垂直腔面发射激光器偏振特性的研究
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摘要
垂直腔面发射激光器(VCSEL)较之传统的边发射激光器来说具有低阈值、单纵模工作、发散角小、动态调制频率高、易实现二维集成等优点，在光通信、光互联、图象信号处理等方面有着重要的应用前景；由于VCSEL是面发射并且器件结构一般为圆对称结构，所以材料增益和波导各向异性效应大大降低，输出光一般为椭圆偏振光，并且偏振的稳定性远不如边发射激光器。
本文从理论和实验上对VCSEL的偏振特性进行了研究，具体工作可以概括如下：
1．通过四能级偏振动力学模型，在不考虑外加应变以及温度的前提下，对Maxwell-Bloch方程进行数值求解，研究了随着注入电流以及各向异性的变化引起的VCSEL的出射偏振光的强度、频率和相位变化。
2．研究了外加应变、温度对各向异性、偏振频率以及相位的影响。
3．通过实验测量了VCSEL的出射偏振光随着注入电流的变化。
结果表明影响VCSEL输出光偏振不稳定性的因素是各向异性效应和注入电流。理论上得出了随着注入电流的增加，偏振光发生变化；实验上测量出了随着注入电流的增加，偏振光的方向发生变化的过程。
Vertical-cavity surface-emitting lasers (VCSEL) have distinct advantage over conventional edge emitting lasers. They are especially suitable for optical communication systems, optical interconnects, parallel optical signal processing. In VCSEL, the material gain and wave guide anisotropy are considerably reduced because of their cylindrical symmetry and their surface-emitting. So lead to their polarization behavior not as good as edge lasers. The paper researched the polarization of VCSEL theoretically and experimentally, the main work is as follows:
Part Ⅰ.Without consideration the applied strain and temperature, we resolved numerically the Maxwell-Bloch equation through four-energy level polarized dynamic model. And we studied the intensity of emergent polarized light , frequency , phase variation about VCSEL
caused by the injection current and anisotropic change.The paper demonstrates that the output light occurs polarization switching as the increasing of the injection current theoretically and experimentally.
Part Ⅱ. We studied the influence of applied strain and temperature on the anisotropic
property , polarized frequency and the phase.
Part Ⅲ. We measured experimentally the change of emergent polarized light cause by injection current.
The result showed that the unstable factors of VCSEL's emergent polarized light are anisotropic effect. We deduced theoretically that the polarized light change with the increase of injection current and measured experimentally the process of polarized light's direction change with the injection current.
本文从理论和实验上对VCSEL的偏振特性进行了研究，具体工作可以概括如下：
1．通过四能级偏振动力学模型，在不考虑外加应变以及温度的前提下，对Maxwell-Bloch方程进行数值求解，研究了随着注入电流以及各向异性的变化引起的VCSEL的出射偏振光的强度、频率和相位变化。
2．研究了外加应变、温度对各向异性、偏振频率以及相位的影响。
3．通过实验测量了VCSEL的出射偏振光随着注入电流的变化。
结果表明影响VCSEL输出光偏振不稳定性的因素是各向异性效应和注入电流。理论上得出了随着注入电流的增加，偏振光发生变化；实验上测量出了随着注入电流的增加，偏振光的方向发生变化的过程。
Vertical-cavity surface-emitting lasers (VCSEL) have distinct advantage over conventional edge emitting lasers. They are especially suitable for optical communication systems, optical interconnects, parallel optical signal processing. In VCSEL, the material gain and wave guide anisotropy are considerably reduced because of their cylindrical symmetry and their surface-emitting. So lead to their polarization behavior not as good as edge lasers. The paper researched the polarization of VCSEL theoretically and experimentally, the main work is as follows:
Part Ⅰ.Without consideration the applied strain and temperature, we resolved numerically the Maxwell-Bloch equation through four-energy level polarized dynamic model. And we studied the intensity of emergent polarized light , frequency , phase variation about VCSEL
caused by the injection current and anisotropic change.The paper demonstrates that the output light occurs polarization switching as the increasing of the injection current theoretically and experimentally.
Part Ⅱ. We studied the influence of applied strain and temperature on the anisotropic
property , polarized frequency and the phase.
Part Ⅲ. We measured experimentally the change of emergent polarized light cause by injection current.
The result showed that the unstable factors of VCSEL's emergent polarized light are anisotropic effect. We deduced theoretically that the polarized light change with the increase of injection current and measured experimentally the process of polarized light's direction change with the injection current.
