VCSEL椭圆偏振特性的研究
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摘要
垂直腔面发射激光器(VCSEL)较之传统的边发射激光器来说具有低阈值、单纵模工作、发散角小、动态调制频率高、易实现二维集成等优点,在光通信、光互联、图象信号处理等方面有着重要的应用前景;由于VCSEL是面发射并且器件结构一般为圆对称结构,所以材料增益和波导各向异性效应大大降低,输出光一般为椭圆偏振光,并且偏振的稳定性远不如边发射激光器。
本文从理论和实验上对VCSEL的椭圆偏振特性进行了研究,具体工作可以概括如下:
1、分析了偏振光、椭圆偏振光以及圆偏振光与自然光的区别,偏振光的性质与表述方法;建立了反映偏振特性的速率方程。
2、分析了垂直腔面发射激光器的偏振原理,垂直腔面发射激光器椭圆偏振方程的模拟。
3、对VSEL偏振进行了相关特性的试验研究:为了提高VCSEL的通信网络性能,完全有必要对其偏振相关特性进行深入的研究,探索更加有效控制偏振选择损耗或增益的办法,以抑制不希望的偏振基态的激射。
4、偏振光偏振态的理论研究;讨论了自然光、线偏振、圆偏振与椭圆偏振在理论模拟上的区别;分别模拟了线偏振,圆偏振、椭圆偏振以及自然光旋转1/4波片的检测理论图;给出了光的试验检测结果分析,并比较分析了理论模拟与试验结果。
Vertical-cavity surface-emitting lasers (VCSEL) have distinct advantage over conventional edge emitting lasers. They are especially suitable for optical communication systems, optical interconnects, parallel optical signal processing. In VCSEL, the material gain and wave guide anisotropy are considerably reduced because of their cylindrical symmetry and their surface-emitting. So they lead to their polarization behavior not as good as edge lasers. The paper researched the polarization of VCSEL theoretically and experimentally, the main work is as follows:1 、 we studied the difference of polarized light 、 elliptical polarized light 、 crcularly polarized light and natural light, poalized light's character and the express method;we setted up the rate equation to show polarization character.2、 we analysed the VCSEL's polarization theory and resolved of elliptical polarization equation.3、we researched the polarization character of VCSEL. In order to enhance VCSEL's communication net capability, it is necessary to research the polarization character , explore the more effective control polarization choice ullage or plus methods to restrict the stimulate that we don not hope, so we gain the steady VCSEL groupware.4、 we have researched theory of polarization state . we have talked about linear polarization light、 circular polarization、 elliptical polarization's detected theory chartWe researched the polarized light theory and discussed the natural light ,linear polarization, circular polarization, ellipse polarization and the theory chart that natural light circumgyrate 1/4 retardation .
本文从理论和实验上对VCSEL的椭圆偏振特性进行了研究,具体工作可以概括如下:
1、分析了偏振光、椭圆偏振光以及圆偏振光与自然光的区别,偏振光的性质与表述方法;建立了反映偏振特性的速率方程。
2、分析了垂直腔面发射激光器的偏振原理,垂直腔面发射激光器椭圆偏振方程的模拟。
3、对VSEL偏振进行了相关特性的试验研究:为了提高VCSEL的通信网络性能,完全有必要对其偏振相关特性进行深入的研究,探索更加有效控制偏振选择损耗或增益的办法,以抑制不希望的偏振基态的激射。
4、偏振光偏振态的理论研究;讨论了自然光、线偏振、圆偏振与椭圆偏振在理论模拟上的区别;分别模拟了线偏振,圆偏振、椭圆偏振以及自然光旋转1/4波片的检测理论图;给出了光的试验检测结果分析,并比较分析了理论模拟与试验结果。
Vertical-cavity surface-emitting lasers (VCSEL) have distinct advantage over conventional edge emitting lasers. They are especially suitable for optical communication systems, optical interconnects, parallel optical signal processing. In VCSEL, the material gain and wave guide anisotropy are considerably reduced because of their cylindrical symmetry and their surface-emitting. So they lead to their polarization behavior not as good as edge lasers. The paper researched the polarization of VCSEL theoretically and experimentally, the main work is as follows:1 、 we studied the difference of polarized light 、 elliptical polarized light 、 crcularly polarized light and natural light, poalized light's character and the express method;we setted up the rate equation to show polarization character.2、 we analysed the VCSEL's polarization theory and resolved of elliptical polarization equation.3、we researched the polarization character of VCSEL. In order to enhance VCSEL's communication net capability, it is necessary to research the polarization character , explore the more effective control polarization choice ullage or plus methods to restrict the stimulate that we don not hope, so we gain the steady VCSEL groupware.4、 we have researched theory of polarization state . we have talked about linear polarization light、 circular polarization、 elliptical polarization's detected theory chartWe researched the polarized light theory and discussed the natural light ,linear polarization, circular polarization, ellipse polarization and the theory chart that natural light circumgyrate 1/4 retardation .
