晶闸管Marx功率脉冲电源的研究
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摘要
在功率脉冲电源技术和工业应用技术迅猛发展的形势之下,工业、军事和科研界对电源提出了提高重复频率、较高的放电电压精度、应用功率半导体器件的一体化变负载功率脉冲电源的设计要求,在此背景之下,本文开展对基于晶闸管开关的Marx功率脉冲电源的研究。
首先对国内外Marx发生器技术的发展及整体和关键技术的研究现状进行综述,确定本文研究的出发点。接着基于电路理论和仿真分析的方法进行了电阻隔离晶闸管Marx发生器的研究,包括充、放电过程的分析,晶闸管Marx发生器电路的设计计算及关键器件的选取,提出了一种改进Marx发生器结构,有效地避免了负载上的预脉冲,推导了均衡充电电阻的选取公式,进行Marx发生器充、放电特性的MATLAB仿真。
为了提高运行效率和重复工作频率,设计了全电感隔离Marx发生器并进行仿真分析,说明了这种发生器的优点和设计原则及方法。基于嵌入式ICOP-6054VE控制器和PM511P多功能数据采集卡,设计了Marx发生器控制系统的硬件和软件,通过对调压模块的脉冲触发控制,以可外置参数的方式实现了充电电流的限幅、充电电压的可控。作为实际Marx发生器系统研制的经验,本文对调试中出现的问题及解决方法做了总结介绍,并对充放电波形进行实测和分析,以验证设计和仿真结果。
本文在重复工作、精确充电的一体化功率脉冲电源应用及需求日益增长形式之下,开展的基于晶闸管开关的Marx发生器的设计、分析、实验等研究工作,对该类电源的设计和应用有一定参考价值。
With the development of pulse power technology and the application, power supply characteristics such as high repetitive frequency, high discharging precision and integrated pulse power supply with power semiconductor devices are highly required. Under the background, the technique of Marx pulse power supply based on thyristor is investigated in this paper.
The development of Marx generator is introduced and the research of general and key technology is summarized. Based on circuit principles and simulation method, the resistor isolated Marx generator is analyzed from charging and discharging process, design of the Marx circuit and principle of critical devices choice. In this paper, an improved structure of resistor isolated Marx generator which can effectively avoid the prepulse on the load is proposed, the formulae of choosing balance charging resistors are deduced, and the MATLAB simulation of charging and discharging characteristics are shown.
In order to improve the operating efficiency and repetition operating frequency, the whole inductor isolated Marx generator is designed and simulated, with the advantage and design principle analyzed. The hardware and software of the Marx generator above mainly base on the embedded controller, ICOP-6054VE and the multifunction data acquisition card, PM511P. Through the pulse triggering control of voltage adjusting module, the amplitude limited charging current and the charging voltage are controlled in the way of given parameter.
With the growing requirement of high repetitive frequency, high charging precision and integrated pulse power supply, the research of Marx generator based on thyristor in this paper have some reference value for the design and application of this kind power supply.
首先对国内外Marx发生器技术的发展及整体和关键技术的研究现状进行综述,确定本文研究的出发点。接着基于电路理论和仿真分析的方法进行了电阻隔离晶闸管Marx发生器的研究,包括充、放电过程的分析,晶闸管Marx发生器电路的设计计算及关键器件的选取,提出了一种改进Marx发生器结构,有效地避免了负载上的预脉冲,推导了均衡充电电阻的选取公式,进行Marx发生器充、放电特性的MATLAB仿真。
为了提高运行效率和重复工作频率,设计了全电感隔离Marx发生器并进行仿真分析,说明了这种发生器的优点和设计原则及方法。基于嵌入式ICOP-6054VE控制器和PM511P多功能数据采集卡,设计了Marx发生器控制系统的硬件和软件,通过对调压模块的脉冲触发控制,以可外置参数的方式实现了充电电流的限幅、充电电压的可控。作为实际Marx发生器系统研制的经验,本文对调试中出现的问题及解决方法做了总结介绍,并对充放电波形进行实测和分析,以验证设计和仿真结果。
本文在重复工作、精确充电的一体化功率脉冲电源应用及需求日益增长形式之下,开展的基于晶闸管开关的Marx发生器的设计、分析、实验等研究工作,对该类电源的设计和应用有一定参考价值。
With the development of pulse power technology and the application, power supply characteristics such as high repetitive frequency, high discharging precision and integrated pulse power supply with power semiconductor devices are highly required. Under the background, the technique of Marx pulse power supply based on thyristor is investigated in this paper.
