashi, M. Kunieda. Dry Electrical Discharge Machining of Cemented Carbide. Journal of Materials Processing Technology. 2004,(149):353–357.
81 M. Kunieda, Y. Miyoshi, T. Takaya, N. Nakajima, Yu ZhanBo, M. Yoshida. High Speed 3D Milling by Dry EDM. Annals of the CIRP. 2003,52(1):147~150
82鈴木正彦,毛利尚武,齋藤長男.放電加工による金属表面の改質.精密工学会誌. 1987,53(2):243~247
83 Z.L.Wang, Y.Fang, P.N.Wu, W.S.Zhao, K.Cheng. Surface Modification Process by Electrical Discharge Machining with Ti Powder Green Compact Electrode. Journal of Materials Processing Technology. 2002,129(11):139~142
84 Z.L. Wang, Y. Fang, W.S. Zhao, K.Cheng. A Surface Modification Method by Using EDM. Key Engineering Materials. 2004,(259-260):592-595
85 W.S. Zhao, Y. Fang, Z.L. Wang, L.H.Li. A Surface Modification Method by EDM and Its Application to Cutting Tools. Materials Science Forum. 2004,(471-472):750~754
86 N. Mohri, Y. Fukuzawa, T. Tani, N. Saito, K. Furutani. Assisting Electrode Method for Machining Insulating Ceramics. Annals of the CIRP. 1996, 45(1): 201~204
87 N. Mohri, Y. Fukusima, Y. Fukuzawa, T. Tani, N. Saito. Layer Generation Process on Work-piece in Electrical Discharge Machining. Annals. of CIRP. 2003,53(1):151~154
88 Apiwat Muttamara, Yasushi Fukuzawa, Naotake Mohri, Takayuki Tani. Probability of Precision Micro-machining of Insulating Si3N4 Ceramics by EDM. Journal of Materials Processing Technology. 2003,(140):243~247
89 Fukuzawa Y, Tani T, Mohri N. Micro Hole Electrical Discharge Machining on Insulating Ceramics with Pipe Electrode. International Journal of Electrical Machining. 2003(8):57~61
90 C. Diver, J. Atkinson, H.J. Helml, L. Li. Micro-EDM Drilling of Tapered Holes for Industrial Applications. Journal of Materials Processing Technology. 2004,(149):296~303
91 Chia-Lung Kuo, Jing-Dae Huang. Fabrication of Series-pattern Micro-disk Electrode and Its Application in Machining Micro-slit of Less Than 10μm. International Journal of Machine Tool & Manufacture. 2004,(44):545~553
92 Feng-Tsai Weng, R.F. Shyu, Chen-siang Hsu. Fabrication of Micro-Electrodes by Multi-EDM Grinding Process. Journal of Materials Processing Technology. 2003,(140):332~334
93 Junfeng Bao, Zhonghui Cao, Ye Yuan, et al. A Non-silicon Micro-machining Based Scalable Fiber Optic Switch. Sensors and Actuators. 2004,(A116):209~214
94 H.S. Lim, Y.S. Wong, M. Rahman, et al. A study on the Machining of High Aspect Ratio Micro-structures Using Micro-EDM. Journal of Materials Processing Technology. 2003,(140):318~325
95 T. Masuzawa, M. Fujino, K. Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34(1):431~434
96増沢隆久,山本正樹,藤野正俊.ワイヤ放電研削法とEDMを用いたマイクロ打拔きシステム.機械技術. 1989, 37(5):37~41
97 T. Masuzawa, M. Yamamoto, M. Fujino. A Micropunching System Using Wire-EDG. Proceedings of ISEM. 1989:86~89
98 T. Masuzawa, M. Fujino and K. Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34(1):431~434
99 K. Kawata, T. Masaki, T. Sato T. Masuzawa. Accuracy of Micro Electro Discharge Machining. Proceedings of International Conference on Precision Engineering’97. Tapei. 1997:597~602
100 T. Masuzawa. State of the Art of Micromachining. Annals of the CIRP. 2000,49(2):473~488
