鉴相法光栅位移测量系统的研究
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摘要
本文介绍了光栅位移检测装置在国内外的发展动态及光栅位移测量的原理,并分析了一些传统的莫尔条纹细分方法的优缺点,进而提出了鉴相跟踪细分法的设计方案,并在数字系统设计中运用可编程逻辑器件。
文中详细介绍了相位检测跟踪细分方案的基本理论,并介绍了可编程技术及Verilog HDL硬件描述语言。文中论证该方案的实现过程,系统首先对传感器输出的位移信号进行相位调制,然后通过数字相位检测跟踪来完成电子细分。
文中分别对实现调制的模拟电路部分和实现细分功能的数字电路部分做了详细的介绍。系统模拟电路部分介绍了光栅系统的放大调制过程,并给出了各部分电路。本系统数字电路设计具有模块化特点。各部分数字电路功能采用硬件描述语言Verilog HDL系统逻辑功能进行描述,并对硬件做了验证与优化。通过数字逻辑实现具体功能,数字系统在一片可定制微控制器Ze5上实现,相对于传统电路明显的减少了器件使用的数量。
新型的设计方案具有以下特点:细分数高其调整方便;细分辨向同时完成;数字系统实现集成化,性能可靠稳定;硬件设计软件化及在系统可编程,便于电路修改及功能扩展。系统调试证明了鉴相理论在玻璃光栅电子细分方面的可行性,该系统针对栅距为20um的玻璃光栅实现100细分,整个系统分辨率达到了0.2um,最高跟踪速度达到了120m/min,本文最后给出了该系统的综合误差分析。
In this paper,measurement principle and development state of optical grating technology are briefly introduced.The advantages and disadvantages of several grating measuring circuit designs are analyzed and compared with each other,and then a new plan is introduced to realize motive position measurement on the base of phase demodulation and a method of using FPGA devices with high speed is put forward to realize integrating designation.
In this paper,measurement principle and the development state of grating technology are introduced.The paper briefly introduced programmable devices and hardware description language Verilog HDL.The procedure to realize this plan is set forth in details: first,in the light of modulation theory,the displacement signal is translated into the time signal;then,through digital phase detection,electronic division is achieved.
The paper introduces the analogical circuit which realizes the modulation and digital circuit which realizes the function of division.The part of analogical circuit introduces the process of modulation of the grating system and presents the circuit of every part.The design of the digital circuit for the system has the character of modularization and all-purpose.The hardware is validated and optimized.The function is realized through the digital logic in a Ze5,and the number of the IC is decreased compared the traditional circuit.
The new plan of design has the characters:High subdivision and convenient adjust; Subdivision and the direction-distinguished is achieved at the same time;The digital system is realized with credible capability;The design of hardware uses the method of soft-ware with the capability of ISP.The correct of the circuit is convenient.The debug of system improves the theory of the phase-distinguished is feasible.The system realizes the number of subdivision reaches 100 based on the 20um grating.The resolving power of the system reaches 0.2um.The highest tracking speed reached 120m/min.The paper presents the report of the integrate error analysis.
文中详细介绍了相位检测跟踪细分方案的基本理论,并介绍了可编程技术及Verilog HDL硬件描述语言。文中论证该方案的实现过程,系统首先对传感器输出的位移信号进行相位调制,然后通过数字相位检测跟踪来完成电子细分。
文中分别对实现调制的模拟电路部分和实现细分功能的数字电路部分做了详细的介绍。系统模拟电路部分介绍了光栅系统的放大调制过程,并给出了各部分电路。本系统数字电路设计具有模块化特点。各部分数字电路功能采用硬件描述语言Verilog HDL系统逻辑功能进行描述,并对硬件做了验证与优化。通过数字逻辑实现具体功能,数字系统在一片可定制微控制器Ze5上实现,相对于传统电路明显的减少了器件使用的数量。
新型的设计方案具有以下特点:细分数高其调整方便;细分辨向同时完成;数字系统实现集成化,性能可靠稳定;硬件设计软件化及在系统可编程,便于电路修改及功能扩展。系统调试证明了鉴相理论在玻璃光栅电子细分方面的可行性,该系统针对栅距为20um的玻璃光栅实现100细分,整个系统分辨率达到了0.2um,最高跟踪速度达到了120m/min,本文最后给出了该系统的综合误差分析。
In this paper,measurement principle and development state of optical grating technology are briefly introduced.The advantages and disadvantages of several grating measuring circuit designs are analyzed and compared with each other,and then a new plan is introduced to realize motive position measurement on the base of phase demodulation and a method of using FPGA devices with high speed is put forward to realize integrating designation.
