微型旋转惯性压电电机动力学特性研究
|
摘要
微型旋转惯性压电电机是一种靠自身惯性产生冲击实现转动的新型压电电机，具有结构简单、动作响应快、无电磁干扰、微位移等特点。在脉冲电信号激励下，利用压电陶瓷片的逆压电效应，使压电振子在共振频段产生微观振动，通过惯性冲击作用转换成旋转的宏观运动，即将电能转换成机械能。
本文提出一种微型旋转惯性压电电机，分析了该种电机的工作原理。建立了压电振子横梁和轴的动力学模型及微分方程，求解了横梁和轴自由振动的固有频率及模态函数，分析了压电振子固有频率随振子参数的变化规律。利用模态叠加原理，分别给出了振子横梁和轴在电压激励下的强迫响应方程，分析了压电振子的强迫响应规律及其随振子参数的变化规律。结果表明，振子横梁长度对振子强迫响应的影响较为明显。
考虑压电振子横梁和轴的振动耦合，建立了压电振子的梁轴耦合动力学模型和微分方程，分析了压电振子固有频率及其随压电振子参数的变化规律。将振子的横梁和轴独立计算的固有频率与振动耦合固有频率对比，计算出两者固有频率的相对偏差并分析了偏差随振子参数变化的规律，总结了两种计算方法的适用参数范围。
利用ANSYS软件对压电振子自由振动进行了模拟仿真，并和理论值进行了分析对比，证明了理论分析的正确性。对压电振子在压电激励下的谐响应进行了模拟，并分析了压电振子振幅随电压的变化关系。
完成了微型旋转惯性压电电机的结构设计和样机的研制。利用Workbench对样机的压电振子进行了模态仿真模拟。进行了样机原理试验。
The micro piezoelectric motor is a kind of new piezoelectric motor with rotary inertiato impact for rotation, and it has the advantages of simple structure, quick respond, withno electromagnetic interference and micro-displacement, etc. With harmonic electricalsignal, it utilized the inverse piezoelectric effect of piezoelectricity ceramic piece, and thepiezoelectric vibrator produced microscopic vibration and converted to macroscopicmotion of revolve with the inertia impulse. The electrical energy was converted to themechanical energy.
A new one of micro rotary inertia piezoelectric motor was proposed and the drivingprinciple of the motor was analyzed in this paper. The dynamical model and differentialequation of piezoelectric vibrator were set up, and their free vibration natural frequenciesand modal functions were solved out, and that the effects of changing parameters onvibrator natural frequencies were analyzed. Based on the mode superposition method, theforced response equation of beam and axis with harmonic electrical signal were deduced.Using the equation, the forced responses of piezoelectric vibrator and the effects ofchanging parameters on forced responses were investigated. Results show that effects ofbeam parameters variation on the vibrating modes are obvious.
The dynamical model and differential equation of piezoelectric vibrator were set upunder considering coupling vibration of the beam and axis. The free vibration naturalfrequencies of piezoelectric vibrator and effects of parameters variation on theirfrequencies are analyzed. The free vibration natural frequencies of coupling vibrationcompared to that of independent calculation, the relative deviation is calculated and effectsof piezoelectric vibrator parameters variation on relative deviation is analyzed. And theapplicable scope of the two different calculation methods is discussed.
The free vibration of piezoelectric vibrator is simulated by ANSYS software andcompared with the theoretical analysis, which demonstrates the correctness of theoryanalysis. The harmonic response of piezoelectric vibrator is also analyzed and therelationship of amplitude and voltage is discussed.
The structure design of micro-piezoelectric motor is finished, and the model machineis manufacture. The free vibration of piezoelectric vibrator is simulated by use ofworkbench software. The principle experiment of the micro piezoelectric motor iscompleted.