The development of Marx generator is introduced and the research of general and key technology is summarized. Based on circuit principles and simulation method, the resistor isolated Marx generator is analyzed from charging and discharging process, design of the Marx circuit and principle of critical devices choice. In this paper, an improved structure of resistor isolated Marx generator which can effectively avoid the prepulse on the load is proposed, the formulae of choosing balance charging resistors are deduced, and the MATLAB simulation of charging and discharging characteristics are shown.
In order to improve the operating efficiency and repetition operating frequency, the whole inductor isolated Marx generator is designed and simulated, with the advantage and design principle analyzed. The hardware and software of the Marx generator above mainly base on the embedded controller, ICOP-6054VE and the multifunction data acquisition card, PM511P. Through the pulse triggering control of voltage adjusting module, the amplitude limited charging current and the charging voltage are controlled in the way of given parameter.
With the growing requirement of high repetitive frequency, high charging precision and integrated pulse power supply, the research of Marx generator based on thyristor in this paper have some reference value for the design and application of this kind power supply.
引文
1 J. W.Baek, D.W.Yoo, G.H.Rim, et al. Solid State Marx Generator Using Series-Connected IGBTs. IEEE Transactions on Plasma Science. 2005, 33(4): 1198-1204
2任先文,赵君科,王保健,涂国锋,李小金,张之福,胡新康. 200kW烟气治理用脉冲电源的研制.高电压技术. 2005, 31(11):33~34
3陈银生,张新胜,袁渭康.高压脉冲电晕放电等离子体降解废水中苯酚.环境科学学报. 2002, 22(5): 566~569
4李效白.等离子体微细加工技术的新进展.真空科学与技术.2000, 20(3): 179~186
5刘芳,黄海涛.高压脉冲放电等离子体水处理中的放电方式及其应用.工业安全与环境. 2006, 32(7): 1~4
6 J.W.Baek, M.H.Ryu, D.W.Yoo, et al. A 2kV-40A Pulse Generator Using Boost Converter Array. 14th IEEE International Pulsed Power Conference. 2003, Dallas: 1423~1426
7 Choyal.Y., Gupta Lalit, Vyas Preeti, et al. Development of a 300-kV Marx Generator and its Application to Drive a Relativistic Electron Beam. IEEE Transactions on Proceedings in Engineering Sciences. 2005, 30(6): 757-764
8王莹.高功率脉冲技术.原子能出版社, 1991: 8, 15, 9, 25
9孙凤举,许日,曾江涛,邱爱慈,邱毓昌. 1MV重复频率Marx发生器.高电压器. 1999,(2):53~55
10 Ian Smith. The Early History of West Pulse Power. IEEE Transactions on Plasma Science. 2006, 34(5): 1585-1609
11刘锡三.高功率脉冲技术.国防工业出版社, 2005: 17~19, 88~89, 35~36,51~54
