阀套内孔形状误差气动测量系统的研究
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摘要
电液伺服阀是电液伺服控制系统的重要部件。它广泛应用于航天、航空、航海的航行控制,其性能直接影响整个系统的运动精度,因而在工业及武器系统中占有重要地位。电液伺服阀的功率级一般为滑阀副,起液压放大器的作用。
滑阀副由阀芯、阀套两部分组成,是借两者的相对运动来改变阀口过流面积,以达到液流控制的目的,是伺服阀的核心零件,尺寸及形位公差要求极严,通常对阀套内孔的技术要求为圆柱度和直线度控制在0.001mm之内。阀套内孔细长,相贯孔多,形状公差测量困难,主要靠手工研磨及试装完成加工,无法采用通用的测量设备进行检测,造成加工周期大幅度延长。
本文针对目前我国伺服滑阀副生产领域的现状,利用气动测量原理开发了阀套内孔形状误差自动化测量设备。本文首先引入了喷嘴挡板机构,并分析其特点;然后利用matlab工具,确定了测量系统的线性工作区,测量间隙;之后设计了测头及校对规,并为其配备了节流孔可调的差压式测量气路。依据相关的理论基础,本文制定了测量方案。根据测量方案中提出的技术要求,本文设计并制作了实验设备,包括设计并加工了机械运动机构和阀套专用夹具,气动测量气路的设计和搭建,选用仪表电路并制作了电控箱,设计并开发了控制及数据处理软件,并提出智能测量方法。最终利用设备进行实验,通过实验数据验证了设计的准确性。
Electro hydraulic servo valve is an important component in electro hydraulic servo control system. It is widely used in navigation control of astronavigation, aviation and navigation, and its characteristic directly effect motion precision of the whole system, so it possess an important position in industrial and weapon system.The power level of the electro hydraulic servo valve is the pair of guiding valve.
The guiding valve is founded with the valve pocket and the spool.Using the two parts, relative movements changes the flow area in order to reach the target of controlling fluid stream.It is the core of the servo valve.Its dimension and size tolerance is requested strictly.Usually we ask the inner hole roundess and linear in the 0.001mm. The inner hole of the servo valve is thin and long,also exits many intersection holes,so it is hard to measure the dimension and size tolerance.We mainly depend on handful grinding and try to produce.We can,t use the universal measurement to detect,so make the producing time longer.
This thesis aims at the actuality of our producing servo valve,I make use of pneumatic gauging to develop automated measurement equipment for testing dimension and size tolerance of the inner hole of the electro hydraulic servo valve. First we introduce nozzle-baffle mechanism and analyze its feature;then I make sure the linear workground and the measuring space with the matlab tool;at last we design the gauge outfit and the collator,so we provide it with differential pressure gas path of adjustable orifice. According as correlative theory base,this thesis establishes the measuring blue print. After create the measurement theory foundation we design and fabricate the experiment implement including designing and processing measurement equipment(craft equipment clamp apparatus and driving part), designing and setting distribution box, choosing and constructing electric control box, designing and developing measurement software and extract intellect measurement method. Finally, we carry on the experiment on these equipments and certify the accuracy of the design through experiment data.
滑阀副由阀芯、阀套两部分组成,是借两者的相对运动来改变阀口过流面积,以达到液流控制的目的,是伺服阀的核心零件,尺寸及形位公差要求极严,通常对阀套内孔的技术要求为圆柱度和直线度控制在0.001mm之内。阀套内孔细长,相贯孔多,形状公差测量困难,主要靠手工研磨及试装完成加工,无法采用通用的测量设备进行检测,造成加工周期大幅度延长。
本文针对目前我国伺服滑阀副生产领域的现状,利用气动测量原理开发了阀套内孔形状误差自动化测量设备。本文首先引入了喷嘴挡板机构,并分析其特点;然后利用matlab工具,确定了测量系统的线性工作区,测量间隙;之后设计了测头及校对规,并为其配备了节流孔可调的差压式测量气路。依据相关的理论基础,本文制定了测量方案。根据测量方案中提出的技术要求,本文设计并制作了实验设备,包括设计并加工了机械运动机构和阀套专用夹具,气动测量气路的设计和搭建,选用仪表电路并制作了电控箱,设计并开发了控制及数据处理软件,并提出智能测量方法。最终利用设备进行实验,通过实验数据验证了设计的准确性。
Electro hydraulic servo valve is an important component in electro hydraulic servo control system. It is widely used in navigation control of astronavigation, aviation and navigation, and its characteristic directly effect motion precision of the whole system, so it possess an important position in industrial and weapon system.The power level of the electro hydraulic servo valve is the pair of guiding valve.
