ZrTiN涂层刀具的制备及切削性能研究
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摘要
三元涂层引入了两种过渡金属,结合固溶强化的机制使得涂层在硬度、结合力、耐磨性和高温抗氧化性等方面具有比二元涂层更优越的性能。本文成功开发出三元ZrTiN系列涂层刀具,并对其制备工艺、物理机械性能、切削性能和磨损机理进行了系统研究。
采用脉冲偏压辅助沉积多弧离子镀并结合离子轰击工艺在YT15刀具基体上制备出ZTG(ZrTiN/ZrTi/Ti+YT15)、ZTF(ZrN/TiN/Ti+YT15)和ZT(ZrTiN+YT15)三种涂层刀具,系统分析了不同工艺参数对涂层性能的影响,并确定了各涂层刀具的最佳制备工艺参数。对于ZTG涂层刀具为：Zr靶电流110 A、Ti靶电流70 A、氮气流量140 sccm、基体负偏压250 v、沉积温度200℃、沉积时间75 min,过渡层的基体负偏压150 V,沉积时间5min；对于ZT涂层刀具为：Zr靶电流110 A,Ti靶电流70 A,氮气流量100 sccm,沉积时间75 min,沉积温度200℃,基体负偏压250 v；对于ZTF涂层刀具为：Zr靶电流为90 A,Ti靶电流为80 A,氮气流量140 sccm,沉积时间75 min,沉积温度200℃,基体负偏压250 v。
对ZrTiN系列涂层刀具的切削性能进行车削试验研究,并与TiN涂层刀具和未涂层YT15刀具对比,结果发现：各向力随着各工艺参数的增加逐渐增大,在同样切削条件下,按照切削力从小到大的顺序,五种刀具可以排序为：ZTGTN>ZT>ZTG>ZTF;加工表面粗糙度受切削速度和进给量的影响要明显于背吃刀量,相同切削参数条件下,五种刀具的加工表面粗糙度按从大到小的顺序可以排列为：YT15>ZTF>ZT>TN>ZTG。
对ZrTiN系列涂层刀具的磨损性能和磨损机理进行试验研究,并与TiN涂层刀具和未涂层YT15刀具进行对比。结果表明：五种刀具后刀面的磨损量从大到小可以排序为：YT15>ZT>ZTF>TN>ZTG; ZrTiN系列涂层刀具的后刀面以粘着磨损和边界磨损为主,前刀面以粘着磨损和磨粒磨损为主,并伴有涂层剥落和微崩刃；而YT15刀具以粘着磨损为主。结合有限元模拟的方法研究了刀具的应力和温度,发现ZrTiN涂层能够明显降低刀具的切削温度和应力,且各刀具磨损的区域正是刀具应力和温度最大值所集中的位置。
The introduction of two transition metal in ternary coatings, combined with the mechanism of solid solution strengthening which makes the coatings have better properties than the binary coatings in hardness, adhesion, wear resistance and elevated temperature oxidation resistance. A series of new ZrTiN coated tools were successfully developed on the basis of this theory, and its preparation process, physical and mechanical properties, cutting performance, wear behaviors and mechanisms were studied systematically.
The ZTG(ZrTiN/ZrTi/Ti+YT15), ZTF(ZrN/TiN/Ti+YT15) and ZT(ZrTiN+YT15) three coatined tools were prepared on YT15 substrates with pulsed bias assisted with arc ion plating technique combined and ion bomdardment. The coated tools'hardness, adhesion strength and thickness influenced by the titanium and zirconium targets' current, substrate bias, deposition temperature, deposition time and nitrogen flow were systematically studied. The optimal preparation processes were optimized. For ZTG coated tools:Zr target current is 110 A, Ti target current:70 A, nitrogen flow:140 sccm, substrate bias:250 V, deposition temperature:200℃, deposition time:75 minutes, the substrate bias for transition layer:150 V and deposition time of the layer:5 minutes; for ZT coated tools:Zr target current:110 A, Ti target current:70 A, nitrogen flow:100 sccm, deposition time:75 minutes, deposition temperature:200℃, the substrate bias: 250 V; for ZTF coated tools:Zr target current:90 A, Ti target current:80 A, nitrogen flow rate:140 sccm, deposition time:75 minutes, deposition temperature:200℃, the substrate bias:250 V.
