嵌入式薄膜热电偶测温刀具传感器的研制
|
摘要
本课题属于切削温度测试研究领域,课题来源于辽宁省自然科学基金项目,项目编号(20062143)和辽宁省教育厅高校科技计划,项目编号(05L023)。本文主要研究瞬态测温传感器——嵌入式薄膜热电偶测温刀具传感器的研制及其性能研究。
切削温度直接影响工件的热变形、已加工表面质量、刀具前刀面积屑瘤的产生和消退以及刀具寿命等众多因素,因而现代制造业对切削温度的监测要求逐步提高。铝合金高速切削过程中产生大量的切削热,由于切削速度高,切削热来不及传给工件就被高速流出的切屑带走,工件和刀具累积热量极少。切削热主要集中于刀尖处,而切削区域埋藏于工件内,处于半封闭状态,目前常用的测温方法无法测量刀尖处的切削温度,只能测量距离刀尖一定距离的平均温度。本文研制出一种嵌入式复合薄膜热电偶刀具温度传感器,该传感器集切削、测温为一体,可以快速并精确地测量刀具刀尖处的切削温度。
论文的主要内容包括:薄膜热电偶测温传感器的结构优化设计,磁控溅射方法制备SiO_2绝缘膜、热电偶薄膜电极,测温传感器的静态标定、动态标定及切削温度测量试验,薄膜热电偶磨损误差分析等。其中,SiO_2绝缘膜、薄膜电极的制备以及薄膜热电偶磨损误差分析是本论文工作的重点。
通过增加磁控溅射射频偏压的方法,使薄膜热电偶与基体之间的结合力得到改善。采用数控线切割慢走丝加工掩模,使其形状规则、热变形量小。磁控溅射得到的热电偶薄膜膜层致密均匀、平整光滑、边界清晰、在热电极尺寸缩小70%的情况下仍能保证连续。对热电偶进行静态标定和动态标定,得出薄膜热电偶的灵敏度为66.9μV/℃,线性误差不大于0.45%。通过采用两种激光器作为激励热源,分别得到一阶系统的阶跃响应和脉冲响应,热电偶响应时间接近0.25ms。分别制作热接点宽度为1.0mm,0.8mm,0.5mm,0.3mm的热电偶来模拟热电偶磨损过程,实验结果证明热接点宽度从1.0mm～0.3mm对静态和动态数据影响不大,说明热电偶的磨损不会影响其精度和响应时间。
The paper is in the field of cutting temperature measurement, which is under the support of Natural Science Foundation of LiaoNing Province(No.20062143) and Plan for Scientific and Technological Industry in Colleges and Universities of LiaoNing Educarion Department. (No.05L023). The present work dedicaes to the development of tempreture sensor——Fabrication and Characterization of Tools with built-in thin film thermocouple sensors.
Cutting temperature directly impact the thermal deformation of workpiece, the quality of processed surface, the area cutter knife before the debris generation and tumor regression, as well as a number of factors, so modern manufacturing industry gradually increase the requirements of monitoring cutting the temperature. In the process of high-speed cutting of aluminum alloy bring a large amount of heat, as the cutting speed is too high, cutting heat has not enough time to take away by the outflow of high-speed chip, a little temperature has been accumulated on the workpiece, and almostly maintain room tempetature. Cutting heat concentrated in the tip, and cutting jobs in the region are buried, in a state of semi-closed, the conventional method of temperature measurement can not touch on the cover of the region. This paper developed tools with built-in thin film thermocouple sensors, which intgrates botll cutting and temperature measuring functions , can quickly and accurately measuring the cutting tool tip Department temperature.
This paper contains: structure optimized design of the TFTC tempreture sensor, the fabrication method for SiO_2 insulating coating, thermocouples thin-film by the Magnetron Spurting, static calibration, dynamical calibration, error analysis of dynamical cutting tempreture, the thermocouple film abrading error analysis and so on. Among these, the manufacturing of SiO_2 insulating coating, thin-film electrodes, the thermocouple film abrading error analysis are the key project and have been emphasized in this paper.
