含柔性放大臂的超磁致伸缩高速点胶阀研究
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摘要
喷射点胶是一种非接触式点胶技术,具有传统的接触式点胶技术无法比拟的优势,逐渐成为微电子封装领域的主流点胶技术。超磁致伸缩材料(GMM)是一种新型的功能材料,在外界磁场的作用下可以产生较大的应变,常被用来制作微位移驱动器。本文在前人的研究基础上,对一种新型的超磁致伸缩驱动的喷射点胶阀做了优化。本文的主要研究工作如下：
1.建立了点胶阀的数学模型和仿真模型,实测数据和仿真数据的对比结果说明了仿真模型能较为准确地反映点胶阀的实际工作情况；
2.对点胶阀的励磁线圈和柔性铰链放大臂做了优化设计,介绍了线圈的设计方法,开发了线圈设计软件。对柔性铰链放大臂的结构做了改进,对比了前后两种放大臂的受力状态,分别给出了两种放大臂柔性铰链的强度校核方法并做了校核对比。
3.对点胶阀的动态性能进行了实验研究。通过对点胶阀喷针位移曲线的分析,发现了点胶阀存在的问题,提出了喷针位置的调整方法,解决了先前点胶阀不能稳定将胶液喷出的问题,使点胶阀的性能有了较为明显的改善,并使点胶阀的稳定工作频率从原先的35Hz提高到了目前的200Hz以上。
4.对点胶工艺开展了探索性的实验,研究了控制信号高压时间、驱动电流及供胶压力对胶点尺寸的影响,用高速摄像系统观察了胶液喷射过程,展示了几种基本点胶图案的效果。
Jet dispensing is a non-contact dispensing technology. It has some inherent advantages over traditional contact dispensing technology. Giant magnetostrictive material(GMM) is a new functional material and usually used on micro-displacement actuator. On the basis of other's research, this paper do some optimization research on a jet dispenser driven by giant magnetostrictive actuator. The main research work are as follows:
1. The dispenser's mathematics model and emulational model are established. The comparison of measured data and simulation data demonstrates that the model can correctly reflect the dispenser's actual working situation.
2. The coil and lever with flexure hinge is designed and optimized. The design method of the coil is introduced and a software used to design the coil is developed. The structure of the lever with flexure hinge is improved, the strained condition contrast of the former and current levers is presented, the mechanical strength checking methods of the two levers are presented respectively and the checking examples are given.
3. Experiments on the dispenser's dynamics is carried out. Through analysing the displacement curve of the dispenser's needle, some problems are found, some methods on relocating the needle are presented, the problem that the dispenser can't jet steadily is solved perfectly, the dispenser's performance is improved obviously, the dispenser's working frequency has been promoted to above 200Hz from previous 35Hz.
4. Some groping experiments on dispensing industrial art are carried out. The differences to the size of the fluid dots made by pulse width of control signal, driving current and gas pressure are researched, the fluid jetting process is observed under the help of the high frame vision system, some basic patterns dispensed are shown.
1.建立了点胶阀的数学模型和仿真模型,实测数据和仿真数据的对比结果说明了仿真模型能较为准确地反映点胶阀的实际工作情况；
2.对点胶阀的励磁线圈和柔性铰链放大臂做了优化设计,介绍了线圈的设计方法,开发了线圈设计软件。对柔性铰链放大臂的结构做了改进,对比了前后两种放大臂的受力状态,分别给出了两种放大臂柔性铰链的强度校核方法并做了校核对比。
3.对点胶阀的动态性能进行了实验研究。通过对点胶阀喷针位移曲线的分析,发现了点胶阀存在的问题,提出了喷针位置的调整方法,解决了先前点胶阀不能稳定将胶液喷出的问题,使点胶阀的性能有了较为明显的改善,并使点胶阀的稳定工作频率从原先的35Hz提高到了目前的200Hz以上。
4.对点胶工艺开展了探索性的实验,研究了控制信号高压时间、驱动电流及供胶压力对胶点尺寸的影响,用高速摄像系统观察了胶液喷射过程,展示了几种基本点胶图案的效果。
Jet dispensing is a non-contact dispensing technology. It has some inherent advantages over traditional contact dispensing technology. Giant magnetostrictive material(GMM) is a new functional material and usually used on micro-displacement actuator. On the basis of other's research, this paper do some optimization research on a jet dispenser driven by giant magnetostrictive actuator. The main research work are as follows:
1. The dispenser's mathematics model and emulational model are established. The comparison of measured data and simulation data demonstrates that the model can correctly reflect the dispenser's actual working situation.