12 Don Cook. New Developments and Applications of Intense Pulsed Radiation Sources at Sandia National Laboratories. 11th IEEE Pulse Power Conference, 1997, Baltimore: 25-36
13 Jong-Hyun Kim, Myung-Hyo Ryu, Byung-Duk Min, et al. High Voltage Pulse Power Supply Using Marx Generator & Solid-State Switches. 31th IEEE Industrial Electronics Society Conference. 2005, Carolina : 1244~1247
14张奇,夏能樵,李悌兴等.微秒Marx发生器.电子学报. 1987, 15(5): 116~118
15曾乃工,杨大伟,姜兴东,罗玉明.强流脉冲电子束加速器用Marx发生器.高电压技术. 1996, 22(2): 78~79
16王新新,张卓,肖如泉.重复频率的Marx发生器的充电回路.高电压技术. 1997,23(1): 37~39
17孙蓓云,周晏,郑振兴等.有界波EMP模拟器脉冲电源.强激光与粒子束. 2000, 12(4): 505~508
18秦卫东,李洪涛,顾元朝等. 200kV快脉冲Marx发生器.高电压技术. 2002, 28(11): 40,51
19 W.J.Carey, J.R.Mayes. Marx Generator Design and Performance. 25th International Power Modulator Symposium. 2002, California: 625~628
20 R.M.Ness, B.D Smith, E.Y.Chu, et al. Compact, Megavolt, Rep-rated Marx Generators. IEEE Transactions on Electron Devices. 1991, 38(4): 803-809
21 J.D.Graham, G D.G.ale, W.E.Sommars, S.E.Calico. Compact 400 kV Marx Generator with Common Switch Housing. 11th IEEE International Pulse Power Conference. 1997, Monterey: 1519~1523
22 D.Goerz, T.Ferriera, D.Nelson, et al. An Ultra-Compact Marx-Type High-Voltage Generator. IEEE Transactions on Pulsed Power Plasma Science. 2001, 1: 628~631
23 A.J.Dragt, J.M.Elizondo. Compact Battery-Powered, 400-kV, 40-Joule Marx Generator. IEEE Transactions on Pulsed Power Plasma Science. 2001, 2: 1555~1558
24 A.A.Neuber, Y.J.Chen, J.C.Dickens, et al. A Compact, Repetitive, 500kV, 500 J, Marx Generator. 15th IEEE International Pulsed Power Conference. 2005, Monterey: 1203~1206
25 G.J.J.Winands, Z.Liu, A.J.M.Pemen, et al. Novel Spark-Gap Switch Design for Pulsed Power Application. Pulsed Power Symposium. 2005, Basingstoke : 27/1~27/6
26柏艳英,王亚非,周鹰.引燃管.电气开关. 2005, No2:15~18.
27 W.Hartmann, M.Romheld, K.D.Rohde. High-Efficiency High-Voltage Pulse Generator Based on a Fast Recovery Pseudospark Switch. IEEE Transactions on Plasma Science. 2000, 28(5): 1481~1485
28 A.Welleman, E.Ramezani, U.Schlapbach. Semiconductor Switches Replace Thyratrons & Ignitrons. 28th IEEE International Conference on Plasma Science. 2001, Las Vegas: 325-328
29吴辉,吴建强,郭兴宽.一种新型的氢闸流管HY3202触发系统的研制.强激光与粒子束. 2002, 14(4): 617~620
30郝晓敏,唐丹,陈敏德,王欣.低抖动纳秒级前沿的氢闸流管高压脉冲电源.强激光与粒子束. 2004,16(2): 265~268
31 Fei Wang, A.Kuthi, M.A.Gundersen. Compact High Repetition Rate Pseudospark Pulse Generator. IEEE Transactions on Plasma Science. 2005, 33(4): 1177~1181
