轮廓仪信号滤波调理与数字技术研究
摘要
表面粗糙度是评定工件性能的一项重要指标,直接影响到工件的摩擦系数、抗疲劳能力等性能以及外观,因此,作为测量表面粗糙度的重要仪器,轮廓仪在机床、汽车、仪器仪表等行业中运用广泛。轮廓仪的性能优劣主要取决于测量精度,而信号调理电路的性能以及粗糙度数字滤波器的好坏直接决定着轮廓仪的测量精度。在查阅相关资料的基础上,本文首先对国内外的粗糙度测量技术进行了分析,在此基础上设计了轮廓仪的信号调理电路与数字滤波器,并将所研究的技术运用到了Talysurf5型轮廓仪的改造过程中。
对轮廓仪信号调理电路的功能与结构进行了分析,并研制了正弦波振荡电路、交流放大电路、带通滤波电路、量程切换电路、相敏检波电路以及低通滤波电路。研制了模数转换电路以及高精度的参考电压电路。分析了光电耦合抗干扰的原理,并运用光电耦合器来对信号调理电路的模拟部分和数字部分进行隔离。
分析了数字滤波原理,推导出2RC、相位校正、高斯滤波这三种数字滤波方法的滤波方程,并在软件上实现了这三种数字滤波方法。根据国家标准GB/T 3505-2009中关于粗糙度评定参数的定义,推导了主要粗糙度评定参数的计算流程。运用VB和VC混合编程的方式编写了表面粗糙度评定软件。将本文所设计的信号调理电路和粗糙度评定软件运用到Talysurf5型轮廓仪的改造中,并对改造后轮廓仪进行了校准。
Surface roughness is an important plant of work piece, and it will directly affects the performances such as coefficient of friction, anti-fatigue, performance, and so on, so, as an important instrument for measuring surface roughness, profilometer is widely used in machine tools, automobiles, instrumentation and other industries. The performance of profilometer mostly depends on the precision of measurement, which is absolutely determined by the performance of signal conditioning circuit and digital filter. Referring to great lot of scientific and technical literatures which are relevant with surface roughness measurement, this dissertation, firstly analyzes the present condition of roughness measurement techniques domestically and abroad, on this basis, signal conditioning circuit and digital filters are developed, and applied to the process of the transformation of Talysurf5 type profilometer.
This dissertation analyzes the function and structure of signal conditioning circuit, and develops sine wave oscillating circuit, AC amplification circuit, band pass filter circuit, range switching circuit, phase sensitive detection circuit and a low pass filter circuit. Develops analog-digital conversion circuit and high-precision reference voltage circuit. This dissertation also analyzes the anti-jamming principium of photocoupler, and uses photocoupler to isolate the analog part of signal conditioning circuit from the digital part.
This dissertation derives the filtering equations of 2RC filter, phase-correct filter, and Gaussian filter from corresponding digital filtering principles, and also implements these three digital filters in software. According to the definitions on roughness evaluation parameters of national standard GB/T 3505-2009, this dissertation derives the process of calculating main roughness evaluation parameters. Develops surface roughness evaluation software based on VB and VC. Applies both the signal conditioning circuit and this software to the transformation process of Talysurf5 type profilometer, and calibrates it.
对轮廓仪信号调理电路的功能与结构进行了分析,并研制了正弦波振荡电路、交流放大电路、带通滤波电路、量程切换电路、相敏检波电路以及低通滤波电路。研制了模数转换电路以及高精度的参考电压电路。分析了光电耦合抗干扰的原理,并运用光电耦合器来对信号调理电路的模拟部分和数字部分进行隔离。
分析了数字滤波原理,推导出2RC、相位校正、高斯滤波这三种数字滤波方法的滤波方程,并在软件上实现了这三种数字滤波方法。根据国家标准GB/T 3505-2009中关于粗糙度评定参数的定义,推导了主要粗糙度评定参数的计算流程。运用VB和VC混合编程的方式编写了表面粗糙度评定软件。将本文所设计的信号调理电路和粗糙度评定软件运用到Talysurf5型轮廓仪的改造中,并对改造后轮廓仪进行了校准。
Surface roughness is an important plant of work piece, and it will directly affects the performances such as coefficient of friction, anti-fatigue, performance, and so on, so, as an important instrument for measuring surface roughness, profilometer is widely used in machine tools, automobiles, instrumentation and other industries. The performance of profilometer mostly depends on the precision of measurement, which is absolutely determined by the performance of signal conditioning circuit and digital filter. Referring to great lot of scientific and technical literatures which are relevant with surface roughness measurement, this dissertation, firstly analyzes the present condition of roughness measurement techniques domestically and abroad, on this basis, signal conditioning circuit and digital filters are developed, and applied to the process of the transformation of Talysurf5 type profilometer.