By increasing the RF bias voltage of magnetron sputtering, the bonding between thin-film thermocouple and substrate has been improved. The mask made by the numerical controlled linear cutting machine, which has regular shape and small thermal deformation. The thermocouple film made by magnetron sputtering has compactive and smooth thickness, clear boundary, continuous even the size reduced 70%. The static and dynamic calibration of TFT-C are proposed, and it is concluded that the sensitivity are 66.9μV/℃, linear error is no greater than 0.45% . Through using two kinds of laser as heat source, the experiment has got first-order system step response and impulse response respectively, the thermocouple response time close to 0.25ms. In order to research the process of the thermocouple wear out,four kinds of hot node width has been made to simulate the process, the results demonstrate that the heat node width made a little influence to the static and dynamic data,so we can say that the thermocouple Wear and tear will not affect its accuracy and response time.
切削温度直接影响工件的热变形、已加工表面质量、刀具前刀面积屑瘤的产生和消退以及刀具寿命等众多因素,因而现代制造业对切削温度的监测要求逐步提高。铝合金高速切削过程中产生大量的切削热,由于切削速度高,切削热来不及传给工件就被高速流出的切屑带走,工件和刀具累积热量极少。切削热主要集中于刀尖处,而切削区域埋藏于工件内,处于半封闭状态,目前常用的测温方法无法测量刀尖处的切削温度,只能测量距离刀尖一定距离的平均温度。本文研制出一种嵌入式复合薄膜热电偶刀具温度传感器,该传感器集切削、测温为一体,可以快速并精确地测量刀具刀尖处的切削温度。
论文的主要内容包括:薄膜热电偶测温传感器的结构优化设计,磁控溅射方法制备SiO_2绝缘膜、热电偶薄膜电极,测温传感器的静态标定、动态标定及切削温度测量试验,薄膜热电偶磨损误差分析等。其中,SiO_2绝缘膜、薄膜电极的制备以及薄膜热电偶磨损误差分析是本论文工作的重点。
通过增加磁控溅射射频偏压的方法,使薄膜热电偶与基体之间的结合力得到改善。采用数控线切割慢走丝加工掩模,使其形状规则、热变形量小。磁控溅射得到的热电偶薄膜膜层致密均匀、平整光滑、边界清晰、在热电极尺寸缩小70%的情况下仍能保证连续。对热电偶进行静态标定和动态标定,得出薄膜热电偶的灵敏度为66.9μV/℃,线性误差不大于0.45%。通过采用两种激光器作为激励热源,分别得到一阶系统的阶跃响应和脉冲响应,热电偶响应时间接近0.25ms。分别制作热接点宽度为1.0mm,0.8mm,0.5mm,0.3mm的热电偶来模拟热电偶磨损过程,实验结果证明热接点宽度从1.0mm～0.3mm对静态和动态数据影响不大,说明热电偶的磨损不会影响其精度和响应时间。
The paper is in the field of cutting temperature measurement, which is under the support of Natural Science Foundation of LiaoNing Province(No.20062143) and Plan for Scientific and Technological Industry in Colleges and Universities of LiaoNing Educarion Department. (No.05L023). The present work dedicaes to the development of tempreture sensor——Fabrication and Characterization of Tools with built-in thin film thermocouple sensors.
Cutting temperature directly impact the thermal deformation of workpiece, the quality of processed surface, the area cutter knife before the debris generation and tumor regression, as well as a number of factors, so modern manufacturing industry gradually increase the requirements of monitoring cutting the temperature. In the process of high-speed cutting of aluminum alloy bring a large amount of heat, as the cutting speed is too high, cutting heat has not enough time to take away by the outflow of high-speed chip, a little temperature has been accumulated on the workpiece, and almostly maintain room tempetature. Cutting heat concentrated in the tip, and cutting jobs in the region are buried, in a state of semi-closed, the conventional method of temperature measurement can not touch on the cover of the region. This paper developed tools with built-in thin film thermocouple sensors, which intgrates botll cutting and temperature measuring functions , can quickly and accurately measuring the cutting tool tip Department temperature.