32 A.Kuthi, R.Alde, M.Gundersen, A.Neuber. Marx Generator Using Pseudospark Switches. 14th IEEE International Pulsed Power Conference. 2003, Dallas: 241~244
33 S.K.Lam, R.Miller, L.Sanders. Fast Marx for PRS Drivers. 14th IEEE Pulsed Power Conference. 2003, Dallas: 619– 621
34王桂吉,吴刚,赵剑衡等.平面火花隙三电极开关研制及性能测试.强激光与粒子束. 2006, 18(2): 349~352
35李远,刘小平,伍登学等.亚ns级抖动环形电极场畸变火花隙开关.高电压技术. 2005, 31(6): 46~48
36邱毓昌.伪火花开关的发展与应用.电工电能新技术. 1997,(4):10~13
37 I.Petzenhauser, K.Frank, U.Blell. Development of Multistage Pseudospark Switches for High Voltage Application. 15th IEEE International Pulsed Power Conference. 2005, California: 730– 733
38 A.I.Kuzmichev, V.I.Kryzhanovsky, D.V.Bochkov. Characteristics of Pseudospark Devices with Electrodes Containing LaB6. XIXth International Symposium on Discharges and Electrical Insulation in Vacuum. 2000, Xi’an:343~346
39 W. Weisser, K. Frank. Silicon Carbide as Electrode Material of a Pseudospark Switch. IEEE Transactions on Plasma Science. 2001, 29(3): 524~528
40邹勇.电容式调压脉冲电源的研究.哈尔滨工业大学工学硕士学位论文. 2006: 3~5
41亢宝位. IGBT发展概述.电力电子. 2006, (5): 10~15
42 G.E.Dale, H.C.Kirbie, J.D.Doss, et al. Solid-State Marx Modulator Development. Conference Record of the 26th International Power Modulator Symposium. 2004,San Francisco: 497~500
43 J.W.Baek, D.W.Yoo, G.H.Rim. Solid State Marx Generator Using Series-Connected IGBTs. Conference Record of the 26th International Power Modulator Symposium. 2004, San Francisco:383~386
44 M.E.Savage. Final Results from The High-Current, High-Action Closing Switch Test Program at Sandia National Laboratories. IEEE Transactions on Plasma Science. 2000, 28(5): 1451~1455
45 Xinxin Wang, Zhou Zhang, Chengmu Luo, Min Han. A Compact Repetitive Marx Generator. 12th IEEE International Pulsed Power Conference. 1999, Momterey: 815~817
46 J.P.O'Loughin, J.M.Lehr, D.L.Loree. High Repetition Rate Charging a Marx Type Generator. 13th International Pulsed Power Conference. 2001, Las Vegas: 242~245
47尚雷,王相綦,裴元吉等.新型软开关高压脉冲电容恒流充电技术分析.强激光与粒子束. 2001, 13(2): 241~244
48 F.W.MacDougall, J.B.Ennis, R.A.Cooper, et al. High Energy Density Pulsed Power Capacitor. 14th International Pulsed Power Conference. 2003, Dallas: 513~517
49林福昌,代新,徐智安等.高储能密度电容器.强激光与粒子束. 2003, 15(1): 94~96
50王云亮,周渊深,舒志兵.电力电子技术.电子工业出版社. 2004: 8
51王新新,张卓,肖如泉.重复频率的Marx发生器.电工技术学报. 1997,12(6): 59~62
2任先文,赵君科,王保健,涂国锋,李小金,张之福,胡新康. 200kW烟气治理用脉冲电源的研制.高电压技术. 2005, 31(11):33~34
3陈银生,张新胜,袁渭康.高压脉冲电晕放电等离子体降解废水中苯酚.环境科学学报. 2002, 22(5): 566~569
4李效白.等离子体微细加工技术的新进展.真空科学与技术.2000, 20(3): 179~186
5刘芳,黄海涛.高压脉冲放电等离子体水处理中的放电方式及其应用.工业安全与环境. 2006, 32(7): 1~4