This dissertation analyzes the function and structure of signal conditioning circuit, and develops sine wave oscillating circuit, AC amplification circuit, band pass filter circuit, range switching circuit, phase sensitive detection circuit and a low pass filter circuit. Develops analog-digital conversion circuit and high-precision reference voltage circuit. This dissertation also analyzes the anti-jamming principium of photocoupler, and uses photocoupler to isolate the analog part of signal conditioning circuit from the digital part.
This dissertation derives the filtering equations of 2RC filter, phase-correct filter, and Gaussian filter from corresponding digital filtering principles, and also implements these three digital filters in software. According to the definitions on roughness evaluation parameters of national standard GB/T 3505-2009, this dissertation derives the process of calculating main roughness evaluation parameters. Develops surface roughness evaluation software based on VB and VC. Applies both the signal conditioning circuit and this software to the transformation process of Talysurf5 type profilometer, and calibrates it.
引文
1俞汉清.表面粗糙度标准及应用.中国计量出版社. 1997:2~9
2吴松青.表面粗糙度应用指南.机械工业出版社. 1990:7~23
3罗宽,田明,臧景峰等.针式轮廓仪的技术改进研究.长春理工大学学报. 2008, 31(4):81~83
4杨晔,童竞,唐家驹. Talysurf-4型表面粗糙度轮廓仪的智能化.计量技术. 1996, (9):17~19
5袁峰伟,蒋彦,黄鑫.表面粗糙度测量仪的自动化和智能化改造.制造技术与机床. 2009,(5):38~40
6强锡富,于汶,电路基础与电动量仪:下册.哈尔滨工业大学出版社. 1986:124~125,129~130
7 H. Dagnall M. A. Exploring Surface. London:Rank Taylor Hobson. 1980
8袁长良,丁志华,武文堂.表面粗糙度及其测量.第一版.机械工业出版社. 1989,:1~18
9李伯奎,刘远伟.表面粗糙度理论发展研究.工具技术. 2004, 38(1):63~67
10唐文彦,张军,李惠鹏.触针法测量表面粗糙度的发展及现状.机械工艺师. 2000, (11):40~42
11张剑.触针接触式表面粗糙度测量仪.机械工人. 2004, (6):57~58
12刘斌,冯其波,匡萃文.表面粗糙度测量方法综述.光学仪器. 2004, 26(5):54~58
13强锡富.传感器.第三版.机械工业出版社. 2001:75~76
14吴建昌,师五喜.几种常见的轮廓仪.仪器仪表用户. 2009,(3):122~123
15杨旭东.表面粗糙度测量仪的工作原理分析及其改进方案.贵州工业大学学报. 2001, 30(1):45~48
16 K. Develi, T. Babadagli, C. Comlekci. A new computer-controlled surface-scanning device for measurement of fracture surface roughness[J]. Computers&Geosciences, 2001,(27):265~277
17 T. R. Tomas. Trends in surface. Int. J .Mach. Tools Manufac. 1998,38(6):405~411
18 Yang. Peizhong, Jiang. Shouwei. The 3-D assessment of surface roughness and its implement with MATLAB. Proceedings of the Seventh International Conference on Industrial Engineering and Engineering Management, 2000: 47~56
19 Whitehouse D J. Surface metrology[J]. Measurement Science and Technology, 1997, (8): 955~972
20赵学智,赖兴余,叶邦彦.表面轮廓参数测量的数字滤波.江西农业大学学报. 1986, 20(2):252~255
21张世亮.表面粗糙度参数的计算机辅助测量.湛江水产学院学报. 1996, 16(1):61~66
22 Baker L R Automated measurement of surface texture. Ln:SPIE. 1986
23刘亚龙,周亮,姚奇.二维表面轮廓测量仪测试系统的开发.机械工程师. 2009,(3): 107~110
24张珍明,劳奇成,李平等.一种电感式传感器信号处理模块.西安工业学院学报1993, 19(1):25~27
25童诗白,华成英.模拟电子技术基础.第三版.高等教育出版社. 2000:313~323,390
26张国雄.测控电路.机械工业出版社. 2000:68~69,79~80,103~106
27远坂俊昭.测量电子电路设计滤波器篇彭军译科学出版社. 2006:59~66
28 Altera Inc. Cyclone FPGA Family. 2003
