激光调阻机光学系统扫描畸变及安装误差研究
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摘要
激光调阻机是激光刻蚀技术在电子加工工业中的一种应用,是集光学、精密机械、计算机控制和精密测量技术于一体的高技术的加工设备,主要用于厚薄膜电阻的微调加工。
本文介绍了透镜前双振镜二维扫描方式的激光调阻系统,阐述了激光微调的工作原理及特点;建立了激光调阻机双振镜二维扫描系统的数学模型,推导出扫描场内任意点的坐标与振镜偏转角之间的函数关系式,并分析了用简化关系式代替推导所得的函数关系式控制振镜扫描时所产生的畸变,最后提出了用理论关系式的等效关系式来控制振镜扫描,用等效关系式控制振镜扫描时不仅可以得到高精度,达到了微米量级,而且用等效关系式对振镜进行控制时,还能够实现激光调阻机的高速度要求,从而达到校正的目的。
此外,本文通过建立数学模型分析了激光调阻机光学系统的装配误差,主要包括入射光线与光学系统光轴倾斜和第二振镜与f~θ透镜非正交,并提出了利用两振镜绕转轴偏转一定的角度补偿上述安装误差的补偿方法,这对与激光调阻机今后的性能提高工作具有非常高的应用价值。
Abstract: Laser trimming machine is an application of the laser trimming technique in electronic processing industry. It is a high technique equipment that utilizes interdisciplinary technologies such as optics, fine mechanics, computer control and fine measurement. It is mainly applied to the micro-trimming of thick-&thin-film.In this paper, A pre-objective dual-galvanometer-based laser trimming system, and its trimming principle and characteristic are described. With establishing the mathematics model of dual-gavanometer scanning system of laser trimming system, the function relation between the arbitrary point's coordinate in scanning region and galvanometer's deflected angle is deduced. Then, the distortions caused by using simple function to control galvanometers instead of the ideal function are analysed. Finally, A method that use the equivalent function to control galvanometers is proposed. In this method, can realize the high accuracy, speed, efficiency.Besides, the mounting errors of the optical system of laser trimming system are analysised by establishing mathematics model. The mounting errors mainly include two sides. One is the inclination of input laser beam and the axis of optic system, the other is the disorthogonality of the second galvanometer and f-theta lens. At last, a method of revovlation galvnometers in a degree is proposed to compensated mounting errors. Mouting error compensation has very hign application to improve the performance of laser trimming system.
本文介绍了透镜前双振镜二维扫描方式的激光调阻系统,阐述了激光微调的工作原理及特点;建立了激光调阻机双振镜二维扫描系统的数学模型,推导出扫描场内任意点的坐标与振镜偏转角之间的函数关系式,并分析了用简化关系式代替推导所得的函数关系式控制振镜扫描时所产生的畸变,最后提出了用理论关系式的等效关系式来控制振镜扫描,用等效关系式控制振镜扫描时不仅可以得到高精度,达到了微米量级,而且用等效关系式对振镜进行控制时,还能够实现激光调阻机的高速度要求,从而达到校正的目的。
此外,本文通过建立数学模型分析了激光调阻机光学系统的装配误差,主要包括入射光线与光学系统光轴倾斜和第二振镜与f~θ透镜非正交,并提出了利用两振镜绕转轴偏转一定的角度补偿上述安装误差的补偿方法,这对与激光调阻机今后的性能提高工作具有非常高的应用价值。
Abstract: Laser trimming machine is an application of the laser trimming technique in electronic processing industry. It is a high technique equipment that utilizes interdisciplinary technologies such as optics, fine mechanics, computer control and fine measurement. It is mainly applied to the micro-trimming of thick-&thin-film.In this paper, A pre-objective dual-galvanometer-based laser trimming system, and its trimming principle and characteristic are described. With establishing the mathematics model of dual-gavanometer scanning system of laser trimming system, the function relation between the arbitrary point's coordinate in scanning region and galvanometer's deflected angle is deduced. Then, the distortions caused by using simple function to control galvanometers instead of the ideal function are analysed. Finally, A method that use the equivalent function to control galvanometers is proposed. In this method, can realize the high accuracy, speed, efficiency.Besides, the mounting errors of the optical system of laser trimming system are analysised by establishing mathematics model. The mounting errors mainly include two sides. One is the inclination of input laser beam and the axis of optic system, the other is the disorthogonality of the second galvanometer and f-theta lens. At last, a method of revovlation galvnometers in a degree is proposed to compensated mounting errors. Mouting error compensation has very hign application to improve the performance of laser trimming system.