This paper contains: structure optimized design of the TFTC tempreture sensor, the fabrication method for SiO_2 insulating coating, thermocouples thin-film by the Magnetron Spurting, static calibration, dynamical calibration, error analysis of dynamical cutting tempreture, the thermocouple film abrading error analysis and so on. Among these, the manufacturing of SiO_2 insulating coating, thin-film electrodes, the thermocouple film abrading error analysis are the key project and have been emphasized in this paper.
By increasing the RF bias voltage of magnetron sputtering, the bonding between thin-film thermocouple and substrate has been improved. The mask made by the numerical controlled linear cutting machine, which has regular shape and small thermal deformation. The thermocouple film made by magnetron sputtering has compactive and smooth thickness, clear boundary, continuous even the size reduced 70%. The static and dynamic calibration of TFT-C are proposed, and it is concluded that the sensitivity are 66.9μV/℃, linear error is no greater than 0.45% . Through using two kinds of laser as heat source, the experiment has got first-order system step response and impulse response respectively, the thermocouple response time close to 0.25ms. In order to research the process of the thermocouple wear out,four kinds of hot node width has been made to simulate the process, the results demonstrate that the heat node width made a little influence to the static and dynamic data,so we can say that the thermocouple Wear and tear will not affect its accuracy and response time.
引文
[1]周泽华等著.金属切削原理(第二版)[M].上海:上海科学技术出版社,1993:100-101.
[2]陈日曜.金属切削原理(第二版)[M].北京:机械工业出版社,1993:79-81.
[3]陆剑中,孙家宁.金属切削原理与刀具(第三版)[M].北京:机械工业出版社,1998:51-54.
[4]Zeng Q Y,Sun B Y.Development of NiCr/NiSi Thin-Film Thermocouple Sensor for Workpiece Temperature Measurement in Chemical Explosive Material Machining.ASME,Journal of Manufacturing Science and Engineering,2006,128:175-179.
[5]Basti A,Obikawa T.Tools with built-in thin film thermocouple sensors for monitoring cutting temperature.International Journal of Machine Tools & Manufacture,2007,47,793-798.
[6]陈明,袁人炜,薛秉源.铝合金高速铣削中切削温度动态变化规律的试验研究.工:具技术,2000,34:7-10.
[7]Choi H,Li X C.Fabrication and application of micro thin film thermocouples for transient temperature measurement in nanosecond pulsed laser micromachining of nickel.Sensors and Actuators 2007,136:118-124.
[8]宋昌才,刘苏.多元多层复合涂层刀具切削温度的测量.江苏理工大学学报(自然科学版).2001,22(1):55-58.
[9]Marcio Bacci da Silva,James Wallbank.Cutting Temprature:Prediction and Measurement Methods-a review[J].Journal of Materials Precessing Technology,1999,88:195-202.
[10]D.O'Sullivan.M.Cotterel.Temprature measurement in single point turning.Journal of Materials Processing Technology 118(2001):301-308.
[11]叶方伟.薄膜热电偶的发展及其应用.材料导报,1995 No5:28-32.
[12]Hemanshu D.Bhatt,Ramakrishna Vedula,Seshu B.Desu etal.La_(1-x)Sr_xCO_3 for thin film thermocouple applications.Thin Solid Films.1999,342(2):249-257.
[13]郭毓,胡维礼,叶小娟等.薄膜热电偶动态建模方法.传感器技术,2004,23(1):41-44.
[14]Hackmann P.A method for measuring rapid changing surface temperature and its application to gun barrels,Theoretical Research Translation,1/46Armanme Research Department.
[15]D.Bendersky,A special thermocouple for measuring transient temperature,Mechnanical Engineering,75(1953):117-125.
[16]Jih-Fen Lei,Herbert A.Will.Thin-film thermocouples and strain-gauge technologies for engine application.Sensor and Actuators A.1998,69(2):187-193.
[17]Masahiko Emi,Yasuko Suzuki,Yuichi Yamada etal.Development of thin film thermocouple for measurement of instantaneous heat flux flowing into cast iron combustion chamber wall.JASE Review,23(2002).379-382.
[18]K.G.Kreider.Thin film thermocouples for internal combustion engines,J.Vac.Sci.Technol.A 4([986):2618-2623.
[19]钱兰,陈宁.膜温可控式表面热电偶及研制中的几个技术问题.西安公路交通大学学报,1998,18(1):67-69.
