强度调制型光纤传感器在真空度测量中的应用
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摘要
光纤技术无论是在光纤通信领域还是在光纤传感领域都可称得上是一个具有革命性的技术开拓，光纤传感本身具有的优点使其成为研究热点，为现代测量技术的发展提供了一个方向。其中的强度调制型光纤传感技术最具有实用化性，本论文将研究其调制特性并进行强度调制型光纤真空度传感实验，主要的研究工作包括：
1．分析了强度调制型光纤传感原理。推导了反射式强度调制系数，并利用计算机软件仿真研究了其调制特性；通过实验得出了不同的反射调制方式和光纤束探头结构的特性曲线。
2．通过实验研究了多模光纤弯曲调制特性与弯曲半径及光源波长的关系，并对其特性曲线进行了理论分析。
3．设计了一套强度调制型光纤真空度传感系统，并利用真空腔室金属膜片压差的弹性微形变实现了反射式光纤真空度连续检测。
4．设计了微弯式强度调制型光纤真空度传感系统，并利用弹性管压差的弹性微形变实现了微弯式光纤真空度检测。
Fiber technology has been developed for many applications in both fiber optic communication and sensor systems. Fiber sensors have presented a direction to modern measurements for their unique characteristics, among them intensity modulation fiber sensors own strong applications. The paper focuses on the following work:
(1) Analyzes fiber sensing theory of intensity modulation; deduces modulation formula of reflex sensor and studies its characteristics using computer; experiments the sensing characteristics of reflex types and fiber bundles.
(2) Experiments the relation between characteristics of microbent multi-mode fiber sensor and its bent radius or source wavelength, gives theoretical analyses.
(3) Constructs fiber optical sensing system for vacuum measuring, carries out vacuum measuring using elastic deformation of metal diaphragm for reflex fiber sensor.
(4) Constructs fiber optical vacuum sensing system for microbent modulation, carries out vacuum measuring using elastic deformation of flexible tube.
1．分析了强度调制型光纤传感原理。推导了反射式强度调制系数，并利用计算机软件仿真研究了其调制特性；通过实验得出了不同的反射调制方式和光纤束探头结构的特性曲线。
2．通过实验研究了多模光纤弯曲调制特性与弯曲半径及光源波长的关系，并对其特性曲线进行了理论分析。
3．设计了一套强度调制型光纤真空度传感系统，并利用真空腔室金属膜片压差的弹性微形变实现了反射式光纤真空度连续检测。
4．设计了微弯式强度调制型光纤真空度传感系统，并利用弹性管压差的弹性微形变实现了微弯式光纤真空度检测。
Fiber technology has been developed for many applications in both fiber optic communication and sensor systems. Fiber sensors have presented a direction to modern measurements for their unique characteristics, among them intensity modulation fiber sensors own strong applications. The paper focuses on the following work:
(1) Analyzes fiber sensing theory of intensity modulation; deduces modulation formula of reflex sensor and studies its characteristics using computer; experiments the sensing characteristics of reflex types and fiber bundles.
(2) Experiments the relation between characteristics of microbent multi-mode fiber sensor and its bent radius or source wavelength, gives theoretical analyses.
(3) Constructs fiber optical sensing system for vacuum measuring, carries out vacuum measuring using elastic deformation of metal diaphragm for reflex fiber sensor.
(4) Constructs fiber optical vacuum sensing system for microbent modulation, carries out vacuum measuring using elastic deformation of flexible tube.
引文
1. CookRO, Hamm CW. Fibre optic lever displacement transducer. Applied Optics. 1979, 18(19):3230～32412
2. Culshaw B. Intensity Modulation Transducers, Chaper6 in Optical Fibre Sensing and Signal Processing. Peter Peregrinus, London, 1984:73～86
3. YinA, ChenS, SunD. A fiber optical lever and its application in a hydrophone. Int. J. Optoeletronics. 1992, 7(1):103～110
4. Sandra LLoret, Daniele Inaudi, Amplitude modulation of a low-coherence source, applications to distance and dynamic displacement sensing. Optics and Lasers in Engineering. 2000 (32) 325～337
5. Cuomo Frank W. Theanalysis of a three fiber lever transducer. Fiber Optic and Laser Sensors. 1984(27)28～32
6. Lewis NE, Miller MB, Leiwis WH. Fiber optic sensors utilizing surface reflections. Fiber Optic and Laser Sensor. 1984(28) :39～45.