本文提出一种微型旋转惯性压电电机，分析了该种电机的工作原理。建立了压电振子横梁和轴的动力学模型及微分方程，求解了横梁和轴自由振动的固有频率及模态函数，分析了压电振子固有频率随振子参数的变化规律。利用模态叠加原理，分别给出了振子横梁和轴在电压激励下的强迫响应方程，分析了压电振子的强迫响应规律及其随振子参数的变化规律。结果表明，振子横梁长度对振子强迫响应的影响较为明显。
考虑压电振子横梁和轴的振动耦合，建立了压电振子的梁轴耦合动力学模型和微分方程，分析了压电振子固有频率及其随压电振子参数的变化规律。将振子的横梁和轴独立计算的固有频率与振动耦合固有频率对比，计算出两者固有频率的相对偏差并分析了偏差随振子参数变化的规律，总结了两种计算方法的适用参数范围。
利用ANSYS软件对压电振子自由振动进行了模拟仿真，并和理论值进行了分析对比，证明了理论分析的正确性。对压电振子在压电激励下的谐响应进行了模拟，并分析了压电振子振幅随电压的变化关系。
完成了微型旋转惯性压电电机的结构设计和样机的研制。利用Workbench对样机的压电振子进行了模态仿真模拟。进行了样机原理试验。
The micro piezoelectric motor is a kind of new piezoelectric motor with rotary inertiato impact for rotation, and it has the advantages of simple structure, quick respond, withno electromagnetic interference and micro-displacement, etc. With harmonic electricalsignal, it utilized the inverse piezoelectric effect of piezoelectricity ceramic piece, and thepiezoelectric vibrator produced microscopic vibration and converted to macroscopicmotion of revolve with the inertia impulse. The electrical energy was converted to themechanical energy.
A new one of micro rotary inertia piezoelectric motor was proposed and the drivingprinciple of the motor was analyzed in this paper. The dynamical model and differentialequation of piezoelectric vibrator were set up, and their free vibration natural frequenciesand modal functions were solved out, and that the effects of changing parameters onvibrator natural frequencies were analyzed. Based on the mode superposition method, theforced response equation of beam and axis with harmonic electrical signal were deduced.Using the equation, the forced responses of piezoelectric vibrator and the effects ofchanging parameters on forced responses were investigated. Results show that effects ofbeam parameters variation on the vibrating modes are obvious.
The dynamical model and differential equation of piezoelectric vibrator were set upunder considering coupling vibration of the beam and axis. The free vibration naturalfrequencies of piezoelectric vibrator and effects of parameters variation on theirfrequencies are analyzed. The free vibration natural frequencies of coupling vibrationcompared to that of independent calculation, the relative deviation is calculated and effectsof piezoelectric vibrator parameters variation on relative deviation is analyzed. And theapplicable scope of the two different calculation methods is discussed.
The free vibration of piezoelectric vibrator is simulated by ANSYS software andcompared with the theoretical analysis, which demonstrates the correctness of theoryanalysis. The harmonic response of piezoelectric vibrator is also analyzed and therelationship of amplitude and voltage is discussed.
The structure design of micro-piezoelectric motor is finished, and the model machineis manufacture. The free vibration of piezoelectric vibrator is simulated by use ofworkbench software. The principle experiment of the micro piezoelectric motor iscompleted.
引文
[1]胡敏强,金龙,顾菊平.超声波电机原理与设计[M].北京:科学出版社,2005:1-1,25-27.
[2]高亮,阚珊珊,李敏,等.压电陶瓷精密转动平台的转角精度测量[J].光学精密工程,2007,15(2):206-211.
[3]王刚.一种三维微位移操作器[J].机械设计,2000,5(5):35-39.
[4]陈海初.压电陶瓷驱动球基微驱动器的动力学研究[J].光学精密工程,2007,15(2):248-253.
[5]刘华,颜国正,丁国清.惯性式压电陶瓷驱动器的研究[J].压电与声光,2001,23(4):275-278.
[6]赵淳生.超声电机技术与应用[M].北京:科学出版社,2007:1-8.
[7]赵淳生,李朝东.日本超声电机的产业化、应用和发展[J].振动、测试与诊断,1999,19(1):1-7.
[8]赵淳生.面向21世纪的超声电机技术[J].中国工程科学,2002,4(2):86-91.
[9]鄂世举,吴博达,杨志刚.压电式微小驱动器的发展及应用[J].压电与声学,2002,24(6):447-451.