引文
1.激光的工业应用.http://www.33tt.com
2.梅遂生.激光加工在电阻工业中的应用激光与红外,2001,24(1):5-10
3.国外激光产业发展现状.http://www.fswyang.nease.net
4.激光技术及产业发展之路.http://www.33tt.com
5.我国激光产业发展研究报告(二).http://www.33tt.com
6.黄永平.激光调阻机快速实时在线检测系统的研究.中科院长春光机所管藏.2002,1-5
7.刘立峰.激光调阻机光刻平台系统控制研究与设计.中科院长春光机所管藏.2003,9-11
8.胡忠谞,恽正中,杨邦朝,孙承永,梁瑞林.薄厚膜混合集成电路[M] 成都:国防工业出版社,1982.
9.[美]托普弗著 朱瑞廉译 厚膜微电子学[M] 成都:国防工业出版社,1975
10.王吉刚,董述恂.RuO2基厚膜电阻电脉冲调阻工艺研究[J].电子元件与材料.2003,22(1):42-43,45
11.王本,沈树群.激光扫描和光盘技术,北京邮电学院出版社,1990
12.陈兴海.振镜式激光打标机的研究.曲阜师范大学管藏,2003,1-8
13.万志.振镜二维激光扫描光学系统的扫描特性及其畸变校正,中科院长春光机所管藏.2000
14.惠延波,卢秉恒,冀春荣,周利民.平视场激光矢量扫描技术研究.西安工业学院学报.1996,16(31:266-270
15.王兴龙,迟泽英等.光纤共焦扫描显微镜的扫描系统畸变与校正的研究,南京理工大学学报:自然科学版 2001,25(5):512-515
16.郭飞,胡兵,应花山,洪利民.双振镜扫描几何失真的硬件校正.激光技术.2003,27(4).337-338,341
17.王兴龙 单模光纤共焦扫描显微成像系统总体设计与平面扫描技术研究,南京理工大学管藏,2002
18.万志,杜温锡.振镜二维扫描的图形畸变校正和曝光量补偿.光学精密工 程.2000,8(2):115-119
19.陈忠,刘晓东.激光振镜扫描系统的快速软件校正算法研究.华中科技大学学报:自然科学版.2003,31(5).68-69,116
20.汪会请,史玉升,黄树槐.三维振镜激光扫描系统的控制算法及其应用.华中科技大学学报:自然科学版.2003,31(5)70-71
21.刘才明.激光大屏幕显示系统中振镜扫描的工作原理及图像失真研究,中国激光.2003,30(3):263-266
22.虞孝舜.双振镜扫描几何畸变的校正.激光与红外.1998,28(1):45-47
23.杨少辰,张运刚.对构成闭环振镜式光学扫描系统的研究.激光与红外.1997,27(5):297-300
24.杨少辰,宫润泽.振镜式光束扫描/偏转系统及成像过程的研究,激光与红外.1997,27(2):95-99
25.严淑敏,龚焕明.X—Y振镜扫描失真及其校正应用激光.1990,10(6):257-258
26.吴大元,陈守川.激光大屏幕显示中振镜扫描图象失真的研究.中国激光.1989,16(8):507-509
27. Peter E. Verboven. Distortion Correction Formulas For Pre-objective Dual Galvanometer Laser Scanning. Appl. Opt. 1988, 27(20): 4172-4173
28. PHYS 4220 Optical System Design, Georgia Tech School of Physics, 2004, 2: 1-25
29. Jonathan S. Ehrmann. Optics For Vector Scanning. SPIE, 1454. 1991: 245-255
2.梅遂生.激光加工在电阻工业中的应用激光与红外,2001,24(1):5-10
3.国外激光产业发展现状.http://www.fswyang.nease.net
4.激光技术及产业发展之路.http://www.33tt.com
5.我国激光产业发展研究报告(二).http://www.33tt.com
6.黄永平.激光调阻机快速实时在线检测系统的研究.中科院长春光机所管藏.2002,1-5
7.刘立峰.激光调阻机光刻平台系统控制研究与设计.中科院长春光机所管藏.2003,9-11
8.胡忠谞,恽正中,杨邦朝,孙承永,梁瑞林.薄厚膜混合集成电路[M] 成都:国防工业出版社,1982.
