微细工具电极在线制备装置开发及加工技术的研究
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摘要
微细加工在精密模具、航空航天、精密仪器、生物医疗等众多领域具有广泛的应用,目前发展的许多微细加工方法,如微细电火花加工、微细电化学加工、微细超声加工等,都需要使用微细电极来实现对微结构的加工。比如：用简单形状的微细柱状电极对微孔、槽和微小三维型腔的加工、使用阵列微细电极对群孔和复杂型腔的加工等。为保证微细加工的尺度和精度,对所使用工具电极的尺寸、形状、位置精度和表面质量等都有相应的要求。此外,最大限度降低工具电极位置精度对微加工的不利影响也是非常关键,因此需要通过在线制备的方法来避免电极因二次装夹而产生的重复定位误差。一些传统的精密制造方法虽然能够制造出直径小至几微米的微细电极,如车削法、铣削、研磨法、LIGA技术等,但它们一般不能实现对工具电极的在线制备,因而难以与后续的微细加工工艺相匹配。微细电极能否实现在线制备已经成为实现许多微细加工方法的前提和重要的关键技术之一。因此自主开发一套专用的微细工具电极在线制备装置具有重要的实际意义。
微细电极的在线制备方法主要包括反拷块法、WEDG (线电极放电磨削)法、电化学腐蚀法、EEDG(刃口电极电火花磨削法)法等几种电加工方法,通过对微细工具电极在线制备技术进行了研究分析,确定了线电极放电磨削(WEDG)和反拷块法相结合的方案。
论文对微细工具电极在线制备装置的开发进行了详细论述。主要包括直径700mm的转台,精密三位移台,大理石台面和立柱等,在这些整体结构设计的基础上,开展微细电极加工模块的设计制作,主要包括水平进给机构、垂直进给机构、旋转主轴、进电装置、观测装置等。
针对微细电火花的加工要求,开发出针对线电极放电磨削和反拷块加工的控制系统。在装备和控制系统的基础之上,研究线电极放电磨削和块反拷加工的机理,并进行相关的工艺实验研究。
在微细工具电极的加工实验中,对比了三种不同进给方式下的实验效果,切向进给具有比较好的优势,然后利用在线加工好的电极,在不锈钢板上了进行了打孔实验,取得了预期效果,同时验证了该装备具有很高的精度和稳定性。
Microfabrication has wide application in many areas of precision molds, aerospace, precision instruments, bio-medical etc. There are many developed microfabrication methods, such as micro-EDM, micro electrochemical machining, micro ultrasonic machining, etc. which require the use of micro-electrode to achieve the processing of the micro-structure. For example, the processing of the axis of the electrode with a simple shape of fine porous slot and tiny three-dimensional cavity, using the array of tiny electrodes on the group of holes and complex cavity processing. In order to ensure the scale and precision of the microfabrication, it has corresponding requirements on the use of the tool electrode size, shape, position accuracy and surface quality. In addition, it is also critical to minimize the adverse effects of the tool electrode position accuracy of the micro-machining, so you need online, and prepare to avoid the duplication of the electrode due to the second fixture positioning errors and fixture errors. Precision manufacturing methods to produce a diameter as small as a few microns of the micro-electrode, such as turning, milling, grinding method, LIGA, but they generally can not achieve online preparation tool electrode, which makes it difficult to match follow-up fine process. Whether micro-electrode can be achieved online preparation or not has become the premise of many microfabrication methods and one of the keys. Therefore, it has far-reaching significance to independently develop a dedicated micro-tool electrode preparation device
Fine line electrode preparation methods include BEDG (block electrode discharge grinding) method, WEDG (wire electrode discharge grinding) method, electrochemical corrosion, EEDG (edge electrode EDM grinding method) act, which are EDM methods. Through the tool electrode preparation techniques are reviewed, and then determine the combination of WEDG and BEDG as the program.
The paper discussed the development of micro-tool electrode preparation device in detail, including turntable diameter700mm, precision displacement units, granite countertops and columns, on the basis of these overall structural design, micro-electrode design of processing equipment was carried out, including the level of feed mechanism, the vertical feed mechanism, the rotating spindle, the lead electrical device, observation devices.
Requirements for the processing of micro-EDM, the control systems were developed for WEDG and BEDG. It is on the basis of the equipment and control systems that to study the mechanism of WEDG and BEDG, and to do related technology test.
