标准球面透镜组辅助装调的寻优模型及技术研究
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摘要
标准球面透镜组能产生峰谷值优于λ／20的球面波，是微小光学系统干涉研究项目重要的研究内容之一。标准球面透镜组有取代球面样板的作用，且覆盖球面半径范围广，因此它的研制及装调技术成为光学测试领域急需解决的问题之一。本文主要深入研究系列标准球面透镜组计算机辅助装调技术中的若干问题。
本文在分析标准球面透镜组的装配时若干对光学质量的影响因素基础上，开展了以下六个方面的研究：(1)对标准球面透镜组，不采用几何象差作评价函数，分析与论证Zernike多项式系数项构成寻优模型评价函数的可行性。(2)建立标准球面透镜组的寻优模型，并讨论优化算法。(3)研究Zernike多项式系数与结构失调量之间的函数关系，分析标准球面透镜组计算机辅助装调的可行性；根据系列标准球面透镜组的具体结构特点，在ZEMAX平台上编写自动寻优求解的程序。(4)对标准球面透镜组辅助装调中寻优求解进行软件实例模拟，模拟模型对加工误差、装配失调的效果。(5)建立实验装置，实际研究标准球面透镜组的计算机辅助装调方法，根据球面波的实测结果，求解待调系统的可行的调整量，文中给出相应的理论分析及实验数据和曲线。
Reference lens, which can produce spherical wave front whose optical quality is better than ?/20 by peak-valley value in wavelength, is an important part of tiny interferometry system project in measurement and testing. It can be used in wide range of radii so that the development of reference lens is becoming an urgent task to be solved. So a computer-aided alignment method for a series of reference lens is studied in detail in this paper.
Based on analyzing the optical quality affecting factors and optical design, the followings are described in detail in this paper: (1) To reference lens, analysising and demonstrating the function of Zernike Polynomial but not aberration; (2) Building the mathematical model for the misalignment reference lens, and discussing the idiographic arithmetic; (3) Based on analyzing the Zernike Polynomial, dissussing the relation of the Zernike Polynimial and the misalignment of reference lens, and choose sensitive structure parameters to optical quality would be determined according to their tolerance data, then programming the alignment software compiled on ZEMAX platforms; (4) Compiled the alignment software to calculating the misalignment value; (5) Experiments are made to examine the computer-aided alignment method and then calculating the function of misalignment value for computer-aided alignment. The theoretical and experimental data and plots are given in the paper.
本文在分析标准球面透镜组的装配时若干对光学质量的影响因素基础上，开展了以下六个方面的研究：(1)对标准球面透镜组，不采用几何象差作评价函数，分析与论证Zernike多项式系数项构成寻优模型评价函数的可行性。(2)建立标准球面透镜组的寻优模型，并讨论优化算法。(3)研究Zernike多项式系数与结构失调量之间的函数关系，分析标准球面透镜组计算机辅助装调的可行性；根据系列标准球面透镜组的具体结构特点，在ZEMAX平台上编写自动寻优求解的程序。(4)对标准球面透镜组辅助装调中寻优求解进行软件实例模拟，模拟模型对加工误差、装配失调的效果。(5)建立实验装置，实际研究标准球面透镜组的计算机辅助装调方法，根据球面波的实测结果，求解待调系统的可行的调整量，文中给出相应的理论分析及实验数据和曲线。
Reference lens, which can produce spherical wave front whose optical quality is better than ?/20 by peak-valley value in wavelength, is an important part of tiny interferometry system project in measurement and testing. It can be used in wide range of radii so that the development of reference lens is becoming an urgent task to be solved. So a computer-aided alignment method for a series of reference lens is studied in detail in this paper.
Based on analyzing the optical quality affecting factors and optical design, the followings are described in detail in this paper: (1) To reference lens, analysising and demonstrating the function of Zernike Polynomial but not aberration; (2) Building the mathematical model for the misalignment reference lens, and discussing the idiographic arithmetic; (3) Based on analyzing the Zernike Polynomial, dissussing the relation of the Zernike Polynimial and the misalignment of reference lens, and choose sensitive structure parameters to optical quality would be determined according to their tolerance data, then programming the alignment software compiled on ZEMAX platforms; (4) Compiled the alignment software to calculating the misalignment value; (5) Experiments are made to examine the computer-aided alignment method and then calculating the function of misalignment value for computer-aided alignment. The theoretical and experimental data and plots are given in the paper.
