基于光整流的太赫兹源与新型太赫兹导波结构研究
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摘要
太赫兹波介于微波与红外线之间，是电磁频谱中唯一尚未完全开发利用的频段，也是当前科学研究热点之一。太赫兹技术在通信、雷达、安检成像、生物医学、频谱分析等多个领域都具有重要的学科价值和广阔的应用前景，被誉为改变未来世界的十大技术之一。太赫兹辐射产生技术与太赫兹导波技术是太赫兹技术中最关键的核心技术，太赫兹源和导波器件也是太赫兹系统中最关键的组成部分。因此，为了加快太赫兹技术发展，推进太赫兹频谱开发利用，急需对高效率高可靠性的太赫兹辐射源与低损耗低色散的太赫兹导波结构进行深入研究。本文对基于光整流方法的高功率宽带太赫兹源与中心频率可调的窄带太赫兹源，介质平板波导、金属平行板介质波导和石墨烯表面等离子激元波导的太赫兹导波结构展开深入研究，具体研究内容包括：
1.基于光整流的高功率宽带(准单周期)太赫兹源的研究。分析了光整流产生宽带太赫兹波的机理与相位匹配条件，针对LiNbO_3晶体在光整流过程中无法实现共线相位匹配问题，研究了基于泵浦脉冲斜波前的非共线相位匹技术；搭建了基于Echelon——离散型倾斜波前技术的宽带太赫兹波产生平台，当泵浦脉冲能量为0.15mJ时，实测光整流产生准单周期太兹波脉冲能量为0.012μJ，激光到太赫兹波的能量转换效率约为8×10-5；搭建了基于光栅——连续型倾斜波前技术的宽带太赫兹波产生平台，当泵浦脉冲能量为7mJ时，实测光整流产生准单周期太赫兹波的峰值电场强度为150kV/cm(离轴抛物面镜焦点处)，对应频谱的峰值频率为0.5THz，带宽为1.6THz，太兹波脉冲能量为7μJ，能量转换效率高达1×10~(-3)，与采用正常波前技术的光整流产生太赫兹波方法相比，能量效率提高了3个数量级。
2.基于光整流的中心频率可调的窄带(准多周期)太赫兹源研究。分析了基于Chirp-Delay方法的窄带太赫兹波产生机理，针对光整流方法产生窄带太赫兹波容易出现中心频率不稳定的问题，根据两束光传播不同光程将产生特定相对时延的原理，设计了一个具有高相位稳定性的时延产生器Etalon，保障了窄带太赫兹源的频率稳定性；针对窄带太赫兹源光路调节较为困难的问题，通过在平移台上引入一镜对，使移动光栅对产生的光程增量恰好与镜对产生的光程增量相互抵消，设计了一个具有自适应光程补偿功能的平行光栅对Compressor，极大方便了光整流产生窄带太赫兹波的光路调节与实验测试；采用LiNbO_3波导作为光整流晶体，搭建了Compressor位于Pump支路与Compressor位于Probe支路两种Chirp-Delay方案的准多周期窄带太赫兹波产生平台。实验表明，这两种方案均能够有效产生中心频率可调的窄带太赫兹波，且中心频率可调范围是0.25~1.2THz，带宽约为100GHz。
3.基于介质平板波导的太赫兹导波结构研究。采用模式匹配法分析三层平板波导在太赫兹波段的传输特性，得到导波场分布、色散方程，功率限制因子以及损耗系数的一般表达式，利用偏振门成像系统，对太赫兹波在LiNbO_3和LiTaO_3平板波导中的传输特性进行实验研究，测试结果与理论计算结果吻合；研究了同一片电光晶体薄片中实现太赫兹波的产生、导波、探测与操控等功能，针对单纯渐变结构极易破碎的问题，提出基于带空气隙的LiTaO_3晶体的锥形狭缝阵渐变平板波导结构，研究表明，这种结构不仅可以有效提高样品的机械性能，还能显著提升在锥形尖端空气隙中太赫兹波电场增强(5.5倍)与能量聚集能力。
4.基于金属平行板介质波导的太赫兹导波结构研究。针对金属平行板波导的横向场分布不集中的问题，结合介质平板波导横向场分布集中特点，提出一种新型太赫兹导波结构——金属平行板介质波导(PPDW)，研究表明，PPDW有宽频带、低损耗、低色散及场分布集中及易于加工应用等优点；研究广义金属平行板介质波导在太赫兹波段的传输特性，得到TE模的场分布，色散方程，功率比例因子、损耗系数以及特性阻抗的一般表达式；设计出太赫兹波段的同轴—PPDW过渡器(仿真研究表明，在0.45~0.75THz频段内，实现S11<-20dB，S21>-0.7dB，单个过渡器插损为0.18dB)、桥形PPDW3dB定向耦合器(仿真研究表明，该桥形耦合器隔离度27dB，耦合损耗为0.9dB，中心频率为1THz，带宽为12.5%，与常规PPDW耦合器相比，带宽拓宽至4.2倍，尺寸缩小了61%)、PPDW滤波器等多种无源器件，在太赫兹电路与系统中具有一定的应用潜力。
5.基于石墨烯表面等离子激元波导的太赫兹导波结构研究。获取准确的石墨烯电磁特性参数是研究石墨烯电磁传输特性的基础，本文由Kubo公式出发，对太赫兹频段石墨烯的电导率、等效介电常数以及电可调性等参数进行表征，并通过仿真验证了石墨烯波导的太赫兹表面等离子激元传输理论正确性，提出基于石墨烯单原子层的太赫兹功分器、反射器、锥形聚焦器等若干无源器件构想，从而为石墨烯在太赫兹导波器件中的应用提供理论依据。
Terahertz range refers to electromagnetic waves with frequencies betweenmicrowave and infrared. This range is the only spectrum in electromagnetic spectrum，which is not fully developed. The development of terahertz spectrum is one of the hotspot subject in current scientific and technological research. Terahertz technology,known as one of the10emerging technologies that will change the world, which