The guiding valve is founded with the valve pocket and the spool.Using the two parts, relative movements changes the flow area in order to reach the target of controlling fluid stream.It is the core of the servo valve.Its dimension and size tolerance is requested strictly.Usually we ask the inner hole roundess and linear in the 0.001mm. The inner hole of the servo valve is thin and long,also exits many intersection holes,so it is hard to measure the dimension and size tolerance.We mainly depend on handful grinding and try to produce.We can,t use the universal measurement to detect,so make the producing time longer.
This thesis aims at the actuality of our producing servo valve,I make use of pneumatic gauging to develop automated measurement equipment for testing dimension and size tolerance of the inner hole of the electro hydraulic servo valve. First we introduce nozzle-baffle mechanism and analyze its feature;then I make sure the linear workground and the measuring space with the matlab tool;at last we design the gauge outfit and the collator,so we provide it with differential pressure gas path of adjustable orifice. According as correlative theory base,this thesis establishes the measuring blue print. After create the measurement theory foundation we design and fabricate the experiment implement including designing and processing measurement equipment(craft equipment clamp apparatus and driving part), designing and setting distribution box, choosing and constructing electric control box, designing and developing measurement software and extract intellect measurement method. Finally, we carry on the experiment on these equipments and certify the accuracy of the design through experiment data.
引文
1. H. Hahm, A. Piepenbrink, K. D. L. Leimbach. Input/output Linearization Control of an Electro Servo-hydraulic Actuator Proceedings of the IEEE Conference on Control Applications. 1994, (2): 995~1000
2.任光融,张振华,周永强.电液伺服阀制造工艺宇航出版社.1988: 2~4, 91~92
3.叶发中.电液伺服阀可靠性设计与分析.战术导弹控制技术. 1992, (1): 1~7
4. L.Shengyi, W.Shimin, L.Bingyang. Research of Super-precision Grinding Control System for Axial Dimension of Hydro Servo Valve Rod. Proceedings of the International Precision Engineering Seminar. 1991: 347~382
5.张建锋,周永强,王广林.微机控制伺服阀液动配磨精密测量技术.液压与气动. 1999: 48~51
6.贾莲凤,王小艺,庞川宾.轴(孔)类工件自动化精密在线检测及评判系统的设计.计算机测量与控制. 2003, 11(8): 567~568
7.岁丰.自动三座标精密测量系统的发展.管理科学与文摘. 1996, (4): 13~15
8.权转菊,吴伟.圆柱度测量仪示值不确定度评定.计量技术. 2005, (12): 10
9. Akasaka Yoshimichi, Nakamura ichiro, Yasunari Shinichi, Ohara Toshitsugu, Kaneko Shigeji. Dynamic characteristics of roll push-up cylinder based on direct-operated servo valve. C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 60 579 Nov 1994 JSME. 1994: 3835~3840
10.浦昭邦,何正叔,张善锺.几何量精密计量仪器.哈尔滨工业大学出版社. 1994: 78~91
11.刘玉初.浮标式气动测量装置设计.机械工业出版社. 1981: 5~6
12.陈建华.滑阀副开口叠合量气动测量精度的提高.航天工艺. 1989, (4): 49~52
13.龚达平.气动测量在伺服阀滑阀加工中的应用.机械工程. 1998, (25): 177~179
14.张申雄.滑阀付开口叠合量气动测量曲线的研究.上仪情报. 1991, (1): 37~43
15.陈吉红,宁德初.滑阀付配磨参数测量的理论研究.国防科技大学学报. 1991, 13(1): 73~78
16. S. J. Lin, A.Akers. Dynamic Model of the Flapper-nozzle Component of an Electrohydraulic Servovalve. Measurement and Control. 1989, 111(1): 105~109
17.魏泗均,杜泽,韩卫实.喷嘴挡板的喷嘴结构与流量系数.应用科技. 1989,(8): 21~23
18. Deadwyler, Richard, Manion, M. Francis. Design Considerations for Improver Fluidic Input Servovalve Performance. Harry Diamond Laboratories(Technical Menorandum). 1989, 79(4): 28