6 J.W.Baek, M.H.Ryu, D.W.Yoo, et al. A 2kV-40A Pulse Generator Using Boost Converter Array. 14th IEEE International Pulsed Power Conference. 2003, Dallas: 1423~1426
7 Choyal.Y., Gupta Lalit, Vyas Preeti, et al. Development of a 300-kV Marx Generator and its Application to Drive a Relativistic Electron Beam. IEEE Transactions on Proceedings in Engineering Sciences. 2005, 30(6): 757-764
8王莹.高功率脉冲技术.原子能出版社, 1991: 8, 15, 9, 25
9孙凤举,许日,曾江涛,邱爱慈,邱毓昌. 1MV重复频率Marx发生器.高电压器. 1999,(2):53~55
10 Ian Smith. The Early History of West Pulse Power. IEEE Transactions on Plasma Science. 2006, 34(5): 1585-1609
11刘锡三.高功率脉冲技术.国防工业出版社, 2005: 17~19, 88~89, 35~36,51~54
12 Don Cook. New Developments and Applications of Intense Pulsed Radiation Sources at Sandia National Laboratories. 11th IEEE Pulse Power Conference, 1997, Baltimore: 25-36
13 Jong-Hyun Kim, Myung-Hyo Ryu, Byung-Duk Min, et al. High Voltage Pulse Power Supply Using Marx Generator & Solid-State Switches. 31th IEEE Industrial Electronics Society Conference. 2005, Carolina : 1244~1247
14张奇,夏能樵,李悌兴等.微秒Marx发生器.电子学报. 1987, 15(5): 116~118
15曾乃工,杨大伟,姜兴东,罗玉明.强流脉冲电子束加速器用Marx发生器.高电压技术. 1996, 22(2): 78~79
16王新新,张卓,肖如泉.重复频率的Marx发生器的充电回路.高电压技术. 1997,23(1): 37~39
17孙蓓云,周晏,郑振兴等.有界波EMP模拟器脉冲电源.强激光与粒子束. 2000, 12(4): 505~508
18秦卫东,李洪涛,顾元朝等. 200kV快脉冲Marx发生器.高电压技术. 2002, 28(11): 40,51
19 W.J.Carey, J.R.Mayes. Marx Generator Design and Performance. 25th International Power Modulator Symposium. 2002, California: 625~628
20 R.M.Ness, B.D Smith, E.Y.Chu, et al. Compact, Megavolt, Rep-rated Marx Generators. IEEE Transactions on Electron Devices. 1991, 38(4): 803-809
21 J.D.Graham, G D.G.ale, W.E.Sommars, S.E.Calico. Compact 400 kV Marx Generator with Common Switch Housing. 11th IEEE International Pulse Power Conference. 1997, Monterey: 1519~1523
22 D.Goerz, T.Ferriera, D.Nelson, et al. An Ultra-Compact Marx-Type High-Voltage Generator. IEEE Transactions on Pulsed Power Plasma Science. 2001, 1: 628~631
23 A.J.Dragt, J.M.Elizondo. Compact Battery-Powered, 400-kV, 40-Joule Marx Generator. IEEE Transactions on Pulsed Power Plasma Science. 2001, 2: 1555~1558
24 A.A.Neuber, Y.J.Chen, J.C.Dickens, et al. A Compact, Repetitive, 500kV, 500 J, Marx Generator. 15th IEEE International Pulsed Power Conference. 2005, Monterey: 1203~1206
25 G.J.J.Winands, Z.Liu, A.J.M.Pemen, et al. Novel Spark-Gap Switch Design for Pulsed Power Application. Pulsed Power Symposium. 2005, Basingstoke : 27/1~27/6
26柏艳英,王亚非,周鹰.引燃管.电气开关. 2005, No2:15~18.