hasfound applications with very important academic value in many different fields, such ascommunication, radar, security monitoring, imaging, bio-medical, and spectral analysis.Both terahertz radiation generation technique and terahertz guidied wave technique arethe most important terahertz technology; terahertz sources and terahertz guidied wavedevices are key components of terahertz systems. Therefore, in order to speed up thepace of the emerging terahertz technology and promote the development and utilizationof the terahertz spectrum, it is urgent needed for systematic and in-depth study on highefficiency and high reliability terahertz radiation sources as well as low loss and lowdispersion terahertz guidied wave structures. The area of focus in this dissertation willbe high power broadband terahertz sources and center frequency tunable narrowbandterahertz sources based on optical rectification methods, dielectric slab waveguides,parallel plate dielectric waveguides (PPDW) and graphene surface plasmon polaritons(SPP) waveguides. The main contents of this dissertation are concluded as follows:
1. High power broadband (quasi-single-cycle) terahertz sources based on opticalrectification. First of all, the principles and the phase matching conditions of broadbandterahertz wave generation via optical rectification have been studied. Since the collinearphase matching condition in LiNbO_3during optical rectification process is not fulfilled,a tilted optical pulse front technique is used to achieve noncollinear phase matching.Then, a broadband terahertz wave generation setup based on discrete tilted pulse fronttechnique via Echelon is built. By using0.15mJ pump pulse, the generated terahertzpulse energy is0.012μJ and the optical-to-terahertz energy conversion efficiency isabout8×10-5. In order to enhance the conversion efficiency, another broadband terahertzwave generation setup based on continuous tilted pulse front technique via grating is built. With7mJ pump pulse, a quasi-single-cycle terahertz pulse is generated with pulsepeak field up to150kV/cm (at the focus point of off-axis parabolic mirror pair), whichcorresponding spectrum with peak frequency of0.5THz, bandwidth of1.6THz. Thegenerated terahertz pulse energy is as high as7μJ and the energy conversion efficiencyis up to1×10~(-3). Comparing to optical rectification terahertz generation based on normalpulsed front technique method, this continuous tilted pulse font technique has more than1000times lager in energy conversion efficiency.
