布拉格反射波导光子晶体激光器的研究
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摘要
布拉格反射波导激光器是一种具有线缺陷的一维光子晶体激光器，它在垂直方向利用光子带隙效应替代传统的全反射原理进行光限制，因此激光器具有大的模式体积和强的模式分辨，可实现超大光模式尺寸、稳定单横模工作。这种激光器可有效的解决传统边发射半导体激光器所面临的灾变光损伤、垂直发散角大等难题。另外，通过控制光子带隙导引模式，布拉格反射波导激光器可输出不同的远场光斑，这在一些领域具有很大的潜在应用。
本论文主要针对布拉格反射波导激光器进行了结构设计、材料生长、器件制备及测试分析，具体的研究内容和结果如下：
（1）采用传输矩阵理论和布洛赫波近似的方法对布拉格反射波导的光学特性进行了深入分析，获得了布拉格反射波导的设计和计算方法。
（2）深入研究了布拉格反射波导激光器的模式特性，发现通过控制激光器的腔模分布可获得不同远场的激光输出，并证明了单边布拉格反射波导激光器实现双瓣远场输出。
（3）采用非对称布拉格反射波导激光器结构，制备的50μm条宽、800μm腔长激光器单管连续输出功率大于1.5W，阈值电流密度仅为253A/cm~2，最大电光转换效率可达48%。
（4）首次验证了一种布拉格反射波导双光束激光器，激光器在垂直方向输出两个对称的、近圆形的光束，单光束垂直发散角低至8°，这种双光束激光器在高速激光扫描、高灵敏度吸收光谱仪、刻蚀深度原位监控、离轴外腔及相干合束等领域具有很大的应用前景。
（5）对布拉格反射波导激光器的光谱特性进行了深入研究，制备的10μm条宽激光器可连续、单模工作，光谱线宽仅为0.052nm，边模抑制比大于33dB，并发现了其具有光谱调制现象。
（6）首次验证了双边布拉格反射波导激光器实现超窄垂直光束发散的激光输出，制备的808nm波长激光器输出一近圆形光斑，垂直和侧向远场发散角半高全宽可低至7.5°×7.2°，达到国际先进水平。
Bragg reflection waveguide (BRW) laser is a new class1D photonic crystallaser with a line defect, where photonic band-gap effect rather than the total internalreflection is utilized to provide optical confinement in the vertical direction. TheBRW lasers (BRLs) possess a variety of advantages compared with conventionalindex-guiding lasers, including the high gain coefficient, large mode volumes, andstrong mode discrimination, allowing for high power and single mode operation.This helps to raise the catastrophic optical damage threshold power and reduce thevertical beam divergence of the diode laser. Another significant advantage of theBRL is that it could produce different beam patterns through controling thenear-field electric field distribution, which are are in demand for a wide variety ofapplications.
The objective of this thesis is to develop high-performance BRLs. The mainwork is as follows:
1) The mode dispersion equation of the Bragg reflection waveguide is solved bythe transfer matrix method and Bloch theory. The design and calculation methods ofthe BRLs are presented.
2) The further analysis shows that the intrinsic reason for the far-fielddistribution is determined by the mode shape in the cavity. The single-sided BRLwith dual-lobed far field is demonstrated.
3) The fabricated50μm-wide asymmetric BRL exhibites more than1.5Wcontinuous-wave output power with high efficiency of48%. The threshold currentdensity is as low as253A/cm~2.
4) A Bragg reflection waveguide twin-beam laser is designed and demonstrated.Nearly the entire emitted power of the BRL is concentrated in two near-circularlobes in the vertical direction. The full-width at half maximum divergence angles areas narrow as7.2°and5.4°respectively in the vertical and lateral directions.
5) The continuous-wave and single-mode operation of the ridge BRL isdemonstrated. The lasing spectrum showed an ultra-narrow linewidth of0.052nmand large side mode suppression ratio (SMSR) exceeding33dB. Periodic spectrummodulation with a uniform mode spacing of3.3nm is also observed.