[10]蔡鹤皋,孙立宁,安辉.压电/电致伸缩微位移器件与应用(上、下)[J].高技术通讯,1994,4(5、6):38-40、37-40.
[11] Furrtani Katushi, Mohri Naotake, Higuchi Toshiro. Self—running type electrical dischargemachine using impact drive mechamism[C]. Japan: Tokyo, Proceeding of Advanced IntelligentMechatroics AIM’97,1997:25-27.
[12]吴一辉,杨洪波.纳米X—Y工作台固有频率特性的研究[J].光学精密工程,1995,3(6):50-54.
[13]张宏壮,曾平,华顺明,等.压电型精密位移驱动器的研究进展[J].压电与声光,2004,26(3):192-195.
[14]姜楠,刘俊标,方光荣,等.惯性冲击式压电微电机的研究[J].压电与声光,2007,29(2):187-189.
[15]刘品宽,孙立宁,刘涛,等.惯性冲击式运动原理的理论分析与仿真[J].中国机械工程,2004,15(4):2217-2221.
[16]金家楣,时运来,李玉宝,等.新型惯性式直线超声压电电机的运动机理及实验研究[J].光学精密工程,2008,16(12):2371-2377.
[17] Wallaschek J. Ultrasonic motor research in Germany-past，present，future. Proceedings of the FirstInternational Workshop on Ultrasonic Motors and Actuators[C]. Yokohama, Japan: TokyoInstitute of Technology,2005:1-1.
[18]张福学,王丽坤.现代压电学[M].北京:科学出版社,2002,101-103.
[19] Williams W, Brown W. Piezoelectric motor [P]. US Patent,2439499.1942:8-20.
[20]胡敏强.超声电动机的研究及其应用[J].微特电机,2000,(5):8-24.
[21] Lavrinenko V V, Nekrasov M. Piezoelectric motor [P]. Soviet Patent.217509.1965.
[22] Barth H V. Ultrasonic drive motor[R]. IBM Technical Disclosure Bulletin,1973,16(7):2263.
[23] Vishnevsky V, Kavertsev V, Kartashev I et al. Piezoelectric motor structures [P]. US Patent,4019073.1975:8-12.
[24] Friend J R, Stutts D S. The dynamics of an annular piezoelectric motor stator [N]. Journal ofsound and vibration,1997,204(3):421-437.
[25] G P, Bar-Cohen Y, Joffe B. The multifunction automated crawling system (MACS)[C].1997IEEEinternational conference on robotics and automation,1997(1):335-340.
[26] Timothy S Glenn, Nesbitt W Hagood. Development of a two-sided piezoelectric rotary ultrasonicmotor for high torque[C]. SPIE,1997,30(41):326-338.
[27] King T G， Xu W. Pizomotors using flexure hinged displacement amplifiers[C]. IEEE colloquiumon innovative actuators for mechatronic systems,(11):1-5.
[28] Xu W, King T G. Mechanical amplifier designed for piezo-application[C]. IEEE colloquium oninnovative actuators for mechatronic systems,1995,(1):40-46.
[29] Hagedorn P, Wallaschek P. Travelling Wave ultrasonic motor, Part I: working principle andmachamatical modeling of the stator[C]. Journal of sound and vibration,1992:31-46.
[30] Hagedorn P, Konrad W. Travelling Wave ultrasonic motor, Part II:a numerical method for theflexural vibration of the stator[C]. Journal of sound and vibration,1993:115-122.
[31] J W Krome, J Wallaschek. Influence of the piezoelectric actuator on the vibrations of the stator ofa traveling wave motor[C]. Ultrasonics symposium,1995(1):413-416.
[32] Krome J W, Wallaschek J. Novel disk type ultrasonic traveling wave motor for high torque[C].Ultrasonic symposium,1997(1):385-390.
[33]周铁英,董蜀湘.环形三叠片超生振子及用其钳位的微动马达[P].中国发明专利,ZL89109320.1989-12-21.
[34]张凯,周铁英,王欢,等.1mm压电柱式超声波微电机的研制[N].声学学报,2004,29(3):258-261.