引文
[1] 刘文揩,VCSEL的偏振特性与半导体微腔效应的研究:[博士论文].北京:中科院半导体所,2002
[2] 韩力英 垂直腔面发射激光器偏振特性的研究.[硕士论文]. 2004,河北工业大学
[3] 段晓峰,垂直腔面发射激光器的光、电特性分析:[硕士论文].2001,河北工业大学
[4] 张存善、马丽丽DBR对微腔激光器光束发散角的影响及光互连中两微腔激光器耦合机制的研究.[硕士论文]. 1996,河北工业大学
[5] 张存善、刘文楷 垂直腔面发射激光器光互连特性的研究[硕士论文].1999河北工业大学
[6] 张存善、杨光 半导体量子阱微腔激光器激子效应研究[硕士论文].2003,河北工业大学
[7] 汪剑平.半导体激光器.北京:电子工业出版社,2000.pp176-177,184
[8] Koyama F, Schlenker D, et al. 1.5W operation of superluminescent diode with highly strained GaInAs/GaAs quantum well emitting at 1.2 μm band. IEEE Interational Semiconductor Lasers Conference, 2000, pp71-72
[9] Chang-Hasnain C J, Harbison J P, Hasnain G, etal. Dynamic, polarization and transverse mode characteristics of vertical cavity surface emitting lasers[J].IEEE J Quantunm Electron, 1991, 27:1402-1409
[10] Choquette K D, Schneider R P, Jr.,Lear K L, et al. Gain-dependent polarization properties of vertical-cavity lasers[j].IEEE J Select Topics Quantum Electron, 1995,1:661-666
[11] Choquette K D, Richie D A, Leibenguth R E. Temperature dependence of gain-dependence of gain-guided vertical-cavity surface-emitting laser polarization[J].Appl Phys Lett, 1994, 64:2062-2064.
[12] 张存善,赵红东,马丽丽等.激光器中研究DBR对发散角影响的新方法.光子学报,1997,v26,n1:pp231-234
[13] K Iga, F Koyama, and S Kinoshita. IEEE J. Quantum Electron, 1998, v24, n9:pp1845-1855
[14] 赵红东,林世鸣,王守武.圆对称光栅对微腔激光器中光波的控制.光子学报,1996,v25,n5:pp407-412
[15] K Tai, R J Fischer, et al. Room-temperature continuous-wave vertical-cavity surface-emitting GaAs injection lasers. Apply Physics Letter, 1989, v55, n24:pp2473-2475
[16] Valentin N Morozov, John A Neff, and Haijun Zhou. Analysis of Vertical-Cavity Surface-Emitting Laser Multimode-Behavior. IEEE Journal of Quantum Electronics, 1997, v33, n6:pp980-988
[17] D Vakhshoori, J D Wynn, et al. Top-surface emitting lasers with 1.9V threshold voltage and efficiencies. Apply Physics Letter, 1993, v62, n13:pp1448-1450
[18] C J Chang-Hasnain, Y A Wu , et al. Low threshold buried herterostructure vertical cavity surface emitting laser. Apply Physics Letter, 1996,v63,n10: PP1307-1309
[19]G C Wilson,D M Kuchta, et al. Spatial hole burning and self-focusing in vertical-cavity surface-emitting laser diodes . Apply Physics Letter,1994,v64, n31: pp542~544
[20]Takashi Yoshikawa, Takeshi Kawakami, Hideaki Saito, et al. IEEE Journal of Quantum Electronics, 1998, v34, n6: ppl009-1015
[21] 母国光.光学.北京:人民教育出版社,1979, pp457-460
[22]S Bandyopadhyay, Y Hong, P S Spencer, et al. VCSEL polarization Control by Optical Injection. IEEE Journal of Lightwave Technology,2003, v21,n10: pp2395-2404
[23]K D Choquette,R P Schneider, K L Lear and R E Leibenguth. Gain-dependent polarization properties of vertical-cavity lases. IEEE J.Selec. Top. Quantum Electron, 1995, v1: pp661-666
[24]A K V Doorn, M P V Exter, and J P Woerdman. Elastooptic anisotropy and polarization orientation of VCSEL' s. Appl.Phys.Lett., 1996,v69: ppl041-1043
[25]R F M Hendriks, M P V Exter, and J P Woerdman. Electro-optic birefringence in semiconductor vertical-cavity lasers. Appl. Phys. Lett. ,1997,v71: pp2599-2601
[26]M Sciamanna, C M asoller, F Rogister, et al. Fast pulsing dynamics of a vertical-cavity surface-emitting laser operating in the low-frequency fluctuation regime. Physical Review A. Atomic, Molecular, and Optical Physics, 2003,v68,n1: pp015805-l-015805-4
