非连续平面的平面形状误差测量技术
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摘要
精密测量是工业精密加工的重要环节之一,一个工件在精加工前后都要进行其形状的精密测量以便于指导加工和评定工件是否符合加工要求。在大型装备制造业当中,经常出现要求高精度加工的情况,需要进行高精度测量的大平面,而现有的平面形状误差在线测量系统和方法只适合于测量连续矩形平面,对于工业生产中经常出现的非连续平面,其平面形状误差在线测量目前尚无有效方法。
为了实现非连续平面的平面形状误差测量,本文建立了一套平面形状误差在线测量系统和方法,该系统使用电涡流传感器作为距离传感器,以基于数字信号处理器的电路作为数据采集系统,运用工业平板电脑实现误差分离、评定等数据处理；测量方法则在时域最小二乘逐次两点法基础上,提出了自适应误差分离矩阵技术,该技术根据测量数据调整时域最小二乘逐次两点法中的误差分离矩阵,使最小二乘逐次两点法能够用于非连续平面的平面形状误差在线测量,这种最小二乘逐次两点法称为自适应矩阵时域最小二乘逐次两点法。探索了基于不规则频域四点法的频域非连续误差分离算法。通过使用自适应矩阵时域最小二乘逐次两点法,本文实现了对非连续平面进行平面形状误差测量,解决了时域最小二乘逐次两点法只能对矩形被测面进行测量的缺点。
通过在实际工作环境下,使用本文所述的非连续平面的平面度误差测量系统对连续平面的平面形状误差进行测量实验,由实验结果可知系统精度良好；使用自适应矩阵时域最小二乘逐次两点法对网格数10乘9的非连续平面模拟采样数据进行误差分离实验,将得到的误差分离结果与标准的时域两点法的误差分离结果相比较。通过比较证明该方法误差分离完整,且不引入额外误差。
实验结果证明了非连续平面的平面度误差测量系统精度不大于0.002mm,自适应矩阵时域最小二乘逐次两点法可实现非连续、非规则平面的在线测量。
Accurate measurement is a key area for high level industrial process. A build block needs to be measured before and after process for guide and to know the result of the processing. There are pressing needs of non-linear surface measurement in heavy industrial equipment production.
Most of the current methods of accurate surface form error measurement only work on linear surface, there no available accurate method for non-linear surface. This paper fund an online surface form error measurement system based on Time domain least-square serial two-point method which been upgrade by self-adaptable error separation matrix technique and other methods for uplift its ability to measure non-linear surface. The self-adaptable error separation matrix technique is allowed adjustment being placed automatically to the error separation matrix for non-linear surface error separation without compromise the accuracy of the system.
Experiment preformed on a linear surface in a realistic environment shows that the measurement system is accurate. The comparison of the result from the simulation which was being run on a non-linear surface of1.5m*1.35m clearly shows that the method this paper shows didn't compromise accuracy of the system which means that the method this paper fund able to work on non-linear surface without compromise accuracy.
为了实现非连续平面的平面形状误差测量,本文建立了一套平面形状误差在线测量系统和方法,该系统使用电涡流传感器作为距离传感器,以基于数字信号处理器的电路作为数据采集系统,运用工业平板电脑实现误差分离、评定等数据处理；测量方法则在时域最小二乘逐次两点法基础上,提出了自适应误差分离矩阵技术,该技术根据测量数据调整时域最小二乘逐次两点法中的误差分离矩阵,使最小二乘逐次两点法能够用于非连续平面的平面形状误差在线测量,这种最小二乘逐次两点法称为自适应矩阵时域最小二乘逐次两点法。探索了基于不规则频域四点法的频域非连续误差分离算法。通过使用自适应矩阵时域最小二乘逐次两点法,本文实现了对非连续平面进行平面形状误差测量,解决了时域最小二乘逐次两点法只能对矩形被测面进行测量的缺点。
通过在实际工作环境下,使用本文所述的非连续平面的平面度误差测量系统对连续平面的平面形状误差进行测量实验,由实验结果可知系统精度良好；使用自适应矩阵时域最小二乘逐次两点法对网格数10乘9的非连续平面模拟采样数据进行误差分离实验,将得到的误差分离结果与标准的时域两点法的误差分离结果相比较。通过比较证明该方法误差分离完整,且不引入额外误差。
实验结果证明了非连续平面的平面度误差测量系统精度不大于0.002mm,自适应矩阵时域最小二乘逐次两点法可实现非连续、非规则平面的在线测量。
Accurate measurement is a key area for high level industrial process. A build block needs to be measured before and after process for guide and to know the result of the processing. There are pressing needs of non-linear surface measurement in heavy industrial equipment production.
Most of the current methods of accurate surface form error measurement only work on linear surface, there no available accurate method for non-linear surface. This paper fund an online surface form error measurement system based on Time domain least-square serial two-point method which been upgrade by self-adaptable error separation matrix technique and other methods for uplift its ability to measure non-linear surface. The self-adaptable error separation matrix technique is allowed adjustment being placed automatically to the error separation matrix for non-linear surface error separation without compromise the accuracy of the system.
Experiment preformed on a linear surface in a realistic environment shows that the measurement system is accurate. The comparison of the result from the simulation which was being run on a non-linear surface of1.5m*1.35m clearly shows that the method this paper shows didn't compromise accuracy of the system which means that the method this paper fund able to work on non-linear surface without compromise accuracy.
