化学微推力器装药及其推力性能研究
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摘要
该文设计了化学微推力器的结构，研究了微推力器的装药方法和推力的测试方法。研究了史蒂酚酸铅和硝酸肼镍在不同药室直径和药剂配比下的点火和推进性能，并且计算了推力器参数对推力性能的影响。主要内容如下：
1．在实验中，设计了三层的推力器结构，中间为药室，上层和下层为点火电路和带喷管的盖片，可以在10×10mm和2mm厚的板上集成了4个直径为0.8mm的微推力器。
2．设计了一种利用真空吸注方法的微孔装药方法。根据电磁天平的原理设计了一套微推力测试装置，利用霍耳传感器来测量推力产生的位移，进而通过计算转换为推力器的推力大小。用光电探头来测量推进剂的燃烧时间。
3．由实验测得的斯蒂酚酸铅加硝化棉的混合装药所测推进性能如下：当药室直径从0.5mm变化到1.2mm时，推力约为0.05～0.38mN，总冲量约为3.2E-05～3.0E-04mN·s。
4．由实验测得的硝酸肼镍加硝化棉的混合装药所测推进性能如下：当药室直径从0.8mm变化到1.5mm时，推力约为0.06～0.25mN，总冲量约为1.8E-03～1.0E-02mN·s。
5．由数值计算可知，At／Ac的大小变化所引起的推力变化比压力指数n和药室直径的变化引起的变化大得多，而且当At／Ac＜0.3时，可以得到最佳的推力效果。
In this paper, the Micro chemical Thruster's structure was designed and loading method of propellant and test method of thrust were investigated. When the propellant was lead styphnate and nickel hydrazine nitrate, their properties of ignition and thrust were investigated under different chamber diameter and different proportion of the
mixed propellant. The influence of different thruster parameters on thruster properties was calculated. The main researches were as following:
1. A three layers thruster was designed. The middle layer was chamber, the top layer was ignition circuit and the bottom layer contained a diaphragm with several nozzles. It could integrate 4 micro-thruster which diameter was 0.8mm on the diaphragm with 10*10*2mm.
2. Design a vacuum method to load propellant into the micro-hole. A test device was designed which tested the properties of thrust according the theory of electromagnetism scale. Using the Hall-effect sensor to measure the scale displacement that could be converted the magnitude of the thrust. Using photoelectricity detector to measure the burning period. a
3. Experiment testified that the properties of thrust of lead styphnate mixed with nitrocellulose was as the following: when the chamber diameter ranged from 0.5mm to 1.2mm, the thrust was about 0.05~0.38mN, impulse was about 3.2E-05-3.0E-04 mN-s.
4. Experiment testified that the properties of thrust of nickel hydrazine nitrate mixed with nitrocellulose was as the following: when the chamber diameter ranged from 0.8mm to 1.5mm, the thrust was about 0.06~0.25mN, impulse was about 1.8E-03~1.0E-02mN-s.
5. Calculating result showed: the thrust changing caused by the magnitude of At/Ac was more larger than that both of the pressure index: "n" and of the chamber diameter, and the best thrust could be get when At/Ac<0.3.
1．在实验中，设计了三层的推力器结构，中间为药室，上层和下层为点火电路和带喷管的盖片，可以在10×10mm和2mm厚的板上集成了4个直径为0.8mm的微推力器。
2．设计了一种利用真空吸注方法的微孔装药方法。根据电磁天平的原理设计了一套微推力测试装置，利用霍耳传感器来测量推力产生的位移，进而通过计算转换为推力器的推力大小。用光电探头来测量推进剂的燃烧时间。
3．由实验测得的斯蒂酚酸铅加硝化棉的混合装药所测推进性能如下：当药室直径从0.5mm变化到1.2mm时，推力约为0.05～0.38mN，总冲量约为3.2E-05～3.0E-04mN·s。
4．由实验测得的硝酸肼镍加硝化棉的混合装药所测推进性能如下：当药室直径从0.8mm变化到1.5mm时，推力约为0.06～0.25mN，总冲量约为1.8E-03～1.0E-02mN·s。
5．由数值计算可知，At／Ac的大小变化所引起的推力变化比压力指数n和药室直径的变化引起的变化大得多，而且当At／Ac＜0.3时，可以得到最佳的推力效果。
In this paper, the Micro chemical Thruster's structure was designed and loading method of propellant and test method of thrust were investigated. When the propellant was lead styphnate and nickel hydrazine nitrate, their properties of ignition and thrust were investigated under different chamber diameter and different proportion of the
mixed propellant. The influence of different thruster parameters on thruster properties was calculated. The main researches were as following:
1. A three layers thruster was designed. The middle layer was chamber, the top layer was ignition circuit and the bottom layer contained a diaphragm with several nozzles. It could integrate 4 micro-thruster which diameter was 0.8mm on the diaphragm with 10*10*2mm.