[27]M Sondermann, H Bohnet, and T Ackemann . Low-frequency fluctuations and polarization dynamics in vertical-cavity surface-emitting lasers with isotropic feedback . Physical Review A. Atomic, Molecular, and Optical Physics. 2003,v67,n2: pp 021802-1-021802-4
[28]S Bandyopadhyay, Y Hong, P S Spencer , et al. Experimental observation of anti-phase polarisation dynamics in VCSELS. Optics Communications, 2002, v202, n 1-3: ppl45-154
[29]F Prati,G Giacomelli, and F Marin. Competition between orthogonally polarized transverse modes in vertical-cavity surface-emitting lasers and its influence on intensity noise. Physical Review A. Atomic, Molecular, and Optical Physics, 2000, v62, n3: pp033810-1-033810-8
[30]Joachim Kaiser, Christian Degen and Wolfgang Elsasser. Polarization-switching influence on the intensity noise of vertical-cavity surface-emitting lasers. Joural of Optical Society of America B,2002, v 19, n4: pp672-677,
[31] Josep Mulet,Claudio R Mirasso, and Maxi San Miguel. Polarization resolved intensity noise in vertical-cavity surface-emitting lasers. Physical Review A. Atomic, Molecular, and Optical Physics,2001, v64,n2: pp023817-l-023817-8
[32]T Ackemann, M Sondermann . Characteristics of polarization switching in vertical-cavity surface-emitting lasers. Proceedings of SPIE-The International Society for Optical Engineering, 2001,v 4286: pp44-54
[33] K D Choquette, D A Richie and R E Leibenguth. Temperature dependence of gain-guided vertical surface emitting laser polarization. Appl. Phys. Lett., 1994, v64: pp2062-2064
[34] M P van Exter, M B Willemsen and J P Woerdman. Characterizing and understanding VCSEL polarizarion noise. Phys. Rev. A 58,1998,v3946: pp4191-4205
[35]J M Martin-Regalado, M San Miguel and N B Abraham. Polarization switching in quantum-well vertical-cavity surface emitting lasers. Opt. Lett. ,1996, v21: pp351-353
[36]Bob Nagler, Michael Peeters, Jan Albert. Polarization-mode hopping in single-mode vertical-cavity suiface-emitting lasers:Theory and experiment. Physical Review A. Atomic, Molecular, and Optical Physics,2003,v68, n1: pp013813-l-013813-8
[37] Joachim Hamm, Klaus Bohringer and Ortwin Hess. Spatially resolved polarization and temperature dynamics in quantum-well vertical-cavity surface-emitters: A mesoscopic approach. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v4646: ppl76-189
[38]Guy Verschaffelt, Jan Alber, Krassimir Panajotov, Bob Nagler . Frequency response of modulation induced polarization switching in VCSELs. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649, pp245-256
[39] Michael Peeters, Krassimir Panajotov, Guy Verschaffelt et al. Polarization Behavior of Vertical-Cavity Surface-Emitting Lasers under the influence of In-Plane Anisotropic Strain. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649: pp281-291
[40]T Yoshikawa,H Kosaka, K Kurihara, et al. . Complete polarization control of 8 X 8 vertical-cavity surface-emitting laser matrix arrays. Appl. Phys. Lett., 1995, v 66: pp908-910
[41]A K Jansen Van Doorn, M P Van Exter, and J P Wowrdman. Tailoring the birefringence in a vertical-cavity semiconductor. Appl. Phys. Lett., 1996, v69: pp3635-3637
[42] Remco C Strijbos, Guy Verschaffelt, Martin Creusen. Controlled polarization switching in intra-cavity contacted VCSELs . Proceedings of SPIE-The International Society for Optical Engineering, 2000, v 3946, pp69-77