[20]沈胜强,张志千,滕叙充等。薄膜热电偶及其对燃烧室壁面瞬态温度的测量.小型内燃机,1988,No3:1-7.
[21]薛晖,李付国,黄吕权.便携式薄膜热电偶测温传感器.传感器技术,1996,No1:46-48.
[22]李付国,黄吕权,薛晖等.多层复合式薄膜热电偶的研制.科技成果·学术论文,1995,No3:6-8.
[23]陈汉平,徐维新.非金属表面温度测量的薄膜热电偶技术.工程热物理学报,1989,10(4):490-492
[24]KennethG.Kreider,FrankDiMeo.Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers.Sensor and Actuators A.1998,69(1):46-52.
[25]KennethG.Kreider,Greg Gitlen.Uigh temperature materials for thin-film thermocouples on silicon wafers.Thin Solid Films.2000,376(1):32-37.
[26]周生国.机械工程测试技术[M].北京:北京理工大学出版社,1993:314.
[27]Nasahiko Emi,Yasuko Suzuki,Yuichi Yamada etal.Development of thin film thermocouple for measurement of instantaneous heat flux flowing into cast iron combustion chamber wall.JASE Review,23(2002).379-382.
[28]K.G.Kreider.Thin film thermocouples for internal combustion engines,J.Vac.Sci.Technol.A 4(1986):2618-2623.
[29]钱兰,陈宁.膜温可控式表面热电偶及研制中的几个技术问题.西安公路交通大学学报,1998,18(1):67-69.
[30]沈胜强,张志千,滕叙充等.薄膜热电偶及其对燃烧室壁面瞬态温度的测量.小型内燃机,1988,No3:1-7.
[31]薛晖,李付国,黄吕权.便携式薄膜热电偶测温传感器.传感器技术,1996,No1:46-48.
[32]李付国,黄吕权,薛晖等.多层复合式薄膜热电偶的研制.科技成果·学术论文,1995,No3:6-8.
[33]陈汉平,徐维新.非金属表面温度测量的薄膜热电偶技术.工程热物理学报,1989,10(4):430-432.
[34]KennethG.Kreider,FrankDiMeo.Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers.Sensor and Actuators A.1998,69(1):46-52.
[35]KennethG.Kreider,Oreg Gillen.High temperature materials for thin-film thermocouples on silicon wafers.Thin Solid Films.2000,376(1):32-37.
[36]周生国.机械工程测试技术[M].北京:北京理工大学出版社,1993:314.
[38]唐伟忠.薄膜材料制备原理、技术及应用(第二版).北京:冶金工业出版社,2003:57-101.
[39]李学丹,万英超,姜祥祺等.真空沉积技术.杭州:浙江大学出版社,1994:68-71.
[40]顾培夫.薄膜技术.杭州:浙江大学出版社,1990:42-56.
[41]田民波,刘德令.薄膜科学与技术手册(上).北京:机械工业出版社,1991:400-441.
[42]S.Schiller etal.Reactive DC high rate sputtering as production technology.Surface &Coatings Technology.1987(33):405-423.
[43]王力衡,黄运添,郑海涛.薄膜技术.北京:清华大学出版社,1991:15-20.
[44]H.Bartzsch.Properties of Si02and Al203 films for electrical insulation applications deposited by reactive pulse magnetron sputtering.Surface and Coatings Technology,2003,174～175:774～778.
[45]曾其勇 化爆材料动态切削温度的薄膜热电偶测量原理及传感器研制:(大连理工大学博士学位论文)大连:大连理工大学2005.
[46]Xu Jun,Ma Tengcai,Lu Wenqi.A new method fpr thin film deposition -faced microwave electron cyclotron resonance plasma source enhanced direct-current magnetron sputtering..Chinese physics letters.2000,17(8):586-588.
[47]Serio B,Nika Ph Prenel J P.static and dynamic calibration of thin-film thermocouple by meansof a laser modulation technique[J].Review of Scientific Instruments,2000,71(11):4306-4313.
[48]M.Hirao.Determining temperature distribution on flank face of cutting tools.J.Mater.Shap.Technol.1989,6(3):143-148.
