微泵的理论建模及静动态特性分析
摘要
如今，在微机械电子系统(MEMS)领域，人们对微流体系统的研究逐渐升温，即化学分析系统和微制剂系统。微泵是微流体系统的基本组件之一。最近几年研制出几种基于不同的驱动原理和用途的微泵，有的已经进入实用阶段。
本文对微泵进行了理论分析，建立了微泵模型的基本方程，求出了流量、压力。建立了静电、压电驱动的微泵薄膜变形的模型，推导出了圆形薄板固有频率。
提出了一种双腔微泵结构设计方案，这种泵分为上下两个泵腔，上面泵腔由腔壁与上下两层薄膜围成，每层薄膜上都有一层PZT片；而下面泵腔则由腔壁与围成上面泵腔的下层硅薄膜及一层玻璃围成，出入口处采用环形阀门结构，泵膜和阀片的材料为硅。泵体半径为3mm，泵膜半径为2mm，泵膜厚度为5μm，PZT片厚度为10μm，泵体高度为1000μm，方波驱动电压为50V,驱动频率为4000Hz。
建立了微泵膜片的有限元模型，采用直接耦合法模拟分析了微泵膜片在压电驱动下产生的形变和由此引起的微泵腔体体积的变化，得出了膜片厚度、形状、和压电驱动电压对微泵腔体体积变化的影响。微泵膜片的动态特性与微泵的工作效率密切相关，本文得出了膜片振动的固有频率与膜片厚度之间的关系，并进行了模态分析、瞬态动力学分析、谐响应分析。微泵的流量和压力是微泵的重要工作参数，应用有限元流固耦合分析对流体进行模拟，经过分析计算，得到微泵的输出流量为145.5μl/min，并模拟出流速和压力的变化情况，从而较为全面的认识了微泵系统的流体特性。等效电路方法是一种建立微系统模型的方式，对微泵系统进行等效电路模拟，得出微泵输出压力以及流量变化情况。序贯耦合法是有限元耦合分析方法之一，适用于静电—结构耦合场。应用序贯耦合法对静电驱动微泵进行模拟分析，得出了膜片厚度、驱动电压以及泵腔高度的变化对泵腔体积变化的影响，研究结果为静电驱动的微泵结构设计提供了依据，具有一定的参考价值。
Today, there is growing interest in research on microfluidic systems, e.g., for chemical analysis systems and microdosage systems. One of the basic components in microfluidic systems is micropumps. During recent years several different micropumps have been presented based on different pump principles and using different actuation principles, some micropumps have come into practice.
This thesis analyzed theory of micropump and built the basic equation of micropump model, solved the flux and pressure of micropump. This thesis built the model of the distortion of the electrostatic and piezoelectric micropump, resolved the inherent frequency of the circular film.
In this thesis, the design of a kind of two cavities micropump was put forward. The micropump is divided into two cavities. The cavity above is composed of the wall of cavities and two layers films lies up and down, each of them has a layer of PZT chip. The cavities underside is composed of the wall of cavities, the film and a layer of class. There is circular valves lies in the import and export, and the material of the micropump films and the valves is silicon. The radius of the micropump is 3mm, the radius of the films of micropump is 2mm, the thickness of the films of the micropump is 5 m, the thickness of the PZT chip is 10 m, the tall of the micropump is 1000 m, the drive voltage is 50V, the drive frequency of the micropump is 4000Hz.
This thesis built the model of micropump, the deformation of the micropump membrane and the volume change of the micropump chamber under piezoelectric-drive were simulated by finite element method (FEM). The effects of the membrane thickness, shape and piezoelectric voltage on the volume change of membrane were analyzed. The relation between intrinsic frequency and membrane thickness was also discussed. The
output flux of the micropump, which is 145. 5 l/min. The change of fluid velocity and pressure of the micropump was also simulated, thus we could recognize the property of the liquid of the microsystems more completely. The equivalent circuit method is a way of building micro system model. The thesis simulated the micropump system with the equivalent circuit method, worked out the change of output pressure and flux of the micropump. The sequential coupling analysis method is one of the FEM analysis method, which is suit of electrostatic-structural coupled-field analysis. The thesis applied the sequential coupling analysis method to simulate the electrostatic-drive micropump. The effects of the membrane thickness, shape and electrostatic voltage on the volume change of membrane were analyzed. The analysis results provided foundation for the structural design of the electrostatic-drive micropump and have some reference value.