2. The coil and lever with flexure hinge is designed and optimized. The design method of the coil is introduced and a software used to design the coil is developed. The structure of the lever with flexure hinge is improved, the strained condition contrast of the former and current levers is presented, the mechanical strength checking methods of the two levers are presented respectively and the checking examples are given.
3. Experiments on the dispenser's dynamics is carried out. Through analysing the displacement curve of the dispenser's needle, some problems are found, some methods on relocating the needle are presented, the problem that the dispenser can't jet steadily is solved perfectly, the dispenser's performance is improved obviously, the dispenser's working frequency has been promoted to above 200Hz from previous 35Hz.
4. Some groping experiments on dispensing industrial art are carried out. The differences to the size of the fluid dots made by pulse width of control signal, driving current and gas pressure are researched, the fluid jetting process is observed under the help of the high frame vision system, some basic patterns dispensed are shown.
引文
[1]沈正湘,李涵雄,J‘汉,韩雷.电子封装中的点胶过程分析和控制[J].控制工程,2005,12(5)：405-408.
[2]赵翼翔,陈新度,陈新.微电子封装中的流体点胶技术综述[J].液压与气动,2006(2)：52-54.
[3]Dan Ashley, Al Lewis喷射点胶技术的关键[J].半导体科技,2007,4：13-18.
[4]杨宜民.新型驱动器及其应用[M].北京：机械工业出版社,1998.
[5]X.C. Shang, E. Pan, L.P. Qin:Mathematical modeling and numerical computation for the vibration of a magnetostrictive actuator[J]. Smart Materials and Structures, 2008, Vol.17:1-12.
[6]B.T Yang, M. Bonis, H. Tao, C. Prelle, F. Lamarque. A magnetostrictive mini actuator for long-stroke positioning with nanometer resolution[J]. Journal of Micromechanics and Microengineering,2006, Vol.16:1227-1232.
[7]张凯军.超磁致伸缩电-机械转换器研究及应用[D].浙江大学硕士学位论文,2003.
[8]唐志峰.超磁致伸缩执行器的基础理论与实验研究[D].浙江大学博士学位论文,2005.
[9]李松涛等.超磁致伸缩材料及其应用研究[J].前沿进展,2004,10(33)：748-752.
[10]李恒菊.磁致伸缩材料在微动工作台中的应用[D].武汉理工大学硕士学位论文,2005.
[11]刘楚辉.基于超磁致伸缩材料的微位移致动器设计与研究[D].浙江大学硕士学位论文，2004.
[12]尹子栋.超磁致伸缩式小型高速开关阀驱动部件关键技术研究[D].河北上业大学硕士学位论文,2006.
[13]张凯军.超磁致伸缩电—机械转换器研究及应用[D].浙江大学硕士学位论文,2003.
[14]王传礼,丁凡,张凯军.稀土超磁致伸缩转换器的动态特性仿真研究[J].系统仿真学报,2003,3(15)：3379-381.
[15]孟爱华,吕福在,程耀东.基于超磁致伸缩致动器的脉冲喷射开关阀建模与仿真[J].机械工程学报,2009,8(45)：303-307.
[16]Ge Z Q, Deng G L. Design and modeling of jet dispenser based on giant magnetostrictive material[J]. ICEPT-HDP,2009:974-979.
[17]Y X Zhao, H X Li, H Ding, Y L Xiong. Integrated modeling of a time-pressure fluid dispensing system for electronics manufacturing[J]. Int J Adv Manuf Technol, 2004, Vol.3:1-9.
[18]Quoc Hung Nguyen, Seung-Bok Choi. Modeling of Unsteady Laminar Flow Based on Steady Solution in Jetting Dispensing Process[J]. IEEE Transactions on Electronics Packaging Manufacturing,2008, Vol.31:134-142.