7．王玉堂，张经武，李乃绩等．光纤传感器研究进展．光电子激光．1996(7)2-7．
8．王惠文．光纤传感技术与应用．国防工业出版社，2001．
9. A. J. Roges, Distrbuted optical fibre sensors for the measurement of pressure, strain and temperature. Phys. Rep, 1988, 169(2): 101～143
10. M.H bel, J.Richa, M.W.thrichetal, High-resolution distributed temperature sensing with the multiphoto-timing technique.Appl.Opt, 1995,34(16):2955～2967
11. X. Bao, D.J. Webb, D.A. Jackson, Recent progressing experiments on a Brillouinloss based distrivuted sensor. Proc. SPIE, 1995, 2360:506～509
12．王立新．光纤传感器研究现状及展望．自动化与仪表．1996，11(6)32-35．
13．孙圣和，王廷云等．光纤测量传感技术．哈尔滨；哈尔滨工业大学出版社，2000．
14．赵育良，李开端．光纤传感器在测量领域的发展与应用．新技术新仪．2001，21(6)45-47．
15. Y.Zhao, P.S .Li, Z.B. Pu, A novel fiber-optical sensor used for complex surface measurement. High Technol. Lett.7(2001)27-30.
16. Y.Zhao,P.S.Li,Z.B.Pu. Shape measurement based on fiber-optical technique for complex internal surface, Measurement 30(2001)289-295.
17. AW.B.Lyons, H.Ewald, E.Lewis. An optical fibre distributed sensor based on pattern recognition.Journal of Materials Processing Technology. 127(2002):23-30.
18. Jan Rayss, Grzegorz Sudolski. Ion adsorption in the porous sol-gel silica layer in the fibre optic pH sensor. Sensors and Actuators B 87 (2002) 397-405.
19. J.M.Senior, S,E,Moss,S.D.Cusworth. Wavelength division multiplexed optical point-sensor networks using injection laser diode sources. Optical &Laser Technology.36(2002) 1-5.
20. Yong Z hao, Yanbiao Liao. Single-mode fiber-based reflex sensor for internal surface in-line measurement of small products. Sensors and Ac tuators A 101 (2002) 30-36.
21. Arun Kumar, Ravi K. Varshney, Siny Antony C, Pratha Sharrna. Transmission characteristics of SMS fiber optic sensor structures. Optics Communications 219 (2003) 215-219.
22. ggg Jesus Castrellon, Gonzalo Paez, Marij a Strojnik. Remote temperature sensor employing erbium-doped silica fiber. Infrared Physics & Technology 43 (2002) 219-222
23. Xie Guangping, Seah Leong Keey, Anand Asundi. Optical time-domain reflectometry for distributed sensing of the structural strain and deformation. Optics and Lasers in Engineering 32 (2000) 437}447.
24. Hossein Golnabi. Mass measurement using an intensity-modulated optical .ber sensor. Optics and Lasers in Engineering 38 (2002) 537-548
25．张毅，洪建中．反射式强度调制型光纤传感器的应用及发展．光电子技术与信息．2002．15(3)23-27．
26．喻骏，牛文成．光纤传感器网频域复用系统的理论分析．传感技术学报．2002(3)48-52．
27．徐涛，罗武胜．强度型光纤传感器补偿技术的研究综述．激光技术．2002(26)454-458．
28．李旺奎．真空计量标准的国际比对[J]．真空与低温，1983，2(2)：15
29．刘玉岱．真空测量与检漏[J]．冶金工业出版社1992．
30．达道安，李旺奎．空间真空技术[M]．北京：宇航出版社．1995．
31．张涤新，李得天，张建军等．正压漏孔校准装置[J]．真空科学与技术，2001(21)：55-59．
32. Coulombe, R.F..A Practical Approach to Plant Data Bus Networks Utilizing Fiber Optics, Proceedings of the ISA International Conference, Philadelphia, PA. Vol,40,Part2, pp1027-1033. 1985..
33. Kapany.M.S.,Fiber Optical-Principlesand Applications. Acodemic Press,New York. 1967.
34．杨祥林，光纤通信系统，国防工业出版社，2000．
35．殷宗敏．光纤波导．上海交通大学出版社．1994．
36．波恩M，沃耳夫E．光学原理(上)．北京：科学出版社，1979
37．张兴周，李绪友，包建新．微弯型光纤传感器．传感器技术．1998．(17)58-62．
38．张淑清，郑德忠，史锦珊．基于光斑场检测德亚微米级光纤微弯曲传感器．传感器技术学报．1999(12)234-237．
39. MarcuseD. Lossesand and impulse response of a parabolic index fiber with random bends.Bell Syst Tech. 1973 ;52:1423～1437.