2. Center frequency tunable narrowband (quasi-multi-cycle) terahertz sourcesbased on optical rectification. The mechanism of narrowband terahertz wave generationby using Chirp-Delay method has been studied. Due to narrowband terahertz wavesgeneration setup usually suffers from instability in center frequency and difficulty inalignment, according to different optical path length will produce a particular relativedelay, an delay generator, called Etalon, with high phase stability is designed toguarantee frequency stability of the narrowband terahertz sources; by introducing amirror pair on translation stage, the amount of optical path length change of the gratingpair will be cancelled by the amount of path length change of the mirror pair, then anadaptive optical path length compensation parallel grating compressor is built, which isof great convenience for optical rectification narrowband terahertz wave generationsetup adjustment and experimental data collection. In this case, a LiNbO_3slabwaveguide is selected as an optical rectification crystal, and two Chirp-Delay schemes’setups with compressor in pump arm and compressor in probe arm are built. Theexperimental results show that both setups are able to generate terahertz wave efficiently,and the tunable center frequencies are range from0.25THz to1.2THz with bandwidthof100GHz.
3. Terahertz guided wave structures based on dielectric slab waveguides. Thetransmission characteristics of three-layer dielectric slab waveguides have been studiedby using mode matching methods. The general expressions for guided modes’ fielddistributions, dispersion relation, power confinement factor and attenuation coefficientsare obtained. By using polarization gating imaging system, terahertz waves transmissioncharacteristics in LiNbO_3and LiTaO_3slab waveguides are tested. The experimentalresults are consistent with the theoretical results. Meanwhile, terahertz generation,transmission, detection and control on single electro-optic crystal chip have been investigated. Furthermore, a tapered slit array LiTaO_3slab waveguide structure with anair gap on the tip is proposed to reduce the fragility of the tapered structure sample andincrease the field enhancement. The experimental results show that this structure is notonly able to improve the mechanical stability, but also able to significantly enhance theelectric fields (about5.5times) and improve the power confinement of the terahertzwave in the air gap in the tip.
4. Terahertz guided wave structures based on parallel plate dielectric waveguides(PPDWs). In order to eliminate the poor cross-sectional electromagnetic fielddistribution of parallel plate waveguide， by taking advantage of the good fielddistribution of slab waveguides, a PPDW is proposed as an promising terahertz guidedwave structure. The investigation results show that this PPDW can be used to guideterahertz waves efficiently with broardband, low attenuation，low dispersion and highfield concentration, which can be fabricated and utilized easily. Afterwards, terahertzwave transmission characteristics of generalized parallel plate dielectric waveguide arestudied, and the general expressions for guided modes’ field distributions, dispersionrelation, power confinement factor, attenuation coefficients and characteristicimpedance are also obtained. Moreover, a terahertz coax-PPDW transition (during0.45~0.75THz, S11<-20dB，S21>-0.7dB，insertion loss as low as0.18dB), a3dBdirectional coupler based on bridged PPDW (with isolation better than27dB, couplerloss of0.9dB, center frequency of1THz, bandwidth of12.5%, compared toconventional PPDW coupler, this bridged PPDW coupler’s bandwidth is about4.2timesbroader, the coupling length is about61%shorter) and a broadband PPDW filter aredesigned, which may have potential applications for the terahertz integrated circuits andsystems.