2. Design a vacuum method to load propellant into the micro-hole. A test device was designed which tested the properties of thrust according the theory of electromagnetism scale. Using the Hall-effect sensor to measure the scale displacement that could be converted the magnitude of the thrust. Using photoelectricity detector to measure the burning period. a
3. Experiment testified that the properties of thrust of lead styphnate mixed with nitrocellulose was as the following: when the chamber diameter ranged from 0.5mm to 1.2mm, the thrust was about 0.05~0.38mN, impulse was about 3.2E-05-3.0E-04 mN-s.
4. Experiment testified that the properties of thrust of nickel hydrazine nitrate mixed with nitrocellulose was as the following: when the chamber diameter ranged from 0.8mm to 1.5mm, the thrust was about 0.06~0.25mN, impulse was about 1.8E-03~1.0E-02mN-s.
5. Calculating result showed: the thrust changing caused by the magnitude of At/Ac was more larger than that both of the pressure index: "n" and of the chamber diameter, and the best thrust could be get when At/Ac<0.3.
引文
1．朱毅麟．电推进的现状与展望．上海航天．1998(3)：48-52
2．党冀萍，钱静．纳米卫星发展现状及纳米卫星中的微电子技术．半导体情报．1999，36(3)：10-17
3．孟晓雄，孙彦平，张立平．纳米卫星的概念及前景．中国航天．1997(9)：36-38．
4. DeGroot, W., Oleson, S. Chemical Microthruster Options, N19970001472/HDM
5. S.W.Janson, H.Helvajian, E.Y.Tobinson. The cencept of "nanosatellite" for revolutionary low-cost space systems, Proceedings of the 44th Interantional Astronautics Feeration Conference, Graz, Austria, Oct.1993, Paper IAF-93-U.5.573
6. Siegfried W. Janson. Chemical and electric micropropulsion concepts for nanosatellites, in Proceedings of the 30th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, Indianapotis IN, June 1994, Paper AIAA-94-2998.
7. Lewis. David H. Jr., Antonsson Erik K. Integrated pulsed propulsion system for microsatellite. US6,131,385 ~_
8．R.M．Myers，R.J.Cassady．美国公司主要电推进计划综述．控制工程，1999，4：27-31
9．毛根旺，韩先伟，杨涓，何洪庆．电推进研究的技术状态和发展前景．推进技术．2000，21(5)：1-5
10. J. Mueller. Thruster options for microspacecraft: a review and evaluation of existing hardware and emerging technologies, in: 33rd AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit, Seattle, USA, July 6-9, 1997
11. J. Mueller, W. Tang, A. Wallace, W. Li, D. Bame, I. Chakraborty, R. Lawton. Design, Analysis and Fabrication of a Vaporizing Liquid Micro-Thruster, AIAA Paper 97-3054, Seattle, WA, USA, July 1997
12. Chen K. Wise. A high-resolution silicon monolithic nozzle array for inkjet printing, Proceedings of the 8th International Conerence on Solid-state Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 25-29, 1995:321-324
13. E.V. Mukerjee,A. P. Wallace, K. Y.Yan, D.W. Howard, R. L.Smith, S. D. Collins. Vaporizing liquid microthruster, Sensors and Actuators 83(2000): 231-236
14．沈瑞琪，叶迎华，戴实之．数字化火工品的概念及应用．火工品．2000(2)：36-38
15. A. Franks, M. Luty, C J Robbie, M. Stedman. A design of a microthrust balance for space applications. Nanoteehnology. 9(1998): 61-66
16. Finck Bernard, Lefuneux Alain, Mane Bernard. Non-detenating azide-based solid pyrotechnic cond gas generating compositions for Microsystems and microdevices. FR 2,774,684.
