LD泵浦的266nm全固态紫外激光器研究
摘要
紫外激光在工业、医疗和科学研究等领域有着广泛的应用,而LD泵浦的全固态紫外激光器已经成为新一代紫外激光光源,属于激光器件研究领域的前沿性课题,本文围绕全固态紫外激光器进行了理论分析和实验研究。
第一章介绍了紫外激光的特点和应用以及LD泵浦的266nm全固态紫外激光器研究概况。第二章阐述了V型折叠腔的设计理论;从激光器速率方程出发,对调Q激光器的峰值功率、脉冲能量与脉冲的时间特性等参数进行了分析,并对声光调Q技术进行了研究。第三章阐述了二次谐波产生的机理,分析了相位匹配原理和相位匹配方法,以及匹配宽度等问题,并总结了常用倍频晶体特别是四倍频晶体的特性。第四章分析了Nd:YAG晶体的光学特性,设计了一台LD侧面泵浦的Nd:YAG/LBO/BBO声光调Q 266nm全固态紫外激光器,采用腔内二倍频腔外四倍频的方式,在泵浦电流23A,重复频率7.3kHz,绿光注入功率10.55W时,获得了平均功率211mW的266nm紫外激光输出。第五章为本论文的总结和展望。
UV laser is widely used in the field of industry, medical treatment, and scientific research. LD-pumped all-solid-state UV laser has become a new UV source. This dissertation has made some theoretical and experimental study around all-solid-state UV laser.In the fist chapter, the applications of UV laser and the development of LD-pumped all-solid-state 266nm UV laser are introduced. In the second chapter, the theory of folded cavity is discussed; based on the rate equations, the peak power, the pulse energy and the time behavior of Q-switched laser are studied; the characters of A-0 Q-switching are also discussed. In the third chapter, the SHG theory is discussed in detail; the principle and the means of phase-matching are introduced; and the characteristics of nonlinear optical crystal are generalized. In the fifth chapter, the optical characteristics of Nd:YAG are studied. Using intracavity SHG and extracavity FHG technique, we designed a LD side-pumped Nd:YAG/LBO/BBO A-0 Q-switched 266nm UV laser. The average power of 211mW at 266nm was obtained when the input current was 23A and the repetition frequency was 7.3kHz. The last chapter is the summarization and suggestion of the paper.
第一章介绍了紫外激光的特点和应用以及LD泵浦的266nm全固态紫外激光器研究概况。第二章阐述了V型折叠腔的设计理论;从激光器速率方程出发,对调Q激光器的峰值功率、脉冲能量与脉冲的时间特性等参数进行了分析,并对声光调Q技术进行了研究。第三章阐述了二次谐波产生的机理,分析了相位匹配原理和相位匹配方法,以及匹配宽度等问题,并总结了常用倍频晶体特别是四倍频晶体的特性。第四章分析了Nd:YAG晶体的光学特性,设计了一台LD侧面泵浦的Nd:YAG/LBO/BBO声光调Q 266nm全固态紫外激光器,采用腔内二倍频腔外四倍频的方式,在泵浦电流23A,重复频率7.3kHz,绿光注入功率10.55W时,获得了平均功率211mW的266nm紫外激光输出。第五章为本论文的总结和展望。
UV laser is widely used in the field of industry, medical treatment, and scientific research. LD-pumped all-solid-state UV laser has become a new UV source. This dissertation has made some theoretical and experimental study around all-solid-state UV laser.In the fist chapter, the applications of UV laser and the development of LD-pumped all-solid-state 266nm UV laser are introduced. In the second chapter, the theory of folded cavity is discussed; based on the rate equations, the peak power, the pulse energy and the time behavior of Q-switched laser are studied; the characters of A-0 Q-switching are also discussed. In the third chapter, the SHG theory is discussed in detail; the principle and the means of phase-matching are introduced; and the characteristics of nonlinear optical crystal are generalized. In the fifth chapter, the optical characteristics of Nd:YAG are studied. Using intracavity SHG and extracavity FHG technique, we designed a LD side-pumped Nd:YAG/LBO/BBO A-0 Q-switched 266nm UV laser. The average power of 211mW at 266nm was obtained when the input current was 23A and the repetition frequency was 7.3kHz. The last chapter is the summarization and suggestion of the paper.