In the micro-tool electrode processing experiments, compared to the experiment results under three different feeding method, tangential feed has the advantage of processing, then use online processing obtain good electrode, perforated experiments on stainless steel plate and achieved the desired results, which verifies the equipment with high precision and stability.
微细电极的在线制备方法主要包括反拷块法、WEDG (线电极放电磨削)法、电化学腐蚀法、EEDG(刃口电极电火花磨削法)法等几种电加工方法,通过对微细工具电极在线制备技术进行了研究分析,确定了线电极放电磨削(WEDG)和反拷块法相结合的方案。
论文对微细工具电极在线制备装置的开发进行了详细论述。主要包括直径700mm的转台,精密三位移台,大理石台面和立柱等,在这些整体结构设计的基础上,开展微细电极加工模块的设计制作,主要包括水平进给机构、垂直进给机构、旋转主轴、进电装置、观测装置等。
针对微细电火花的加工要求,开发出针对线电极放电磨削和反拷块加工的控制系统。在装备和控制系统的基础之上,研究线电极放电磨削和块反拷加工的机理,并进行相关的工艺实验研究。
在微细工具电极的加工实验中,对比了三种不同进给方式下的实验效果,切向进给具有比较好的优势,然后利用在线加工好的电极,在不锈钢板上了进行了打孔实验,取得了预期效果,同时验证了该装备具有很高的精度和稳定性。
Microfabrication has wide application in many areas of precision molds, aerospace, precision instruments, bio-medical etc. There are many developed microfabrication methods, such as micro-EDM, micro electrochemical machining, micro ultrasonic machining, etc. which require the use of micro-electrode to achieve the processing of the micro-structure. For example, the processing of the axis of the electrode with a simple shape of fine porous slot and tiny three-dimensional cavity, using the array of tiny electrodes on the group of holes and complex cavity processing. In order to ensure the scale and precision of the microfabrication, it has corresponding requirements on the use of the tool electrode size, shape, position accuracy and surface quality. In addition, it is also critical to minimize the adverse effects of the tool electrode position accuracy of the micro-machining, so you need online, and prepare to avoid the duplication of the electrode due to the second fixture positioning errors and fixture errors. Precision manufacturing methods to produce a diameter as small as a few microns of the micro-electrode, such as turning, milling, grinding method, LIGA, but they generally can not achieve online preparation tool electrode, which makes it difficult to match follow-up fine process. Whether micro-electrode can be achieved online preparation or not has become the premise of many microfabrication methods and one of the keys. Therefore, it has far-reaching significance to independently develop a dedicated micro-tool electrode preparation device
Fine line electrode preparation methods include BEDG (block electrode discharge grinding) method, WEDG (wire electrode discharge grinding) method, electrochemical corrosion, EEDG (edge electrode EDM grinding method) act, which are EDM methods. Through the tool electrode preparation techniques are reviewed, and then determine the combination of WEDG and BEDG as the program.
The paper discussed the development of micro-tool electrode preparation device in detail, including turntable diameter700mm, precision displacement units, granite countertops and columns, on the basis of these overall structural design, micro-electrode design of processing equipment was carried out, including the level of feed mechanism, the vertical feed mechanism, the rotating spindle, the lead electrical device, observation devices.
Requirements for the processing of micro-EDM, the control systems were developed for WEDG and BEDG. It is on the basis of the equipment and control systems that to study the mechanism of WEDG and BEDG, and to do related technology test.
In the micro-tool electrode processing experiments, compared to the experiment results under three different feeding method, tangential feed has the advantage of processing, then use online processing obtain good electrode, perforated experiments on stainless steel plate and achieved the desired results, which verifies the equipment with high precision and stability.
引文
[1]Xi-Qing Sun,T.Masuzawa,M.fujino. Micro ultrasonic machining and its applications in MEMS[J].Sensors and Actuators,1996(57):159-164.
[2]T.Masuzawa. Sate of the Art of Micromachining[J].CIRP Annals-Manufacturing techn-ology.2000,49(2):473-488
[3]Bo Hyun Kim,Byung Jin Park and Chong Nam Chu.Fabrication of multiple electrodes by reverse EDM and their application in micro ECM[J].Micromech.Microeng.2006(16):843-850.
[4]黄燕华,董申,袁光辉,等.微细轴精密车削技术[J].电加工与模具,2003(4)： 14-16.
[5]E.W.Becker,W.Ehrfeld,P.Hagmann,et al. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography [J]. Microelectron[J].1986,4(1):35-56.