17. David H. Lewis Jr., Siegfried W. Janson, Ronald B. Cohen, Erik K. Antonsson. Digital micropropulsion, Sensors and Actuators 80(2000): 143-154
18. Carole Rossi, N. Fabre, V. Conedera, D. Esteve. Design farication and thrust prediction of solid propellant microthrusters for space application, Proceedings of SPIE-The International Society for Optical Engineering v 3680 n Ⅱ 1999: 906-916
19. Carole Rossi, Daniel Esteve, Corinne Mingues. Pyrotechnic actuator: a new generation of si integrated actuator. Sensors and Actuators 74(1999): 211-215
20．金友编译．激光微细加工：新的发展与应用．光机电信息．2001(7)：8-16
21．叶玉堂编著．激光微细加工．第1版．北京：电子科技大学出版社．1995
22．[日]微细加工技术编辑委员会编．朱怀义，赵巾奎译．微细加工技术．第1版．北京：科学出版社，1983
23．蒋欣荣编著．微细加工技术．第1版．北京：电子工业出版社，1990
24．孔庆华编著．特种加工．第1版．上海：同济大学出版社，1997
25．马宏编著．精密刻划工艺．第1版．北京：兵器工业出版社，1994
26. M. Bao., W. Wang. Future of microelectromechanical systems (MEMS), Sensors and Actuators A56(1996): 135-141.
27. Willianm W.. Hansen, Siegfried W. Janson. Direct-write UV laser microfabrication of 3D structures in lithium-alumosilicate glass. In SPIE proceedings Volume 2991, 1997: 104
28. Kim Hyeong-Jun, Lee Sang-Hoon,You Seog-Joo, Choi Sung-Churl. The fabrication of micro-framework using photosensitive glass-ceramics. Han'guk Ceramik Hakhoech1 2000,37(1): 82-89
29. Lewis David H., Janson Siegfried W., Cohen Ronald B., Antonsson Erik K. IEEE Int. Conf. Micro. Electro. Mech.. Syst. Tech. Dig. 12th(1999): 517-522
30. Kleimann P., Linnros J., Petersson S. Formation of wide and deep pores in silicon by electrochemical etching. Mater. Sci. Eng., B2000, 1369-70:29-33
31. DumitrescuMarius, Cobiann Cornel, Lungu Dan, Dascalu Dan, Pascu Adrian, Kclev spas, Van Den Berg Albert. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption. Eurosensors Ⅻ, Proc, 12th Eur. Conf. Solid-state. Transducers 9th UK Conf. Sens. Their Appl.1998, 2:
1202-1205
32. Makino Eiji, Shibata Takayaki, Yamada Yoshihiko. Micromaching of fine ceramics by photolithography. Sens. Aetuators, A 1999, A75(3): 278-288
33. Liu Chang, Tai Yu-chong. Sealing of micromachined cavities using chemical vapor deposition methods,characterization and optimization. J. microelectromech. Syst. 1999,8(2): 135-145 ~
34. Ch Jae-Yeol, Cho Young-Rae, Kim Heui-Soo, Jeong Hyo-Soo. Fabrication technology of glass micro-framework by photolithographic process. Han'guk Chaelyo Hakhoechi. 1998, 8(9): 871-875
35. Boucinha M, Chu V, Conde JP. Application of thin-film micromaching on glass. Mater. Res. Sol. Symp. Proc. 1999, 507:85-90
36. Batta M. Microfabrication by electrochemical metal removal. IBM J. Res. Dev. 1998, 42(5): 655-669
37. Reynes Jean Michel, Allier Jean Francois. Semiconducter based igniter for pyrotechnic device. FR 2,753,264
38．吴汉基，周顺林，蒋远大．走向国际化的静态等离子体推力器．中国航天．1998(4)：29-31
39．朱毅麟．离子推进及其关键技术．上海航天．2000(1)：12-18
40. Mueller Juergen. Thruster options for microspacecraft: A review and evaluation of state of the art and emerging technologies. Prog. Astronanut. Aeronaut. 2000, 187:45-137
41. Ketsdever Andrew D. System considerations considerations and design options for microspacecraft propulsion systems. Prog. Astronaut. Aeronaut. 2000, 187:139-163