引文
1 Mark Gitin.半导体泵浦紫外激光器.现代科学仪器,1999,(4):39～41
2 J. E. Eden,南山.紫外和真空紫外激光及其应用前景.国外激光,1989,(2):1～6
3 梁少华.激光表面处理技术在纺织品上的应用.印染,2001,(4):50～52
4 魏杰,郑海洋,章莲蒂,等.激光质谱法对机动车尾气中污染物的实时监测.物理,2001,30(12):778～781
5 李子尧,魏杰,张冰,等.激光质谱法:原理及其在环境监测中的应用.量子电子学报,2001,18(1):1～8
6 刘文清,崔志成,董凤忠.环境污染监测的光学和光谱学技术.光电子技术与信息,2002,15(5):1～12
7 李四海.海上溢油遥感探测技术及其应用进展.遥感信息,2004,(2):53～57
8 姚建铨.奇异的光——激光.北京:清华大学出版社;广州:暨南大学出版社,2000.144～177
9 陈家璧.激光原理及应用.北京:电子工业出版社,2004.184～195
10 张阳德,王毅,魏辛,等.医用多波段激光器的研制及应用.中国医学工程,2004,12(4):57～59
11 汤秀章,张海峰,陶业争,等.紫外超短脉冲激光的放大.中国原子能科学研究院年报,2001,68
12 陶业争,李业军,单玉生,等.与ICF快点火相关的激光等离子体研究.中国原子能科学研究院年报,2001,68
13 陈艳,晓晨.全固体化紫外激光技术.激光与光电子学进展,2000,(5):19～22
14 Yusuke Mori, Ikuo Kuroda, Satoshi Nakajima, et al. New nonlinear optical crystal: Cesium lithium borate. Appl. Phys. Lett. 1995, 67(13): 1818～1820
15 Yusuke Mori, Ikuo Kuroda, Satoshi Nakajima, et al. Nonlinear Optical Properties of Cesium Lithium Borate. Jpn. J. Appl. Phys. 1995, 34(3A): L296～L298
16 Y. K. Yap, M. Inagaki, S. Nakajima, et al. High-power fourth-harmonic generation of a Nd: YAG laser by means of a CsLiB_6O_(10). Opt. Lett. 1996, 21(17): 1348～1350
17 K. Kondo, M. Oka, H. Wada, et al. Demonstration of long-term reliability of a 266-nm, continuous-wave, frequency-quadrupled solid-state laser using β-BaB_2O_4. Opt. Lett. 1998, 23(3): 195～197
18 美国相干公司的高能紫外激光器的进展.光机电信息,2000,17(1):33
19 Jun Sakuma, Yuichi Asakawa, Minoru Obara. Generation of 5-W deep-UV continuous-wave radiation at 266 nm by an external cavity with a CsLiB_6O_(10) crystal. Opt. Lett. 2004, 29(1): 92～94
20 Tetsuo Kojima, Susumu Konno, Shuichi Fujikawa, et al. 20-W ultraviolet-beam generation by fourth-harmonic generation of an all-solid-state laser. Opt. Lett. 2000, 25(1): 58～60
21 T. Kamimura, S. Fukumoto, R. Ono, et al. Enhancement of CsLiB_6O_(10) surface-damage resistance by improved crystallinity and ion-beam etching. Opt. Lett. 2002, 27(8): 616～618
22 陈国夫,杜戈果,王贤华.LD泵浦Nd:YVO_4/KTP/BBO紫外激光器.光子学报,1999,28(8):684～687
23 陈国夫,王贤华,杜戈国.全固态紫外激光器研究.光子学报,1999,28(9):785～78
24 张秀荣,张顺兴,柴耀.新型非线性晶体CLBO的应用研究.人工晶体学报,2000,29(5):215
25 何京良,卢兴强,贾玉磊等.BBO四倍频全固态Nd:YVO_4紫外激光器.物理学报,2000,49(10):2106～2108
26 周城,叶子青,郑权,等.Cr~(4+):YAG被动调Q绿光激光器及其腔外倍频266nm激光的研究.光学技术,2003,29(2):148～150
27 侯玮.博士学位论文.中国科学院物理研究所,北京,2001.65～74
28 LU Jun-Hua, WANG Gui-Ling, XU Zu-Yan, et al. Efficient 266nm Ultraviolet Beam Generation in K_2Al_2B_2O_7 Crystal. CHIN. PHYS. LETT. 2002, 19(5): 680～681
29 Guiling Wang, Chengqian Zhang, Chuangtian Chen, et al. High efficiency 266-nm output of a KBe_2BO_3F_2 crystal. Appl. Opt. 2003, 42(21):4331～4334
30 孙同庆,王晓青,沈光球,等.CLBO晶体生长与紫外倍频性能研究.人工晶体学报,2004,33(2):133～136
