矩形板超声电机的振子振型激励技术研究
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摘要
与传统的电磁电机不同，超声电机是基于摩擦驱动原理的一类新型电机。超声电机利用弹性压电振子的共振，通过摩擦耦合驱动与其接触的动子运动。该类电机具有低速大转矩、功率体积比高、结构紧凑、定位精度高、不受电磁干扰、断电自锁等优点，可以满足直接驱动领域、精密驱动领域和无磁驱动领域对驱动器的微型化、精密化和智能化的要求。
为了成功地设计出超声电机，并使超声电机输出较好的工作性能，必须研究超声电机的振子振型激励技术。在预压力和负载一定的情况下，振子对动子做功大小，取决于振子表面接触点的运动轨迹。而振子表面接触点的运动轨迹，是振子在所有工作模态下振动的综合作用。因此如何有效地激励出振子的工作模态，并使各个工作模态成功耦合是超声电机设计的核心工作，也是提升超声电机输出性能的关键。
对于特定尺寸的压电振子来说，振子表面质点的运动轨迹主要受振子工作模态的类型、工作模态的耦合方式、激励信号的电压、频率及其施加位置等因素的影响。本文主要围绕着如何有效地激励出超声电机的工作模态、并使各模态之间成功耦合，从三个方面研究矩形板超声电机的振子振型激励技术，这三个方面为：（a）振子的工作模态耦合方式（b）振子各工作模态的频率一致性调节方法（c）激励信号的施加位置确定方法。
本文的主要工作如下：
1.提出并实现了一种矩形板超声电机的双频模态叠加激励方法，得出了两个不同频率的模态可以叠加在一起的条件。采用这种激励方式时，在振子上同时激励出两个不同频率的弯曲振动模态。振子表面接触点在振子和动子接触面的切向和法向的振动分别是由两个振动模态的分量叠加而成，因此可以获得较大的振动强度，振子可以对动子做更多的功。通过对压电振子表面的银电极进行分区，选择不同的分区来分别激励各个模态，可以使每个模态都能同时获得较大的振动幅值。根据理论分析，成功地制作了采用双频模态叠加激励的矩形板超声电机，并测量了该电机的输出特性，证明了该激励方法的有效性。
2.提出了一种基于遗传算法、神经网络和有限元算法的超声电机工作模态频率一致性的自动调节方法。该调节方法将压电陶瓷和金属基体组成的复合压电振子作为研究对象，用有限元方法建立了复合压电振子的机电耦合动力学模型，更准确地描述了压电振子的机电耦合现象。采用BP神经网络对ANSYS输出结果中的目标模态进行识别，减少了人工干预，可以实现矩形板超声电机纵、弯模态频率一致性的自动调节，能大大加快求解过程，提高求解精度。计算结果显示，采用该调节方法，可以使矩形板超声电机的纵、弯模态的频率差计算值减小至1.146Hz。
3.提出了一种将人工免疫算法和有限元算法相结合的确定矩形板超声电机振子的最佳激励区域的方法。该方法将快速、高效的人工免疫算法应用到超声电机的设计中，可大幅节约计算时间。该方法将振子对动子做的功作为解的评价标准，而不是只考虑振子在某个方向的位移作为目标函数，使计算结果更能接近超声电机的实际工作情况。计算结果表明，使用该方法确定超声电机的最佳激励位置及最佳激励电极面积，算法可以快速地收敛到全局最优解。对两个振子，包括五种激励情况下的无负载转速进行实验对比。实验结果显示，使用计算的最佳激励区域，超声电机具有最大的输出转速，与计算的结果相一致，证明了目标函数的有效性。表明采用人工免疫算法和有限元算法相结合，可快速、有效的用于同时寻找超声电机的最佳激励位置及激励电极面积。
The ultrasonic motors which utilize the mechanism of friction drive are quite differentwith the conventional electric motors. They utilize the friction force between the resonantvibrators and the rotors to drive. They are characterized as high torque at low speed, hightorque volume ratio, precise and accurate positioning, no electromagnetic interference andself-breaking without extra energy consumption, thus meeting the requirements ofmicrominiaturization, high precision and intellectualization in the areas of direct drive,precise drive and non-magnetic drive.
To successfully design an ultrasonic motor, and to get better motor performance, it isrequired to investigate the exciting technologies of vibrator for ultrasonic motors. When thepre-force and the load are fixed, the work that the vibrator does to the mover is determined bythe motion trajectory of the contact point. The motion trajectory of the contact point onvibrator surface is the coupling between working vibration modes. So how to effectivelyexcite the working vibration mode and successfully couple the working vibration modes arethe key issues in the design of ultrasonic motors. They are also the key to achieve betterperformances of ultrasonic motors.
For the specific piezoelectric vibrator, the motion trajectory of the contact point onvibrator surface depends on the type of working vibration mode, the coupling betweenworking vibration modes, the amplitude of the exciting voltage, the frequency of the excitingvoltage and the exciting location on vibrator. This dissertation focuses on how to effectively excite and successfully couple the working vibration modes of ultrasonic motor vibrator, andit investigates the exciting technologies of vibration shape of ultrasonic motors in threeaspects:(a) the coupling of working vibration modes (b) the regulation method of thefrequency difference between working vibration modes (c) the method of determining theoptimal exciting location on vibrator.
