双波长全息法测量物体形貌
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摘要
在制造高质量产品和高效率生产过程中,精密测量技术起到了很大的作用,而且其重要性与日俱增。光学测量技术是一种非接触测量,与传统的接触式测量技术相比,非接触式测量具有精度高、信噪比高、动态响应快、线性好、量程范围大和非接触等优点。
用干涉的方法比较两个光滑表面之间的微小差异或错位是我们所熟悉的。例如如果在迈克尔逊干涉仪中的两臂的反射镜不完全垂直,则在视场中将出现平行的干涉条纹。于此同理,用马赫—曾德尔干涉仪可以测量一个加工出来的光滑球面与另一个标准光滑球面之间的微小差异。但是上述方法中存在着两个缺点。首先,比较是在两个表面之间进行的,如果一个表面后来的形位相对于原来的形位发生了微小差异,则上述方法对此无能为力。其次,被比较的两个表面都必须是光滑的。
本文中我们介绍了双波长全息干涉术,这种方法可以克服以上两个缺点。因为比较的对象是同一表面的先后两个状态,而在表面的形位发生变化时其同一局部的细微结构基本保持不变,所以这种方法不必限定光滑表面,而适用于粗糙的漫射表面。同时我们运用双波长全息法测量物体表面形貌,把一个凸凹不平的表面的高度分布情况借助干涉条纹显现出来,通过理论分析和实验验证,这是一种具有纳米准确度的可行测量方法。
In the manufacture of high-quality products and efficient production processes, precision measurement technology plays a significant role, and it is growing importance. Optical measurement technique is a non-contact measurement. It has a lot of advantages over traditional contact measurement technique, such as high accuracy, high signal to noise ratio, fast dynamic response, good linearity, large measuring range, non-contact and so on. Comparing the small differences or dislocation between two smooth surface with the interference method is familiar
For example, if the Michelson interferometer’s mirrors in the arms are not completely vertical, parallel interference fringes will appear in the field .
Also using Mach-Zehnder interferometer the small difference between one produced smooth sphere and another standard smooth spherical can measure. However, there are two shortcomings in these methods. First, because the comparison is conducted between the two surfaces, relative to the original surface, if the shape and position occurred minor differences, the above method could not work. Second the two surfaces being compared must be smooth.
In this paper we introduce a two-wavelength holographic interferometry, and this method can overcome these two shortcomings. Because the objects of comparison are two states of the same surface,and when the surface changes occurred, fine structure of its essentially unchanged at the same local. This method don’t limit the smooth surface and it applies to rough diffuse surface too. We use two-wavelength holographic to measure the surface of objects, and show the contour distribution of the surface with interference fringes. Through theoretical analysis and experimental testimony. This is a kind of method with nanometer precision.
用干涉的方法比较两个光滑表面之间的微小差异或错位是我们所熟悉的。例如如果在迈克尔逊干涉仪中的两臂的反射镜不完全垂直,则在视场中将出现平行的干涉条纹。于此同理,用马赫—曾德尔干涉仪可以测量一个加工出来的光滑球面与另一个标准光滑球面之间的微小差异。但是上述方法中存在着两个缺点。首先,比较是在两个表面之间进行的,如果一个表面后来的形位相对于原来的形位发生了微小差异,则上述方法对此无能为力。其次,被比较的两个表面都必须是光滑的。
本文中我们介绍了双波长全息干涉术,这种方法可以克服以上两个缺点。因为比较的对象是同一表面的先后两个状态,而在表面的形位发生变化时其同一局部的细微结构基本保持不变,所以这种方法不必限定光滑表面,而适用于粗糙的漫射表面。同时我们运用双波长全息法测量物体表面形貌,把一个凸凹不平的表面的高度分布情况借助干涉条纹显现出来,通过理论分析和实验验证,这是一种具有纳米准确度的可行测量方法。
In the manufacture of high-quality products and efficient production processes, precision measurement technology plays a significant role, and it is growing importance. Optical measurement technique is a non-contact measurement. It has a lot of advantages over traditional contact measurement technique, such as high accuracy, high signal to noise ratio, fast dynamic response, good linearity, large measuring range, non-contact and so on. Comparing the small differences or dislocation between two smooth surface with the interference method is familiar
For example, if the Michelson interferometer’s mirrors in the arms are not completely vertical, parallel interference fringes will appear in the field .