[35]刘建芳,杨志刚,赵宏伟,等.新型压电精密步进旋转驱动器[N].吉林大学学报(工学版),2006,36(5):673-678.
[36]李晓韬,程光明,杨志刚,等.应用惯性冲击原理的非对称夹持式压电旋转驱动器的设计[J].光学精密工程,2010,18(1):156-160.
[37] Li X T, Xu G, Toshisugu U, eta1．Research on a novel sensor for measuring force in arbitrarydirection[C].2008International Conference on Computer and Electrical Engineering,2008:241-244.
[38]程光明,李晓韬,曾平,等.压电叠堆式惯性移动机构的设计与试验[J].吉林大学学报(工学版),2007(1):85-88.
[39]曾平,李晓韬,程光明,等.新型压电单振子移动机构的试验研究[J]．压电与声光,2007(5):622-624.
[40] Higuchi T, Yagamata Y, Kudoh K, et al. Pricise positioning mechanism utilizing rapiddeformations of piezoelectric elements[C]. Proceedings of the IEEE International Conference onRobotics and Automation,1995,1(5):666-671.
[41] Morita Takeshi, Yoshida Ryuichi, Okamotoy asuhiro, et al. A smooth impact rotation motor usinga multi-layered torsional piezoelectric autuator [J]. IEE Transactions on Ultrasonics,Ferroelectrics, and Frequency Control,1999,46(6):1439-1445.
[42]姜楠,刘俊标.旋转型压电惯性冲击马达的特性[J].光电精密工程,2009,17(2):350-355.
[43]江溯.机构、驱动、检测一体化的压电陶瓷旋转型驱动器的研究[J].中国机械工程,1997,8(4):65-67.
[44]李晓韬,杨志刚,程光明,等.基于惯性冲击原理的变摩擦式微位移机构的运动特性[J].光学精密工程,2008,16(4):676-981.
[45]张宏壮,曾平,华顺明,等.压电双晶片型惯性冲击式旋转精密驱动器的研究[J].光学精密工程,2005,13(3):298-303.
[46]马建旭,马培,罗俊章,等.管道微机器人中压电执行器的研究[J].压电与声,1999,21(2):108-118.
[47]陈建宇,孙麟治.压电元件驱动的微小夹持器的研制[J].光学精密工程,1997,5(4):41-48.
[48]张宏壮,程光明,赵宏伟,等.压电双晶片型二维惯性冲击式精密驱动器[J].吉林大学学报:工学版,2006,36(1):67-71.
[49]温建明,程光明,曾平,等.新型惯性式压电旋转驱动器[J].吉林大学学报:工学版,2007,37(5):1112-1115.
[50]莫岳平,靳宏,赵夙,等.一种新型压电超声直线电机的研究[J].微电机,2011,44(8):11-13.
[51]邢继春,许立忠,梁永丽.旋转式惯性压电电机的振子模型研究[J].振动与冲击,2010,29(11):105-109.
[52]曾平,温建明,程光明,等.新型压电双晶片式惯性旋转驱动机构设计[J].纳米技术与精密工程,2008,6(4):302-308.
[53]刘延柱,陈文良,陈立群.振动力学[M].北京:高等教育出版社,1998:137-138.
[54]谢官模.振动力学[M].北京:国防工业出版社,2007:69-72.
[55]鲁周勋.转轴的弯、扭耦合振动研究[J].汽轮机技术,1994,10(5):266-268.
[56]龚曙光,谢桂兰,黄云清. ANSYS参数化编程与命令手册[M].北京:机械工业出版社,2009:102-105.
[2]高亮,阚珊珊,李敏,等.压电陶瓷精密转动平台的转角精度测量[J].光学精密工程,2007,15(2):206-211.
[3]王刚.一种三维微位移操作器[J].机械设计,2000,5(5):35-39.
[4]陈海初.压电陶瓷驱动球基微驱动器的动力学研究[J].光学精密工程,2007,15(2):248-253.
[5]刘华,颜国正,丁国清.惯性式压电陶瓷驱动器的研究[J].压电与声光,2001,23(4):275-278.