[6]韩桂海,于炳亮,郭钟宁,等.电极在线加工技术[J].山东科学,2006(5)：69-72.
[7]贾宝贤,王振龙,赵万生,等.用块电极轴向进给法电火花磨削微细轴[J].电加工与模具,2004(3)：26-29.
[8]赵万生,李文卓,王振龙,等.高精度微细电火花加工系统的研制[J].电加工与模具,2004(1)：6-9.
[9]张云鹏,云乃彰,陈建宁,等.微细轴放电反拷成形方式的比较研究[J].电加工与模具,2006(4)：29-31.
[10]MASUZAWA T, FUJINO M, KOBAYASHI. Wire electrodischarge Grinding for micro-machining[J].Annals of the CIRP,1985,34(1)431-434.
[11]王振龙,赵万生,狄士春,等.微细电火花加工技术的研究进展[J].中国机械工程,2002,13(10)：894-898.
[12]S.H.Yeo,S.A.P.Balon. Fabrication of micro-cylindrical parts based on a novel grinding apparatus[C]. Jounal of Engineering Manufacture.2000,214:245-249.
[13]胡富强,王振龙,赵万生,等.线电级放电磨削(WEDG)技术的研究与应用[J].哈尔滨工业大学学报,2003,35(10)：1171-1174.
[14]赵万生,韦红雨,栗岩,等.应用线电极电火花磨削法加工微细轴[J].机械工艺师,1998(1)：22-23.
[15]李勇,王显军,郭旻,等.微细电火花加工技术研究[J].清华大学学报(自然科学版),1999,39(8)：45-48.
[16]高长水,宋小中,刘正埙,等.电火花线电极磨削机构设计研究[J].电加工,1997(3)：17-19.
[17]Dong-Yea Sheu. Study on high-speed fabrication of micro tools by hybrid circuit twin-wedg[C].proceedings of the 16th international symposium on electromaching. 2010,545-548.
[18]冯焕琴.基于线切割机的线电极放电磨削工艺研究[D].吉林.吉林大学.2004.
[19]刘舜逢.多功能微小动压成型加工机之开发与研究[D].台湾.云林科技大学.2002.
[20]赵万生,韦红雨,狄士春,等.微细电火花加工的新进展[J].仪器仪表学报,1996,17(1)：65-69.
[21]Charmilles Technologies. Micro EDM HO-10 and EL-10[M].
[22]Kai EGASHIRA and Katsumi MIZUTANI. EDM at Low Open-Circuit Voltage[J].the Japan Society of electriccal Machining Engineers.2005(10):21-26.
[23]Chong Nam Chu. Micro fabrication by Electrochemical Machining and Deposition[R].2004.9.9.
[24]Kai Egashira, Yosuke Morita, Yasuki Hattori. Eleectrical discharge machining of submicron holes using Ultrasmall Dia-meter electrodes[J]. Precision Engineering.2010(34):139-144.
[25]M.Y.Ali.A.S.Ong. Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering[J].Manuf Technol.2006(31):501-508.
[26]Hung Sung Liu,Biing Hwa Ywa Yan,Chien Liang Chen, et al.Application of micro-EDM combined with high-frequency dither grinding to micro-hole maching[J].International Journal of Machine Tools&Manufacture.2006(46)80-87.
[27]Shun-Tong Chen,Ming-Yi Tsai,Yun-Cheng Lai,et al.Development of a micro diamond grinding tool by compound process[J].Journal of Materials Processing Technology.2009(209)4698-4703.
[28]Dong-Yea Sheu. Multi-spherical probe machining by EDM Combining WEDG technology with one-pulse electro-discharge[J].Journal of Materials Processing Technology.2004(149)597-603.
[29]T. Masuzawa,M. Yamaguchi, M. Fujino. Surface Finishing of Micropins Produced by WEDG [J].CIRP Annals-Manufacturing Technology.2005.54(1)171-174.
[30]Albert W.-J. Hsue, and W.-C. Wei, Yin Chuan.Ultrasonic Assisted Multi-Axial Wire Electrical Discharge Grinding (WEDG) Processes for Micro-EDM and Cylindrical-WEDM",, Proc. of the 16th International Symposium f or ElectroMachining (ISEM-16), Shanghai, China,20th-23th, April,2010.
[31]Minoru Yamazaki, Takemi Suzuki, Noritoshi Mori, et al. EDM of Micro-rods by Self-drilled Holes[J]. Journal of Materials Processing Technology.2004,149:134-138.
