集成MEMS电容位移传感器的二维微位移定位平台系统的研究
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摘要
随着科学技术的发展，微位移定位技术已成为许多现代高科技装备的基础技术，高精度微位移定位平台系统被广泛应用于航空航天、超精密加工制造和测量、微电子、生物工程、光学工程等领域。本课题针对微位移定位平台系统中定位平台较大、耦合度较高，位移传感器难于实现小型化和高度集成化，尤其是位移传感器不易于安装调整等不足，优化设计了微位移定位平台，并设计了适用于二维定位平台的梳齿电容位移传感器。
本文首先对微位移定位平台进行了整体设计，确定了微位移定位平台的整体结构尺寸；设计了平行薄板柔性解耦梁来抑制二维微位移定位平台的耦合；合理布局微位移定位平台上的各个结构，利用一级杠杆位移放大机构的特性，有效放大驱动位移，同时改变驱动位移的方向；设计了细牙螺钉结合楔块位移缩小机构的压电陶瓷驱动器预紧方案；最后，使用ANSYS分析软件对设计完成的微位移定位平台进行仿真分析。
设计了基于MEMS工艺的硅基梳齿电容微位移传感器，考虑与上述微位移定位平台的集成，对梳齿电容微位移传感器进行了整体设计；通过分析计算确定传感器中梳齿电极的参数、梳齿电极间距和柔性梁的结构形式和参数；使用ANSYS分析软件对设计完成的传感器进行仿真分析；最后，确定硅基MEMS梳齿电容传感器的加工工艺。
建立了以前馈控制同PID控制相结合算法为基础的控制系统，该控制系统主要由压电陶瓷驱动器及驱动电源、梳齿电容微位移传感器、电容信号转换电路和控制计算机组成，从而保证微位移定位平台系统具有好的控制精度。
最后，建立实验测试系统，对微位移定位平台进行测试，测试实物微位移定位平台的输出位移特性、分辨率、耦合度和频率特性等特性，验证该定位平台是否符合理论设计，是否能达到设计指标。
With the development of science and technology, micro-displacement positioningtechnology has become the basic technologies of many modern High-tech equipment,High-precision positioning platform systems are widely used in aerospace, ultra-precisionmanufacturing and measurement, microelectronics, bio-engineering, optical engineeringand other fields. This subject for that the big platform body, high couple of themicro-displacement positioning platform system, and the displacement sensors is difficultto achieve miniaturization and high integration, especially the installation and adjustmentof displacement sensor is not easy to ensure, optimized the design of themicro-displacement positioning platform and designed the comb capacitive displacementsensor for two-dimensional positioning platform.
This paper first did the overall design to determine the size of the overall structure ofthe micro-displacement positioning platform; Designed the sheet parallel flexibledecoupling beam to suppress the coupling of the two-dimensional micro-displacementpositioning platform; Made the structures in micro-displacement positioning platform havereasonable layout, using one level displacement amplification mechanism to amplify thedrive displacement effectively, while change the driving displacement direction; Designedthe preload program of the piezoelectric ceramic actuator using fine pitch screw combinedwith wedge mechanism; Finally, using the ANSYS analysis software to simulate andanalyze the designed positioning platform.
Designed the comb capacitive micro-displacement sensor silicon-based MEMSprocess, considering the integration with the above-mentioned micro-displacementpositioning platform, did the overall design for comb capacitive displacement sensor; Byanalysis and calculation to determine the parameters of the comb-tooth electrode structureof the sensor, the comb-tooth electrode spacing and the structure of the flexible beam;Using the ANSYS analysis software to simulate and analyze the designed comb capacitivedisplacement sensor; Finally, identified the process of the silicon-based MEMS comb capacitive sensor.
Established the control systems based the algorithm of feed-forward control combinedwith PID, This control system consists of piezoelectric actuators and drive power, combCapacitive Displacement sensor, capacitance signal conversion circuit and controlcomputer, Thus ensured the micro-displacement positioning platform system has goodcontrol accuracy.
Finally, build a lab test systems, test the output displacement, resolution, coupling andfrequency of the micro positioning platform to verify the real micro positioning platformdo or don’t achieve the design specifications.