40. Sandra LLoret, Daniele Inaudi, Amplitude modulation of a low-coherence source, applications to distance and dynamic displacement sensing, Op tics and Lasers in Engineering 32 (2000) 325～337.
41. Yuan Libo, Zhang Zhenhui. Characteristic function of the twin receiving optical fiber sensors．光子学报(英文版)．1998(27)：441-446．
42．郑小平，廖延彪．提高双参量光纤传感器精度的一种方法．光学学报．1998(18)358-361．
43．张宜华．精通MATLAB5.0．清华大学出版社．1999．
44．清源计算机工作室编著．MATLAB6.0高级应用．机械工业出版社．2001．
45．孙兆林．MATLAB6．X图像处理．清华大学出版社．2002．
46．蒲俊等编著．MATLAB 6.0数学手册．浦东电子出版社．2002．
47．王学军等编著．Matlab 6.1最新应用详解．中国水利水电出版社．2002．
48．云舟工作室编著．MATLAB 6数学建模基础教程．人民邮电出版社．2001．
49．王华等编著．Matlab在电信工程中的应用．中国水利水电出版社．2001．
50．王化祥，张淑英．传感器原理及应用．天津大学出版社．2002．
51．栾桂冬．传感器及其应用．西安电子科技大学出版社，2002．
52．周晓军，薛志英，林水生等．遗传算法在双光束干涉型光纤传感器信号处理中的应用．仪器仪表学报．2001(22)31-37．
53．杨华勇，吕海宝，徐涛等．强度型光纤传感器补偿技术的研究综述．激光技术．2002(26)454-459．
54. OD scar Esteban, M! Cruz Navarrete, etc. Simple model of compound waveguide structures used as "ber-optic sensors. Optics and Lasers in Engineering. 2000(33):
219-230.
55. Hossein Golnabi. Mass measurement using an intensity-modulated optical fiber sensor. Optics and Lasers in Engineering .2002(38) :537-548.
56. RCUSED. Curvature loss formula for optical fibers [J]. Jpt SocAm, 1976, 66(3): 216.
57. Harm F M. Barton J S and Jones J D C. Bend Loss in Buffered Over moded Optical Fiber:LP_11 Mode and Whispering Galler Mode Interaction .ELE.Lett, 1994, 30 (17):1433.
58. He Guangyu, Chen Xuxing, Qi Enyun,Numerical Aperture of Multimode Fibers with Curvature. SPIE. 1996.2895:552.
59．贺光裕，姜久兴，刘鹏．多模光纤弯曲损耗的理论分析[J]．哈尔滨理工大学学报，1997，2(5)：91．
60．刘叶新，杨晓云，陈学琴等．多模光纤弯曲损耗的分析[J]．中山大学学报(自然科学版)．2002(41)25-26．
61．姜文龙，孙淑静．关于物理真空本质的认识．松辽学刊(自然科学版)．1999(4)93-94．
62．吕时良，李得天，张涤新等．金属膨胀式真空计量标准。真空科学与技术．1998(18)266-269．
63. Jitschin W. Migwi J K.Grosse G.Vaccum. 1990:40(3 )293-304.
64．杨鸿呜，王荣．真空测量技术发展溯源．真空．2000(5)46-47．
65．张涤新．真空计量的现状及发展趋势．真空与低温。2001(7)63-69．
66. HONDA S, OKADA T. NAWATE M. Tunneling giant magnetoresistance in heterogeneous Fe-SiO2 granular films[J]. Phys RevieB, 1997(56) 1456614573.
67．孙以材．压力传感器的设计．制造与应用．冶金工业出版社，2000．
68．ZDM-1型电容薄膜真空计鉴定测试报告．浙江省技术监督检测研究院．1998．6
2. Culshaw B. Intensity Modulation Transducers, Chaper6 in Optical Fibre Sensing and Signal Processing. Peter Peregrinus, London, 1984:73～86
3. YinA, ChenS, SunD. A fiber optical lever and its application in a hydrophone. Int. J. Optoeletronics. 1992, 7(1):103～110
4. Sandra LLoret, Daniele Inaudi, Amplitude modulation of a low-coherence source, applications to distance and dynamic displacement sensing. Optics and Lasers in Engineering. 2000 (32) 325～337
5. Cuomo Frank W. Theanalysis of a three fiber lever transducer. Fiber Optic and Laser Sensors. 1984(27)28～32
6. Lewis NE, Miller MB, Leiwis WH. Fiber optic sensors utilizing surface reflections. Fiber Optic and Laser Sensor. 1984(28) :39～45.