[32]翁明浩.微细阵列轴孔的电火花和电化学加工工艺研究[D].哈尔滨.哈尔滨工业大学.2007.
[33]李刚.基于直线电机的微细电火花加工系统及其关键技术研究[D].哈尔滨。哈尔滨工业大学.2007.
[34]Hideki Takezawa,Hiroaki Hamamatsu,Naotake ohri,etal. Development of micro-EDM-center with rapidly sh-arpened electrode[J] Journal of materials Processing Technology.2004,149:112-116.
[35]Y.M.Lim and S.H.Kim. An Electrochemical Fabrication Method for Extemely Thin Cylindrical Micropin[J].International Journal of Machine Tools and Manufacture.2001,41:2287-2296.
[36]Y.M.Lim,H.J.Lim,J.R.Liu,et al. Fabrication of Cylindrical Micropins with Various Diameters using DC Current Density Control[J].Journal of Materials Processing Technology.2003,141:251-255.
[37]罗红平.纳秒脉宽脉冲电化学微加工机床关键技术研究[D].湖南.湖南大学.2009.
[38]韩子平,于兆勤,郭钟宁,等.微细电解加工实验研究[J].机电工程技术,2008,37(9)：27-30.
[39]朱保国.脉冲电化学微细加工关键技术研究[D].哈尔滨.哈尔滨工业大学.2007.
[40]王昆.微细电解线切割加工技术的基础研究[D].南京.南京航空航天大学.2007.
[41]王昆,朱荻,王明环,等.微米尺度线电极的电化学腐蚀法制备[J].机械科学与技术.2006,25(9)：1073-1075.
[42]王明环,朱荻,张朝阳.电化学腐蚀法加工微圆柱体[J].机械工程学报,2006,42(6)：128-132.
[43]朱荻,王明环,明平美,等.微细电化学加工技术[J].纳米技术与精密工程,2005,3(2)：151-155.
[44]王磊,朱荻,曲宁松,等.电化学腐蚀法制备微细群圆柱[J].机械科学与技术,2007,26(7)：856-861.
[45]Se Hyun Ahn, Shi Hyoung Ryu, Deok Ki Choi,et al. El-ectro-chemical micro drilling using ultra short pulses[J]. Precision Engineering.2004 (28):129-134.
[46]Zhi-Wen Fan,Lih-Wu Hourng,Cheng-Yu wang.fabricat-ion of tungsten microelectrodes using pulsed electroche-mical machining[J].Precision Engineering.2010(34):489-496.
[47]黄德欢.纳米技术与应用(第1版)[M].中国纺织大学出版社,2001年1月.
[48]朱荻,曲宁松,胡洋洋.金属微细群柱结构电解反拷加工方法及专用工具[P].中国国家发明专利说明书,申请号200810022328.8
[49]胡洋洋,朱荻,曲宁松.高深宽比微细金属群柱结构的电化学加工方法及专用工具[P].中国国家发明专利说明书,申请号200810022330.5.
[50]赵万生.基于刃口电极微细电解磨削的微细轴在线制造方法[P].中国国家发明专利说明书,申请号200610027966.X.
[51]霍孟友,艾兴.电火花精微加工脉冲电源设计[J].新技术新工艺.1999,(6)：3-5.
[52]李文卓.微细电火花加工系统及其相关技术的研究[D].哈尔滨工业大学博士学位论文.2002：34-47.
[53]高强.低电压微细电火花加工工艺研究[D].哈尔滨工业大学硕士学位论文.2005：8-13.
[54]李庆祥,王东生,李玉.现代精密仪器设计[M].北京：清华大学出版社,2003.
[55]NI7350使用说明书[M].美国国家仪器有限公司,2006.
[56]NI-STC3使用说明书[M].美国国家仪器有限公司,2006.
[57]松下MINAS A5系列交流伺服马达驱动器使用说明书[M].松下电器产业株式会社,2010.
[58]AH3144高灵敏度单极霍尔开关电路使用说明书[M].深圳市裕辉科技有限公司,2010.
[2]T.Masuzawa. Sate of the Art of Micromachining[J].CIRP Annals-Manufacturing techn-ology.2000,49(2):473-488
[3]Bo Hyun Kim,Byung Jin Park and Chong Nam Chu.Fabrication of multiple electrodes by reverse EDM and their application in micro ECM[J].Micromech.Microeng.2006(16):843-850.