In this paper,measurement principle and the development state of grating technology are introduced.The paper briefly introduced programmable devices and hardware description language Verilog HDL.The procedure to realize this plan is set forth in details: first,in the light of modulation theory,the displacement signal is translated into the time signal;then,through digital phase detection,electronic division is achieved.
The paper introduces the analogical circuit which realizes the modulation and digital circuit which realizes the function of division.The part of analogical circuit introduces the process of modulation of the grating system and presents the circuit of every part.The design of the digital circuit for the system has the character of modularization and all-purpose.The hardware is validated and optimized.The function is realized through the digital logic in a Ze5,and the number of the IC is decreased compared the traditional circuit.
The new plan of design has the characters:High subdivision and convenient adjust; Subdivision and the direction-distinguished is achieved at the same time;The digital system is realized with credible capability;The design of hardware uses the method of soft-ware with the capability of ISP.The correct of the circuit is convenient.The debug of system improves the theory of the phase-distinguished is feasible.The system realizes the number of subdivision reaches 100 based on the 20um grating.The resolving power of the system reaches 0.2um.The highest tracking speed reached 120m/min.The paper presents the report of the integrate error analysis.
引文
[1]杨孟华.光栅数显装置的集成化设计及数字锁相环的研究:(硕士学位论文).沈阳:沈阳工业大学,2002.
[2]何频.光栅数显系统的设计与实现.计量技术,2005(3):143-161.
[3]M.Frigo.An Adaptive Software Architecture for the FFT.IcaSSP conference proceedings,1998,(3):1381-1384.
[4]苏绍璟.大量程纳米级光栅位移测量理论及关键技术研究:(博士学位论文).长沙:国防科技大学,2005.
[5]D K Bowen,D G Chetwynd.Sub-nanometre Transducer Characterization by X-ray Interferometry.Precision Engineering.1990,12(2):165-167.
[6]郭雨梅,王楠,常丽等.数字集成化光栅数显装置的研究与设计.仪表技术与传感器,2005(5):58-59.
[7]张婉青.细分芯片在光栅测量系统中的应用.南京工业职业技术学院学报,2005(6):57-59.
[8]何春娟,刘绒霞,曹磊.莫尔条纹技术在微小位移测量中的应用.西安工业学院学报,2005(12):565-567.
[9]Zagar Bernhard.Laser-interferometer Measuring Displacement with Nanometer[10]Resolution.IEEE Transactions on Instrumentation and Measurement,1994,43(2):332-336.
[11]Miyahara Kensuke.Application of Surface Sabrication to Strain Measurement in Nanometer Scale with the Scanning tunneling Microscope:Journall of Testing and Evaluation,1994,22(2):121-126.
[12]杜列波.纳米级光栅位移测量中关键技术的研究:(博士学位论文).长沙:国防科技大学,2004.
[13]陈勇,陈慧宝,孙桂清等.光栅莫尔条纹信号质量的提高及其采集方法.上海大学学报,2004(4):129-132.
[14]刘清.提高光栅测量精度和分辨率的技术研究与实现.计量学报,2003(10):275-278.
[15]Wagdy M F.Errors in Sampled Data Phase Measurement.IEEE Trans Instru Meas.1985,34(12):507-509.
[16]张英杰,海淘.一种辨别莫尔条纹移动方向的实时性辨向电路.现代电子技术,2004(19):29-31.
[17]Yamashita Tadaoki,Nakashima Hirotaka.Measuring Method of Piezo-Element Displacement Characteristics as Nano-meter Moving Means.Journal of the Japan Society of Precision Engineering,1993,59(9):1543-1548.
[18]王小兵,金锋.一种改进的全数字化锁相环在光栅位置检测中的应用.仪器仪表学报,2004(4):641-643.
[19]Zhang Shulian,Tang Ming.Principle for Measurement of Micrometer and Nanometer Displacement and Air Refractivity Based on Lase Mode Split Technology and Laseing Action.Optical Enginerring,1994,33(10):3381-3387.
[20]王君立,隗海林,刘琳,改善莫尔条纹细分精度的硬件实现.传感技术学报,2005(1):209-211.
[21]王晓飞,刘桂礼.基于LM3914的电平切割细分电路.北京机械工业学院学报,2000(3):49-51.