[43]Guy Verschaffelt, W vander Vleuten, M Creusen, et al. Polarization Stabilization in Vertical-Cavity Surface - Emitting Lasers Through Asymmertric Current Injection. IEEE Photonics Technology letters,2000,vl2,n8: pp945-947
[44]Qiansuo Yang, Akihiro Sasoh. Frequency characteristics and dynamical behaviors of self-moduloation in vertical-cavity surface-emitting lasers . Optics Communications, 2003,v219,n1-6: pp307-315
[45] Z George Pan, Shijun Jiang, and Mario Dagenais. Optical injection induced polarization bistability in vertical-cavity surface-emitting lasers. Appl.Phys.Lett. , 1993, v63, n22: pp2999-3001
[46] J Martin-Regalado, F Prati,M San Miguel, et al. Polarization Properties of Vertical- Cavity Surface-Emitting Lasers . IEEE Journal of Quantum Electronics, 1997, v33, n5: pp765-783
[47]Lei Zhuang, Steve Schablitsky, Rick C Shi and Stephen Y Chou. Fabrication and performance of thin amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization. Journal of Society Technology B,1996, vl4, n6: pp4055-4057 [50]T Ohtoshi, T Kuroda, A Niwa, et al. . Appl.Phys. Lett. , 1994, v65: ppl886
[48]CA Berseth, B Dwi r, I Utke, et al. Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography. J. Vac. Sci. Technol. B,1999, v17, n6: pp3222-3225
[49] Jung-Hoon Ser, Young-Gu Ju,, Jae-Heon Shin, et al. Polarization stabilization of vertical-cavity top-surface-emitting lasers by inscription of fine metal-interlaced gratings. Appl. Phys. Lett.,1995, v66, n22: pp2769-2771
[50] J Faist and F-K Reinhart . Phase modulation in GaAs/AlGaAs double heterostructures. II.experiment. J. Appl. Phys. , 1990, v67: pp7006-7012
[51] M San Miguel, Q Feng and J V Moloney. Light-polarization dynamics in surface emitting semiconductor lasers. Physical Review A. Atomic, Molecular, and Optical Physics, 1995, v52, n2: ppl728-1739
[52] J-P Hermier,M I Kolobov, I Maurin,et al . Quantum spin-flip model of vertical-cavity surface-emitting lasers . Physical Review A. Atomic, Molecular,and Optical Physics, 2002, v65,n5: pp538251-5382513
[53] J Martin-Regalado, S Balle, and M San Miguel, et al. Polarization and transverse mode selection in quantum-well vertical-cavity surface-emitting lasers. Opticas Letters, 1997, v22: pp460-462
[54]M P Van Exter, R F M Hendriks, and J P Woerdman. Physical insight into the polarization dynamics of VCSEL's. Phys. Rev. A, v57, pp2080-2090
[2] 韩力英 垂直腔面发射激光器偏振特性的研究.[硕士论文]. 2004,河北工业大学
[3] 段晓峰,垂直腔面发射激光器的光、电特性分析:[硕士论文].2001,河北工业大学
[4] 张存善、马丽丽DBR对微腔激光器光束发散角的影响及光互连中两微腔激光器耦合机制的研究.[硕士论文]. 1996,河北工业大学
[5] 张存善、刘文楷 垂直腔面发射激光器光互连特性的研究[硕士论文].1999河北工业大学
[6] 张存善、杨光 半导体量子阱微腔激光器激子效应研究[硕士论文].2003,河北工业大学
[7] 汪剑平.半导体激光器.北京:电子工业出版社,2000.pp176-177,184
[8] Koyama F, Schlenker D, et al. 1.5W operation of superluminescent diode with highly strained GaInAs/GaAs quantum well emitting at 1.2 μm band. IEEE Interational Semiconductor Lasers Conference, 2000, pp71-72
[9] Chang-Hasnain C J, Harbison J P, Hasnain G, etal. Dynamic, polarization and transverse mode characteristics of vertical cavity surface emitting lasers[J].IEEE J Quantunm Electron, 1991, 27:1402-1409
[10] Choquette K D, Schneider R P, Jr.,Lear K L, et al. Gain-dependent polarization properties of vertical-cavity lasers[j].IEEE J Select Topics Quantum Electron, 1995,1:661-666
[11] Choquette K D, Richie D A, Leibenguth R E. Temperature dependence of gain-dependence of gain-guided vertical-cavity surface-emitting laser polarization[J].Appl Phys Lett, 1994, 64:2062-2064.