引文
1 袁旭沧．现代光学设计方法．第1版．北京．北京理工大学出版社，1995
2 徐金镛，孙培家．光学设计．第1版．北京．国防工业出版社，1989
3 郁道银，谈恒英．工程光学．第1版．北京．机械工业出版社，2000
4 马小忠．象差变化量表在光学设计中的应用．光仪技术．2000(4)：8—11
5 李玉林．在光学系统的优化设计中用波面象差构成评价函数的一种改进方法．光仪技术．1990(3)：6—11
6 Gao Zhishan, Chen Lei. Computer aided alignment for a reference transmission sphere of an interferometer. OE. Vol.50: 1786—1789
7 Gao Zhishan, Chen Jinbang. Tolerance analysis and test of focus'coincidence with last surface's curvature center for reference lenses. SPIE. Vol.4927: 186—189
8 ZEMAX. Optical Design Program User's Guide Version 9.0. Focus-Software Inc.
9 萧泽新．工程光学设计．第1版．北京．电子工业出版社，2003
10 李林，安连生．计算机辅助光学设计的理论与应用．第1版．北京．国防工业出版社，2002
11 Ira M.Egdall, "Manufacture of a Three-Mirror Wide-field Optical System", Opt. Eng. Vol. 24(2)P285, 1985
12 George N.Lawrence and Weng W.Chow, "Wave-front Tomography by Zemike Polynomial Decomposition", Optics Letters, Vol.9 No.7, P267,1984
13 Hwan J.Jeong, George N.Lawrence and Kie B.Nahm, "Auto-alignment of a Three-mirror Off-axis Telescope by Reverse Optimization and End-to-end Aberration Measurements", SPIE, Vol.818, P419,1987
14 Hwan J.Jeong and George N.Lawrence, "Simultaneous Determination of Misalignment and Mirror Surface Figure Error of a Three-mirror Off-axis Telescope by End-to-end Measurements and Reverse Optimization: Numerical Analysis and Simulation", SPIE, Vol.966, P341,1988
15 J.W.Figoski,T.E.Shrode,G.F.Moore,"Computer-aided Alignment of a Wide-field, Three-mirror, Unobscured, High-resolution Sensor" 1989, SPIE. Vol. 1049: 166
16 Daniel Leigh, Dov Freiman. Computer Aided Optical System Alignment With CODE V. 1988. SPIE. Vol.1038: 288—294
17 Michael R.Descour, Mark R.Willer. Misalignment modes in high-performance optical
systems. 2000. OE. Vol.39: 1737—1747
18 郭培基，余景池．柱面镜组的计算机辅助调校．光学技术．2000(4)：323—324，328
19 张斌，韩昌元．离轴非球面三反射镜光学系统装调中计算机优化方法的研究．光学学报．2001(1)：54
20 Zhang Bin, Zhang Xiaohui. Investigation on computer-aided alignment of the complex optical system. SPIE. Vol. 4231: 67—72
21 Lieguo Liang, Genrui Cao. Study on method of measurement for high precision aspherical mirrors. SPIE. Vol. 4231: 558—561
22 Liu Huilan, Xu Hongqiang. A computer-aided alignment method for large and complex optical system. SPIE. Vol.4231: 73—78
23 姚汉民，魏全忠．亚微米投影光刻物镜的光学装校．光学技术．1998(3)：63—64
24 郑阳．光学零件制造的系统装配公差计算方法研究．第1版．成都．中科院光电技术研究所，1993
25 朱郁葱．标准光学面形的建立与绝对检测．计量学报．1989，10(4)：285—289
26 邱车培．标准镜头的光学设计．光学技术．1991．(5)：27—31
27 莫卫东．Zemike多项式拟合干涉面方法研究．高速摄影与光子学．1991(1)：389—396
28 洪霞．一种干涉图波面拟合的新方法．第五届光学测试学术讨论会．1993
29 惠梅．运用泽尼克多项式进行物面波前数据拟合．光子学报．1999(12)：1113—1116
30 Matthew P.Rimmer. A computer aided optical alignment method. SPIE. 1990. Vol.2171. 363—368
31 张景文．高精度航空摄影镜头的胶合和定心．光学技术．1998(3)：76-77
32 唐波．部分相干成象的模拟计算方法．光电工程．1996(2)：20-27
33 陈进榜．高精度、大口径平面波象差标准：移相式平面干涉仪．光学学报．1995(4)：480-485
34 谭宇．透镜的偏心差与中心偏．云光技术．1992(3)：17-20
35 王淑荣．用ZYGO数字干涉仪检测非球面的新方法．光学机械．1992(1)：26-29
36 李全胜．光学自由曲面计算机控制加工中的五项形面检测研究．光学精密工程．1999(3)：97-102
37 尹燕．非共轴、非球面光学系统计算软件设计．光电工程．1991(1)：12-20
38 范志刚．干涉条纹图的处理方法的研究．光学技术．2000(3)：323-324，328
39 Sergei A.Rodionov, Nikolay B.Voznessenski. Principles and Sofware for Photolithography Optical System Alignment and Tolerancing. SPIE. Vol. 3780: 180—190
40 Heui, Joe Phk. Computer-aided measurement and compensation system for focal length of lenses in camera manufacture based on the MTF performance using the line CCD sensor. Int.J.Mach.Tools Manuf. 2000(8): Vol 40, 493-511
41 D.Ralea. New method for automati optimization of glass combination in optical system working in the visible range. SPIE. 1998: Vol 3405, 1143-1149
2 徐金镛，孙培家．光学设计．第1版．北京．国防工业出版社，1989
3 郁道银，谈恒英．工程光学．第1版．北京．机械工业出版社，2000
4 马小忠．象差变化量表在光学设计中的应用．光仪技术．2000(4)：8—11
5 李玉林．在光学系统的优化设计中用波面象差构成评价函数的一种改进方法．光仪技术．1990(3)：6—11
6 Gao Zhishan, Chen Lei. Computer aided alignment for a reference transmission sphere of an interferometer. OE. Vol.50: 1786—1789
7 Gao Zhishan, Chen Jinbang. Tolerance analysis and test of focus'coincidence with last surface's curvature center for reference lenses. SPIE. Vol.4927: 186—189