[49]游伯坤等.温度测量与仪表.上海:机械工业出版社,1982:153-159.
[50]三零四所.热电偶.上海:国防工业出版社,1978:90-107.
[51]黄泽铣.热电偶原理及其检定.北京:中国计量出版社.1993.270-286.
[52]曲喜新,过璧君.薄膜物理.薄膜物理.1994:80,86.
[53]黄吕权,李付国.薄膜热电偶的技术特性研究.中国机械工程.1996,7(5):34-36.
[54]陈敏,马丽.传感器特性曲线的一种拟合方法.传感器技术.2003.22(1):38-40.
[2]陈日曜.金属切削原理(第二版)[M].北京:机械工业出版社,1993:79-81.
[3]陆剑中,孙家宁.金属切削原理与刀具(第三版)[M].北京:机械工业出版社,1998:51-54.
[4]Zeng Q Y,Sun B Y.Development of NiCr/NiSi Thin-Film Thermocouple Sensor for Workpiece Temperature Measurement in Chemical Explosive Material Machining.ASME,Journal of Manufacturing Science and Engineering,2006,128:175-179.
[5]Basti A,Obikawa T.Tools with built-in thin film thermocouple sensors for monitoring cutting temperature.International Journal of Machine Tools & Manufacture,2007,47,793-798.
[6]陈明,袁人炜,薛秉源.铝合金高速铣削中切削温度动态变化规律的试验研究.工:具技术,2000,34:7-10.
[7]Choi H,Li X C.Fabrication and application of micro thin film thermocouples for transient temperature measurement in nanosecond pulsed laser micromachining of nickel.Sensors and Actuators 2007,136:118-124.
[8]宋昌才,刘苏.多元多层复合涂层刀具切削温度的测量.江苏理工大学学报(自然科学版).2001,22(1):55-58.
[9]Marcio Bacci da Silva,James Wallbank.Cutting Temprature:Prediction and Measurement Methods-a review[J].Journal of Materials Precessing Technology,1999,88:195-202.
[10]D.O'Sullivan.M.Cotterel.Temprature measurement in single point turning.Journal of Materials Processing Technology 118(2001):301-308.
[11]叶方伟.薄膜热电偶的发展及其应用.材料导报,1995 No5:28-32.
[12]Hemanshu D.Bhatt,Ramakrishna Vedula,Seshu B.Desu etal.La_(1-x)Sr_xCO_3 for thin film thermocouple applications.Thin Solid Films.1999,342(2):249-257.
[13]郭毓,胡维礼,叶小娟等.薄膜热电偶动态建模方法.传感器技术,2004,23(1):41-44.
[14]Hackmann P.A method for measuring rapid changing surface temperature and its application to gun barrels,Theoretical Research Translation,1/46Armanme Research Department.
[15]D.Bendersky,A special thermocouple for measuring transient temperature,Mechnanical Engineering,75(1953):117-125.
[16]Jih-Fen Lei,Herbert A.Will.Thin-film thermocouples and strain-gauge technologies for engine application.Sensor and Actuators A.1998,69(2):187-193.
[17]Masahiko Emi,Yasuko Suzuki,Yuichi Yamada etal.Development of thin film thermocouple for measurement of instantaneous heat flux flowing into cast iron combustion chamber wall.JASE Review,23(2002).379-382.
[18]K.G.Kreider.Thin film thermocouples for internal combustion engines,J.Vac.Sci.Technol.A 4([986):2618-2623.
[19]钱兰,陈宁.膜温可控式表面热电偶及研制中的几个技术问题.西安公路交通大学学报,1998,18(1):67-69.
[20]沈胜强,张志千,滕叙充等。薄膜热电偶及其对燃烧室壁面瞬态温度的测量.小型内燃机,1988,No3:1-7.
[21]薛晖,李付国,黄吕权.便携式薄膜热电偶测温传感器.传感器技术,1996,No1:46-48.
[22]李付国,黄吕权,薛晖等.多层复合式薄膜热电偶的研制.科技成果·学术论文,1995,No3:6-8.