[4]黄燕华,董申,袁光辉,等.微细轴精密车削技术[J].电加工与模具,2003(4)： 14-16.
[5]E.W.Becker,W.Ehrfeld,P.Hagmann,et al. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography [J]. Microelectron[J].1986,4(1):35-56.
[6]韩桂海,于炳亮,郭钟宁,等.电极在线加工技术[J].山东科学,2006(5)：69-72.
[7]贾宝贤,王振龙,赵万生,等.用块电极轴向进给法电火花磨削微细轴[J].电加工与模具,2004(3)：26-29.
[8]赵万生,李文卓,王振龙,等.高精度微细电火花加工系统的研制[J].电加工与模具,2004(1)：6-9.
[9]张云鹏,云乃彰,陈建宁,等.微细轴放电反拷成形方式的比较研究[J].电加工与模具,2006(4)：29-31.
[10]MASUZAWA T, FUJINO M, KOBAYASHI. Wire electrodischarge Grinding for micro-machining[J].Annals of the CIRP,1985,34(1)431-434.
[11]王振龙,赵万生,狄士春,等.微细电火花加工技术的研究进展[J].中国机械工程,2002,13(10)：894-898.
[12]S.H.Yeo,S.A.P.Balon. Fabrication of micro-cylindrical parts based on a novel grinding apparatus[C]. Jounal of Engineering Manufacture.2000,214:245-249.
[13]胡富强,王振龙,赵万生,等.线电级放电磨削(WEDG)技术的研究与应用[J].哈尔滨工业大学学报,2003,35(10)：1171-1174.
[14]赵万生,韦红雨,栗岩,等.应用线电极电火花磨削法加工微细轴[J].机械工艺师,1998(1)：22-23.
[15]李勇,王显军,郭旻,等.微细电火花加工技术研究[J].清华大学学报(自然科学版),1999,39(8)：45-48.
[16]高长水,宋小中,刘正埙,等.电火花线电极磨削机构设计研究[J].电加工,1997(3)：17-19.
[17]Dong-Yea Sheu. Study on high-speed fabrication of micro tools by hybrid circuit twin-wedg[C].proceedings of the 16th international symposium on electromaching. 2010,545-548.
[18]冯焕琴.基于线切割机的线电极放电磨削工艺研究[D].吉林.吉林大学.2004.
[19]刘舜逢.多功能微小动压成型加工机之开发与研究[D].台湾.云林科技大学.2002.
[20]赵万生,韦红雨,狄士春,等.微细电火花加工的新进展[J].仪器仪表学报,1996,17(1)：65-69.
[21]Charmilles Technologies. Micro EDM HO-10 and EL-10[M].
[22]Kai EGASHIRA and Katsumi MIZUTANI. EDM at Low Open-Circuit Voltage[J].the Japan Society of electriccal Machining Engineers.2005(10):21-26.
[23]Chong Nam Chu. Micro fabrication by Electrochemical Machining and Deposition[R].2004.9.9.
[24]Kai Egashira, Yosuke Morita, Yasuki Hattori. Eleectrical discharge machining of submicron holes using Ultrasmall Dia-meter electrodes[J]. Precision Engineering.2010(34):139-144.
[25]M.Y.Ali.A.S.Ong. Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering[J].Manuf Technol.2006(31):501-508.
[26]Hung Sung Liu,Biing Hwa Ywa Yan,Chien Liang Chen, et al.Application of micro-EDM combined with high-frequency dither grinding to micro-hole maching[J].International Journal of Machine Tools&Manufacture.2006(46)80-87.
[27]Shun-Tong Chen,Ming-Yi Tsai,Yun-Cheng Lai,et al.Development of a micro diamond grinding tool by compound process[J].Journal of Materials Processing Technology.2009(209)4698-4703.
[28]Dong-Yea Sheu. Multi-spherical probe machining by EDM Combining WEDG technology with one-pulse electro-discharge[J].Journal of Materials Processing Technology.2004(149)597-603.
[29]T. Masuzawa,M. Yamaguchi, M. Fujino. Surface Finishing of Micropins Produced by WEDG [J].CIRP Annals-Manufacturing Technology.2005.54(1)171-174.