[22]Jen-shiun chiang,kuang-yuan chen.The design of an All-digital Phase-locked Loop with Small Dco Hardware and Fast phase lock.IEEE Transactions on Circuits and Systems-analog and Digital Signal Processing,1999(7):945-950.
[23]鲁标,孟克,潘玉恒.数字相关检测技术在激光相位测距仪中的应用.应用科技,2005(2):24-26.
[24]申启飞,王克逸.一种用于位置控制的相位检测方案.机床与液压,2005(5):115-116.
[25]Yamali Lorenzo.Optical Generation of amHz-Linewidth Microwave Signal Using Semiconductor Lasers and a Discriminator-Aided Phase-Locked Loop,IEEE Transactions on Circuits and systems-analog and digital signal processing,1997(6):1296-1300.
[26]Giuseppedemaria,Lorenzo Sciavicco.Pull-inRange Etermination for Class of Phase-Locked Loops.IEEE Transactions on Circuits and Systems-analog and Digital Signal Processing,1981(11):359-362.
[27]程方,范光照,刘玉圣.纳米测量中的光栅信号细分技术.计量测试与检定,2006(16):15-16.
[28]欧阳三泰,欧阳琳等.一种智能化光栅检测装置.湖南工程学院学报,2004(12):9-11.
[29]崔骥,李怀琼,陈钱.光栅莫尔条纹信号的细分与辩向新技术.光学技术,2000(7):294-296.
[30]金喜平,姬立红,庞杰.VHDL和ISP逻辑器件在光栅数显装置中的应用.沈阳工业大学学报,2001(2):40-42.
[31]李怀琼,陈钱,王钰.新型光栅信号数字细分技术及其误差分析.计量学报,2001(10):281-283.
[32]王忠祥,丁辉.纳米测量技术研究的若干进展.纳米测量技术与仪器,2003(3):3-5.
[33]余水宝.智能数字锁相倍频技术研究.浙江师范大学学报(自然科学版),2003(2):17-20.
[34]闫丽,段发阶,方志强.基于EPM7128的光栅位移传感器信号细分电路模块的设计.计量与测试技术,2005(3):19-21.
[35]Todd D.Morton.嵌入式微控制器.北京:机械工业出版社,2005.
[36]严钟豪,谭祖根.非电量电测技术.北京:机械工业出版,1988.
[37]薛实福,李庆祥.精密仪器设计.北京:清华大学出版社,1991.
[38]李宏,张家田.液晶显示器件应用技术.北京:机械工业出版社,2004.
[39]刘亮.数字电路设计与Verilog HDL.北京:人民邮电出版社,2000.
[40]李广军,孟宪民.可编程ASIC设计与应用.西安:西安电子科技大学出版社,2000.
[41]王田苗.嵌入式系统设计与实例开发(第二版).北京:清华大学出版社,2003.
[42]褚振勇,翁木云.FPGA设计及应用.西安:西安电子科技大学出版社,2002.
[2]何频.光栅数显系统的设计与实现.计量技术,2005(3):143-161.
[3]M.Frigo.An Adaptive Software Architecture for the FFT.IcaSSP conference proceedings,1998,(3):1381-1384.
[4]苏绍璟.大量程纳米级光栅位移测量理论及关键技术研究:(博士学位论文).长沙:国防科技大学,2005.
[5]D K Bowen,D G Chetwynd.Sub-nanometre Transducer Characterization by X-ray Interferometry.Precision Engineering.1990,12(2):165-167.
[6]郭雨梅,王楠,常丽等.数字集成化光栅数显装置的研究与设计.仪表技术与传感器,2005(5):58-59.
[7]张婉青.细分芯片在光栅测量系统中的应用.南京工业职业技术学院学报,2005(6):57-59.
[8]何春娟,刘绒霞,曹磊.莫尔条纹技术在微小位移测量中的应用.西安工业学院学报,2005(12):565-567.
[9]Zagar Bernhard.Laser-interferometer Measuring Displacement with Nanometer[10]Resolution.IEEE Transactions on Instrumentation and Measurement,1994,43(2):332-336.
[11]Miyahara Kensuke.Application of Surface Sabrication to Strain Measurement in Nanometer Scale with the Scanning tunneling Microscope:Journall of Testing and Evaluation,1994,22(2):121-126.
[12]杜列波.纳米级光栅位移测量中关键技术的研究:(博士学位论文).长沙:国防科技大学,2004.