[6]赵淳生.超声电机技术与应用[M].北京:科学出版社,2007:1-8.
[7]赵淳生,李朝东.日本超声电机的产业化、应用和发展[J].振动、测试与诊断,1999,19(1):1-7.
[8]赵淳生.面向21世纪的超声电机技术[J].中国工程科学,2002,4(2):86-91.
[9]鄂世举,吴博达,杨志刚.压电式微小驱动器的发展及应用[J].压电与声学,2002,24(6):447-451.
[10]蔡鹤皋,孙立宁,安辉.压电/电致伸缩微位移器件与应用(上、下)[J].高技术通讯,1994,4(5、6):38-40、37-40.
[11] Furrtani Katushi, Mohri Naotake, Higuchi Toshiro. Self—running type electrical dischargemachine using impact drive mechamism[C]. Japan: Tokyo, Proceeding of Advanced IntelligentMechatroics AIM’97,1997:25-27.
[12]吴一辉,杨洪波.纳米X—Y工作台固有频率特性的研究[J].光学精密工程,1995,3(6):50-54.
[13]张宏壮,曾平,华顺明,等.压电型精密位移驱动器的研究进展[J].压电与声光,2004,26(3):192-195.
[14]姜楠,刘俊标,方光荣,等.惯性冲击式压电微电机的研究[J].压电与声光,2007,29(2):187-189.
[15]刘品宽,孙立宁,刘涛,等.惯性冲击式运动原理的理论分析与仿真[J].中国机械工程,2004,15(4):2217-2221.
[16]金家楣,时运来,李玉宝,等.新型惯性式直线超声压电电机的运动机理及实验研究[J].光学精密工程,2008,16(12):2371-2377.
[17] Wallaschek J. Ultrasonic motor research in Germany-past，present，future. Proceedings of the FirstInternational Workshop on Ultrasonic Motors and Actuators[C]. Yokohama, Japan: TokyoInstitute of Technology,2005:1-1.
[18]张福学,王丽坤.现代压电学[M].北京:科学出版社,2002,101-103.
[19] Williams W, Brown W. Piezoelectric motor [P]. US Patent,2439499.1942:8-20.
[20]胡敏强.超声电动机的研究及其应用[J].微特电机,2000,(5):8-24.
[21] Lavrinenko V V, Nekrasov M. Piezoelectric motor [P]. Soviet Patent.217509.1965.
[22] Barth H V. Ultrasonic drive motor[R]. IBM Technical Disclosure Bulletin,1973,16(7):2263.
[23] Vishnevsky V, Kavertsev V, Kartashev I et al. Piezoelectric motor structures [P]. US Patent,4019073.1975:8-12.
[24] Friend J R, Stutts D S. The dynamics of an annular piezoelectric motor stator [N]. Journal ofsound and vibration,1997,204(3):421-437.
[25] G P, Bar-Cohen Y, Joffe B. The multifunction automated crawling system (MACS)[C].1997IEEEinternational conference on robotics and automation,1997(1):335-340.
[26] Timothy S Glenn, Nesbitt W Hagood. Development of a two-sided piezoelectric rotary ultrasonicmotor for high torque[C]. SPIE,1997,30(41):326-338.
[27] King T G， Xu W. Pizomotors using flexure hinged displacement amplifiers[C]. IEEE colloquiumon innovative actuators for mechatronic systems,(11):1-5.
[28] Xu W, King T G. Mechanical amplifier designed for piezo-application[C]. IEEE colloquium oninnovative actuators for mechatronic systems,1995,(1):40-46.
[29] Hagedorn P, Wallaschek P. Travelling Wave ultrasonic motor, Part I: working principle andmachamatical modeling of the stator[C]. Journal of sound and vibration,1992:31-46.
[30] Hagedorn P, Konrad W. Travelling Wave ultrasonic motor, Part II:a numerical method for theflexural vibration of the stator[C]. Journal of sound and vibration,1993:115-122.
[31] J W Krome, J Wallaschek. Influence of the piezoelectric actuator on the vibrations of the stator ofa traveling wave motor[C]. Ultrasonics symposium,1995(1):413-416.