[23]陈汉平,徐维新.非金属表面温度测量的薄膜热电偶技术.工程热物理学报,1989,10(4):490-492
[24]KennethG.Kreider,FrankDiMeo.Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers.Sensor and Actuators A.1998,69(1):46-52.
[25]KennethG.Kreider,Greg Gitlen.Uigh temperature materials for thin-film thermocouples on silicon wafers.Thin Solid Films.2000,376(1):32-37.
[26]周生国.机械工程测试技术[M].北京:北京理工大学出版社,1993:314.
[27]Nasahiko Emi,Yasuko Suzuki,Yuichi Yamada etal.Development of thin film thermocouple for measurement of instantaneous heat flux flowing into cast iron combustion chamber wall.JASE Review,23(2002).379-382.
[28]K.G.Kreider.Thin film thermocouples for internal combustion engines,J.Vac.Sci.Technol.A 4(1986):2618-2623.
[29]钱兰,陈宁.膜温可控式表面热电偶及研制中的几个技术问题.西安公路交通大学学报,1998,18(1):67-69.
[30]沈胜强,张志千,滕叙充等.薄膜热电偶及其对燃烧室壁面瞬态温度的测量.小型内燃机,1988,No3:1-7.
[31]薛晖,李付国,黄吕权.便携式薄膜热电偶测温传感器.传感器技术,1996,No1:46-48.
[32]李付国,黄吕权,薛晖等.多层复合式薄膜热电偶的研制.科技成果·学术论文,1995,No3:6-8.
[33]陈汉平,徐维新.非金属表面温度测量的薄膜热电偶技术.工程热物理学报,1989,10(4):430-432.
[34]KennethG.Kreider,FrankDiMeo.Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers.Sensor and Actuators A.1998,69(1):46-52.
[35]KennethG.Kreider,Oreg Gillen.High temperature materials for thin-film thermocouples on silicon wafers.Thin Solid Films.2000,376(1):32-37.
[36]周生国.机械工程测试技术[M].北京:北京理工大学出版社,1993:314.
[38]唐伟忠.薄膜材料制备原理、技术及应用(第二版).北京:冶金工业出版社,2003:57-101.
[39]李学丹,万英超,姜祥祺等.真空沉积技术.杭州:浙江大学出版社,1994:68-71.
[40]顾培夫.薄膜技术.杭州:浙江大学出版社,1990:42-56.
[41]田民波,刘德令.薄膜科学与技术手册(上).北京:机械工业出版社,1991:400-441.
[42]S.Schiller etal.Reactive DC high rate sputtering as production technology.Surface &Coatings Technology.1987(33):405-423.
[43]王力衡,黄运添,郑海涛.薄膜技术.北京:清华大学出版社,1991:15-20.
[44]H.Bartzsch.Properties of Si02and Al203 films for electrical insulation applications deposited by reactive pulse magnetron sputtering.Surface and Coatings Technology,2003,174～175:774～778.
[45]曾其勇 化爆材料动态切削温度的薄膜热电偶测量原理及传感器研制:(大连理工大学博士学位论文)大连:大连理工大学2005.
[46]Xu Jun,Ma Tengcai,Lu Wenqi.A new method fpr thin film deposition -faced microwave electron cyclotron resonance plasma source enhanced direct-current magnetron sputtering..Chinese physics letters.2000,17(8):586-588.
[47]Serio B,Nika Ph Prenel J P.static and dynamic calibration of thin-film thermocouple by meansof a laser modulation technique[J].Review of Scientific Instruments,2000,71(11):4306-4313.
[48]M.Hirao.Determining temperature distribution on flank face of cutting tools.J.Mater.Shap.Technol.1989,6(3):143-148.
[49]游伯坤等.温度测量与仪表.上海:机械工业出版社,1982:153-159.
[50]三零四所.热电偶.上海:国防工业出版社,1978:90-107.
[51]黄泽铣.热电偶原理及其检定.北京:中国计量出版社.1993.270-286.
[52]曲喜新,过璧君.薄膜物理.薄膜物理.1994:80,86.
[53]黄吕权,李付国.薄膜热电偶的技术特性研究.中国机械工程.1996,7(5):34-36.
[54]陈敏,马丽.传感器特性曲线的一种拟合方法.传感器技术.2003.22(1):38-40.