摘要
本文介绍了光栅位移检测装置在国内外的发展动态及光栅位移测量的原理,并分析了一些传统的莫尔条纹细分方法的优缺点,进而提出了鉴相跟踪细分法的设计方案,并在数字系统设计中运用可编程逻辑器件。
文中详细介绍了相位检测跟踪细分方案的基本理论,并介绍了可编程技术及Verilog HDL硬件描述语言。文中论证该方案的实现过程,系统首先对传感器输出的位移信号进行相位调制,然后通过数字相位检测跟踪来完成电子细分。
文中分别对实现调制的模拟电路部分和实现细分功能的数字电路部分做了详细的介绍。系统模拟电路部分介绍了光栅系统的放大调制过程,并给出了各部分电路。本系统数字电路设计具有模块化特点。各部分数字电路功能采用硬件描述语言Verilog HDL系统逻辑功能进行描述,并对硬件做了验证与优化。通过数字逻辑实现具体功能,数字系统在一片可定制微控制器Ze5上实现,相对于传统电路明显的减少了器件使用的数量。
新型的设计方案具有以下特点:细分数高其调整方便;细分辨向同时完成;数字系统实现集成化,性能可靠稳定;硬件设计软件化及在系统可编程,便于电路修改及功能扩展。系统调试证明了鉴相理论在玻璃光栅电子细分方面的可行性,该系统针对栅距为20um的玻璃光栅实现100细分,整个系统分辨率达到了0.2um,最高跟踪速度达到了120m/min,本文最后给出了该系统的综合误差分析。
In this paper,measurement principle and development state of optical grating technology are briefly introduced.The advantages and disadvantages of several grating measuring circuit designs are analyzed and compared with each other,and then a new plan is introduced to realize motive position measurement on the base of phase demodulation and a method of using FPGA devices with high speed is put forward to realize integrating designation.
In this paper,measurement principle and the development state of grating technology are introduced.The paper briefly introduced programmable devices and hardware description language Verilog HDL.The procedure to realize this plan is set forth in details: first,in the light of modulation theory,the displacement signal is translated into the time signal;then,through digital phase detection,electronic division is achieved.
The paper introduces the analogical circuit which realizes the modulation and digital circuit which realizes the function of division.The part of analogical circuit introduces the process of modulation of the grating system and presents the circuit of every part.The design of the digital circuit for the system has the character of modularization and all-purpose.The hardware is validated and optimized.The function is realized through the digital logic in a Ze5,and the number of the IC is decreased compared the traditional circuit.
The new plan of design has the characters:High subdivision and convenient adjust; Subdivision and the direction-distinguished is achieved at the same time;The digital system is realized with credible capability;The design of hardware uses the method of soft-ware with the capability of ISP.The correct of the circuit is convenient.The debug of system improves the theory of the phase-distinguished is feasible.The system realizes the number of subdivision reaches 100 based on the 20um grating.The resolving power of the system reaches 0.2um.The highest tracking speed reached 120m/min.The paper presents the report of the integrate error analysis.
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