5. Terahertz guided wave structures based on graphene surface plasmon polaritons(SPP) waveguides. As we know, accurate electromagnetic characteristic parameters ofgraphene are the foundation of studying electromagnetic transmission characteristics ofgraphene waveguides. By using Kubo formula, the surface conductivity, equivalentcomplex permittivity and electrical tenability of graphene at terahertz frequencies areobtained. Meanwhile, a numerical simulation is used to verify the transmissioncharacteristics of graphene SPP with a good agreement. Then, several terahertz passivedevices such as splitters, reflectors, tapered structures based on single-atomic-layer graphene are proposed and simulated, which will lay solid theoretical foundation forgraphene based terahertz devices and systems.
1.基于光整流的高功率宽带(准单周期)太赫兹源的研究。分析了光整流产生宽带太赫兹波的机理与相位匹配条件，针对LiNbO_3晶体在光整流过程中无法实现共线相位匹配问题，研究了基于泵浦脉冲斜波前的非共线相位匹技术；搭建了基于Echelon——离散型倾斜波前技术的宽带太赫兹波产生平台，当泵浦脉冲能量为0.15mJ时，实测光整流产生准单周期太兹波脉冲能量为0.012μJ，激光到太赫兹波的能量转换效率约为8×10-5；搭建了基于光栅——连续型倾斜波前技术的宽带太赫兹波产生平台，当泵浦脉冲能量为7mJ时，实测光整流产生准单周期太赫兹波的峰值电场强度为150kV/cm(离轴抛物面镜焦点处)，对应频谱的峰值频率为0.5THz，带宽为1.6THz，太兹波脉冲能量为7μJ，能量转换效率高达1×10~(-3)，与采用正常波前技术的光整流产生太赫兹波方法相比，能量效率提高了3个数量级。
2.基于光整流的中心频率可调的窄带(准多周期)太赫兹源研究。分析了基于Chirp-Delay方法的窄带太赫兹波产生机理，针对光整流方法产生窄带太赫兹波容易出现中心频率不稳定的问题，根据两束光传播不同光程将产生特定相对时延的原理，设计了一个具有高相位稳定性的时延产生器Etalon，保障了窄带太赫兹源的频率稳定性；针对窄带太赫兹源光路调节较为困难的问题，通过在平移台上引入一镜对，使移动光栅对产生的光程增量恰好与镜对产生的光程增量相互抵消，设计了一个具有自适应光程补偿功能的平行光栅对Compressor，极大方便了光整流产生窄带太赫兹波的光路调节与实验测试；采用LiNbO_3波导作为光整流晶体，搭建了Compressor位于Pump支路与Compressor位于Probe支路两种Chirp-Delay方案的准多周期窄带太赫兹波产生平台。实验表明，这两种方案均能够有效产生中心频率可调的窄带太赫兹波，且中心频率可调范围是0.25~1.2THz，带宽约为100GHz。
3.基于介质平板波导的太赫兹导波结构研究。采用模式匹配法分析三层平板波导在太赫兹波段的传输特性，得到导波场分布、色散方程，功率限制因子以及损耗系数的一般表达式，利用偏振门成像系统，对太赫兹波在LiNbO_3和LiTaO_3平板波导中的传输特性进行实验研究，测试结果与理论计算结果吻合；研究了同一片电光晶体薄片中实现太赫兹波的产生、导波、探测与操控等功能，针对单纯渐变结构极易破碎的问题，提出基于带空气隙的LiTaO_3晶体的锥形狭缝阵渐变平板波导结构，研究表明，这种结构不仅可以有效提高样品的机械性能，还能显著提升在锥形尖端空气隙中太赫兹波电场增强(5.5倍)与能量聚集能力。
4.基于金属平行板介质波导的太赫兹导波结构研究。针对金属平行板波导的横向场分布不集中的问题，结合介质平板波导横向场分布集中特点，提出一种新型太赫兹导波结构——金属平行板介质波导(PPDW)，研究表明，PPDW有宽频带、低损耗、低色散及场分布集中及易于加工应用等优点；研究广义金属平行板介质波导在太赫兹波段的传输特性，得到TE模的场分布，色散方程，功率比例因子、损耗系数以及特性阻抗的一般表达式；设计出太赫兹波段的同轴—PPDW过渡器(仿真研究表明，在0.45~0.75THz频段内，实现S11<-20dB，S21>-0.7dB，单个过渡器插损为0.18dB)、桥形PPDW3dB定向耦合器(仿真研究表明，该桥形耦合器隔离度27dB，耦合损耗为0.9dB，中心频率为1THz，带宽为12.5%，与常规PPDW耦合器相比，带宽拓宽至4.2倍，尺寸缩小了61%)、PPDW滤波器等多种无源器件，在太赫兹电路与系统中具有一定的应用潜力。
5.基于石墨烯表面等离子激元波导的太赫兹导波结构研究。获取准确的石墨烯电磁特性参数是研究石墨烯电磁传输特性的基础，本文由Kubo公式出发，对太赫兹频段石墨烯的电导率、等效介电常数以及电可调性等参数进行表征，并通过仿真验证了石墨烯波导的太赫兹表面等离子激元传输理论正确性，提出基于石墨烯单原子层的太赫兹功分器、反射器、锥形聚焦器等若干无源器件构想，从而为石墨烯在太赫兹导波器件中的应用提供理论依据。