42. Claude R Phipps, James Luke. Micro Laser Plasma Thrusters for Small Satellites, Proceedings of SPIE-The International Society for Optical Engineering, Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, USA, v4065, 2000: 801-809
43. Stenmark Lars, Lang Martin. Micro propulsion thrusters and technologies. Eur. Space Agency, ESA SP 1997:399-405
44．李宜敏，张中钦，张远君主编．固体火箭发动机原理．第1版．北京：北京航空航天大学出版社，1991
45．董师颜，张兆良．固体火箭发动机原理．第1版．北京：北京理工大学出版社，1996
46．王肇经，李东升等编著．真空吸注装药．第1版．北京：兵器工业出版社．1992
47．赵宝瑞，李晶，蒋金伟．微小推力自动测量系统研究．宇航计测技术．2000，20(4)：31-35
48．赵宝瑞，李晶．电火箭微小推力自动测量系统研究．导弹与航天运载技术．2000(2)：40-43
49．钟一鹏，胡雅达，江宏志．国外炸药性能手册．第1版．北京：兵器工业出版社，1990
50．潘功配，徐云庚．烟火药材料手册．第1版．南京：华东工程学院，1983
51．J.A.迪安主编．兰氏化学手册．第1版．北京：科学出版社，1991
2．党冀萍，钱静．纳米卫星发展现状及纳米卫星中的微电子技术．半导体情报．1999，36(3)：10-17
3．孟晓雄，孙彦平，张立平．纳米卫星的概念及前景．中国航天．1997(9)：36-38．
4. DeGroot, W., Oleson, S. Chemical Microthruster Options, N19970001472/HDM
5. S.W.Janson, H.Helvajian, E.Y.Tobinson. The cencept of "nanosatellite" for revolutionary low-cost space systems, Proceedings of the 44th Interantional Astronautics Feeration Conference, Graz, Austria, Oct.1993, Paper IAF-93-U.5.573
6. Siegfried W. Janson. Chemical and electric micropropulsion concepts for nanosatellites, in Proceedings of the 30th AIAA/ASME/SAE/ASEE Joint Propulsion Conference, Indianapotis IN, June 1994, Paper AIAA-94-2998.
7. Lewis. David H. Jr., Antonsson Erik K. Integrated pulsed propulsion system for microsatellite. US6,131,385 ~_
8．R.M．Myers，R.J.Cassady．美国公司主要电推进计划综述．控制工程，1999，4：27-31
9．毛根旺，韩先伟，杨涓，何洪庆．电推进研究的技术状态和发展前景．推进技术．2000，21(5)：1-5
10. J. Mueller. Thruster options for microspacecraft: a review and evaluation of existing hardware and emerging technologies, in: 33rd AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit, Seattle, USA, July 6-9, 1997
11. J. Mueller, W. Tang, A. Wallace, W. Li, D. Bame, I. Chakraborty, R. Lawton. Design, Analysis and Fabrication of a Vaporizing Liquid Micro-Thruster, AIAA Paper 97-3054, Seattle, WA, USA, July 1997
12. Chen K. Wise. A high-resolution silicon monolithic nozzle array for inkjet printing, Proceedings of the 8th International Conerence on Solid-state Sensors and Actuators (Transducers'95), Stockholm, Sweden, June 25-29, 1995:321-324
13. E.V. Mukerjee,A. P. Wallace, K. Y.Yan, D.W. Howard, R. L.Smith, S. D. Collins. Vaporizing liquid microthruster, Sensors and Actuators 83(2000): 231-236
14．沈瑞琪，叶迎华，戴实之．数字化火工品的概念及应用．火工品．2000(2)：36-38
15. A. Franks, M. Luty, C J Robbie, M. Stedman. A design of a microthrust balance for space applications. Nanoteehnology. 9(1998): 61-66
16. Finck Bernard, Lefuneux Alain, Mane Bernard. Non-detenating azide-based solid pyrotechnic cond gas generating compositions for Microsystems and microdevices. FR 2,774,684.
17. David H. Lewis Jr., Siegfried W. Janson, Ronald B. Cohen, Erik K. Antonsson. Digital micropropulsion, Sensors and Actuators 80(2000): 143-154
18. Carole Rossi, N. Fabre, V. Conedera, D. Esteve. Design farication and thrust prediction of solid propellant microthrusters for space application, Proceedings of SPIE-The International Society for Optical Engineering v 3680 n Ⅱ 1999: 906-916
19. Carole Rossi, Daniel Esteve, Corinne Mingues. Pyrotechnic actuator: a new generation of si integrated actuator. Sensors and Actuators 74(1999): 211-215
