数字散斑干涉术测物面形变
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摘要
本文研究了用数字散斑干涉术(DSPI)测量物面形变。DSPI综合了散斑干涉技术、精密测量技术、计算机图像处理技术,测量误差小、精度高,可用于检测微米量级的形变。基于DSPI原理,设计了由泰曼-格林系统、马赫-曾德系统及微机控制的实时散斑系统组成的三种实验装置,并用这三种实验装置进行粗糙物体表面的形变测量。为实现散斑干涉术的数字化,本文利用CCD接收散斑干涉图并将其输入计算机进行数字图像处理。根据散斑干涉图高噪声的特点,采用相减模式得到包含物体形变信息的数字散斑相关条纹,计算出物体的形变量。最后,本文在研究了空域和频域中各种去噪算法去噪能力的基础上,采用多种Matlab滤波程序,有效的消除了相关条纹中颗粒性噪声的影响,以改善相关条纹的对比度和图像的清晰度。
Digital speckle pattern interferometry (DSPI) for surface deformation measurement is studied in this paper. Digital speckle pattern interferometry is combined with speckle interference technology, precision testing technology and computer image processing technology. It has smaller error and higher accuracy, so it can be used in measuring micron dimension deformation. we design three kinds of optical devices based on principle of DSPI, they are composed of Twyman-Green、Mach-Zehnder and a computer-controlled real-time speckle interference system and used in rough surface deformation measurement. In order to achieve the digital speckle pattern interferometry, the device receives the interference fringes by CCD and input the fringes to the computer in order to carry on digital image processing. According to the characteristic of the speckle pattern and it is high noise, we present subtraction method to process image, and the correlative fringe pattern include object's deformation information is obtained. Then, we can count the deformation by the correlative fringe. At last, this paper applies filter program wrote by Matlab, eliminates the effects of digital speckle interference correlative fringe pattern effectively which caused by pellet noise, improves the contrast of fringe and increases the definition of image, based on the study of the de-noising ability of all kinds de-noising algorithm in spatial domain and frequency-domain.
Digital speckle pattern interferometry (DSPI) for surface deformation measurement is studied in this paper. Digital speckle pattern interferometry is combined with speckle interference technology, precision testing technology and computer image processing technology. It has smaller error and higher accuracy, so it can be used in measuring micron dimension deformation. we design three kinds of optical devices based on principle of DSPI, they are composed of Twyman-Green、Mach-Zehnder and a computer-controlled real-time speckle interference system and used in rough surface deformation measurement. In order to achieve the digital speckle pattern interferometry, the device receives the interference fringes by CCD and input the fringes to the computer in order to carry on digital image processing. According to the characteristic of the speckle pattern and it is high noise, we present subtraction method to process image, and the correlative fringe pattern include object's deformation information is obtained. Then, we can count the deformation by the correlative fringe. At last, this paper applies filter program wrote by Matlab, eliminates the effects of digital speckle interference correlative fringe pattern effectively which caused by pellet noise, improves the contrast of fringe and increases the definition of image, based on the study of the de-noising ability of all kinds de-noising algorithm in spatial domain and frequency-domain.
引文
[1]J.C.Dainty.Laser Speckle and Related Phenomena.Springer-Verlag Berlin Herdelberg New York.1975:171-253
[2]Leendertz J.A.Interferometric displacement measurement on scatlering surfaces utilizing speckle effect.J.Phys.E(Scient.Instruin).1970,56(3):214-218