2 J. E. Eden,南山.紫外和真空紫外激光及其应用前景.国外激光,1989,(2):1～6
3 梁少华.激光表面处理技术在纺织品上的应用.印染,2001,(4):50～52
4 魏杰,郑海洋,章莲蒂,等.激光质谱法对机动车尾气中污染物的实时监测.物理,2001,30(12):778～781
5 李子尧,魏杰,张冰,等.激光质谱法:原理及其在环境监测中的应用.量子电子学报,2001,18(1):1～8
6 刘文清,崔志成,董凤忠.环境污染监测的光学和光谱学技术.光电子技术与信息,2002,15(5):1～12
7 李四海.海上溢油遥感探测技术及其应用进展.遥感信息,2004,(2):53～57
8 姚建铨.奇异的光——激光.北京:清华大学出版社;广州:暨南大学出版社,2000.144～177
9 陈家璧.激光原理及应用.北京:电子工业出版社,2004.184～195
10 张阳德,王毅,魏辛,等.医用多波段激光器的研制及应用.中国医学工程,2004,12(4):57～59
11 汤秀章,张海峰,陶业争,等.紫外超短脉冲激光的放大.中国原子能科学研究院年报,2001,68
12 陶业争,李业军,单玉生,等.与ICF快点火相关的激光等离子体研究.中国原子能科学研究院年报,2001,68
13 陈艳,晓晨.全固体化紫外激光技术.激光与光电子学进展,2000,(5):19～22
14 Yusuke Mori, Ikuo Kuroda, Satoshi Nakajima, et al. New nonlinear optical crystal: Cesium lithium borate. Appl. Phys. Lett. 1995, 67(13): 1818～1820
15 Yusuke Mori, Ikuo Kuroda, Satoshi Nakajima, et al. Nonlinear Optical Properties of Cesium Lithium Borate. Jpn. J. Appl. Phys. 1995, 34(3A): L296～L298
16 Y. K. Yap, M. Inagaki, S. Nakajima, et al. High-power fourth-harmonic generation of a Nd: YAG laser by means of a CsLiB_6O_(10). Opt. Lett. 1996, 21(17): 1348～1350
17 K. Kondo, M. Oka, H. Wada, et al. Demonstration of long-term reliability of a 266-nm, continuous-wave, frequency-quadrupled solid-state laser using β-BaB_2O_4. Opt. Lett. 1998, 23(3): 195～197
18 美国相干公司的高能紫外激光器的进展.光机电信息,2000,17(1):33
19 Jun Sakuma, Yuichi Asakawa, Minoru Obara. Generation of 5-W deep-UV continuous-wave radiation at 266 nm by an external cavity with a CsLiB_6O_(10) crystal. Opt. Lett. 2004, 29(1): 92～94
20 Tetsuo Kojima, Susumu Konno, Shuichi Fujikawa, et al. 20-W ultraviolet-beam generation by fourth-harmonic generation of an all-solid-state laser. Opt. Lett. 2000, 25(1): 58～60
21 T. Kamimura, S. Fukumoto, R. Ono, et al. Enhancement of CsLiB_6O_(10) surface-damage resistance by improved crystallinity and ion-beam etching. Opt. Lett. 2002, 27(8): 616～618
22 陈国夫,杜戈果,王贤华.LD泵浦Nd:YVO_4/KTP/BBO紫外激光器.光子学报,1999,28(8):684～687
23 陈国夫,王贤华,杜戈国.全固态紫外激光器研究.光子学报,1999,28(9):785～78
24 张秀荣,张顺兴,柴耀.新型非线性晶体CLBO的应用研究.人工晶体学报,2000,29(5):215
25 何京良,卢兴强,贾玉磊等.BBO四倍频全固态Nd:YVO_4紫外激光器.物理学报,2000,49(10):2106～2108
26 周城,叶子青,郑权,等.Cr~(4+):YAG被动调Q绿光激光器及其腔外倍频266nm激光的研究.光学技术,2003,29(2):148～150
27 侯玮.博士学位论文.中国科学院物理研究所,北京,2001.65～74
28 LU Jun-Hua, WANG Gui-Ling, XU Zu-Yan, et al. Efficient 266nm Ultraviolet Beam Generation in K_2Al_2B_2O_7 Crystal. CHIN. PHYS. LETT. 2002, 19(5): 680～681
29 Guiling Wang, Chengqian Zhang, Chuangtian Chen, et al. High efficiency 266-nm output of a KBe_2BO_3F_2 crystal. Appl. Opt. 2003, 42(21):4331～4334
30 孙同庆,王晓青,沈光球,等.CLBO晶体生长与紫外倍频性能研究.人工晶体学报,2004,33(2):133～136