[12] 张存善,赵红东,马丽丽等.激光器中研究DBR对发散角影响的新方法.光子学报,1997,v26,n1:pp231-234
[13] K Iga, F Koyama, and S Kinoshita. IEEE J. Quantum Electron, 1998, v24, n9:pp1845-1855
[14] 赵红东,林世鸣,王守武.圆对称光栅对微腔激光器中光波的控制.光子学报,1996,v25,n5:pp407-412
[15] K Tai, R J Fischer, et al. Room-temperature continuous-wave vertical-cavity surface-emitting GaAs injection lasers. Apply Physics Letter, 1989, v55, n24:pp2473-2475
[16] Valentin N Morozov, John A Neff, and Haijun Zhou. Analysis of Vertical-Cavity Surface-Emitting Laser Multimode-Behavior. IEEE Journal of Quantum Electronics, 1997, v33, n6:pp980-988
[17] D Vakhshoori, J D Wynn, et al. Top-surface emitting lasers with 1.9V threshold voltage and efficiencies. Apply Physics Letter, 1993, v62, n13:pp1448-1450
[18] C J Chang-Hasnain, Y A Wu , et al. Low threshold buried herterostructure vertical cavity surface emitting laser. Apply Physics Letter, 1996,v63,n10: PP1307-1309
[19]G C Wilson,D M Kuchta, et al. Spatial hole burning and self-focusing in vertical-cavity surface-emitting laser diodes . Apply Physics Letter,1994,v64, n31: pp542~544
[20]Takashi Yoshikawa, Takeshi Kawakami, Hideaki Saito, et al. IEEE Journal of Quantum Electronics, 1998, v34, n6: ppl009-1015
[21] 母国光.光学.北京:人民教育出版社,1979, pp457-460
[22]S Bandyopadhyay, Y Hong, P S Spencer, et al. VCSEL polarization Control by Optical Injection. IEEE Journal of Lightwave Technology,2003, v21,n10: pp2395-2404
[23]K D Choquette,R P Schneider, K L Lear and R E Leibenguth. Gain-dependent polarization properties of vertical-cavity lases. IEEE J.Selec. Top. Quantum Electron, 1995, v1: pp661-666
[24]A K V Doorn, M P V Exter, and J P Woerdman. Elastooptic anisotropy and polarization orientation of VCSEL' s. Appl.Phys.Lett., 1996,v69: ppl041-1043
[25]R F M Hendriks, M P V Exter, and J P Woerdman. Electro-optic birefringence in semiconductor vertical-cavity lasers. Appl. Phys. Lett. ,1997,v71: pp2599-2601
[26]M Sciamanna, C M asoller, F Rogister, et al. Fast pulsing dynamics of a vertical-cavity surface-emitting laser operating in the low-frequency fluctuation regime. Physical Review A. Atomic, Molecular, and Optical Physics, 2003,v68,n1: pp015805-l-015805-4
[27]M Sondermann, H Bohnet, and T Ackemann . Low-frequency fluctuations and polarization dynamics in vertical-cavity surface-emitting lasers with isotropic feedback . Physical Review A. Atomic, Molecular, and Optical Physics. 2003,v67,n2: pp 021802-1-021802-4
[28]S Bandyopadhyay, Y Hong, P S Spencer , et al. Experimental observation of anti-phase polarisation dynamics in VCSELS. Optics Communications, 2002, v202, n 1-3: ppl45-154
[29]F Prati,G Giacomelli, and F Marin. Competition between orthogonally polarized transverse modes in vertical-cavity surface-emitting lasers and its influence on intensity noise. Physical Review A. Atomic, Molecular, and Optical Physics, 2000, v62, n3: pp033810-1-033810-8
[30]Joachim Kaiser, Christian Degen and Wolfgang Elsasser. Polarization-switching influence on the intensity noise of vertical-cavity surface-emitting lasers. Joural of Optical Society of America B,2002, v 19, n4: pp672-677,
[31] Josep Mulet,Claudio R Mirasso, and Maxi San Miguel. Polarization resolved intensity noise in vertical-cavity surface-emitting lasers. Physical Review A. Atomic, Molecular, and Optical Physics,2001, v64,n2: pp023817-l-023817-8
[32]T Ackemann, M Sondermann . Characteristics of polarization switching in vertical-cavity surface-emitting lasers. Proceedings of SPIE-The International Society for Optical Engineering, 2001,v 4286: pp44-54
[33] K D Choquette, D A Richie and R E Leibenguth. Temperature dependence of gain-guided vertical surface emitting laser polarization. Appl. Phys. Lett., 1994, v64: pp2062-2064