本文首先对微位移定位平台进行了整体设计，确定了微位移定位平台的整体结构尺寸；设计了平行薄板柔性解耦梁来抑制二维微位移定位平台的耦合；合理布局微位移定位平台上的各个结构，利用一级杠杆位移放大机构的特性，有效放大驱动位移，同时改变驱动位移的方向；设计了细牙螺钉结合楔块位移缩小机构的压电陶瓷驱动器预紧方案；最后，使用ANSYS分析软件对设计完成的微位移定位平台进行仿真分析。
设计了基于MEMS工艺的硅基梳齿电容微位移传感器，考虑与上述微位移定位平台的集成，对梳齿电容微位移传感器进行了整体设计；通过分析计算确定传感器中梳齿电极的参数、梳齿电极间距和柔性梁的结构形式和参数；使用ANSYS分析软件对设计完成的传感器进行仿真分析；最后，确定硅基MEMS梳齿电容传感器的加工工艺。
建立了以前馈控制同PID控制相结合算法为基础的控制系统，该控制系统主要由压电陶瓷驱动器及驱动电源、梳齿电容微位移传感器、电容信号转换电路和控制计算机组成，从而保证微位移定位平台系统具有好的控制精度。
最后，建立实验测试系统，对微位移定位平台进行测试，测试实物微位移定位平台的输出位移特性、分辨率、耦合度和频率特性等特性，验证该定位平台是否符合理论设计，是否能达到设计指标。
With the development of science and technology, micro-displacement positioningtechnology has become the basic technologies of many modern High-tech equipment,High-precision positioning platform systems are widely used in aerospace, ultra-precisionmanufacturing and measurement, microelectronics, bio-engineering, optical engineeringand other fields. This subject for that the big platform body, high couple of themicro-displacement positioning platform system, and the displacement sensors is difficultto achieve miniaturization and high integration, especially the installation and adjustmentof displacement sensor is not easy to ensure, optimized the design of themicro-displacement positioning platform and designed the comb capacitive displacementsensor for two-dimensional positioning platform.
This paper first did the overall design to determine the size of the overall structure ofthe micro-displacement positioning platform; Designed the sheet parallel flexibledecoupling beam to suppress the coupling of the two-dimensional micro-displacementpositioning platform; Made the structures in micro-displacement positioning platform havereasonable layout, using one level displacement amplification mechanism to amplify thedrive displacement effectively, while change the driving displacement direction; Designedthe preload program of the piezoelectric ceramic actuator using fine pitch screw combinedwith wedge mechanism; Finally, using the ANSYS analysis software to simulate andanalyze the designed positioning platform.
Designed the comb capacitive micro-displacement sensor silicon-based MEMSprocess, considering the integration with the above-mentioned micro-displacementpositioning platform, did the overall design for comb capacitive displacement sensor; Byanalysis and calculation to determine the parameters of the comb-tooth electrode structureof the sensor, the comb-tooth electrode spacing and the structure of the flexible beam;Using the ANSYS analysis software to simulate and analyze the designed comb capacitivedisplacement sensor; Finally, identified the process of the silicon-based MEMS comb capacitive sensor.
Established the control systems based the algorithm of feed-forward control combinedwith PID, This control system consists of piezoelectric actuators and drive power, combCapacitive Displacement sensor, capacitance signal conversion circuit and controlcomputer, Thus ensured the micro-displacement positioning platform system has goodcontrol accuracy.
Finally, build a lab test systems, test the output displacement, resolution, coupling andfrequency of the micro positioning platform to verify the real micro positioning platformdo or don’t achieve the design specifications.
引文
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[3]冯金.染色体显微操作系统关键技术研究[D].上海：上海交通大学，2012.
[4]赵强，阎绍泽.光刻机精密运动平台的几何及运动误差建模[J].清华大学学报（自然科学版）.2010,50（2）：241-245.
[5]宋树军.高精度定位平台系统的研究[J].机床与液压.2010,38(12):16-17.
[6] Y.Tian, B.Shirinzadeh, D.Zhang. Design and dynamics of a3-DOF flexure-basedparallel mechanism for micro/nano manipulation[J]. Microelectronic Engineering.2010,(7):230-241.
[7] E.E.Scire, eta1. Piezodriven50um range stage with subnanometer resolution[J].Rev.Sci.Instrum.1978，49(12)：1735-1740.
[8] Binning.G, Quate.C.F, Gerber.C.H. Atomic Force Microscope[J]. Phys. Rev. Lett.1986(9):[9]Qingsong Xu, Yangmin Li. Tracking performance characterization andimprovement of a piezoactuated micropositioning system based on an empiricalindex[J].Robotics and Computer-integrated Manufacturing.2010,26(6):744-752.
[10]赵鑫.基于MEMS微位移传感的纳米定位工作台研制[D].黑龙江：哈尔滨工业大学，2008.
[11]张彦斐,宫金良.2自由度大行程微定位平台结构与参数设计[J].机械工程学报.2010,46(23):30-35.
[12] D. Zhang, D.G.Chetwynd, X.Liu, Y.Tian. Investigation of a3-DOF micro-positioningtable for surface grinding [J]. International Journal of Mechanical Sciences.2006,48(12):1401-1408.
[13]王家涛.硅基集成式微型平面纳米级定位系统的研究[D].黑龙江：哈尔滨工业大学，2008.
[14] Eddy, David S. Application of MEMS technology in automotive sensors and actuators[J]. Proceedings of the IEEE.1998,86(8):1747-1755.
[15] Sun Yu. Characterizing Fruit Fly Flight Behavior Using a Microforce Sensor With aNew Comb-Drive Configuration [J]. Micro-electromechanical Systems.2005,14(1):4-11.
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