9.[美]托普弗著 朱瑞廉译 厚膜微电子学[M] 成都:国防工业出版社,1975
10.王吉刚,董述恂.RuO2基厚膜电阻电脉冲调阻工艺研究[J].电子元件与材料.2003,22(1):42-43,45
11.王本,沈树群.激光扫描和光盘技术,北京邮电学院出版社,1990
12.陈兴海.振镜式激光打标机的研究.曲阜师范大学管藏,2003,1-8
13.万志.振镜二维激光扫描光学系统的扫描特性及其畸变校正,中科院长春光机所管藏.2000
14.惠延波,卢秉恒,冀春荣,周利民.平视场激光矢量扫描技术研究.西安工业学院学报.1996,16(31:266-270
15.王兴龙,迟泽英等.光纤共焦扫描显微镜的扫描系统畸变与校正的研究,南京理工大学学报:自然科学版 2001,25(5):512-515
16.郭飞,胡兵,应花山,洪利民.双振镜扫描几何失真的硬件校正.激光技术.2003,27(4).337-338,341
17.王兴龙 单模光纤共焦扫描显微成像系统总体设计与平面扫描技术研究,南京理工大学管藏,2002
18.万志,杜温锡.振镜二维扫描的图形畸变校正和曝光量补偿.光学精密工 程.2000,8(2):115-119
19.陈忠,刘晓东.激光振镜扫描系统的快速软件校正算法研究.华中科技大学学报:自然科学版.2003,31(5).68-69,116
20.汪会请,史玉升,黄树槐.三维振镜激光扫描系统的控制算法及其应用.华中科技大学学报:自然科学版.2003,31(5)70-71
21.刘才明.激光大屏幕显示系统中振镜扫描的工作原理及图像失真研究,中国激光.2003,30(3):263-266
22.虞孝舜.双振镜扫描几何畸变的校正.激光与红外.1998,28(1):45-47
23.杨少辰,张运刚.对构成闭环振镜式光学扫描系统的研究.激光与红外.1997,27(5):297-300
24.杨少辰,宫润泽.振镜式光束扫描/偏转系统及成像过程的研究,激光与红外.1997,27(2):95-99
25.严淑敏,龚焕明.X—Y振镜扫描失真及其校正应用激光.1990,10(6):257-258
26.吴大元,陈守川.激光大屏幕显示中振镜扫描图象失真的研究.中国激光.1989,16(8):507-509
27. Peter E. Verboven. Distortion Correction Formulas For Pre-objective Dual Galvanometer Laser Scanning. Appl. Opt. 1988, 27(20): 4172-4173
28. PHYS 4220 Optical System Design, Georgia Tech School of Physics, 2004, 2: 1-25
29. Jonathan S. Ehrmann. Optics For Vector Scanning. SPIE, 1454. 1991: 245-255