The main research contents are as follows:
1. A dual-frequency modal superposition exciting method for ultrasonic motor withrectangular shaped vibrator has been proposed and realized. The requirements forsuperposition of two vibration modes are obtained. There are two bending vibration modeswith different frequencies are excited and superposed in this exciting method. Both thenormal vibration and the tangential vibration of contact point are superposition of twovibration modes, so the vibrator can obtain larger vibration intensity and the vibrator can domore work to the rotor subsequently. By selecting different electrode segments to excite thetwo vibration modes separately, each vibration mode could obtain the largest vibrationamplitude at the same time. According to theoretical analysis, an ultrasonic motor usingdual-frequency modal superposition exciting is successfully fabricated, and the motorperformances are experimentally measured to justify the effectiveness of this exciting method.
2. A regulation method by combing genetic algorithm, neural network and finite elementanalysis is proposed to regulate the accordance of two frequencies of two vibration modes forultrasonic motors with rectangular shaped vibrator. This regulation method investigates thevibration of metal-piezoelectric composite vibrator, and modeling the mechanical-electriccoupling for metal-piezoelectric composite vibrator utilizing the finite element method. Theelectromechanical coupling of piezoelectric vibrator is accurately described. The backpropagation neural network is used to identify the objective mode from the output data offinite element analysis. This can automatically regulate the accordance of the frequencies oftwo different vibration modes, thus can save a lot of calculating time. The calculation results show that, using this regulation method, the frequency difference between two vibrationmodes can decrease to1.146Hz.
3. An optimization method by combining artificial immune algorithm and finite elementanalysis is proposed for the exciting position optimization of a piezoceramic plate typeultrasonic motor. This method uses the artificial immune algorithm as optimizer. The artificialimmune algorithm has the merit of high efficiency which quick convergence. This can save alot of calculation time. This optimization method use the work that vibrator does to rotor asthe evaluation criterion, instead of only taking the vibration amplitude in one direction as theevaluation criterion of the possible solutions, which makes the calculating results closely tothe actual working condition. Calculating results show that, using this method to calculate theoptimal exciting electrode, the algorithm can quickly converge to global optimum. The motorperformances of two vibrators which include five exciting cases are experimentally measured.Experimental results show that, using the calculated optimal exciting electrode, the rotor canobtain the largest no-load rotational speed of five different exciting cases. These show goodagreement with the calculating results, which can justify the effectiveness of the objectivefunction. This proved that using this method, both the optimal exciting position and size ofexciting electrode can be quickly and accurately determined.
为了成功地设计出超声电机，并使超声电机输出较好的工作性能，必须研究超声电机的振子振型激励技术。在预压力和负载一定的情况下，振子对动子做功大小，取决于振子表面接触点的运动轨迹。而振子表面接触点的运动轨迹，是振子在所有工作模态下振动的综合作用。因此如何有效地激励出振子的工作模态，并使各个工作模态成功耦合是超声电机设计的核心工作，也是提升超声电机输出性能的关键。
对于特定尺寸的压电振子来说，振子表面质点的运动轨迹主要受振子工作模态的类型、工作模态的耦合方式、激励信号的电压、频率及其施加位置等因素的影响。本文主要围绕着如何有效地激励出超声电机的工作模态、并使各模态之间成功耦合，从三个方面研究矩形板超声电机的振子振型激励技术，这三个方面为：（a）振子的工作模态耦合方式（b）振子各工作模态的频率一致性调节方法（c）激励信号的施加位置确定方法。
本文的主要工作如下：
1.提出并实现了一种矩形板超声电机的双频模态叠加激励方法，得出了两个不同频率的模态可以叠加在一起的条件。采用这种激励方式时，在振子上同时激励出两个不同频率的弯曲振动模态。振子表面接触点在振子和动子接触面的切向和法向的振动分别是由两个振动模态的分量叠加而成，因此可以获得较大的振动强度，振子可以对动子做更多的功。通过对压电振子表面的银电极进行分区，选择不同的分区来分别激励各个模态，可以使每个模态都能同时获得较大的振动幅值。根据理论分析，成功地制作了采用双频模态叠加激励的矩形板超声电机，并测量了该电机的输出特性，证明了该激励方法的有效性。
2.提出了一种基于遗传算法、神经网络和有限元算法的超声电机工作模态频率一致性的自动调节方法。该调节方法将压电陶瓷和金属基体组成的复合压电振子作为研究对象，用有限元方法建立了复合压电振子的机电耦合动力学模型，更准确地描述了压电振子的机电耦合现象。采用BP神经网络对ANSYS输出结果中的目标模态进行识别，减少了人工干预，可以实现矩形板超声电机纵、弯模态频率一致性的自动调节，能大大加快求解过程，提高求解精度。计算结果显示，采用该调节方法，可以使矩形板超声电机的纵、弯模态的频率差计算值减小至1.146Hz。
3.提出了一种将人工免疫算法和有限元算法相结合的确定矩形板超声电机振子的最佳激励区域的方法。该方法将快速、高效的人工免疫算法应用到超声电机的设计中，可大幅节约计算时间。该方法将振子对动子做的功作为解的评价标准，而不是只考虑振子在某个方向的位移作为目标函数，使计算结果更能接近超声电机的实际工作情况。计算结果表明，使用该方法确定超声电机的最佳激励位置及最佳激励电极面积，算法可以快速地收敛到全局最优解。对两个振子，包括五种激励情况下的无负载转速进行实验对比。实验结果显示，使用计算的最佳激励区域，超声电机具有最大的输出转速，与计算的结果相一致，证明了目标函数的有效性。表明采用人工免疫算法和有限元算法相结合，可快速、有效的用于同时寻找超声电机的最佳激励位置及激励电极面积。
The ultrasonic motors which utilize the mechanism of friction drive are quite differentwith the conventional electric motors. They utilize the friction force between the resonantvibrators and the rotors to drive. They are characterized as high torque at low speed, hightorque volume ratio, precise and accurate positioning, no electromagnetic interference andself-breaking without extra energy consumption, thus meeting the requirements ofmicrominiaturization, high precision and intellectualization in the areas of direct drive,precise drive and non-magnetic drive.