Terahertz range refers to electromagnetic waves with frequencies betweenmicrowave and infrared. This range is the only spectrum in electromagnetic spectrum，which is not fully developed. The development of terahertz spectrum is one of the hotspot subject in current scientific and technological research. Terahertz technology,known as one of the10emerging technologies that will change the world, which hasfound applications with very important academic value in many different fields, such ascommunication, radar, security monitoring, imaging, bio-medical, and spectral analysis.Both terahertz radiation generation technique and terahertz guidied wave technique arethe most important terahertz technology; terahertz sources and terahertz guidied wavedevices are key components of terahertz systems. Therefore, in order to speed up thepace of the emerging terahertz technology and promote the development and utilizationof the terahertz spectrum, it is urgent needed for systematic and in-depth study on highefficiency and high reliability terahertz radiation sources as well as low loss and lowdispersion terahertz guidied wave structures. The area of focus in this dissertation willbe high power broadband terahertz sources and center frequency tunable narrowbandterahertz sources based on optical rectification methods, dielectric slab waveguides,parallel plate dielectric waveguides (PPDW) and graphene surface plasmon polaritons(SPP) waveguides. The main contents of this dissertation are concluded as follows:
1. High power broadband (quasi-single-cycle) terahertz sources based on opticalrectification. First of all, the principles and the phase matching conditions of broadbandterahertz wave generation via optical rectification have been studied. Since the collinearphase matching condition in LiNbO_3during optical rectification process is not fulfilled,a tilted optical pulse front technique is used to achieve noncollinear phase matching.Then, a broadband terahertz wave generation setup based on discrete tilted pulse fronttechnique via Echelon is built. By using0.15mJ pump pulse, the generated terahertzpulse energy is0.012μJ and the optical-to-terahertz energy conversion efficiency isabout8×10-5. In order to enhance the conversion efficiency, another broadband terahertzwave generation setup based on continuous tilted pulse front technique via grating is built. With7mJ pump pulse, a quasi-single-cycle terahertz pulse is generated with pulsepeak field up to150kV/cm (at the focus point of off-axis parabolic mirror pair), whichcorresponding spectrum with peak frequency of0.5THz, bandwidth of1.6THz. Thegenerated terahertz pulse energy is as high as7μJ and the energy conversion efficiencyis up to1×10~(-3). Comparing to optical rectification terahertz generation based on normalpulsed front technique method, this continuous tilted pulse font technique has more than1000times lager in energy conversion efficiency.