Also using Mach-Zehnder interferometer the small difference between one produced smooth sphere and another standard smooth spherical can measure. However, there are two shortcomings in these methods. First, because the comparison is conducted between the two surfaces, relative to the original surface, if the shape and position occurred minor differences, the above method could not work. Second the two surfaces being compared must be smooth.
In this paper we introduce a two-wavelength holographic interferometry, and this method can overcome these two shortcomings. Because the objects of comparison are two states of the same surface,and when the surface changes occurred, fine structure of its essentially unchanged at the same local. This method don’t limit the smooth surface and it applies to rough diffuse surface too. We use two-wavelength holographic to measure the surface of objects, and show the contour distribution of the surface with interference fringes. Through theoretical analysis and experimental testimony. This is a kind of method with nanometer precision.
引文
[1]W.Schumann.M.Du b a s.Holographic lnterferometry.Berlin Heidelberg New York,Springer-Verlag,1979.
[2]Cai Yun liang.Modulated Beams Holography and Signal Processing.SPI E,1990,1230:612～6l5.
[3]Bennrtt C L.Carter M Imaging Fourier transform spectrometer 1993
[4]Vaughan A H Imaging michelson spectrometer for hubble space telescope 1988
[5]Junttila M L.Kauppinen J.Ikonen E Performance limites of stationary Fourier transform spectrometers 1991(9)
[6]Junttila M L Stationary Fourier transform spectrometer 1992(21)
[7]Hashimoto M.Kawata S Multichanel Fourier transform infrared spectrometer 1992(28)
[8]Moller K D Wave-front-divideing array interferometer without moving parts for real-time spectroscopy from the IR to the UV 1995(9)
[9]Daniel Hofstetter.Hans P Zappe.RenéDandliker Optical displacement mesurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers 1997(4)
[10]Jack A Stone.Lowell P Howard A simple technique for observing periodic nonlinearities in Michelson interferometers 1998
[11]S J A G Cosijns.H Haitjema.P H J Schellekens Modeling and verifying non-linearities in heterodyne displacement interferometry 2002
[12]J M De Freitas.M A Player Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry 1993
[13]Jolyon M De Freitas Analysis of laser source birefringence and dichroism on nonlinearity in heterodyne interferometry 1997
[14]John C Bird.Facheng Liang.Biran H Solheim A polarizing Michelson interferometer for measuring thermospheric winds 1995
[15]James Millerd.Neal Brock.John Hays Pixelated phase-mask dynamic interferometer 2004
[16]N Park.P F Wysoeki 24-line multiwavelength operation of erbium-doped fiber-ring laser 1996(11)
[17]Shan Qin.Yongbo Tang.Daru Chen Multi-wavelength hybrid gain fiber ring laser based on Raman and erbium-doped fiber 2006(11)
[18]W S Man.H Y Tam.M S Demokanaal Mechanism of intrinsic wavelength tuning and sideband asymmetry in a passively mode-locked soliton fiber ring laser 2000(1)
[19]Barakat R Bilinear constraints between elements of the 4×4 Mueller-Jones transfer matrix of polarization theory 1981
[20]Lu Shihyau.Chipman R A Mueller matrices and the degree of polarization 1998
[21]Craig R M.Gilbert S L.Hale P D High-resolution,nonmechanical approach to polarization-dependent transmission measurements 1998
[22]Foschini G J.Poole C D Statistical theory of polari-zation dispersion in single mode fibers 1991(11)
[23]K.S.Youngworth.T.G.Brown Focusing of high numerical aperture cylindrical vector beams 2000(2)
[24]Hao Bing.James Leger Numerical aperture invariant focus shaping using spirally polarized beams 2008
[25]S.Quabis.R.Dorn.G.Leuchs Generation of a radially polarized doughnut mode of high quality 2005
[26]Djenan Ganic.Xiaosong Gan.Min Gu Generation of doughnut laser beams by use of a liquid-crystal cell with a conversion efficiency near 100% 2002(15)
[27]Axel Ruehl.Holger Hundertmark.Dieter Wandt O.7 W all-fiber erbium oscillator generating 64 fs wave breaking-free pulses 2005(16)
[28]Steven L Jacques.Jessica C Ramella-Roman.Ken Lee Imaging skin pathology with polarized light 2002(3)
[29]Vadim Backman.Rajan Gurjar.Kamran Badizadegan Polarized light scattering spectroscopy for quantitative measurement of epithelial cellular structures in situ 1999(4)
[30]母国光,占元令.光学[ M] .北京:人民教育出版社, 1978.