[19]Quoc-Hung Nguyen, Seung-Bok Choi, Jae-Do Kim. The design and control of a jetting dispenser for semiconductor electronic packaging driven by a piezostack and a flexible beam[J]. Smart Materials and Structures,2008, Vol.17:1-12.
[20]Yi-Xiang Zhao, Han-Xiong Li, Han Ding, You-Lun Xiong. Integrated modeling of a time-pressure fluid dispensing system for electronics manufacturing[J]. Int J Adv Manuf Technol,2005, Vol.26:1-9.
[21]YA. G. Fredrickson, R. B. BIRD. Non-Newtonian flow in annuli[J]. Ind. Eng. Chem,1958, Vol.50:347-352.
[22]Quoc-Hung Nguyen, Min-Kyu Choi, Seung-Bok Choi. A new type of piezostack-driven jetting dispenser for semiconductor electronic packaging:modeling and control[J]. Smart Materials and Structures,2008, Vol.17:1-13.
[23]Quoc Hung Nguyen, Young-Min Han, Seung-Bok Choi, Seung-Min Hong. Dynamic Characteristics of a New Jetting Dispense Driven by Piezostack Actuator[J]. IEEE Transactions on Electronics Packaging Manufacturing,2008, Vol.31:248-259.
[24]李士会,何将三,邓圭玲.喷射器内胶液流动数值仿真[J].电子工业专用设备,2006,4：51-54.
[25]李十会.胶液喷射器内胶液流动的三维数值仿真与关键结构参数设计[D].中南大学硕士学位论文,2006.
[26]陈奎宇.胶液喷射分配胶液累积体积及其速度参数影响规律[D].中南大学硕士学位论文,2007.
[27]李章平,邓圭玲.精密点胶螺杆泵胶液流动分析与数值仿真[J].中国机械工程,2007,18(17)：51-54.
[28]舒霞云,张鸿海,刘华勇等.高黏度微量喷射系统的实验研究[J].中国科学,2010,(40)：171-176.
[29]林其壬,赵佑民.磁路设计原理[M].北京：机械工业出版社,1987.
[30]吴鹰飞,周兆英.柔性铰链的计算和分析[J].机械设计与研究,2002,6(18)：29-30.
[31]左行勇MEMS及MCM中柔性铰链的设计与制造[M].电子科技大学硕士学位论文,2007.
[32]Jae W. Ryu, Dae-Gab Gweon, Kee S. Moont.Optimal design of a flexure hinge based XY φ wafer stage[J]. Precision Eng,1997, Vol.21:18-28.
[33]Smith S T, Chetwynd D C, Bowen D K. Design and assessment of monolithic high precision translation mechanisms[J]. J Phys E:Sci. Instrum,1998, Vol.20: 977-983.
[34]刘鸿文.材料力学I(第4版)[M].北京：高等教育出版社,2004,1.
[35]濮良贵,纪名刚.机械设计(第8版)[M].北京：高等教育出版社,2006,5.
[36]成大先.机械设计手册(常用工程材料)[M].北京：化学工业出版社,2004,1.
[37]KennedyW C, Desai P J. Modeling and Contr ol of the Mitsubishi PA-10 Robot Ar m Harmonic Drive System [J]. IEEE Trans. Magn,2005, Vol.3:263-274.
[38]贾振元,史纯.超磁致伸缩微位移执行器的研制及控制技术[J].机电工程技术,2003,5(32)：51-53.
[39]李国平,林君焕,潘晓彬.超磁致伸缩执行器的驱动电路及接口设计[J].航空精密制造技术,2007,(43)：32-33.
[40]米林剑,高文泉,赵兴,包河涛,杨卫化.超磁致伸缩谐波电动机控制系统研究[J].驱动控制,2009,(11)：46-56.
[41]张杰.叠栅MOSFET的结构设计与特性研究[D].安徽大学硕士学位论文,2010.
[42]王旭光,肖海荣.采用MOSFET的高速截流开关[J].工矿自动化,2005,2：28-30.
[43]Galil Motion Control Inc. DMC-1700/1800 Manual Rev.1.2m.
[44]杨叔子,杨克冲.机械工程控制基础(第五版)[M].武汉：华中科技出版社,2005,7.
[45]Katsuniko Ogata著,卢伯英等译.现代控制工程(第四版)[M].北京：电子工业出版社,2003.