引文
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[2]蔚文平,平面度的在线检测及补偿方法的研究,航空精密制造技术,1997,33(5)：40-43
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[3]苏恒,洪迈生,李自军,等,基于频域——时域的机场直行部件运动误差在线测量,仪器仪表学报,2003,24(3)：275-280
[4]Zhang Lei, Yang Xiumin, Li Xiaofei, et al, Experimental Research and Establishment of the Model of the Two-probe Flatness Error Separation, The 2009 IEEE International Conference on Industrial Technology, Gippsland VIC:ICIT,2009:1-6
[5]洪迈生,苏恒,熊诗波,等,数控机床运动误差检测技术(待续)组合机床与自动化加工技术,2002,(1)：18-23
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[7]李济顺,洪迈生,形状误差分离统一理论——解的确定性准则,上海交通大学学报,1998,32(5)：46-48,
[8]Julio Molleda, Ruben Usamentiaga, Daniel F, Garcia, et al, Shape Measurement of Steel Strips Using a Laser-Based Three-Dimensional Reconstruction Technique, IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS,2011,47(4):1536-1544
[9]杨碧波,赵文宏,赵蓉,等,大尺寸平面直线度检测方法的研究,机电工程,2011,28(1)：99-102
[10]雷凯,秦哲,区锐相,平面度误差评定算法及程序设计,机床与液压,2011,39(4)：87-91
[11]Zhu Shiping, Fang Jiancheng, ZhouRui, et al, A New Noncontact Flatness Measuring System of Large 2-D Flat Workpiece, IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT,2008,12(57):2891-2904
[12]Daniel F, Garcia, Marcos A, del Rio, FLATNESS DEFECT MEASUREMENT SYSTEM FOR STEEL INDUSTRY BASED ON A REAL-TIME LINEAR-IMAGE PROCESSOR, Systems, Man and Cybernetics,1993, Systems Engineering in the Service of Humans, Le Touquet:Systems, Man and Cybernetics,1993,331-336 (Vol,3)
[13]Ruben Usamentiaga, Julio Molleda, Daniel F, Garcla, et al, Machine Vision System for Flatness Control Feedback,2009 Second International Conference on Machine Vision Dubai:ICMV,2009,105-110
[14]Julio Molleda, Ruben Usamentiaga, Daniel F, Garcla, et al, Shape Measurement of Steel Strips Using a Laser-Based Three-Dimensional Reconstruction Technique, IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS,2011,47(4):1536-1544
[15]洪迈生,邓宗煌,陈健强等,精确的时域三点法圆度误差分离技术,上海交通大学学报,2000.34(10)：1318-1319
[16]Zhang Yun, Tao Tao, Mei Xuesong, et al, An Online Spindle Rotation Error Measurement System Based on Improved Three Point Method, The Ninth International Conference on Electronic Measurement & Instruments, Beijing, JCEMI,2009:2-651-2-656
[17]常娜,被测面在线测量误差分离技术的研究,大连海事大学,2011,7
[18]张善锤,于瀛洁,张之江,直线度平面度测量技术,中国计量出版社,175-192
[19]Aoki Y, Ozono S.On a New Method of Roundness Measurement Based on the Three-Point Method.J.Jpn.Soc.Prec.Eng., (in Japanese).1966,32(12):831-836.
[20]Ruben Usamentiaga, Julio Molleda, Daniel F, Garcla, et al, Machine Vision System for Flatness Control Feedback,2009 Second International Conference on Machine Vision Dubai:ICMV,2009,105-110
[21]洪迈生,魏元雷,李济顺,一维和多维误差分离技术的统一理论,中国机械工程,2000,11(3)：245-248
[22]李济顺,张洛平,洪迈生,误差分离统一理论-时域频域分离一致性,计量学报,2002,23(3)：164-166
[23]洪迈生,蔡萍,多位法误差分离技术的统一方程及可操作性,纳米技术与精密工程,2004,2(1)：59-64
[24]郝群,刘巽尔,王信义.一种在线测量平面度误差的新方法.航空计测技术.1996,16(4)：3-9.
[25]蔚文平.平面度的在线检测及补偿方法的研究.航空精密制造技术术.1997,33(5)：40-43.
[26]刘兴占,何真,梁晋文.平面度误差分离法及实时测量仪.中国,实用新型,CN88107139.0.1988.
[27]Itoigawa R, Funabashi K, Nakamura T. Spherical form error measurement with two-dimensional Fourier trans-form.Trans Jpn Soc Mech Eng, Series C.1990,56(524):1028-1033.
[28]Kiyono Satoshi, Ge Zongtao.Basic study of the measurement of 2-D surface profile. JSME International Journal, Series C.1995,38(3):494-500.
[29]祝斌,洪迈生,李济顺.基于二维Fourier变换的平面形状误差分离新方法.上海交通大学学报.1998,32(12)：34-37.
[30]孙剑,张杰,苏兰海,曹建国,基于投影条纹法的带钢平坦度检测系统,仪器仪表学报第28卷第4期,2007年4月：743-747
[31]祝斌,洪迈生,李济顺.基于二维Fourier变换的平面形状误差分离新方法.上海交通大学学报.1998,32(12)：34-37.
[32]王雪妮,施展,超精密平面度在线检测方法研究,精密制造与自动化,2009,3：22-24
[33]张善锤,于瀛洁,张之江,直线度平面度测量技术,北京：中国计量出版社,1997
[34]洪迈生,李自军.广义位移传感器在形状误差和误差运动分离中的读数贡献.光学技术.2002,28(6)504-507.
[35]王素红.利用电涡流传感器测量位移.大学物理实验.2000,13(1)：18-19.
[36]余长胜,电涡流效应的等效测量及其在电涡流传感器上的应用,传感器技术,1987(Z1)：84-85
[37]李哲英,洛丽,刘元盛.DSP基础理论与应用技术.北京：北京航空航天大学出版社,2002.
[38]汪春梅,孙洪波.TMS320C55x DSP原理及应用.北京：电子工业出版社,2008.
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