[34] M P van Exter, M B Willemsen and J P Woerdman. Characterizing and understanding VCSEL polarizarion noise. Phys. Rev. A 58,1998,v3946: pp4191-4205
[35]J M Martin-Regalado, M San Miguel and N B Abraham. Polarization switching in quantum-well vertical-cavity surface emitting lasers. Opt. Lett. ,1996, v21: pp351-353
[36]Bob Nagler, Michael Peeters, Jan Albert. Polarization-mode hopping in single-mode vertical-cavity suiface-emitting lasers:Theory and experiment. Physical Review A. Atomic, Molecular, and Optical Physics,2003,v68, n1: pp013813-l-013813-8
[37] Joachim Hamm, Klaus Bohringer and Ortwin Hess. Spatially resolved polarization and temperature dynamics in quantum-well vertical-cavity surface-emitters: A mesoscopic approach. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v4646: ppl76-189
[38]Guy Verschaffelt, Jan Alber, Krassimir Panajotov, Bob Nagler . Frequency response of modulation induced polarization switching in VCSELs. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649, pp245-256
[39] Michael Peeters, Krassimir Panajotov, Guy Verschaffelt et al. Polarization Behavior of Vertical-Cavity Surface-Emitting Lasers under the influence of In-Plane Anisotropic Strain. Proceedings of SPIE-The International Society for Optical Engineering, 2002, v 4649: pp281-291
[40]T Yoshikawa,H Kosaka, K Kurihara, et al. . Complete polarization control of 8 X 8 vertical-cavity surface-emitting laser matrix arrays. Appl. Phys. Lett., 1995, v 66: pp908-910
[41]A K Jansen Van Doorn, M P Van Exter, and J P Wowrdman. Tailoring the birefringence in a vertical-cavity semiconductor. Appl. Phys. Lett., 1996, v69: pp3635-3637
[42] Remco C Strijbos, Guy Verschaffelt, Martin Creusen. Controlled polarization switching in intra-cavity contacted VCSELs . Proceedings of SPIE-The International Society for Optical Engineering, 2000, v 3946, pp69-77
[43]Guy Verschaffelt, W vander Vleuten, M Creusen, et al. Polarization Stabilization in Vertical-Cavity Surface - Emitting Lasers Through Asymmertric Current Injection. IEEE Photonics Technology letters,2000,vl2,n8: pp945-947
[44]Qiansuo Yang, Akihiro Sasoh. Frequency characteristics and dynamical behaviors of self-moduloation in vertical-cavity surface-emitting lasers . Optics Communications, 2003,v219,n1-6: pp307-315
[45] Z George Pan, Shijun Jiang, and Mario Dagenais. Optical injection induced polarization bistability in vertical-cavity surface-emitting lasers. Appl.Phys.Lett. , 1993, v63, n22: pp2999-3001
[46] J Martin-Regalado, F Prati,M San Miguel, et al. Polarization Properties of Vertical- Cavity Surface-Emitting Lasers . IEEE Journal of Quantum Electronics, 1997, v33, n5: pp765-783
[47]Lei Zhuang, Steve Schablitsky, Rick C Shi and Stephen Y Chou. Fabrication and performance of thin amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization. Journal of Society Technology B,1996, vl4, n6: pp4055-4057 [50]T Ohtoshi, T Kuroda, A Niwa, et al. . Appl.Phys. Lett. , 1994, v65: ppl886
[48]CA Berseth, B Dwi r, I Utke, et al. Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography. J. Vac. Sci. Technol. B,1999, v17, n6: pp3222-3225
[49] Jung-Hoon Ser, Young-Gu Ju,, Jae-Heon Shin, et al. Polarization stabilization of vertical-cavity top-surface-emitting lasers by inscription of fine metal-interlaced gratings. Appl. Phys. Lett.,1995, v66, n22: pp2769-2771
[50] J Faist and F-K Reinhart . Phase modulation in GaAs/AlGaAs double heterostructures. II.experiment. J. Appl. Phys. , 1990, v67: pp7006-7012
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