2. Center frequency tunable narrowband (quasi-multi-cycle) terahertz sourcesbased on optical rectification. The mechanism of narrowband terahertz wave generationby using Chirp-Delay method has been studied. Due to narrowband terahertz wavesgeneration setup usually suffers from instability in center frequency and difficulty inalignment, according to different optical path length will produce a particular relativedelay, an delay generator, called Etalon, with high phase stability is designed toguarantee frequency stability of the narrowband terahertz sources; by introducing amirror pair on translation stage, the amount of optical path length change of the gratingpair will be cancelled by the amount of path length change of the mirror pair, then anadaptive optical path length compensation parallel grating compressor is built, which isof great convenience for optical rectification narrowband terahertz wave generationsetup adjustment and experimental data collection. In this case, a LiNbO_3slabwaveguide is selected as an optical rectification crystal, and two Chirp-Delay schemes’setups with compressor in pump arm and compressor in probe arm are built. Theexperimental results show that both setups are able to generate terahertz wave efficiently,and the tunable center frequencies are range from0.25THz to1.2THz with bandwidthof100GHz.
3. Terahertz guided wave structures based on dielectric slab waveguides. Thetransmission characteristics of three-layer dielectric slab waveguides have been studiedby using mode matching methods. The general expressions for guided modes’ fielddistributions, dispersion relation, power confinement factor and attenuation coefficientsare obtained. By using polarization gating imaging system, terahertz waves transmissioncharacteristics in LiNbO_3and LiTaO_3slab waveguides are tested. The experimentalresults are consistent with the theoretical results. Meanwhile, terahertz generation,transmission, detection and control on single electro-optic crystal chip have been investigated. Furthermore, a tapered slit array LiTaO_3slab waveguide structure with anair gap on the tip is proposed to reduce the fragility of the tapered structure sample andincrease the field enhancement. The experimental results show that this structure is notonly able to improve the mechanical stability, but also able to significantly enhance theelectric fields (about5.5times) and improve the power confinement of the terahertzwave in the air gap in the tip.
4. Terahertz guided wave structures based on parallel plate dielectric waveguides(PPDWs). In order to eliminate the poor cross-sectional electromagnetic fielddistribution of parallel plate waveguide， by taking advantage of the good fielddistribution of slab waveguides, a PPDW is proposed as an promising terahertz guidedwave structure. The investigation results show that this PPDW can be used to guideterahertz waves efficiently with broardband, low attenuation，low dispersion and highfield concentration, which can be fabricated and utilized easily. Afterwards, terahertzwave transmission characteristics of generalized parallel plate dielectric waveguide arestudied, and the general expressions for guided modes’ field distributions, dispersionrelation, power confinement factor, attenuation coefficients and characteristicimpedance are also obtained. Moreover, a terahertz coax-PPDW transition (during0.45~0.75THz, S11<-20dB，S21>-0.7dB，insertion loss as low as0.18dB), a3dBdirectional coupler based on bridged PPDW (with isolation better than27dB, couplerloss of0.9dB, center frequency of1THz, bandwidth of12.5%, compared toconventional PPDW coupler, this bridged PPDW coupler’s bandwidth is about4.2timesbroader, the coupling length is about61%shorter) and a broadband PPDW filter aredesigned, which may have potential applications for the terahertz integrated circuits andsystems.
5. Terahertz guided wave structures based on graphene surface plasmon polaritons(SPP) waveguides. As we know, accurate electromagnetic characteristic parameters ofgraphene are the foundation of studying electromagnetic transmission characteristics ofgraphene waveguides. By using Kubo formula, the surface conductivity, equivalentcomplex permittivity and electrical tenability of graphene at terahertz frequencies areobtained. Meanwhile, a numerical simulation is used to verify the transmissioncharacteristics of graphene SPP with a good agreement. Then, several terahertz passivedevices such as splitters, reflectors, tapered structures based on single-atomic-layer graphene are proposed and simulated, which will lay solid theoretical foundation forgraphene based terahertz devices and systems.
引文
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