[3]方强,陈家璧.全息散斑计量学:[M].北京:科学出版社,1995
[4]S.Nakadate,T.Yatagai and H.saito.Electronic speckle pattern interferometry using digital image procesiing technique.Appl.Opt.1980,19(11):1879-1883
[5]Yamaguchi I.A laser-speckle strain gange[J].Journal of Physics E:Scientific Instruments,1981,14:1270-1273
[6]秦玉文,戴嘉彬,陈金龙.电子散斑方法的进展.实验力学.1999,11(4):410-416
[7]张东升,佟景伟.用数字散斑干涉法测量动态面内位移场.国防科技大学学报.1995,17(2):100-104
[8]张东升,佟景伟,李鸿琦.面内和离面位移场的电子散斑自动检测技术研究.实验力学.1995,10(4):356-365
[9]任雅萍,骆德渊,姜力军等.实时数字散斑干涉仪及其应用.半导体光电.1997,18(2):118-121
[10]刘宝会.多功能数字散斑干涉无损检测技术及应用研究:[博士学位论文].天津:天津大学机械工程学院,2004
[11]姜力军,刘伟,谭玉山.散斑计量技术——走向工程实用化的技术.物理.1995,24(3):154-160
[12]李新忠,宋文武,王希军.激光散斑计量技术及其应用.光机电信息.2005,16-20
[13]Lili Zhou,Xuezeng Zhao.Real-time measurement of surface roughness based on dynamic speckles.SPIE.2005,5638:395-403
[14]杨国光.近代光学测试技术.北京:机械工业出版社,1986:131-188
[15]吴震.光干涉测量技术.北京:中国计量出版社.1995:212-240
[16]王文生.干涉测试技术.北京:兵器工业出版社,1992:258-261
[17]Mathias Lehmann.Measurement optimization in speckle interferometry of imaging lens aperture.SPIE.2003,2783:408-419
[18]Yaozu Song,Wei Zhang.Laws of laser speckle movement and their application in flow visualization.SPIE.1999,3783:89-100
[19]Song Yaozu,Wu Ying.Investigation of speckle displacement effects on speckle interferometry.SPIE.2000,1860:381-389
[20]李林涛.激光散斑的特性及其干涉条纹的滤波研究:[硕士学位论文].吉林:长春理工大学光电工程学院,2008
[21]贺安之 阎大鹏.激光瞬态干涉度量学:北京:机械工业出版社,1993:17-25,79-89
[22]Jones R,wgkes C.Hologrophic and speckle iterferometry.Cambridge:Cambridge unierslty press.1983:chapter 4
[23]陈华平.散斑干涉技术及其图像处理系统的研究:[硕士学位论文].广东:广东工业大学,2004
[24]何玉明.线性相关计算法形成数字剪切散斑相关条纹图[J].光子学报,1995,24(1):13-17
[25]Fernando M S,Andrew J M,John R T,Noe A O.Noise reduction in twin-pulsed addition electronic speckle pattern interferometry fringe pattern[J].Optical Engineeing,1994,33(5):1712-1716
[26]张霖,徐平,王光能.激光电子散斑干涉测微小位移.物理实验.1997,18(5):24-26
[27]SUN Ping,TAO Chun-xian,ZHANG Li et al.Spatial modulation for electronic speckle patterns and its demodulation.Optoelectronics Letters.2005,1(2):141-143
[28]郭霏.基于电子散斑干涉术的位移测量:[硕士学位论文].吉林:长春理工大学光电工程学院,2008
[29]刘中本,卢石镐.相移电子散斑干涉法测量面内变形.西安工业学院学报.1994,14(2):85-89
[30]Gushov V.I.Nechaev V.G.In-plane deformation measurement by digital phase-shifting speckle interferometry.SPIE.2002,2791:165-169
[31]刘诚,高淑梅.基于图像处理技术的数字散斑照相.1999,19(10):1396-1400
[32]范金坪.数字散斑及其在形变测量中的应用研究:[硕士学位论文].云南:昆明理工大学,2007
[33]于起峰 伏思华.基于条纹方向和条纹等值线的ESPI与InSAR干涉条纹图处理方法.北京:科学技术出版社,2007
[34]周春雷.激光干涉图像处理技术研究:[硕士学位论文].北京:国防科技大学,2005
[35]Rafael C.Gonzalez,Richard E.Woods.Digital image processing second edition.Publishing House of Electronics industry.2004:52-57,75-79,116-127
[36]张德丰.MATLAB图像处理.北京:机械工业出版社,2009:5-8
[37]张汗灵.MATLAB在图像处理中的应用.北京:清华大学出版社,2008:83-110
[38]何小元,衡伟,徐铸.数字散斑条纹处理的频域法和空域法.实验力学.1995,10(4):302-308
[39]J.M.Huntley.Random phase measurement errors in digital speckle pattern interferometry.SPIE.2001,2544:246-257
[40]王朝阳,戴静敏.散斑位移信息图象处理技术及应用.传感与自动测控技术.2002,21(3):44-47
[41]尹志武,程维明,陈明仪.条纹图的图像处理方法.光学精密工程.1999,7(1):51-58
[42]Saba Mirza,Rajesh Kumar,Chandar Shakher.Study of various processing schemes and wavelet filters for speckle noise reduction in digital speckle pattern interferometric fringes.Optical Engineering.2005,44(4):1-6
[43]Dai Songping,Ma Shining,Liu Ying.A new filter technique for image of electronic speckle pattern interferometric fringe.Chinese Journal of lasers.1998,4(6):509-513
[44]Li Jingzhen,Li shanxiang,Sun Yiling etal.Dynamic speckle pattern technique on measuring in-plane.SPIE.2001,4183:309-312
[45]伏思华,于起峰.数字散斑条纹图的滤波方法.应用光学.2005,26(4):5-8