27 W.Hartmann, M.Romheld, K.D.Rohde. High-Efficiency High-Voltage Pulse Generator Based on a Fast Recovery Pseudospark Switch. IEEE Transactions on Plasma Science. 2000, 28(5): 1481~1485
28 A.Welleman, E.Ramezani, U.Schlapbach. Semiconductor Switches Replace Thyratrons & Ignitrons. 28th IEEE International Conference on Plasma Science. 2001, Las Vegas: 325-328
29吴辉,吴建强,郭兴宽.一种新型的氢闸流管HY3202触发系统的研制.强激光与粒子束. 2002, 14(4): 617~620
30郝晓敏,唐丹,陈敏德,王欣.低抖动纳秒级前沿的氢闸流管高压脉冲电源.强激光与粒子束. 2004,16(2): 265~268
31 Fei Wang, A.Kuthi, M.A.Gundersen. Compact High Repetition Rate Pseudospark Pulse Generator. IEEE Transactions on Plasma Science. 2005, 33(4): 1177~1181
32 A.Kuthi, R.Alde, M.Gundersen, A.Neuber. Marx Generator Using Pseudospark Switches. 14th IEEE International Pulsed Power Conference. 2003, Dallas: 241~244
33 S.K.Lam, R.Miller, L.Sanders. Fast Marx for PRS Drivers. 14th IEEE Pulsed Power Conference. 2003, Dallas: 619– 621
34王桂吉,吴刚,赵剑衡等.平面火花隙三电极开关研制及性能测试.强激光与粒子束. 2006, 18(2): 349~352
35李远,刘小平,伍登学等.亚ns级抖动环形电极场畸变火花隙开关.高电压技术. 2005, 31(6): 46~48
36邱毓昌.伪火花开关的发展与应用.电工电能新技术. 1997,(4):10~13
37 I.Petzenhauser, K.Frank, U.Blell. Development of Multistage Pseudospark Switches for High Voltage Application. 15th IEEE International Pulsed Power Conference. 2005, California: 730– 733
38 A.I.Kuzmichev, V.I.Kryzhanovsky, D.V.Bochkov. Characteristics of Pseudospark Devices with Electrodes Containing LaB6. XIXth International Symposium on Discharges and Electrical Insulation in Vacuum. 2000, Xi’an:343~346
39 W. Weisser, K. Frank. Silicon Carbide as Electrode Material of a Pseudospark Switch. IEEE Transactions on Plasma Science. 2001, 29(3): 524~528
40邹勇.电容式调压脉冲电源的研究.哈尔滨工业大学工学硕士学位论文. 2006: 3~5
41亢宝位. IGBT发展概述.电力电子. 2006, (5): 10~15
42 G.E.Dale, H.C.Kirbie, J.D.Doss, et al. Solid-State Marx Modulator Development. Conference Record of the 26th International Power Modulator Symposium. 2004,San Francisco: 497~500
43 J.W.Baek, D.W.Yoo, G.H.Rim. Solid State Marx Generator Using Series-Connected IGBTs. Conference Record of the 26th International Power Modulator Symposium. 2004, San Francisco:383~386
44 M.E.Savage. Final Results from The High-Current, High-Action Closing Switch Test Program at Sandia National Laboratories. IEEE Transactions on Plasma Science. 2000, 28(5): 1451~1455
45 Xinxin Wang, Zhou Zhang, Chengmu Luo, Min Han. A Compact Repetitive Marx Generator. 12th IEEE International Pulsed Power Conference. 1999, Momterey: 815~817
46 J.P.O'Loughin, J.M.Lehr, D.L.Loree. High Repetition Rate Charging a Marx Type Generator. 13th International Pulsed Power Conference. 2001, Las Vegas: 242~245
47尚雷,王相綦,裴元吉等.新型软开关高压脉冲电容恒流充电技术分析.强激光与粒子束. 2001, 13(2): 241~244
48 F.W.MacDougall, J.B.Ennis, R.A.Cooper, et al. High Energy Density Pulsed Power Capacitor. 14th International Pulsed Power Conference. 2003, Dallas: 513~517
49林福昌,代新,徐智安等.高储能密度电容器.强激光与粒子束. 2003, 15(1): 94~96
50王云亮,周渊深,舒志兵.电力电子技术.电子工业出版社. 2004: 8
51王新新,张卓,肖如泉.重复频率的Marx发生器.电工技术学报. 1997,12(6): 59~62