7．王玉堂，张经武，李乃绩等．光纤传感器研究进展．光电子激光．1996(7)2-7．
8．王惠文．光纤传感技术与应用．国防工业出版社，2001．
9. A. J. Roges, Distrbuted optical fibre sensors for the measurement of pressure, strain and temperature. Phys. Rep, 1988, 169(2): 101～143
10. M.H bel, J.Richa, M.W.thrichetal, High-resolution distributed temperature sensing with the multiphoto-timing technique.Appl.Opt, 1995,34(16):2955～2967
11. X. Bao, D.J. Webb, D.A. Jackson, Recent progressing experiments on a Brillouinloss based distrivuted sensor. Proc. SPIE, 1995, 2360:506～509
12．王立新．光纤传感器研究现状及展望．自动化与仪表．1996，11(6)32-35．
13．孙圣和，王廷云等．光纤测量传感技术．哈尔滨；哈尔滨工业大学出版社，2000．
14．赵育良，李开端．光纤传感器在测量领域的发展与应用．新技术新仪．2001，21(6)45-47．
15. Y.Zhao, P.S .Li, Z.B. Pu, A novel fiber-optical sensor used for complex surface measurement. High Technol. Lett.7(2001)27-30.
16. Y.Zhao,P.S.Li,Z.B.Pu. Shape measurement based on fiber-optical technique for complex internal surface, Measurement 30(2001)289-295.
17. AW.B.Lyons, H.Ewald, E.Lewis. An optical fibre distributed sensor based on pattern recognition.Journal of Materials Processing Technology. 127(2002):23-30.
18. Jan Rayss, Grzegorz Sudolski. Ion adsorption in the porous sol-gel silica layer in the fibre optic pH sensor. Sensors and Actuators B 87 (2002) 397-405.
19. J.M.Senior, S,E,Moss,S.D.Cusworth. Wavelength division multiplexed optical point-sensor networks using injection laser diode sources. Optical &Laser Technology.36(2002) 1-5.
20. Yong Z hao, Yanbiao Liao. Single-mode fiber-based reflex sensor for internal surface in-line measurement of small products. Sensors and Ac tuators A 101 (2002) 30-36.
21. Arun Kumar, Ravi K. Varshney, Siny Antony C, Pratha Sharrna. Transmission characteristics of SMS fiber optic sensor structures. Optics Communications 219 (2003) 215-219.
22. ggg Jesus Castrellon, Gonzalo Paez, Marij a Strojnik. Remote temperature sensor employing erbium-doped silica fiber. Infrared Physics & Technology 43 (2002) 219-222
23. Xie Guangping, Seah Leong Keey, Anand Asundi. Optical time-domain reflectometry for distributed sensing of the structural strain and deformation. Optics and Lasers in Engineering 32 (2000) 437}447.
24. Hossein Golnabi. Mass measurement using an intensity-modulated optical .ber sensor. Optics and Lasers in Engineering 38 (2002) 537-548
25．张毅，洪建中．反射式强度调制型光纤传感器的应用及发展．光电子技术与信息．2002．15(3)23-27．
26．喻骏，牛文成．光纤传感器网频域复用系统的理论分析．传感技术学报．2002(3)48-52．
27．徐涛，罗武胜．强度型光纤传感器补偿技术的研究综述．激光技术．2002(26)454-458．
28．李旺奎．真空计量标准的国际比对[J]．真空与低温，1983，2(2)：15
29．刘玉岱．真空测量与检漏[J]．冶金工业出版社1992．
30．达道安，李旺奎．空间真空技术[M]．北京：宇航出版社．1995．
31．张涤新，李得天，张建军等．正压漏孔校准装置[J]．真空科学与技术，2001(21)：55-59．
32. Coulombe, R.F..A Practical Approach to Plant Data Bus Networks Utilizing Fiber Optics, Proceedings of the ISA International Conference, Philadelphia, PA. Vol,40,Part2, pp1027-1033. 1985..