19. Hunt J M. Generation and migration of petroleum from abnormally pressured fluid compartments. AAPG Bull. 1990, 74(1): 1~12
20. R.N.Steven. Wet gas metering with a horizontally moun-ted Venturimeter .Flow Measurement and Instrumentation. 2002: 12
21. E. Urata, Y. Nakao. Study of a Flapper-nozzle System for a Water Hydraulic Servovalve. JSME International Journal. 1998, 41(2): 270~277
22.范鸿滏.滑阀开口量的气动测量分析.计量学报. 1981, (7): 13~16
23.石淼森.气动测量.中国计量出版社. 1992: 18
24. GAO Wei, Satoshi Kiyono, Tadatoshi Nomura. A new multiprobe method of roundness measurements. Precision Engineering. 1996, 19(1): 37~44
25. K.Kim. Cylindrical accuracy control based on stochastic modeling and forecasting compensation. International Journal of Machine Tools and Manufacture. 1988, 28(4): 495~501
26. Ni Xiaohua, Deng Shanxi. Uncertainty of result of spatiall straightenss least-square evaluation. Proceedings of the Second International Symposiumon Instrumentation Science and Technology.Jinan,China. 2002, (3): 129~133
27.黄富贵,崔长彩.任意方向上直线度误差的评定新方法.机械工程学报. 2008, 44(7): 221~223
28. Hu Xinsheng, Zhou Ji, Ma Xigeng, Wang Zhongyu, Li Zhu. The Unified Evaluation Criteria and Algorithm for Non-linear Model of the Form-position Errors. Acta Metrologica Sinca. 1997, 18(1): 18~19
29. Liu Yusheng,Yang Jiangxin,Wu Zhaotong,Gao Shuming. A mathematical model of symmetry based on mathematical definition[J]. Journal of Zhejiang University Science. 2002, 3(1): 24~29
30.王平江,陈吉红,赵震.形状误差评定中最小区域收敛条件几何判定方法探讨.计量技术. 1998, (1): 2~4
31. Cart K, Ferreira P. Verification of foml tolerances PartⅡ: Cylindricity and straightness of a median line[J]. Prec Eng. 1995, 17(2): 144~156
32. Lai J Y, Chen I H. Minimum zone evaluation of circles and cylinders .Int J Mach Tools & Manufact. 1996, 36(4): 435~451
33. Zhu X Y, Ding H, Wang MY. Formerror evaluation:an iterativereweighted least squares algorithm[J]. Transaction of theASME: Journal of Manufacturing Science and Engineering. 2004, 126(8): 535~541
34. Qing Z, Fan K C, Li Z. Evaluation method for spatial straightness errors based on minimum Zone condition. Precision Engineering. 1999, 32(4): 264~272
35.李军.关于数据采集技术的研究科技资讯. 2006, (33): 64
36.王信通.磁力无心夹具的圆弧形浮动支承.精密制造与自动化. 1989, (7):5
37. Yan Guijun, Lu Haibao, Qi Xingmin. The Research on Increasing Precision of the Step-angle of a Step-Motor. Journal of National University of Defense Technology. 1994, (2): 24~26
38. Kok-Meng Lee, George Vachtsevanos ,and ChiKong Kwan. Development of a spherical stepper wrist motor. IEEE Int. 1988,(15): 272~273
39.周融,林善法,陈宁宁.一种传感器标定的自动化测试方案. 2003, 12(3):10~12
40. Cho N T U. Roundness modeling of Machined parts for tolerance analysis. Precision Engineering. 2001, (9): 256
41.王志杰.圆柱度误差的数据处理系统.机电技术学报. 2009, (1): 22~25
2.任光融,张振华,周永强.电液伺服阀制造工艺宇航出版社.1988: 2~4, 91~92
3.叶发中.电液伺服阀可靠性设计与分析.战术导弹控制技术. 1992, (1): 1~7
4. L.Shengyi, W.Shimin, L.Bingyang. Research of Super-precision Grinding Control System for Axial Dimension of Hydro Servo Valve Rod. Proceedings of the International Precision Engineering Seminar. 1991: 347~382
5.张建锋,周永强,王广林.微机控制伺服阀液动配磨精密测量技术.液压与气动. 1999: 48~51
6.贾莲凤,王小艺,庞川宾.轴(孔)类工件自动化精密在线检测及评判系统的设计.计算机测量与控制. 2003, 11(8): 567~568
7.岁丰.自动三座标精密测量系统的发展.管理科学与文摘. 1996, (4): 13~15
8.权转菊,吴伟.圆柱度测量仪示值不确定度评定.计量技术. 2005, (12): 10
9. Akasaka Yoshimichi, Nakamura ichiro, Yasunari Shinichi, Ohara Toshitsugu, Kaneko Shigeji. Dynamic characteristics of roll push-up cylinder based on direct-operated servo valve. C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 60 579 Nov 1994 JSME. 1994: 3835~3840