[2]Leendertz J.A.Interferometric displacement measurement on scatlering surfaces utilizing speckle effect.J.Phys.E(Scient.Instruin).1970,56(3):214-218
[3]方强,陈家璧.全息散斑计量学:[M].北京:科学出版社,1995
[4]S.Nakadate,T.Yatagai and H.saito.Electronic speckle pattern interferometry using digital image procesiing technique.Appl.Opt.1980,19(11):1879-1883
[5]Yamaguchi I.A laser-speckle strain gange[J].Journal of Physics E:Scientific Instruments,1981,14:1270-1273
[6]秦玉文,戴嘉彬,陈金龙.电子散斑方法的进展.实验力学.1999,11(4):410-416
[7]张东升,佟景伟.用数字散斑干涉法测量动态面内位移场.国防科技大学学报.1995,17(2):100-104
[8]张东升,佟景伟,李鸿琦.面内和离面位移场的电子散斑自动检测技术研究.实验力学.1995,10(4):356-365
[9]任雅萍,骆德渊,姜力军等.实时数字散斑干涉仪及其应用.半导体光电.1997,18(2):118-121
[10]刘宝会.多功能数字散斑干涉无损检测技术及应用研究:[博士学位论文].天津:天津大学机械工程学院,2004
[11]姜力军,刘伟,谭玉山.散斑计量技术——走向工程实用化的技术.物理.1995,24(3):154-160
[12]李新忠,宋文武,王希军.激光散斑计量技术及其应用.光机电信息.2005,16-20
[13]Lili Zhou,Xuezeng Zhao.Real-time measurement of surface roughness based on dynamic speckles.SPIE.2005,5638:395-403
[14]杨国光.近代光学测试技术.北京:机械工业出版社,1986:131-188
[15]吴震.光干涉测量技术.北京:中国计量出版社.1995:212-240
[16]王文生.干涉测试技术.北京:兵器工业出版社,1992:258-261
[17]Mathias Lehmann.Measurement optimization in speckle interferometry of imaging lens aperture.SPIE.2003,2783:408-419
[18]Yaozu Song,Wei Zhang.Laws of laser speckle movement and their application in flow visualization.SPIE.1999,3783:89-100
[19]Song Yaozu,Wu Ying.Investigation of speckle displacement effects on speckle interferometry.SPIE.2000,1860:381-389
[20]李林涛.激光散斑的特性及其干涉条纹的滤波研究:[硕士学位论文].吉林:长春理工大学光电工程学院,2008
[21]贺安之 阎大鹏.激光瞬态干涉度量学:北京:机械工业出版社,1993:17-25,79-89
[22]Jones R,wgkes C.Hologrophic and speckle iterferometry.Cambridge:Cambridge unierslty press.1983:chapter 4
[23]陈华平.散斑干涉技术及其图像处理系统的研究:[硕士学位论文].广东:广东工业大学,2004
[24]何玉明.线性相关计算法形成数字剪切散斑相关条纹图[J].光子学报,1995,24(1):13-17
[25]Fernando M S,Andrew J M,John R T,Noe A O.Noise reduction in twin-pulsed addition electronic speckle pattern interferometry fringe pattern[J].Optical Engineeing,1994,33(5):1712-1716
[26]张霖,徐平,王光能.激光电子散斑干涉测微小位移.物理实验.1997,18(5):24-26
[27]SUN Ping,TAO Chun-xian,ZHANG Li et al.Spatial modulation for electronic speckle patterns and its demodulation.Optoelectronics Letters.2005,1(2):141-143
[28]郭霏.基于电子散斑干涉术的位移测量:[硕士学位论文].吉林:长春理工大学光电工程学院,2008
[29]刘中本,卢石镐.相移电子散斑干涉法测量面内变形.西安工业学院学报.1994,14(2):85-89
[30]Gushov V.I.Nechaev V.G.In-plane deformation measurement by digital phase-shifting speckle interferometry.SPIE.2002,2791:165-169
[31]刘诚,高淑梅.基于图像处理技术的数字散斑照相.1999,19(10):1396-1400
[32]范金坪.数字散斑及其在形变测量中的应用研究:[硕士学位论文].云南:昆明理工大学,2007
[33]于起峰 伏思华.基于条纹方向和条纹等值线的ESPI与InSAR干涉条纹图处理方法.北京:科学技术出版社,2007
[34]周春雷.激光干涉图像处理技术研究:[硕士学位论文].北京:国防科技大学,2005
[35]Rafael C.Gonzalez,Richard E.Woods.Digital image processing second edition.Publishing House of Electronics industry.2004:52-57,75-79,116-127
[36]张德丰.MATLAB图像处理.北京:机械工业出版社,2009:5-8
[37]张汗灵.MATLAB在图像处理中的应用.北京:清华大学出版社,2008:83-110
[38]何小元,衡伟,徐铸.数字散斑条纹处理的频域法和空域法.实验力学.1995,10(4):302-308
[39]J.M.Huntley.Random phase measurement errors in digital speckle pattern interferometry.SPIE.2001,2544:246-257
[40]王朝阳,戴静敏.散斑位移信息图象处理技术及应用.传感与自动测控技术.2002,21(3):44-47
[41]尹志武,程维明,陈明仪.条纹图的图像处理方法.光学精密工程.1999,7(1):51-58
[42]Saba Mirza,Rajesh Kumar,Chandar Shakher.Study of various processing schemes and wavelet filters for speckle noise reduction in digital speckle pattern interferometric fringes.Optical Engineering.2005,44(4):1-6
[43]Dai Songping,Ma Shining,Liu Ying.A new filter technique for image of electronic speckle pattern interferometric fringe.Chinese Journal of lasers.1998,4(6):509-513
[44]Li Jingzhen,Li shanxiang,Sun Yiling etal.Dynamic speckle pattern technique on measuring in-plane.SPIE.2001,4183:309-312
[45]伏思华,于起峰.数字散斑条纹图的滤波方法.应用光学.2005,26(4):5-8