33. Kapany.M.S.,Fiber Optical-Principlesand Applications. Acodemic Press,New York. 1967.
34．杨祥林，光纤通信系统，国防工业出版社，2000．
35．殷宗敏．光纤波导．上海交通大学出版社．1994．
36．波恩M，沃耳夫E．光学原理(上)．北京：科学出版社，1979
37．张兴周，李绪友，包建新．微弯型光纤传感器．传感器技术．1998．(17)58-62．
38．张淑清，郑德忠，史锦珊．基于光斑场检测德亚微米级光纤微弯曲传感器．传感器技术学报．1999(12)234-237．
39. MarcuseD. Lossesand and impulse response of a parabolic index fiber with random bends.Bell Syst Tech. 1973 ;52:1423～1437.
40. Sandra LLoret, Daniele Inaudi, Amplitude modulation of a low-coherence source, applications to distance and dynamic displacement sensing, Op tics and Lasers in Engineering 32 (2000) 325～337.
41. Yuan Libo, Zhang Zhenhui. Characteristic function of the twin receiving optical fiber sensors．光子学报(英文版)．1998(27)：441-446．
42．郑小平，廖延彪．提高双参量光纤传感器精度的一种方法．光学学报．1998(18)358-361．
43．张宜华．精通MATLAB5.0．清华大学出版社．1999．
44．清源计算机工作室编著．MATLAB6.0高级应用．机械工业出版社．2001．
45．孙兆林．MATLAB6．X图像处理．清华大学出版社．2002．
46．蒲俊等编著．MATLAB 6.0数学手册．浦东电子出版社．2002．
47．王学军等编著．Matlab 6.1最新应用详解．中国水利水电出版社．2002．
48．云舟工作室编著．MATLAB 6数学建模基础教程．人民邮电出版社．2001．
49．王华等编著．Matlab在电信工程中的应用．中国水利水电出版社．2001．
50．王化祥，张淑英．传感器原理及应用．天津大学出版社．2002．
51．栾桂冬．传感器及其应用．西安电子科技大学出版社，2002．
52．周晓军，薛志英，林水生等．遗传算法在双光束干涉型光纤传感器信号处理中的应用．仪器仪表学报．2001(22)31-37．
53．杨华勇，吕海宝，徐涛等．强度型光纤传感器补偿技术的研究综述．激光技术．2002(26)454-459．
54. OD scar Esteban, M! Cruz Navarrete, etc. Simple model of compound waveguide structures used as "ber-optic sensors. Optics and Lasers in Engineering. 2000(33):
219-230.
55. Hossein Golnabi. Mass measurement using an intensity-modulated optical fiber sensor. Optics and Lasers in Engineering .2002(38) :537-548.
56. RCUSED. Curvature loss formula for optical fibers [J]. Jpt SocAm, 1976, 66(3): 216.
57. Harm F M. Barton J S and Jones J D C. Bend Loss in Buffered Over moded Optical Fiber:LP_11 Mode and Whispering Galler Mode Interaction .ELE.Lett, 1994, 30 (17):1433.
58. He Guangyu, Chen Xuxing, Qi Enyun,Numerical Aperture of Multimode Fibers with Curvature. SPIE. 1996.2895:552.
59．贺光裕，姜久兴，刘鹏．多模光纤弯曲损耗的理论分析[J]．哈尔滨理工大学学报，1997，2(5)：91．
60．刘叶新，杨晓云，陈学琴等．多模光纤弯曲损耗的分析[J]．中山大学学报(自然科学版)．2002(41)25-26．
61．姜文龙，孙淑静．关于物理真空本质的认识．松辽学刊(自然科学版)．1999(4)93-94．
62．吕时良，李得天，张涤新等．金属膨胀式真空计量标准。真空科学与技术．1998(18)266-269．
63. Jitschin W. Migwi J K.Grosse G.Vaccum. 1990:40(3 )293-304.
64．杨鸿呜，王荣．真空测量技术发展溯源．真空．2000(5)46-47．
65．张涤新．真空计量的现状及发展趋势．真空与低温。2001(7)63-69．
66. HONDA S, OKADA T. NAWATE M. Tunneling giant magnetoresistance in heterogeneous Fe-SiO2 granular films[J]. Phys RevieB, 1997(56) 1456614573.
67．孙以材．压力传感器的设计．制造与应用．冶金工业出版社，2000．
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