引文
[1]友清．垂直腔面发射激光器：进展和未来前景．激光与光电子学进展，1999，n5：pp13-17
[2]潘炜，张晓霞，罗斌．垂直腔面发射半导体微腔激光器．物理学报，1999，v28，n4：pp210-216
[3]友清．发射蓝光的光泵InGaN垂直腔面发射激光器．激光与光电子学进展，1999，n11：pp44-45
[4]从征．同相发射的垂直腔面发射激光器．激光与光电子学进展，1999，n11：pp45
[5]1．55 μ m室温电抽运全晶格匹配Sb基垂直腔面发射激光器．激光与光电子学进展，2000，n9：pp58-59
[6]李雪梅，刘颖，姜秀英等．H型结构垂直腔面发射激光器．中国激光，1998，Vol．A25，n 1：pp18-20
[7]李雪梅，常玉春，宋俊峰等．室温连续可见光垂直腔面发射激光器．半导体光电，1999，v20，n1：pp31-33
[8]林世鸣，程澎，康学军等．低阈值红光垂直腔面发射激光器．高技术通讯，1999，n 7：pp17-19
[9]汪剑平．半导体激光器．北京：电子工业出版社，2000．pp176-177，184
[10]Koyama F, Schlenker D, et al. 1.5 W operation of superluminescent diode with highly strained GaInAs/GaAs quantum well emitting at 1.2 μm band. IEEE Interational Semiconductor Lasers Conference, 2000, pp71-72
[11]王莉，陈弘达，潘钟等．垂直腔面发射激光器的研究开发现状及应用．高技术通讯，2001，n4：pp104-108
[12]Agrawal G P, Dutta N K. Semiconductor Lasers. 2nd edition. New York: Van Nostrand Rinhold, 1993, pp462-468,473-485
[13]张存善，张延生，段晓峰等．垂直腔面发射激光器DBR结构反射特性分析．光电子·激光，2002，v13，n1：pp34-36
[14]张存善，赵红东，马丽丽等．激光器中研究DBR对发散角影响的新方法．光子学报，1997，v26，n1：pp23 1-234
[15]K Iga, F Koyama, and S Kinoshita. IEEE J. Quantum Electron, 1998, v24, n9:pp1845-1855
[16]赵红东，林世鸣，王守武．圆对称光栅对微腔激光器中光波的控制．光子学报，1996，v25，n5：pp407-412
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[18]Yalentin N Morozov, John A Neff, and Haijun Zhou. Analysis of Vertical-Cavity SurfaceEmitting Laser Multimode Behavior. IEEE Journal of Quantum Electronics, 1997, v33, n6: pp980-988
[19]D Vakhshoori, J D Wynn, et al. Top-surface emitting lasers with 1.9V threshold voltage and efficiencies. Apply Physics Letter, 1993, v62, n13:pp1448-1450
[20]C J Chang-Hasnain, Y A Wu, et al. Low threshold buried herterostructure vertical cavity surface emitting laser. Apply Physics Letter, 1996, v63, n10: pp1307-1309
[21]G C Wilson, D M Kuchta, et al. Spatial hole burning and self-focusing in vertical-cavity
surface-emitting laser diodes. Apply Physics Letter, 1994, v64, n31:pp542-544
[22]Takashi Yoshikawa, Takeshi Kawakami, Hideaki Saito, et al. IEEE Journal of Quantum Electronics, 1998, v34, n6:pp1009-1015
[23]母国光．光学．北京：人民教育出版社，1979，pp457-460
[24]S Bandyopadhyay, Y Hong, P S Spencer, et al. VCSEL polarization Control by Optical Injection. IEEE Journal of Lightwave Technology, 2OO3, v21, n10: pp2395-2404
[25]K D Choquette, R P Schneider, K L Lear and R E Leibenguth. Gain-dependent polarization properties of vertical-cavity lases. IEEE J. Selec. Top. Quantum Electron, 1995, v1: pp661-666
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[27]R F M Hendriks, M P V Exter, and J P Woerdman. Electro-optic birefringence in semiconductor vertical-cavity lasers. Appl. Phys. Lett. ,1997, v71:pp2599-2601
[28]M Sciamanna, C M asoller, F Rogister, et al. Fast pulsing dynamics of a vertical-cavity surface-emitting laser operating in the low-frequency fluctuation regime. Physical Review A. Atomic, Molecular, and Optical Physics, 2003, v68, n1: pp015805-1-015805-4
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[30]S Bandyopadhyay, Y Hong, P S Spencer, et al. Experimental observation of anti-phase polarisation dynamics in VCSELS. Optics Communications, 2002, v202, n1-3:pp145-154
[31]F Prati, G Giacomelli, and F Matin. Competition between orthogonally polarized transverse modes in vertical-cavity surface-emitting lasers and its influence on intensity noise. Physical Review A. Atomic, Molecular, and Optical Physics, 2000, v62, n3:pp033810-1-033810-8