[31]程守洙,江之永.普通物理学[ M]. (第5版) .北京:高等教育出版社, 1998
[32]戴高良纳米精度外差干涉仪非线性漂移的研究[期刊论文] -光学学报1998(12)
[33]马利红.王辉.李勇全息模拟再现像的三维重构[期刊论文] -光子学报2006(04)
[34]CUCHE E.MARQUET P.DEPEURSINGE C 1999 Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms 1999(34)
[35]PALACIOS F.RICARDO J.PALACIOS D 3D image reconstruction of transparent microscopic objects using digital holography 2005(1-3)
[36] Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram 2006(10)
[37]MULLER J 2005 Digital holography as a tool for testing high-aperture micro-optics 2005(01)
[38]SCHNARS U L F.JUPTNER W Digital recording and numerical reconstruction of holograms 2002(01)
[39]范华.杨玉孝.谭玉山自动实时激光全息无损检测系统[期刊论文] -应用光学1998(03)
[40]刘守.张向苏.王天及光全息术及相关产业的现状与发展[期刊论文] -物理2000(02)
[41]刘志伟宽幅模压全息技术与应用1997(04)
[42]曾阳素.张恰宵.高福华用全息透镜记录多重分数傅里叶变换全息图[期刊论文] -光学学报2002(08)
[43]吕晓旭.张以谟.钟丽云.熊秉衡实时全息干涉计量中时间序列条纹位相的测量方法[期刊论文] -中国激光2004(31)
[2]Cai Yun liang.Modulated Beams Holography and Signal Processing.SPI E,1990,1230:612～6l5.
[3]Bennrtt C L.Carter M Imaging Fourier transform spectrometer 1993
[4]Vaughan A H Imaging michelson spectrometer for hubble space telescope 1988
[5]Junttila M L.Kauppinen J.Ikonen E Performance limites of stationary Fourier transform spectrometers 1991(9)
[6]Junttila M L Stationary Fourier transform spectrometer 1992(21)
[7]Hashimoto M.Kawata S Multichanel Fourier transform infrared spectrometer 1992(28)
[8]Moller K D Wave-front-divideing array interferometer without moving parts for real-time spectroscopy from the IR to the UV 1995(9)
[9]Daniel Hofstetter.Hans P Zappe.RenéDandliker Optical displacement mesurement with GaAs/AlGaAs-based monolithically integrated Michelson interferometers 1997(4)
[10]Jack A Stone.Lowell P Howard A simple technique for observing periodic nonlinearities in Michelson interferometers 1998
[11]S J A G Cosijns.H Haitjema.P H J Schellekens Modeling and verifying non-linearities in heterodyne displacement interferometry 2002
[12]J M De Freitas.M A Player Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry 1993
[13]Jolyon M De Freitas Analysis of laser source birefringence and dichroism on nonlinearity in heterodyne interferometry 1997
[14]John C Bird.Facheng Liang.Biran H Solheim A polarizing Michelson interferometer for measuring thermospheric winds 1995
[15]James Millerd.Neal Brock.John Hays Pixelated phase-mask dynamic interferometer 2004
[16]N Park.P F Wysoeki 24-line multiwavelength operation of erbium-doped fiber-ring laser 1996(11)