20．金友编译．激光微细加工：新的发展与应用．光机电信息．2001(7)：8-16
21．叶玉堂编著．激光微细加工．第1版．北京：电子科技大学出版社．1995
22．[日]微细加工技术编辑委员会编．朱怀义，赵巾奎译．微细加工技术．第1版．北京：科学出版社，1983
23．蒋欣荣编著．微细加工技术．第1版．北京：电子工业出版社，1990
24．孔庆华编著．特种加工．第1版．上海：同济大学出版社，1997
25．马宏编著．精密刻划工艺．第1版．北京：兵器工业出版社，1994
26. M. Bao., W. Wang. Future of microelectromechanical systems (MEMS), Sensors and Actuators A56(1996): 135-141.
27. Willianm W.. Hansen, Siegfried W. Janson. Direct-write UV laser microfabrication of 3D structures in lithium-alumosilicate glass. In SPIE proceedings Volume 2991, 1997: 104
28. Kim Hyeong-Jun, Lee Sang-Hoon,You Seog-Joo, Choi Sung-Churl. The fabrication of micro-framework using photosensitive glass-ceramics. Han'guk Ceramik Hakhoech1 2000,37(1): 82-89
29. Lewis David H., Janson Siegfried W., Cohen Ronald B., Antonsson Erik K. IEEE Int. Conf. Micro. Electro. Mech.. Syst. Tech. Dig. 12th(1999): 517-522
30. Kleimann P., Linnros J., Petersson S. Formation of wide and deep pores in silicon by electrochemical etching. Mater. Sci. Eng., B2000, 1369-70:29-33
31. DumitrescuMarius, Cobiann Cornel, Lungu Dan, Dascalu Dan, Pascu Adrian, Kclev spas, Van Den Berg Albert. Thermal simulation of surface micromachined polysilicon hot plates of low power consumption. Eurosensors Ⅻ, Proc, 12th Eur. Conf. Solid-state. Transducers 9th UK Conf. Sens. Their Appl.1998, 2:
1202-1205
32. Makino Eiji, Shibata Takayaki, Yamada Yoshihiko. Micromaching of fine ceramics by photolithography. Sens. Aetuators, A 1999, A75(3): 278-288
33. Liu Chang, Tai Yu-chong. Sealing of micromachined cavities using chemical vapor deposition methods,characterization and optimization. J. microelectromech. Syst. 1999,8(2): 135-145 ~
34. Ch Jae-Yeol, Cho Young-Rae, Kim Heui-Soo, Jeong Hyo-Soo. Fabrication technology of glass micro-framework by photolithographic process. Han'guk Chaelyo Hakhoechi. 1998, 8(9): 871-875
35. Boucinha M, Chu V, Conde JP. Application of thin-film micromaching on glass. Mater. Res. Sol. Symp. Proc. 1999, 507:85-90
36. Batta M. Microfabrication by electrochemical metal removal. IBM J. Res. Dev. 1998, 42(5): 655-669
37. Reynes Jean Michel, Allier Jean Francois. Semiconducter based igniter for pyrotechnic device. FR 2,753,264
38．吴汉基，周顺林，蒋远大．走向国际化的静态等离子体推力器．中国航天．1998(4)：29-31
39．朱毅麟．离子推进及其关键技术．上海航天．2000(1)：12-18
40. Mueller Juergen. Thruster options for microspacecraft: A review and evaluation of state of the art and emerging technologies. Prog. Astronanut. Aeronaut. 2000, 187:45-137
41. Ketsdever Andrew D. System considerations considerations and design options for microspacecraft propulsion systems. Prog. Astronaut. Aeronaut. 2000, 187:139-163
42. Claude R Phipps, James Luke. Micro Laser Plasma Thrusters for Small Satellites, Proceedings of SPIE-The International Society for Optical Engineering, Society of Photo-Optical Instrumentation Engineers, Bellingham, WA, USA, v4065, 2000: 801-809
43. Stenmark Lars, Lang Martin. Micro propulsion thrusters and technologies. Eur. Space Agency, ESA SP 1997:399-405
44．李宜敏，张中钦，张远君主编．固体火箭发动机原理．第1版．北京：北京航空航天大学出版社，1991
45．董师颜，张兆良．固体火箭发动机原理．第1版．北京：北京理工大学出版社，1996
46．王肇经，李东升等编著．真空吸注装药．第1版．北京：兵器工业出版社．1992
47．赵宝瑞，李晶，蒋金伟．微小推力自动测量系统研究．宇航计测技术．2000，20(4)：31-35
48．赵宝瑞，李晶．电火箭微小推力自动测量系统研究．导弹与航天运载技术．2000(2)：40-43
49．钟一鹏，胡雅达，江宏志．国外炸药性能手册．第1版．北京：兵器工业出版社，1990
50．潘功配，徐云庚．烟火药材料手册．第1版．南京：华东工程学院，1983
51．J.A.迪安主编．兰氏化学手册．第1版．北京：科学出版社，1991