101 K. Egashira, T. Masuzawa, M. Fujino, X. Q. Sun. Application of USM to Micromachining by on-the-Machine Tool Fabrication. International Journal of Electrical Machining. 1997,(2):31~36
102 K. Egashira, T. Masuzawa. Microultrasonic Machining by the Application of Workpiece Vibration. Annals of the CIRP. 1999,48(1):131~134
103 J. Fleischer, T. Masuzawa, J. Schmidt, M. Knoll. New Applications for Micro-EDM. Journal of Materials Processing Technology. 2004,(149):246~249
104 Choo J H, Yeo S H, Tan F F. Flexible Tooling for Localized ElectrochemicalDeposition with Wire Electro Discharge Grinding. Microsystem Technologies. 2004,(10):127~136
105贾宝贤,胡富强,王振龙,等.线电极电火花磨削技术在微细加工中的应用.电加工与模具. 2006,(增刊):22~25
106 Nachiappan Ravi, Xue Chuan. The Effects of Electro-discharge Machining Block Electrode Method for Microelectrode. Journal of micromechanics and microengineering. 2002,(12):532~540
107 Nachiappan Ravi, Han Huang. Fabrication of Symmetrical Section Microfeatures Using the Electro-discharge Machining Block Electrode Method. Journal of micromechanics and microengineering. 2002,(12):905~910
108 W.S. Zhao, B.X. Jia, Z.L. Wang, etc. Study on Block Electrode Discharge Grinding of Micro Rods. Key Engineering Materials. 2006,(304~305):201~205
109贾宝贤,王振龙,赵万生.用块电极轴向进给法电火花磨削微细轴.电加工与模具. 2004(2):26~29
110 Mohri N., Takezawa H., Furutani K., Ito Y., Sata T. A New Process of Additive and Removal Machining by EDM with a Thin Electrode. Annals of the CIRP. 2000,49(1):123~126
111曹国辉,王振龙,迟关心,郭永丰,赵万生.基于单脉冲放电的钨微细电极快速成形方法及其应用研究.机械工程学报. 2003,39(7):43~47
112 W.S. Zhao, G.H. Cao, Z.L. Wang and G.X. Chi. Primary Study on Instantaneous Fabricating Mechanism of Tungsten Microelectrode Based on Single Discharge and Its Application. Key Engineering Materials. 2004,(259-260):496~501
113 Minoru Yamazaki, Takemi Suzuki, Noritoshi Mori, Masanori Kunieda, EDM of Micro-rods by Self-drilled Holes. Journal of Materials Processing Technology. 2004,(149):134~138
114 Ken’ichi Takahata, Y. B. Gianchandani. Batch Mode Micro-Electro-Discharge Machining. Journal of Microelectromechanical Systems. 2002, (4):102~111
115彭良强,伊福廷,张菊芳.大面积微细结构的电火花加工.航空制造技术. 2002,(5):47~48
116邹丽芸,张院春,彭良强,等.基于LIGA技术的微细电火花加工优化研究.电加工与模具. 2004,(增刊):39~41
117彭良强.基于LIGA技术的微细电火花加工.机器工人. 2004,(1):26~28
118 Kai Egashira, Katsumi Mizutani. EDM at Low Open-Circuit Voltage. Journal of the Japan Society of Electrical Machining Engineers. 2003,37(85):18~23
119李文卓.微细电火花加工系统及其相关技术的研究.哈尔滨工业大学博士论文. 2002:68~72
120早川伸哉, ORI Ricardo Itiro,糸魚川文広,中村隆,松原十三生.微細放電付着加工による3次元形状創成法.精密工学会誌. 2000,66(12):1943~1947
121 Shinya Hayakawa, Ricardo Itiro Ori, Fumihiro Itoigawa, Takashi Nakamura, Tomio Matsubara. Fabrication of Microstructure Using EDM Deposition. ISEM XIIΙ. Bibao, 2001:783~793
122曹国辉,金柏冬,肖凯,等.空气中微细电火花沉积铜合金工艺方法.南京航空航天大学学报. 2005,37(增刊):77~80
123金柏冬,曹国辉,王振龙,等.空气中微细电火花沉积的工艺规律研究.中国机械工程. 2006,17(2):111~115
124刘志新.空气中电火花沉积与去除加工方法及其实验研究.哈尔滨工业大学硕士论文. 2004:16~28
125曹国辉.基于脉冲放电的若干微细加工方法及试验的研究.哈尔滨工业大学博士学位论文. 2004:19~33
126 Yu ZY, Masuzawa T, Fujino M. Micro-EDM for Three-dimensional Cavities Development of Uniform Wear Method. Annals of the CIRP 1998,47(1):169–172
127 Yu Zuyuan. Three Dimensional Micro-EDM Using Simple Electrodes. Disseration of the University of Tokyo. 1997,(352):149~155