[17]Shan Qin.Yongbo Tang.Daru Chen Multi-wavelength hybrid gain fiber ring laser based on Raman and erbium-doped fiber 2006(11)
[18]W S Man.H Y Tam.M S Demokanaal Mechanism of intrinsic wavelength tuning and sideband asymmetry in a passively mode-locked soliton fiber ring laser 2000(1)
[19]Barakat R Bilinear constraints between elements of the 4×4 Mueller-Jones transfer matrix of polarization theory 1981
[20]Lu Shihyau.Chipman R A Mueller matrices and the degree of polarization 1998
[21]Craig R M.Gilbert S L.Hale P D High-resolution,nonmechanical approach to polarization-dependent transmission measurements 1998
[22]Foschini G J.Poole C D Statistical theory of polari-zation dispersion in single mode fibers 1991(11)
[23]K.S.Youngworth.T.G.Brown Focusing of high numerical aperture cylindrical vector beams 2000(2)
[24]Hao Bing.James Leger Numerical aperture invariant focus shaping using spirally polarized beams 2008
[25]S.Quabis.R.Dorn.G.Leuchs Generation of a radially polarized doughnut mode of high quality 2005
[26]Djenan Ganic.Xiaosong Gan.Min Gu Generation of doughnut laser beams by use of a liquid-crystal cell with a conversion efficiency near 100% 2002(15)
[27]Axel Ruehl.Holger Hundertmark.Dieter Wandt O.7 W all-fiber erbium oscillator generating 64 fs wave breaking-free pulses 2005(16)
[28]Steven L Jacques.Jessica C Ramella-Roman.Ken Lee Imaging skin pathology with polarized light 2002(3)
[29]Vadim Backman.Rajan Gurjar.Kamran Badizadegan Polarized light scattering spectroscopy for quantitative measurement of epithelial cellular structures in situ 1999(4)
[30]母国光,占元令.光学[ M] .北京:人民教育出版社, 1978.
[31]程守洙,江之永.普通物理学[ M]. (第5版) .北京:高等教育出版社, 1998
[32]戴高良纳米精度外差干涉仪非线性漂移的研究[期刊论文] -光学学报1998(12)
[33]马利红.王辉.李勇全息模拟再现像的三维重构[期刊论文] -光子学报2006(04)
[34]CUCHE E.MARQUET P.DEPEURSINGE C 1999 Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms 1999(34)
[35]PALACIOS F.RICARDO J.PALACIOS D 3D image reconstruction of transparent microscopic objects using digital holography 2005(1-3)
[36] Total aberrations compensation in digital holographic microscopy with a reference conjugated hologram 2006(10)
[37]MULLER J 2005 Digital holography as a tool for testing high-aperture micro-optics 2005(01)
[38]SCHNARS U L F.JUPTNER W Digital recording and numerical reconstruction of holograms 2002(01)
[39]范华.杨玉孝.谭玉山自动实时激光全息无损检测系统[期刊论文] -应用光学1998(03)
[40]刘守.张向苏.王天及光全息术及相关产业的现状与发展[期刊论文] -物理2000(02)
[41]刘志伟宽幅模压全息技术与应用1997(04)
[42]曾阳素.张恰宵.高福华用全息透镜记录多重分数傅里叶变换全息图[期刊论文] -光学学报2002(08)
[43]吕晓旭.张以谟.钟丽云.熊秉衡实时全息干涉计量中时间序列条纹位相的测量方法[期刊论文] -中国激光2004(31)