[13]陈勇,陈慧宝,孙桂清等.光栅莫尔条纹信号质量的提高及其采集方法.上海大学学报,2004(4):129-132.
[14]刘清.提高光栅测量精度和分辨率的技术研究与实现.计量学报,2003(10):275-278.
[15]Wagdy M F.Errors in Sampled Data Phase Measurement.IEEE Trans Instru Meas.1985,34(12):507-509.
[16]张英杰,海淘.一种辨别莫尔条纹移动方向的实时性辨向电路.现代电子技术,2004(19):29-31.
[17]Yamashita Tadaoki,Nakashima Hirotaka.Measuring Method of Piezo-Element Displacement Characteristics as Nano-meter Moving Means.Journal of the Japan Society of Precision Engineering,1993,59(9):1543-1548.
[18]王小兵,金锋.一种改进的全数字化锁相环在光栅位置检测中的应用.仪器仪表学报,2004(4):641-643.
[19]Zhang Shulian,Tang Ming.Principle for Measurement of Micrometer and Nanometer Displacement and Air Refractivity Based on Lase Mode Split Technology and Laseing Action.Optical Enginerring,1994,33(10):3381-3387.
[20]王君立,隗海林,刘琳,改善莫尔条纹细分精度的硬件实现.传感技术学报,2005(1):209-211.
[21]王晓飞,刘桂礼.基于LM3914的电平切割细分电路.北京机械工业学院学报,2000(3):49-51.
[22]Jen-shiun chiang,kuang-yuan chen.The design of an All-digital Phase-locked Loop with Small Dco Hardware and Fast phase lock.IEEE Transactions on Circuits and Systems-analog and Digital Signal Processing,1999(7):945-950.
[23]鲁标,孟克,潘玉恒.数字相关检测技术在激光相位测距仪中的应用.应用科技,2005(2):24-26.
[24]申启飞,王克逸.一种用于位置控制的相位检测方案.机床与液压,2005(5):115-116.
[25]Yamali Lorenzo.Optical Generation of amHz-Linewidth Microwave Signal Using Semiconductor Lasers and a Discriminator-Aided Phase-Locked Loop,IEEE Transactions on Circuits and systems-analog and digital signal processing,1997(6):1296-1300.
[26]Giuseppedemaria,Lorenzo Sciavicco.Pull-inRange Etermination for Class of Phase-Locked Loops.IEEE Transactions on Circuits and Systems-analog and Digital Signal Processing,1981(11):359-362.
[27]程方,范光照,刘玉圣.纳米测量中的光栅信号细分技术.计量测试与检定,2006(16):15-16.
[28]欧阳三泰,欧阳琳等.一种智能化光栅检测装置.湖南工程学院学报,2004(12):9-11.
[29]崔骥,李怀琼,陈钱.光栅莫尔条纹信号的细分与辩向新技术.光学技术,2000(7):294-296.
[30]金喜平,姬立红,庞杰.VHDL和ISP逻辑器件在光栅数显装置中的应用.沈阳工业大学学报,2001(2):40-42.
[31]李怀琼,陈钱,王钰.新型光栅信号数字细分技术及其误差分析.计量学报,2001(10):281-283.
[32]王忠祥,丁辉.纳米测量技术研究的若干进展.纳米测量技术与仪器,2003(3):3-5.
[33]余水宝.智能数字锁相倍频技术研究.浙江师范大学学报(自然科学版),2003(2):17-20.
[34]闫丽,段发阶,方志强.基于EPM7128的光栅位移传感器信号细分电路模块的设计.计量与测试技术,2005(3):19-21.
[35]Todd D.Morton.嵌入式微控制器.北京:机械工业出版社,2005.
[36]严钟豪,谭祖根.非电量电测技术.北京:机械工业出版,1988.
[37]薛实福,李庆祥.精密仪器设计.北京:清华大学出版社,1991.
[38]李宏,张家田.液晶显示器件应用技术.北京:机械工业出版社,2004.
[39]刘亮.数字电路设计与Verilog HDL.北京:人民邮电出版社,2000.
[40]李广军,孟宪民.可编程ASIC设计与应用.西安:西安电子科技大学出版社,2000.
[41]王田苗.嵌入式系统设计与实例开发(第二版).北京:清华大学出版社,2003.
[42]褚振勇,翁木云.FPGA设计及应用.西安:西安电子科技大学出版社,2002.