128赵万生,王振龙,郭东明.国外特种加工技术的最新进展.电加工. 1999, (5):12~19
129 Zuyuan Yu,Takahisa Masuzawa,Masatoshi Fujino.3D Micro-EDM with Simply Shaped Electrode.Annals of the CIRP.1997,46(1):1~8
130 G. Thornell and S. Johansson. Microprocessing at the Fingertips. Journal of Micromechanics and microengineering. 1998,(8):251~262
131 K. Takahata, S. Aoki. Fine Surface Finishing Method for 3-Dimensional Micro Structures. MEMS’96. 1996:73~78
132 R. Dominiek, M. Wim, V. B. Hendrik. Production of Seismic Mass Suspensions in Silicon by Electro-Discharge Machining. Journal of Micromechanics and Microengineering. 1999,(9): 206~210
133 R. Dominiek, V. B. Hendrik, M. Wim. A Review on Micro Electro-Discharge Machining of Metal and Silicon. Proceedings of 1st EUPEN Conference, Bremen.1999:24~31
134 X. Song, R. Dominiek, M. Wim, B. Hendrik. Investigation of Micro-EDM for Silicon Microstructure Fabrication. Society of Photo-Optical Instrumentation Engineers. 1999,3680(3):792~799
135张勇.微细电火花加工系统及其工艺技术的研究.哈尔滨工业大学博士学位论文. 2004:48~77
136 http://www.mech.kuleuven.ac.be/pma/research/mpe/default_en.phtml Web-pages of Leuven University
137 J. Stampfl, R. Leitgeb, Y. Cheng, et al. Electro-Discharge Machining of Mesoscopic Parts with Electroplated Copper and hot-pressed Silver Tungsten Electrodes. Journal of Micromechanics and microengineering. 2000,(10): 1~6
138 Y. Cheng, J. Stampfl. Additive/Subtractive Material Processing for Mesoscopic Parts. Solid Freeform Fabrication Symposium, Austin, Texas. 1999:1~9
139李文卓.微细电火花加工系统及其相关技术的研究.哈尔滨工业大学博士论文. 2002:68~72
140 http://www.mech.kuleuven.ac.be/pma/research/mpe/default_en.phtml. Web-pages of Leuven University
141 http://www.sarix.com/sx100_e.htm. Web-pages of Sarix company
142 M. Rahman, H.S. Lim, K.S. Neo, A. Senthil Kumar. Tool-based Nanofinishing and Micromachining. Journal of Materials Processing Technology. 2006,(160):1~15
143 H.S. Lim, Y.S. Wong, M. Rahman, M.K. Edwin Lee. A Study on the Machining of High Aspect Ratio Micro-stuctrues Using Micro-EDM. Journal of Materials Processing Technology. 2003,(140):18~325
144 Ivano Beltrami, Cedric Joseph, Reymond Clavel, et al. Micro- and Nano Electric-discharge Machining. Journal of Materials Processing Technology. 2004,(149):263~265
145 T. Kurita, M. Hattori. Development of New-concept Desk Top Size Machine Tool. International Journal of Machine Tool & Manufacture. 2005,(45):959~965
146宋小中,刘正勋,高长水,等.电致伸缩型电火花微细加工伺服系统的研究.电加工.1995,(3):7~11
147 Yong Li, Min Guo, Zhaoying Zhou, Min Hu. Micro Electro Discharge Machine with an Inchworm Type of Micro Feed Mechanism. Precision Engineering. 2002, 26: 7~14
148李勇.蠕动式压电/电致伸缩微进给定位机构的研究进展.中国机械工程. 1999,10(12):1410~1412
149 W.S. Zhao, Y. Zhang, Z.L. Wang, B.X. Jia, F.Q. Hu, Z.Y. Li. Research On a Micro EDM Equipment and Its Application. Key Engineering Materials. 2004,(259-260):567~571
150张勇,王振龙,李志勇,杨洋,贾宝贤,胡富强,赵万生.微细电火花加工装置关键技术研究.机械工程学报. 2004,(9):175~179
151张勇,王振龙,胡富强,赵万生.微细电火花加工装置的设计与应用.微细加工技术. 2004,(6):55~59
152 B.X. Jia, Z.L. Wang, F.Q. Hu, X.H. Li, W.S. Zhao. Research on Multifunctional Micro Machining Equipment. Materials Science Forum. 2004, 471~472: 37~42
153杨洋.微细分层电火花加工CAD/CAM研究.哈尔滨工业大学博士学位论文. 2004:19~78
154霍孟友,张建华,艾兴.电火花放电加工间隙状态检测方法综述.电加工与模具. 2003,(3):18~20