[46]邬义杰,刘楚辉.超磁致伸缩驱动器设计方法的研究[J].浙江大学学报(工学版),2004,6(38)：747-751.
[47]Jing Ma, Zhan Shi, C W Nan. Magnetic-field induced electric response of simple magnetoelectric composite rods[J]. Journal of Physics:Applied Physics,2008, Vol.41: 1-6.
[48]‘争荣.高速点胶控制系统研发[D].中南大学硕士学位论文,2010.
[49]姜涛,王安麟,王石刚,邵萌.基于机器视觉的印刷电路板误差校正方法[J].上海交通大学学报,2005,Vol.6：945-949.
[50]C.-L.Shih, C.-W.Ruo. Auto-calibration of an SMT machine by machine vision[J]. International Journal of Advanced Manufacturing Technology,2005, Vol.26: 243-250.
[51]Asymtek Inc. DJ-2000 DispenseJet Installation and Operations Manual.
[52]刘华勇.高黏度流体微量喷射与控制技术研究[D].华中科技大学硕士学位论文,2007.
[2]赵翼翔,陈新度,陈新.微电子封装中的流体点胶技术综述[J].液压与气动,2006(2)：52-54.
[3]Dan Ashley, Al Lewis喷射点胶技术的关键[J].半导体科技,2007,4：13-18.
[4]杨宜民.新型驱动器及其应用[M].北京：机械工业出版社,1998.
[5]X.C. Shang, E. Pan, L.P. Qin:Mathematical modeling and numerical computation for the vibration of a magnetostrictive actuator[J]. Smart Materials and Structures, 2008, Vol.17:1-12.
[6]B.T Yang, M. Bonis, H. Tao, C. Prelle, F. Lamarque. A magnetostrictive mini actuator for long-stroke positioning with nanometer resolution[J]. Journal of Micromechanics and Microengineering,2006, Vol.16:1227-1232.
[7]张凯军.超磁致伸缩电-机械转换器研究及应用[D].浙江大学硕士学位论文,2003.
[8]唐志峰.超磁致伸缩执行器的基础理论与实验研究[D].浙江大学博士学位论文,2005.
[9]李松涛等.超磁致伸缩材料及其应用研究[J].前沿进展,2004,10(33)：748-752.
[10]李恒菊.磁致伸缩材料在微动工作台中的应用[D].武汉理工大学硕士学位论文,2005.
[11]刘楚辉.基于超磁致伸缩材料的微位移致动器设计与研究[D].浙江大学硕士学位论文，2004.
[12]尹子栋.超磁致伸缩式小型高速开关阀驱动部件关键技术研究[D].河北上业大学硕士学位论文,2006.
[13]张凯军.超磁致伸缩电—机械转换器研究及应用[D].浙江大学硕士学位论文,2003.
[14]王传礼,丁凡,张凯军.稀土超磁致伸缩转换器的动态特性仿真研究[J].系统仿真学报,2003,3(15)：3379-381.
[15]孟爱华,吕福在,程耀东.基于超磁致伸缩致动器的脉冲喷射开关阀建模与仿真[J].机械工程学报,2009,8(45)：303-307.
[16]Ge Z Q, Deng G L. Design and modeling of jet dispenser based on giant magnetostrictive material[J]. ICEPT-HDP,2009:974-979.
[17]Y X Zhao, H X Li, H Ding, Y L Xiong. Integrated modeling of a time-pressure fluid dispensing system for electronics manufacturing[J]. Int J Adv Manuf Technol, 2004, Vol.3:1-9.
[18]Quoc Hung Nguyen, Seung-Bok Choi. Modeling of Unsteady Laminar Flow Based on Steady Solution in Jetting Dispensing Process[J]. IEEE Transactions on Electronics Packaging Manufacturing,2008, Vol.31:134-142.
[19]Quoc-Hung Nguyen, Seung-Bok Choi, Jae-Do Kim. The design and control of a jetting dispenser for semiconductor electronic packaging driven by a piezostack and a flexible beam[J]. Smart Materials and Structures,2008, Vol.17:1-12.
[20]Yi-Xiang Zhao, Han-Xiong Li, Han Ding, You-Lun Xiong. Integrated modeling of a time-pressure fluid dispensing system for electronics manufacturing[J]. Int J Adv Manuf Technol,2005, Vol.26:1-9.