[32]Joachim Kaiser, Christian Degen and Wolfgang Elsasser. Polarization-switching influence on the intensity noise of vertical-cavity surface-emitting lasers. Joural of Optical Society of America B, 2002, v 19, n4: pp672-677,
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[35]K D Choquette, D A Richie and R E Leibenguth. Temperature dependence of gain-guided vertical surface emitting laser polarization. Appl. Phys. Lett.,1994, v64: pp2062-2064
[36]M P van Exter, M B Willemsen and J P Woerdman. Characterizing and understanding VCSEL polarizarion noise. Phys. Rev. A 58,1998, v3946:pp4191-4205
[37]J M Martin-Regalado, M San Miguel and N B Abraham. Polarization switching in quantum-
well vertical-cavity surface emitting lasers. Opt. Lett. ,1996, v21:pp351-353
[38]Bob Nagler, Michael Peeters, Jan Albert. Polarization-mode hopping in single-mode vertical-cavity suiface-emitting lasers:Theory and experiment. Physical Review A. Atomic, Molecular, and Optical Physics, 2003, v68, n1: pp013813-1-013813-8
[39]Joachim Hamm, Klaus Bohringer and Ortwin Hess. Spatially resolved polarization and temperature dynamics in quantum-well vertical-cavity surface-emitters: A mesoscopic approach. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v4646:pp176-189
[40]Guy Verschaffelt, Jan Alber, Krassimir Panajotov, Bob Nagler. Frequency response of modulation induced polarization switching in VCSELs. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649, pp245-256
[41]Michael Peeters, Krassimir Panajotov, Guy Verschaffelt et al. Polarization Behavior of Vertical-Cavity Surface-Emitting Lasers under the influence of In-Plane Anisotropic Strain. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649:pp281-291
[42]T Yoshikawa, H Kosaka, K Kurihara, et al.. Complete polarization control of 8×8 vertical-cavity surface-emitting laser matrix arrays. Appl. Phys. Lett.,1995, v66: pp908-910
[43]A K Jansen Van Doorn, M P Van Exter, and J P Wowrdman. Tailoring the birefringence in a vertical-cavity semiconductor. Appl. Phys. Lett.,1996, v69:pp3635-3637
[44]Remco C Strijbos, Guy Verschaffelt, Martin Creusen. Controlled polarization switching in intra-cavity contacted VCSELs. Proceedings of SPIE-The International Society for Optical Engineering, 2OOO, v 3946, pp69-77
[45]Guy Yerschaffelt, W vander Yleuten, M Creusen, et al. Polarization Stabilization in Vertical-Cavity Surface -Emitting Lasers Through Asymmertric Current Injection. IEEE Photonics Technology letters, 2000, v12, n8:pp945-947
[46]Qiansuo Yang, Akihiro Sasoh. Frequency characteristics and dynamical behaviors of self-moduloation in vertical-cavity surface-emitting lasers. Optics Communications, 2003, v219, n1-6:pp307-315
[47]Z George Pan, Shijun Jiang, and Mario Dagenais. Optical injection induced polarization bistability in vertical-cavity surface-emitting lasers. Appl. Phys. Lett., 1993, v63, n22:pp2999-3001
[48]J Martin-Regalado, F Prati,M San Miguel, et al. Polarization Properties of Vertical-Cavity Surface-Emitting Lasers. IEEE Journal of Quantum Electronics, 1997, v33, n5: pp765-783
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[58]M P Van Exter, R F M Hendriks, and J P Woerdman. Physical insight into the polarization dynamics of VCSEL's. Phys. Rev. A, v57, pp2080-2090
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[2]潘炜，张晓霞，罗斌．垂直腔面发射半导体微腔激光器．物理学报，1999，v28，n4：pp210-216
[3]友清．发射蓝光的光泵InGaN垂直腔面发射激光器．激光与光电子学进展，1999，n11：pp44-45