10.浦昭邦,何正叔,张善锺.几何量精密计量仪器.哈尔滨工业大学出版社. 1994: 78~91
11.刘玉初.浮标式气动测量装置设计.机械工业出版社. 1981: 5~6
12.陈建华.滑阀副开口叠合量气动测量精度的提高.航天工艺. 1989, (4): 49~52
13.龚达平.气动测量在伺服阀滑阀加工中的应用.机械工程. 1998, (25): 177~179
14.张申雄.滑阀付开口叠合量气动测量曲线的研究.上仪情报. 1991, (1): 37~43
15.陈吉红,宁德初.滑阀付配磨参数测量的理论研究.国防科技大学学报. 1991, 13(1): 73~78
16. S. J. Lin, A.Akers. Dynamic Model of the Flapper-nozzle Component of an Electrohydraulic Servovalve. Measurement and Control. 1989, 111(1): 105~109
17.魏泗均,杜泽,韩卫实.喷嘴挡板的喷嘴结构与流量系数.应用科技. 1989,(8): 21~23
18. Deadwyler, Richard, Manion, M. Francis. Design Considerations for Improver Fluidic Input Servovalve Performance. Harry Diamond Laboratories(Technical Menorandum). 1989, 79(4): 28
19. Hunt J M. Generation and migration of petroleum from abnormally pressured fluid compartments. AAPG Bull. 1990, 74(1): 1~12
20. R.N.Steven. Wet gas metering with a horizontally moun-ted Venturimeter .Flow Measurement and Instrumentation. 2002: 12
21. E. Urata, Y. Nakao. Study of a Flapper-nozzle System for a Water Hydraulic Servovalve. JSME International Journal. 1998, 41(2): 270~277
22.范鸿滏.滑阀开口量的气动测量分析.计量学报. 1981, (7): 13~16
23.石淼森.气动测量.中国计量出版社. 1992: 18
24. GAO Wei, Satoshi Kiyono, Tadatoshi Nomura. A new multiprobe method of roundness measurements. Precision Engineering. 1996, 19(1): 37~44
25. K.Kim. Cylindrical accuracy control based on stochastic modeling and forecasting compensation. International Journal of Machine Tools and Manufacture. 1988, 28(4): 495~501
26. Ni Xiaohua, Deng Shanxi. Uncertainty of result of spatiall straightenss least-square evaluation. Proceedings of the Second International Symposiumon Instrumentation Science and Technology.Jinan,China. 2002, (3): 129~133
27.黄富贵,崔长彩.任意方向上直线度误差的评定新方法.机械工程学报. 2008, 44(7): 221~223
28. Hu Xinsheng, Zhou Ji, Ma Xigeng, Wang Zhongyu, Li Zhu. The Unified Evaluation Criteria and Algorithm for Non-linear Model of the Form-position Errors. Acta Metrologica Sinca. 1997, 18(1): 18~19
29. Liu Yusheng,Yang Jiangxin,Wu Zhaotong,Gao Shuming. A mathematical model of symmetry based on mathematical definition[J]. Journal of Zhejiang University Science. 2002, 3(1): 24~29
30.王平江,陈吉红,赵震.形状误差评定中最小区域收敛条件几何判定方法探讨.计量技术. 1998, (1): 2~4
31. Cart K, Ferreira P. Verification of foml tolerances PartⅡ: Cylindricity and straightness of a median line[J]. Prec Eng. 1995, 17(2): 144~156
32. Lai J Y, Chen I H. Minimum zone evaluation of circles and cylinders .Int J Mach Tools & Manufact. 1996, 36(4): 435~451
33. Zhu X Y, Ding H, Wang MY. Formerror evaluation:an iterativereweighted least squares algorithm[J]. Transaction of theASME: Journal of Manufacturing Science and Engineering. 2004, 126(8): 535~541
34. Qing Z, Fan K C, Li Z. Evaluation method for spatial straightness errors based on minimum Zone condition. Precision Engineering. 1999, 32(4): 264~272
35.李军.关于数据采集技术的研究科技资讯. 2006, (33): 64
36.王信通.磁力无心夹具的圆弧形浮动支承.精密制造与自动化. 1989, (7):5
37. Yan Guijun, Lu Haibao, Qi Xingmin. The Research on Increasing Precision of the Step-angle of a Step-Motor. Journal of National University of Defense Technology. 1994, (2): 24~26
38. Kok-Meng Lee, George Vachtsevanos ,and ChiKong Kwan. Development of a spherical stepper wrist motor. IEEE Int. 1988,(15): 272~273
39.周融,林善法,陈宁宁.一种传感器标定的自动化测试方案. 2003, 12(3):10~12
40. Cho N T U. Roundness modeling of Machined parts for tolerance analysis. Precision Engineering. 2001, (9): 256
41.王志杰.圆柱度误差的数据处理系统.机电技术学报. 2009, (1): 22~25