29 Tom Shanley. Don Anderson. PCI System Architecture. Fourth Edition. Addison Wesley Longman Inc,2002
30李惠鹏.轮廓仪智能化相关技术的研究.哈尔滨工业大学硕士论文. 2000: 9~10,18~19
31高明甫,杨勇,孔令斌.二阶压控电压源滤波器设计.电子技术. 2010, (3): 73~75
32万鹏,朱洁.串行输出的16位ADC芯片MAX195的应用.电测与仪表. 1997, 34(376):44~46
33秦伟刚.光电耦合技术与应用.仪器仪表学报. 2006, 27(6):2603~2604
34中华人民共和国国家标准. GB/T 3505-2009产品几何技术规范表面结构:轮廓法术语、定义及表面结构参数
35 Wen-Ruey Chang, Mikko Hirvonen,Raoul Gronqvist[J]. The effect of cut-off length on surface roughness parameters and their correlations with transition friction[J]. Safty Science, 2004, 42:755~769
36 Tomas. Roughness Surfaces[M]. Longman Group Ltd.1992
37 J.Raja, V.Radhakrishnan. Digital Filtering of Surface Profile. Wear, 1979,(57):147~155
38 Bala Muralikrisnan&Shengyu. Fusome note on the 2RC filter. Center for Precision Metrology, UNC Charlotte[J], 1~3
39 H.Shi.J.Fang. Carrier-based Automatic Phase-shift Method. Spie.1989,116:18~24
40樊新海,安钢,张传清.零相数字滤波及其应用.国外电子测量技术. 2005, (8):9~11
41许景波,袁怡宝,朴伟英.表面粗糙度测量中的高斯滤波快速算法.计量学报. 2005, 26(4):309~312
42 Krystek M. A Fast Gauss Filtering Algorithm for Rougness Measurments[J]. Prec Eng,1996,(19): 198~200
43 K lapper, J Harris C M. On the response and approximation of Gaussian filters[J]. RE Transactions on Audio, 1959 (5): 80~87
44刘琦,姚英学,代晓颖.零件轮廓测量软件关键算法的研究.机械制造. 2008, 46(532): 47~50
45张泰昌.轮廓最大高度Ry值测量的研究.制造技术与机床. 1996, (7): 19~20
46甘晓川,张瑜,刘娜.表面粗糙度参数Rz、Rm ax、Rt、R3 z、RPc等的测量.中国计量. 2008, (9): 75~77
47 Chen Xuesheng, Yi Qin, Raj Balenda. Development of a statistical parameter-based surface model for the simulation of variation of surface roughness with contact pressure[J]. Journal of Materials Processing Technology, 2004, (145):247~255
48危常忠,王本强,谢铁邦.表面纹理的参数评定研究.华中理工大学学报. 1999, 27(1): 55~59
49 Diel, R.J, Holm, P. Roughness measurement-Have the necessities changed[J]. Journal of Sound and Vibration,2006, 293(3):777~783
50 Wen-Ruey Chang. The effect of surface roughness on dynamic friction between neolite and quarry tile. Safty Science,1998:29~105
51 Rajendra M. Patrikar. Modeling and simulation of surface roughness[J]. Applied Surface Science, 2004, (228): 213~220
2吴松青.表面粗糙度应用指南.机械工业出版社. 1990:7~23
3罗宽,田明,臧景峰等.针式轮廓仪的技术改进研究.长春理工大学学报. 2008, 31(4):81~83
4杨晔,童竞,唐家驹. Talysurf-4型表面粗糙度轮廓仪的智能化.计量技术. 1996, (9):17~19
5袁峰伟,蒋彦,黄鑫.表面粗糙度测量仪的自动化和智能化改造.制造技术与机床. 2009,(5):38~40
6强锡富,于汶,电路基础与电动量仪:下册.哈尔滨工业大学出版社. 1986:124~125,129~130
7 H. Dagnall M. A. Exploring Surface. London:Rank Taylor Hobson. 1980
8袁长良,丁志华,武文堂.表面粗糙度及其测量.第一版.机械工业出版社. 1989,:1~18
9李伯奎,刘远伟.表面粗糙度理论发展研究.工具技术. 2004, 38(1):63~67
10唐文彦,张军,李惠鹏.触针法测量表面粗糙度的发展及现状.机械工艺师. 2000, (11):40~42
11张剑.触针接触式表面粗糙度测量仪.机械工人. 2004, (6):57~58
12刘斌,冯其波,匡萃文.表面粗糙度测量方法综述.光学仪器. 2004, 26(5):54~58
13强锡富.传感器.第三版.机械工业出版社. 2001:75~76
14吴建昌,师五喜.几种常见的轮廓仪.仪器仪表用户. 2009,(3):122~123
15杨旭东.表面粗糙度测量仪的工作原理分析及其改进方案.贵州工业大学学报. 2001, 30(1):45~48
16 K. Develi, T. Babadagli, C. Comlekci. A new computer-controlled surface-scanning device for measurement of fracture surface roughness[J]. Computers&Geosciences, 2001,(27):265~277