6) High brightness808nm edge-emitting Bragg reflection waveguide laserswith a nearly circular output beam was firstly demonstrated. The vertical beamdivergence is as narrow as8°at the full width at half maximum. The significantlyreduced vertical beam divergence while maintaining stable single transverse modeoperation is beneficial for fiber coupling.
本论文主要针对布拉格反射波导激光器进行了结构设计、材料生长、器件制备及测试分析，具体的研究内容和结果如下：
（1）采用传输矩阵理论和布洛赫波近似的方法对布拉格反射波导的光学特性进行了深入分析，获得了布拉格反射波导的设计和计算方法。
（2）深入研究了布拉格反射波导激光器的模式特性，发现通过控制激光器的腔模分布可获得不同远场的激光输出，并证明了单边布拉格反射波导激光器实现双瓣远场输出。
（3）采用非对称布拉格反射波导激光器结构，制备的50μm条宽、800μm腔长激光器单管连续输出功率大于1.5W，阈值电流密度仅为253A/cm~2，最大电光转换效率可达48%。
（4）首次验证了一种布拉格反射波导双光束激光器，激光器在垂直方向输出两个对称的、近圆形的光束，单光束垂直发散角低至8°，这种双光束激光器在高速激光扫描、高灵敏度吸收光谱仪、刻蚀深度原位监控、离轴外腔及相干合束等领域具有很大的应用前景。
（5）对布拉格反射波导激光器的光谱特性进行了深入研究，制备的10μm条宽激光器可连续、单模工作，光谱线宽仅为0.052nm，边模抑制比大于33dB，并发现了其具有光谱调制现象。
（6）首次验证了双边布拉格反射波导激光器实现超窄垂直光束发散的激光输出，制备的808nm波长激光器输出一近圆形光斑，垂直和侧向远场发散角半高全宽可低至7.5°×7.2°，达到国际先进水平。
Bragg reflection waveguide (BRW) laser is a new class1D photonic crystallaser with a line defect, where photonic band-gap effect rather than the total internalreflection is utilized to provide optical confinement in the vertical direction. TheBRW lasers (BRLs) possess a variety of advantages compared with conventionalindex-guiding lasers, including the high gain coefficient, large mode volumes, andstrong mode discrimination, allowing for high power and single mode operation.This helps to raise the catastrophic optical damage threshold power and reduce thevertical beam divergence of the diode laser. Another significant advantage of theBRL is that it could produce different beam patterns through controling thenear-field electric field distribution, which are are in demand for a wide variety ofapplications.
The objective of this thesis is to develop high-performance BRLs. The mainwork is as follows:
1) The mode dispersion equation of the Bragg reflection waveguide is solved bythe transfer matrix method and Bloch theory. The design and calculation methods ofthe BRLs are presented.
2) The further analysis shows that the intrinsic reason for the far-fielddistribution is determined by the mode shape in the cavity. The single-sided BRLwith dual-lobed far field is demonstrated.
3) The fabricated50μm-wide asymmetric BRL exhibites more than1.5Wcontinuous-wave output power with high efficiency of48%. The threshold currentdensity is as low as253A/cm~2.
4) A Bragg reflection waveguide twin-beam laser is designed and demonstrated.Nearly the entire emitted power of the BRL is concentrated in two near-circularlobes in the vertical direction. The full-width at half maximum divergence angles areas narrow as7.2°and5.4°respectively in the vertical and lateral directions.
5) The continuous-wave and single-mode operation of the ridge BRL isdemonstrated. The lasing spectrum showed an ultra-narrow linewidth of0.052nmand large side mode suppression ratio (SMSR) exceeding33dB. Periodic spectrummodulation with a uniform mode spacing of3.3nm is also observed.
6) High brightness808nm edge-emitting Bragg reflection waveguide laserswith a nearly circular output beam was firstly demonstrated. The vertical beamdivergence is as narrow as8°at the full width at half maximum. The significantlyreduced vertical beam divergence while maintaining stable single transverse modeoperation is beneficial for fiber coupling.
引文
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