[4]从征．同相发射的垂直腔面发射激光器．激光与光电子学进展，1999，n11：pp45
[5]1．55 μ m室温电抽运全晶格匹配Sb基垂直腔面发射激光器．激光与光电子学进展，2000，n9：pp58-59
[6]李雪梅，刘颖，姜秀英等．H型结构垂直腔面发射激光器．中国激光，1998，Vol．A25，n 1：pp18-20
[7]李雪梅，常玉春，宋俊峰等．室温连续可见光垂直腔面发射激光器．半导体光电，1999，v20，n1：pp31-33
[8]林世鸣，程澎，康学军等．低阈值红光垂直腔面发射激光器．高技术通讯，1999，n 7：pp17-19
[9]汪剑平．半导体激光器．北京：电子工业出版社，2000．pp176-177，184
[10]Koyama F, Schlenker D, et al. 1.5 W operation of superluminescent diode with highly strained GaInAs/GaAs quantum well emitting at 1.2 μm band. IEEE Interational Semiconductor Lasers Conference, 2000, pp71-72
[11]王莉，陈弘达，潘钟等．垂直腔面发射激光器的研究开发现状及应用．高技术通讯，2001，n4：pp104-108
[12]Agrawal G P, Dutta N K. Semiconductor Lasers. 2nd edition. New York: Van Nostrand Rinhold, 1993, pp462-468,473-485
[13]张存善，张延生，段晓峰等．垂直腔面发射激光器DBR结构反射特性分析．光电子·激光，2002，v13，n1：pp34-36
[14]张存善，赵红东，马丽丽等．激光器中研究DBR对发散角影响的新方法．光子学报，1997，v26，n1：pp23 1-234
[15]K Iga, F Koyama, and S Kinoshita. IEEE J. Quantum Electron, 1998, v24, n9:pp1845-1855
[16]赵红东，林世鸣，王守武．圆对称光栅对微腔激光器中光波的控制．光子学报，1996，v25，n5：pp407-412
[17]K Tai, R J Fischer, et al. Room-temperature continuous-wave vertical-cavity surfaceemitting GaAs injection lasers. Apply Physics Letter, 1989, v55, n24: pp2473-2475
[18]Yalentin N Morozov, John A Neff, and Haijun Zhou. Analysis of Vertical-Cavity SurfaceEmitting Laser Multimode Behavior. IEEE Journal of Quantum Electronics, 1997, v33, n6: pp980-988
[19]D Vakhshoori, J D Wynn, et al. Top-surface emitting lasers with 1.9V threshold voltage and efficiencies. Apply Physics Letter, 1993, v62, n13:pp1448-1450
[20]C J Chang-Hasnain, Y A Wu, et al. Low threshold buried herterostructure vertical cavity surface emitting laser. Apply Physics Letter, 1996, v63, n10: pp1307-1309
[21]G C Wilson, D M Kuchta, et al. Spatial hole burning and self-focusing in vertical-cavity
surface-emitting laser diodes. Apply Physics Letter, 1994, v64, n31:pp542-544
[22]Takashi Yoshikawa, Takeshi Kawakami, Hideaki Saito, et al. IEEE Journal of Quantum Electronics, 1998, v34, n6:pp1009-1015
[23]母国光．光学．北京：人民教育出版社，1979，pp457-460
[24]S Bandyopadhyay, Y Hong, P S Spencer, et al. VCSEL polarization Control by Optical Injection. IEEE Journal of Lightwave Technology, 2OO3, v21, n10: pp2395-2404
[25]K D Choquette, R P Schneider, K L Lear and R E Leibenguth. Gain-dependent polarization properties of vertical-cavity lases. IEEE J. Selec. Top. Quantum Electron, 1995, v1: pp661-666
[26]A K V Doorn, M P V Exter, and J P Woerdman. Elastooptic anisotropy and polarization orientation of VCSEL's. Appl. Phys. Lett.,1996, v69:pp1041-1043
[27]R F M Hendriks, M P V Exter, and J P Woerdman. Electro-optic birefringence in semiconductor vertical-cavity lasers. Appl. Phys. Lett. ,1997, v71:pp2599-2601
[28]M Sciamanna, C M asoller, F Rogister, et al. Fast pulsing dynamics of a vertical-cavity surface-emitting laser operating in the low-frequency fluctuation regime. Physical Review A. Atomic, Molecular, and Optical Physics, 2003, v68, n1: pp015805-1-015805-4
[29]M Sondermann, H Bohnet, and T Ackemann. Low-frequency fluctuations and polarization dynamics in vertical-cavity surface-emitting lasers with isotropic feedback. Physical Review A. Atomic, Molecular, and Optical Physics. 2003, v67, n2: pp 021802-1-021802-4
[30]S Bandyopadhyay, Y Hong, P S Spencer, et al. Experimental observation of anti-phase polarisation dynamics in VCSELS. Optics Communications, 2002, v202, n1-3:pp145-154