A series of ZrTiN coated tools' cutting performance were studied by testing, and compared with TiN coated tools and uncoated YT15 tools. The results showed that three components of cutting force increased as the cutting speed increased, according to the size of the cutting force, they can be arranged in the order of ZTGZTF>ZT>TN>ZTG under same cutting parameters.
The ZrTiN series of coated tools' wear performance and mechanism were studied by testing, and compared with TiN coated tools and YT15 tools. It is indicated that the rate of flank wear in descending order is:ZTG
采用脉冲偏压辅助沉积多弧离子镀并结合离子轰击工艺在YT15刀具基体上制备出ZTG(ZrTiN/ZrTi/Ti+YT15)、ZTF(ZrN/TiN/Ti+YT15)和ZT(ZrTiN+YT15)三种涂层刀具,系统分析了不同工艺参数对涂层性能的影响,并确定了各涂层刀具的最佳制备工艺参数。对于ZTG涂层刀具为：Zr靶电流110 A、Ti靶电流70 A、氮气流量140 sccm、基体负偏压250 v、沉积温度200℃、沉积时间75 min,过渡层的基体负偏压150 V,沉积时间5min；对于ZT涂层刀具为：Zr靶电流110 A,Ti靶电流70 A,氮气流量100 sccm,沉积时间75 min,沉积温度200℃,基体负偏压250 v；对于ZTF涂层刀具为：Zr靶电流为90 A,Ti靶电流为80 A,氮气流量140 sccm,沉积时间75 min,沉积温度200℃,基体负偏压250 v。
对ZrTiN系列涂层刀具的切削性能进行车削试验研究,并与TiN涂层刀具和未涂层YT15刀具对比,结果发现：各向力随着各工艺参数的增加逐渐增大,在同样切削条件下,按照切削力从小到大的顺序,五种刀具可以排序为：ZTG
对ZrTiN系列涂层刀具的磨损性能和磨损机理进行试验研究,并与TiN涂层刀具和未涂层YT15刀具进行对比。结果表明：五种刀具后刀面的磨损量从大到小可以排序为：YT15>ZT>ZTF>TN>ZTG; ZrTiN系列涂层刀具的后刀面以粘着磨损和边界磨损为主,前刀面以粘着磨损和磨粒磨损为主,并伴有涂层剥落和微崩刃；而YT15刀具以粘着磨损为主。结合有限元模拟的方法研究了刀具的应力和温度,发现ZrTiN涂层能够明显降低刀具的切削温度和应力,且各刀具磨损的区域正是刀具应力和温度最大值所集中的位置。
The introduction of two transition metal in ternary coatings, combined with the mechanism of solid solution strengthening which makes the coatings have better properties than the binary coatings in hardness, adhesion, wear resistance and elevated temperature oxidation resistance. A series of new ZrTiN coated tools were successfully developed on the basis of this theory, and its preparation process, physical and mechanical properties, cutting performance, wear behaviors and mechanisms were studied systematically.
The ZTG(ZrTiN/ZrTi/Ti+YT15), ZTF(ZrN/TiN/Ti+YT15) and ZT(ZrTiN+YT15) three coatined tools were prepared on YT15 substrates with pulsed bias assisted with arc ion plating technique combined and ion bomdardment. The coated tools'hardness, adhesion strength and thickness influenced by the titanium and zirconium targets' current, substrate bias, deposition temperature, deposition time and nitrogen flow were systematically studied. The optimal preparation processes were optimized. For ZTG coated tools:Zr target current is 110 A, Ti target current:70 A, nitrogen flow:140 sccm, substrate bias:250 V, deposition temperature:200℃, deposition time:75 minutes, the substrate bias for transition layer:150 V and deposition time of the layer:5 minutes; for ZT coated tools:Zr target current:110 A, Ti target current:70 A, nitrogen flow:100 sccm, deposition time:75 minutes, deposition temperature:200℃, the substrate bias: 250 V; for ZTF coated tools:Zr target current:90 A, Ti target current:80 A, nitrogen flow rate:140 sccm, deposition time:75 minutes, deposition temperature:200℃, the substrate bias:250 V.
A series of ZrTiN coated tools' cutting performance were studied by testing, and compared with TiN coated tools and uncoated YT15 tools. The results showed that three components of cutting force increased as the cutting speed increased, according to the size of the cutting force, they can be arranged in the order of ZTG
The ZrTiN series of coated tools' wear performance and mechanism were studied by testing, and compared with TiN coated tools and YT15 tools. It is indicated that the rate of flank wear in descending order is:ZTG
引文
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