[21]YA. G. Fredrickson, R. B. BIRD. Non-Newtonian flow in annuli[J]. Ind. Eng. Chem,1958, Vol.50:347-352.
[22]Quoc-Hung Nguyen, Min-Kyu Choi, Seung-Bok Choi. A new type of piezostack-driven jetting dispenser for semiconductor electronic packaging:modeling and control[J]. Smart Materials and Structures,2008, Vol.17:1-13.
[23]Quoc Hung Nguyen, Young-Min Han, Seung-Bok Choi, Seung-Min Hong. Dynamic Characteristics of a New Jetting Dispense Driven by Piezostack Actuator[J]. IEEE Transactions on Electronics Packaging Manufacturing,2008, Vol.31:248-259.
[24]李士会,何将三,邓圭玲.喷射器内胶液流动数值仿真[J].电子工业专用设备,2006,4：51-54.
[25]李十会.胶液喷射器内胶液流动的三维数值仿真与关键结构参数设计[D].中南大学硕士学位论文,2006.
[26]陈奎宇.胶液喷射分配胶液累积体积及其速度参数影响规律[D].中南大学硕士学位论文,2007.
[27]李章平,邓圭玲.精密点胶螺杆泵胶液流动分析与数值仿真[J].中国机械工程,2007,18(17)：51-54.
[28]舒霞云,张鸿海,刘华勇等.高黏度微量喷射系统的实验研究[J].中国科学,2010,(40)：171-176.
[29]林其壬,赵佑民.磁路设计原理[M].北京：机械工业出版社,1987.
[30]吴鹰飞,周兆英.柔性铰链的计算和分析[J].机械设计与研究,2002,6(18)：29-30.
[31]左行勇MEMS及MCM中柔性铰链的设计与制造[M].电子科技大学硕士学位论文,2007.
[32]Jae W. Ryu, Dae-Gab Gweon, Kee S. Moont.Optimal design of a flexure hinge based XY φ wafer stage[J]. Precision Eng,1997, Vol.21:18-28.
[33]Smith S T, Chetwynd D C, Bowen D K. Design and assessment of monolithic high precision translation mechanisms[J]. J Phys E:Sci. Instrum,1998, Vol.20: 977-983.
[34]刘鸿文.材料力学I(第4版)[M].北京：高等教育出版社,2004,1.
[35]濮良贵,纪名刚.机械设计(第8版)[M].北京：高等教育出版社,2006,5.
[36]成大先.机械设计手册(常用工程材料)[M].北京：化学工业出版社,2004,1.
[37]KennedyW C, Desai P J. Modeling and Contr ol of the Mitsubishi PA-10 Robot Ar m Harmonic Drive System [J]. IEEE Trans. Magn,2005, Vol.3:263-274.
[38]贾振元,史纯.超磁致伸缩微位移执行器的研制及控制技术[J].机电工程技术,2003,5(32)：51-53.
[39]李国平,林君焕,潘晓彬.超磁致伸缩执行器的驱动电路及接口设计[J].航空精密制造技术,2007,(43)：32-33.
[40]米林剑,高文泉,赵兴,包河涛,杨卫化.超磁致伸缩谐波电动机控制系统研究[J].驱动控制,2009,(11)：46-56.
[41]张杰.叠栅MOSFET的结构设计与特性研究[D].安徽大学硕士学位论文,2010.
[42]王旭光,肖海荣.采用MOSFET的高速截流开关[J].工矿自动化,2005,2：28-30.
[43]Galil Motion Control Inc. DMC-1700/1800 Manual Rev.1.2m.
[44]杨叔子,杨克冲.机械工程控制基础(第五版)[M].武汉：华中科技出版社,2005,7.
[45]Katsuniko Ogata著,卢伯英等译.现代控制工程(第四版)[M].北京：电子工业出版社,2003.
[46]邬义杰,刘楚辉.超磁致伸缩驱动器设计方法的研究[J].浙江大学学报(工学版),2004,6(38)：747-751.
[47]Jing Ma, Zhan Shi, C W Nan. Magnetic-field induced electric response of simple magnetoelectric composite rods[J]. Journal of Physics:Applied Physics,2008, Vol.41: 1-6.
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