[31]F Prati, G Giacomelli, and F Matin. Competition between orthogonally polarized transverse modes in vertical-cavity surface-emitting lasers and its influence on intensity noise. Physical Review A. Atomic, Molecular, and Optical Physics, 2000, v62, n3:pp033810-1-033810-8
[32]Joachim Kaiser, Christian Degen and Wolfgang Elsasser. Polarization-switching influence on the intensity noise of vertical-cavity surface-emitting lasers. Joural of Optical Society of America B, 2002, v 19, n4: pp672-677,
[33]Josep Mulet, Claudio R Mirasso, and Maxi San Miguel. Polarization resolved intensity noise in vertical-cavity surface-emitting lasers. Physical Review A. Atomic, Molecular, and Optical Physics, 2001, v64, n2:pp023817-1-023817-8
[34]T Ackemann, M Sondermann. Characteristics of polarization switching in vertical-cavity surface-emitting lasers. Proceedings of SPIE-The International Society for Optical Engineering, 2001, v 4286:pp44-54
[35]K D Choquette, D A Richie and R E Leibenguth. Temperature dependence of gain-guided vertical surface emitting laser polarization. Appl. Phys. Lett.,1994, v64: pp2062-2064
[36]M P van Exter, M B Willemsen and J P Woerdman. Characterizing and understanding VCSEL polarizarion noise. Phys. Rev. A 58,1998, v3946:pp4191-4205
[37]J M Martin-Regalado, M San Miguel and N B Abraham. Polarization switching in quantum-
well vertical-cavity surface emitting lasers. Opt. Lett. ,1996, v21:pp351-353
[38]Bob Nagler, Michael Peeters, Jan Albert. Polarization-mode hopping in single-mode vertical-cavity suiface-emitting lasers:Theory and experiment. Physical Review A. Atomic, Molecular, and Optical Physics, 2003, v68, n1: pp013813-1-013813-8
[39]Joachim Hamm, Klaus Bohringer and Ortwin Hess. Spatially resolved polarization and temperature dynamics in quantum-well vertical-cavity surface-emitters: A mesoscopic approach. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v4646:pp176-189
[40]Guy Verschaffelt, Jan Alber, Krassimir Panajotov, Bob Nagler. Frequency response of modulation induced polarization switching in VCSELs. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649, pp245-256
[41]Michael Peeters, Krassimir Panajotov, Guy Verschaffelt et al. Polarization Behavior of Vertical-Cavity Surface-Emitting Lasers under the influence of In-Plane Anisotropic Strain. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649:pp281-291
[42]T Yoshikawa, H Kosaka, K Kurihara, et al.. Complete polarization control of 8×8 vertical-cavity surface-emitting laser matrix arrays. Appl. Phys. Lett.,1995, v66: pp908-910
[43]A K Jansen Van Doorn, M P Van Exter, and J P Wowrdman. Tailoring the birefringence in a vertical-cavity semiconductor. Appl. Phys. Lett.,1996, v69:pp3635-3637
[44]Remco C Strijbos, Guy Verschaffelt, Martin Creusen. Controlled polarization switching in intra-cavity contacted VCSELs. Proceedings of SPIE-The International Society for Optical Engineering, 2OOO, v 3946, pp69-77
[45]Guy Yerschaffelt, W vander Yleuten, M Creusen, et al. Polarization Stabilization in Vertical-Cavity Surface -Emitting Lasers Through Asymmertric Current Injection. IEEE Photonics Technology letters, 2000, v12, n8:pp945-947
[46]Qiansuo Yang, Akihiro Sasoh. Frequency characteristics and dynamical behaviors of self-moduloation in vertical-cavity surface-emitting lasers. Optics Communications, 2003, v219, n1-6:pp307-315
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