[32] Krome J W, Wallaschek J. Novel disk type ultrasonic traveling wave motor for high torque[C].Ultrasonic symposium,1997(1):385-390.
[33]周铁英,董蜀湘.环形三叠片超生振子及用其钳位的微动马达[P].中国发明专利,ZL89109320.1989-12-21.
[34]张凯,周铁英,王欢,等.1mm压电柱式超声波微电机的研制[N].声学学报,2004,29(3):258-261.
[35]刘建芳,杨志刚,赵宏伟,等.新型压电精密步进旋转驱动器[N].吉林大学学报(工学版),2006,36(5):673-678.
[36]李晓韬,程光明,杨志刚,等.应用惯性冲击原理的非对称夹持式压电旋转驱动器的设计[J].光学精密工程,2010,18(1):156-160.
[37] Li X T, Xu G, Toshisugu U, eta1．Research on a novel sensor for measuring force in arbitrarydirection[C].2008International Conference on Computer and Electrical Engineering,2008:241-244.
[38]程光明,李晓韬,曾平,等.压电叠堆式惯性移动机构的设计与试验[J].吉林大学学报(工学版),2007(1):85-88.
[39]曾平,李晓韬,程光明,等.新型压电单振子移动机构的试验研究[J]．压电与声光,2007(5):622-624.
[40] Higuchi T, Yagamata Y, Kudoh K, et al. Pricise positioning mechanism utilizing rapiddeformations of piezoelectric elements[C]. Proceedings of the IEEE International Conference onRobotics and Automation,1995,1(5):666-671.
[41] Morita Takeshi, Yoshida Ryuichi, Okamotoy asuhiro, et al. A smooth impact rotation motor usinga multi-layered torsional piezoelectric autuator [J]. IEE Transactions on Ultrasonics,Ferroelectrics, and Frequency Control,1999,46(6):1439-1445.
[42]姜楠,刘俊标.旋转型压电惯性冲击马达的特性[J].光电精密工程,2009,17(2):350-355.
[43]江溯.机构、驱动、检测一体化的压电陶瓷旋转型驱动器的研究[J].中国机械工程,1997,8(4):65-67.
[44]李晓韬,杨志刚,程光明,等.基于惯性冲击原理的变摩擦式微位移机构的运动特性[J].光学精密工程,2008,16(4):676-981.
[45]张宏壮,曾平,华顺明,等.压电双晶片型惯性冲击式旋转精密驱动器的研究[J].光学精密工程,2005,13(3):298-303.
[46]马建旭,马培,罗俊章,等.管道微机器人中压电执行器的研究[J].压电与声,1999,21(2):108-118.
[47]陈建宇,孙麟治.压电元件驱动的微小夹持器的研制[J].光学精密工程,1997,5(4):41-48.
[48]张宏壮,程光明,赵宏伟,等.压电双晶片型二维惯性冲击式精密驱动器[J].吉林大学学报:工学版,2006,36(1):67-71.
[49]温建明,程光明,曾平,等.新型惯性式压电旋转驱动器[J].吉林大学学报:工学版,2007,37(5):1112-1115.
[50]莫岳平,靳宏,赵夙,等.一种新型压电超声直线电机的研究[J].微电机,2011,44(8):11-13.
[51]邢继春,许立忠,梁永丽.旋转式惯性压电电机的振子模型研究[J].振动与冲击,2010,29(11):105-109.
[52]曾平,温建明,程光明,等.新型压电双晶片式惯性旋转驱动机构设计[J].纳米技术与精密工程,2008,6(4):302-308.
[53]刘延柱,陈文良,陈立群.振动力学[M].北京:高等教育出版社,1998:137-138.
[54]谢官模.振动力学[M].北京:国防工业出版社,2007:69-72.
[55]鲁周勋.转轴的弯、扭耦合振动研究[J].汽轮机技术,1994,10(5):266-268.
[56]龚曙光,谢桂兰,黄云清. ANSYS参数化编程与命令手册[M].北京:机械工业出版社,2009:102-105.