8 ZEMAX. Optical Design Program User's Guide Version 9.0. Focus-Software Inc.
9 萧泽新．工程光学设计．第1版．北京．电子工业出版社，2003
10 李林，安连生．计算机辅助光学设计的理论与应用．第1版．北京．国防工业出版社，2002
11 Ira M.Egdall, "Manufacture of a Three-Mirror Wide-field Optical System", Opt. Eng. Vol. 24(2)P285, 1985
12 George N.Lawrence and Weng W.Chow, "Wave-front Tomography by Zemike Polynomial Decomposition", Optics Letters, Vol.9 No.7, P267,1984
13 Hwan J.Jeong, George N.Lawrence and Kie B.Nahm, "Auto-alignment of a Three-mirror Off-axis Telescope by Reverse Optimization and End-to-end Aberration Measurements", SPIE, Vol.818, P419,1987
14 Hwan J.Jeong and George N.Lawrence, "Simultaneous Determination of Misalignment and Mirror Surface Figure Error of a Three-mirror Off-axis Telescope by End-to-end Measurements and Reverse Optimization: Numerical Analysis and Simulation", SPIE, Vol.966, P341,1988
15 J.W.Figoski,T.E.Shrode,G.F.Moore,"Computer-aided Alignment of a Wide-field, Three-mirror, Unobscured, High-resolution Sensor" 1989, SPIE. Vol. 1049: 166
16 Daniel Leigh, Dov Freiman. Computer Aided Optical System Alignment With CODE V. 1988. SPIE. Vol.1038: 288—294
17 Michael R.Descour, Mark R.Willer. Misalignment modes in high-performance optical
systems. 2000. OE. Vol.39: 1737—1747
18 郭培基，余景池．柱面镜组的计算机辅助调校．光学技术．2000(4)：323—324，328
19 张斌，韩昌元．离轴非球面三反射镜光学系统装调中计算机优化方法的研究．光学学报．2001(1)：54
20 Zhang Bin, Zhang Xiaohui. Investigation on computer-aided alignment of the complex optical system. SPIE. Vol. 4231: 67—72
21 Lieguo Liang, Genrui Cao. Study on method of measurement for high precision aspherical mirrors. SPIE. Vol. 4231: 558—561
22 Liu Huilan, Xu Hongqiang. A computer-aided alignment method for large and complex optical system. SPIE. Vol.4231: 73—78
23 姚汉民，魏全忠．亚微米投影光刻物镜的光学装校．光学技术．1998(3)：63—64
24 郑阳．光学零件制造的系统装配公差计算方法研究．第1版．成都．中科院光电技术研究所，1993
25 朱郁葱．标准光学面形的建立与绝对检测．计量学报．1989，10(4)：285—289
26 邱车培．标准镜头的光学设计．光学技术．1991．(5)：27—31
27 莫卫东．Zemike多项式拟合干涉面方法研究．高速摄影与光子学．1991(1)：389—396
28 洪霞．一种干涉图波面拟合的新方法．第五届光学测试学术讨论会．1993
29 惠梅．运用泽尼克多项式进行物面波前数据拟合．光子学报．1999(12)：1113—1116
30 Matthew P.Rimmer. A computer aided optical alignment method. SPIE. 1990. Vol.2171. 363—368
31 张景文．高精度航空摄影镜头的胶合和定心．光学技术．1998(3)：76-77
32 唐波．部分相干成象的模拟计算方法．光电工程．1996(2)：20-27
33 陈进榜．高精度、大口径平面波象差标准：移相式平面干涉仪．光学学报．1995(4)：480-485
34 谭宇．透镜的偏心差与中心偏．云光技术．1992(3)：17-20
35 王淑荣．用ZYGO数字干涉仪检测非球面的新方法．光学机械．1992(1)：26-29
36 李全胜．光学自由曲面计算机控制加工中的五项形面检测研究．光学精密工程．1999(3)：97-102
37 尹燕．非共轴、非球面光学系统计算软件设计．光电工程．1991(1)：12-20
38 范志刚．干涉条纹图的处理方法的研究．光学技术．2000(3)：323-324，328
39 Sergei A.Rodionov, Nikolay B.Voznessenski. Principles and Sofware for Photolithography Optical System Alignment and Tolerancing. SPIE. Vol. 3780: 180—190
40 Heui, Joe Phk. Computer-aided measurement and compensation system for focal length of lenses in camera manufacture based on the MTF performance using the line CCD sensor. Int.J.Mach.Tools Manuf. 2000(8): Vol 40, 493-511
41 D.Ralea. New method for automati optimization of glass combination in optical system working in the visible range. SPIE. 1998: Vol 3405, 1143-1149