[30]Albert W.-J. Hsue, and W.-C. Wei, Yin Chuan.Ultrasonic Assisted Multi-Axial Wire Electrical Discharge Grinding (WEDG) Processes for Micro-EDM and Cylindrical-WEDM",, Proc. of the 16th International Symposium f or ElectroMachining (ISEM-16), Shanghai, China,20th-23th, April,2010.
[31]Minoru Yamazaki, Takemi Suzuki, Noritoshi Mori, et al. EDM of Micro-rods by Self-drilled Holes[J]. Journal of Materials Processing Technology.2004,149:134-138.
[32]翁明浩.微细阵列轴孔的电火花和电化学加工工艺研究[D].哈尔滨.哈尔滨工业大学.2007.
[33]李刚.基于直线电机的微细电火花加工系统及其关键技术研究[D].哈尔滨。哈尔滨工业大学.2007.
[34]Hideki Takezawa,Hiroaki Hamamatsu,Naotake ohri,etal. Development of micro-EDM-center with rapidly sh-arpened electrode[J] Journal of materials Processing Technology.2004,149:112-116.
[35]Y.M.Lim and S.H.Kim. An Electrochemical Fabrication Method for Extemely Thin Cylindrical Micropin[J].International Journal of Machine Tools and Manufacture.2001,41:2287-2296.
[36]Y.M.Lim,H.J.Lim,J.R.Liu,et al. Fabrication of Cylindrical Micropins with Various Diameters using DC Current Density Control[J].Journal of Materials Processing Technology.2003,141:251-255.
[37]罗红平.纳秒脉宽脉冲电化学微加工机床关键技术研究[D].湖南.湖南大学.2009.
[38]韩子平,于兆勤,郭钟宁,等.微细电解加工实验研究[J].机电工程技术,2008,37(9)：27-30.
[39]朱保国.脉冲电化学微细加工关键技术研究[D].哈尔滨.哈尔滨工业大学.2007.
[40]王昆.微细电解线切割加工技术的基础研究[D].南京.南京航空航天大学.2007.
[41]王昆,朱荻,王明环,等.微米尺度线电极的电化学腐蚀法制备[J].机械科学与技术.2006,25(9)：1073-1075.
[42]王明环,朱荻,张朝阳.电化学腐蚀法加工微圆柱体[J].机械工程学报,2006,42(6)：128-132.
[43]朱荻,王明环,明平美,等.微细电化学加工技术[J].纳米技术与精密工程,2005,3(2)：151-155.
[44]王磊,朱荻,曲宁松,等.电化学腐蚀法制备微细群圆柱[J].机械科学与技术,2007,26(7)：856-861.
[45]Se Hyun Ahn, Shi Hyoung Ryu, Deok Ki Choi,et al. El-ectro-chemical micro drilling using ultra short pulses[J]. Precision Engineering.2004 (28):129-134.
[46]Zhi-Wen Fan,Lih-Wu Hourng,Cheng-Yu wang.fabricat-ion of tungsten microelectrodes using pulsed electroche-mical machining[J].Precision Engineering.2010(34):489-496.
[47]黄德欢.纳米技术与应用(第1版)[M].中国纺织大学出版社,2001年1月.
[48]朱荻,曲宁松,胡洋洋.金属微细群柱结构电解反拷加工方法及专用工具[P].中国国家发明专利说明书,申请号200810022328.8
[49]胡洋洋,朱荻,曲宁松.高深宽比微细金属群柱结构的电化学加工方法及专用工具[P].中国国家发明专利说明书,申请号200810022330.5.
[50]赵万生.基于刃口电极微细电解磨削的微细轴在线制造方法[P].中国国家发明专利说明书,申请号200610027966.X.
[51]霍孟友,艾兴.电火花精微加工脉冲电源设计[J].新技术新工艺.1999,(6)：3-5.
[52]李文卓.微细电火花加工系统及其相关技术的研究[D].哈尔滨工业大学博士学位论文.2002：34-47.
[53]高强.低电压微细电火花加工工艺研究[D].哈尔滨工业大学硕士学位论文.2005：8-13.
[54]李庆祥,王东生,李玉.现代精密仪器设计[M].北京：清华大学出版社,2003.
[55]NI7350使用说明书[M].美国国家仪器有限公司,2006.
[56]NI-STC3使用说明书[M].美国国家仪器有限公司,2006.
[57]松下MINAS A5系列交流伺服马达驱动器使用说明书[M].松下电器产业株式会社,2010.
[58]AH3144高灵敏度单极霍尔开关电路使用说明书[M].深圳市裕辉科技有限公司,2010.