To successfully design an ultrasonic motor, and to get better motor performance, it isrequired to investigate the exciting technologies of vibrator for ultrasonic motors. When thepre-force and the load are fixed, the work that the vibrator does to the mover is determined bythe motion trajectory of the contact point. The motion trajectory of the contact point onvibrator surface is the coupling between working vibration modes. So how to effectivelyexcite the working vibration mode and successfully couple the working vibration modes arethe key issues in the design of ultrasonic motors. They are also the key to achieve betterperformances of ultrasonic motors.
For the specific piezoelectric vibrator, the motion trajectory of the contact point onvibrator surface depends on the type of working vibration mode, the coupling betweenworking vibration modes, the amplitude of the exciting voltage, the frequency of the excitingvoltage and the exciting location on vibrator. This dissertation focuses on how to effectively excite and successfully couple the working vibration modes of ultrasonic motor vibrator, andit investigates the exciting technologies of vibration shape of ultrasonic motors in threeaspects:(a) the coupling of working vibration modes (b) the regulation method of thefrequency difference between working vibration modes (c) the method of determining theoptimal exciting location on vibrator.
The main research contents are as follows:
1. A dual-frequency modal superposition exciting method for ultrasonic motor withrectangular shaped vibrator has been proposed and realized. The requirements forsuperposition of two vibration modes are obtained. There are two bending vibration modeswith different frequencies are excited and superposed in this exciting method. Both thenormal vibration and the tangential vibration of contact point are superposition of twovibration modes, so the vibrator can obtain larger vibration intensity and the vibrator can domore work to the rotor subsequently. By selecting different electrode segments to excite thetwo vibration modes separately, each vibration mode could obtain the largest vibrationamplitude at the same time. According to theoretical analysis, an ultrasonic motor usingdual-frequency modal superposition exciting is successfully fabricated, and the motorperformances are experimentally measured to justify the effectiveness of this exciting method.
2. A regulation method by combing genetic algorithm, neural network and finite elementanalysis is proposed to regulate the accordance of two frequencies of two vibration modes forultrasonic motors with rectangular shaped vibrator. This regulation method investigates thevibration of metal-piezoelectric composite vibrator, and modeling the mechanical-electriccoupling for metal-piezoelectric composite vibrator utilizing the finite element method. Theelectromechanical coupling of piezoelectric vibrator is accurately described. The backpropagation neural network is used to identify the objective mode from the output data offinite element analysis. This can automatically regulate the accordance of the frequencies oftwo different vibration modes, thus can save a lot of calculating time. The calculation results show that, using this regulation method, the frequency difference between two vibrationmodes can decrease to1.146Hz.
3. An optimization method by combining artificial immune algorithm and finite elementanalysis is proposed for the exciting position optimization of a piezoceramic plate typeultrasonic motor. This method uses the artificial immune algorithm as optimizer. The artificialimmune algorithm has the merit of high efficiency which quick convergence. This can save alot of calculation time. This optimization method use the work that vibrator does to rotor asthe evaluation criterion, instead of only taking the vibration amplitude in one direction as theevaluation criterion of the possible solutions, which makes the calculating results closely tothe actual working condition. Calculating results show that, using this method to calculate theoptimal exciting electrode, the algorithm can quickly converge to global optimum. The motorperformances of two vibrators which include five exciting cases are experimentally measured.Experimental results show that, using the calculated optimal exciting electrode, the rotor canobtain the largest no-load rotational speed of five different exciting cases. These show goodagreement with the calculating results, which can justify the effectiveness of the objectivefunction. This proved that using this method, both the optimal exciting position and size ofexciting electrode can be quickly and accurately determined.
引文
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