17 T. R. Tomas. Trends in surface. Int. J .Mach. Tools Manufac. 1998,38(6):405~411
18 Yang. Peizhong, Jiang. Shouwei. The 3-D assessment of surface roughness and its implement with MATLAB. Proceedings of the Seventh International Conference on Industrial Engineering and Engineering Management, 2000: 47~56
19 Whitehouse D J. Surface metrology[J]. Measurement Science and Technology, 1997, (8): 955~972
20赵学智,赖兴余,叶邦彦.表面轮廓参数测量的数字滤波.江西农业大学学报. 1986, 20(2):252~255
21张世亮.表面粗糙度参数的计算机辅助测量.湛江水产学院学报. 1996, 16(1):61~66
22 Baker L R Automated measurement of surface texture. Ln:SPIE. 1986
23刘亚龙,周亮,姚奇.二维表面轮廓测量仪测试系统的开发.机械工程师. 2009,(3): 107~110
24张珍明,劳奇成,李平等.一种电感式传感器信号处理模块.西安工业学院学报1993, 19(1):25~27
25童诗白,华成英.模拟电子技术基础.第三版.高等教育出版社. 2000:313~323,390
26张国雄.测控电路.机械工业出版社. 2000:68~69,79~80,103~106
27远坂俊昭.测量电子电路设计滤波器篇彭军译科学出版社. 2006:59~66
28 Altera Inc. Cyclone FPGA Family. 2003
29 Tom Shanley. Don Anderson. PCI System Architecture. Fourth Edition. Addison Wesley Longman Inc,2002
30李惠鹏.轮廓仪智能化相关技术的研究.哈尔滨工业大学硕士论文. 2000: 9~10,18~19
31高明甫,杨勇,孔令斌.二阶压控电压源滤波器设计.电子技术. 2010, (3): 73~75
32万鹏,朱洁.串行输出的16位ADC芯片MAX195的应用.电测与仪表. 1997, 34(376):44~46
33秦伟刚.光电耦合技术与应用.仪器仪表学报. 2006, 27(6):2603~2604
34中华人民共和国国家标准. GB/T 3505-2009产品几何技术规范表面结构:轮廓法术语、定义及表面结构参数
35 Wen-Ruey Chang, Mikko Hirvonen,Raoul Gronqvist[J]. The effect of cut-off length on surface roughness parameters and their correlations with transition friction[J]. Safty Science, 2004, 42:755~769
36 Tomas. Roughness Surfaces[M]. Longman Group Ltd.1992
37 J.Raja, V.Radhakrishnan. Digital Filtering of Surface Profile. Wear, 1979,(57):147~155
38 Bala Muralikrisnan&Shengyu. Fusome note on the 2RC filter. Center for Precision Metrology, UNC Charlotte[J], 1~3
39 H.Shi.J.Fang. Carrier-based Automatic Phase-shift Method. Spie.1989,116:18~24
40樊新海,安钢,张传清.零相数字滤波及其应用.国外电子测量技术. 2005, (8):9~11
41许景波,袁怡宝,朴伟英.表面粗糙度测量中的高斯滤波快速算法.计量学报. 2005, 26(4):309~312
42 Krystek M. A Fast Gauss Filtering Algorithm for Rougness Measurments[J]. Prec Eng,1996,(19): 198~200
43 K lapper, J Harris C M. On the response and approximation of Gaussian filters[J]. RE Transactions on Audio, 1959 (5): 80~87
44刘琦,姚英学,代晓颖.零件轮廓测量软件关键算法的研究.机械制造. 2008, 46(532): 47~50
45张泰昌.轮廓最大高度Ry值测量的研究.制造技术与机床. 1996, (7): 19~20
46甘晓川,张瑜,刘娜.表面粗糙度参数Rz、Rm ax、Rt、R3 z、RPc等的测量.中国计量. 2008, (9): 75~77
47 Chen Xuesheng, Yi Qin, Raj Balenda. Development of a statistical parameter-based surface model for the simulation of variation of surface roughness with contact pressure[J]. Journal of Materials Processing Technology, 2004, (145):247~255
48危常忠,王本强,谢铁邦.表面纹理的参数评定研究.华中理工大学学报. 1999, 27(1): 55~59
49 Diel, R.J, Holm, P. Roughness measurement-Have the necessities changed[J]. Journal of Sound and Vibration,2006, 293(3):777~783
50 Wen-Ruey Chang. The effect of surface roughness on dynamic friction between neolite and quarry tile. Safty Science,1998:29~105
51 Rajendra M. Patrikar. Modeling and simulation of surface roughness[J]. Applied Surface Science, 2004, (228): 213~220