本文对微泵进行了理论分析，建立了微泵模型的基本方程，求出了流量、压力。建立了静电、压电驱动的微泵薄膜变形的模型，推导出了圆形薄板固有频率。
提出了一种双腔微泵结构设计方案，这种泵分为上下两个泵腔，上面泵腔由腔壁与上下两层薄膜围成，每层薄膜上都有一层PZT片；而下面泵腔则由腔壁与围成上面泵腔的下层硅薄膜及一层玻璃围成，出入口处采用环形阀门结构，泵膜和阀片的材料为硅。泵体半径为3mm，泵膜半径为2mm，泵膜厚度为5μm，PZT片厚度为10μm，泵体高度为1000μm，方波驱动电压为50V,驱动频率为4000Hz。
建立了微泵膜片的有限元模型，采用直接耦合法模拟分析了微泵膜片在压电驱动下产生的形变和由此引起的微泵腔体体积的变化，得出了膜片厚度、形状、和压电驱动电压对微泵腔体体积变化的影响。微泵膜片的动态特性与微泵的工作效率密切相关，本文得出了膜片振动的固有频率与膜片厚度之间的关系，并进行了模态分析、瞬态动力学分析、谐响应分析。微泵的流量和压力是微泵的重要工作参数，应用有限元流固耦合分析对流体进行模拟，经过分析计算，得到微泵的输出流量为145.5μl/min，并模拟出流速和压力的变化情况，从而较为全面的认识了微泵系统的流体特性。等效电路方法是一种建立微系统模型的方式，对微泵系统进行等效电路模拟，得出微泵输出压力以及流量变化情况。序贯耦合法是有限元耦合分析方法之一，适用于静电—结构耦合场。应用序贯耦合法对静电驱动微泵进行模拟分析，得出了膜片厚度、驱动电压以及泵腔高度的变化对泵腔体积变化的影响，研究结果为静电驱动的微泵结构设计提供了依据，具有一定的参考价值。
Today, there is growing interest in research on microfluidic systems, e.g., for chemical analysis systems and microdosage systems. One of the basic components in microfluidic systems is micropumps. During recent years several different micropumps have been presented based on different pump principles and using different actuation principles, some micropumps have come into practice.
This thesis analyzed theory of micropump and built the basic equation of micropump model, solved the flux and pressure of micropump. This thesis built the model of the distortion of the electrostatic and piezoelectric micropump, resolved the inherent frequency of the circular film.
In this thesis, the design of a kind of two cavities micropump was put forward. The micropump is divided into two cavities. The cavity above is composed of the wall of cavities and two layers films lies up and down, each of them has a layer of PZT chip. The cavities underside is composed of the wall of cavities, the film and a layer of class. There is circular valves lies in the import and export, and the material of the micropump films and the valves is silicon. The radius of the micropump is 3mm, the radius of the films of micropump is 2mm, the thickness of the films of the micropump is 5 m, the thickness of the PZT chip is 10 m, the tall of the micropump is 1000 m, the drive voltage is 50V, the drive frequency of the micropump is 4000Hz.
This thesis built the model of micropump, the deformation of the micropump membrane and the volume change of the micropump chamber under piezoelectric-drive were simulated by finite element method (FEM). The effects of the membrane thickness, shape and piezoelectric voltage on the volume change of membrane were analyzed. The relation between intrinsic frequency and membrane thickness was also discussed. The
output flux of the micropump, which is 145. 5 l/min. The change of fluid velocity and pressure of the micropump was also simulated, thus we could recognize the property of the liquid of the microsystems more completely. The equivalent circuit method is a way of building micro system model. The thesis simulated the micropump system with the equivalent circuit method, worked out the change of output pressure and flux of the micropump. The sequential coupling analysis method is one of the FEM analysis method, which is suit of electrostatic-structural coupled-field analysis. The thesis applied the sequential coupling analysis method to simulate the electrostatic-drive micropump. The effects of the membrane thickness, shape and electrostatic voltage on the volume change of membrane were analyzed. The analysis results provided foundation for the structural design of the electrostatic-drive micropump and have some reference value.
引文
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[2] 邵培革，王立鼎．微机械元件和仪器新近展[J]．光学精密工程，7(1)1999：10—15
[3] 才海男，马秀兰，李鸥生等．微机械技术发展现状[J]．哈尔滨工业大学学报，6(29)1997：57—61
[4] 赵志诚．微电子机械技术的现状与发展[J]．仪表技术与传感器，1997，6：1-3
[5] Government of United States of America. Report of the national critical technologies Panel[M]. 1991, 3: 102-110
[6] 王立鼎．微型机械研究的现状及展望[J]．科技导报，1993，12：45-45
[7] 干东英，王立鼎．微型机械的现状与发展[J]．机械工程学报，30(2)1994：1-8
[8] KeithW. Brendley. Military applications microelectromechanical systems[J]. RAND. 1993: 43-45
[9] H.T.G.VAN LINTEL. A piezoelectric micropump based on micromaching of silicon [J]. Sensors and Actuators,(15) 1988:153-167
[10] Christopher J Morris and K Forster. Optimization of a circular piezoelectric bimorph for a micropump driver[J]. J. Micromech.Microeng,(10)2000:459-465
[11] H.Q.Li,D.C.Roberts,J.L.Sten, etc. A high frequency high flow rate piezo- electrically driven MEMS micropump[J]. Proceedings IEEE Solid State Sensors Workshop, Hilton Head. June 2000:56-60
[12] Linneman R., Woias P. ,Senfft C.-D.,Ditterich J.A. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases[J].IEEE 11th International Workshop on Micro Eletro Mechanical Systems(MEMS'98), Heidelberg, Germany, Jan. 25-29,1998: 532-537
[13] Michael koch etal. A novel micromachined pump based on thick-film pizeoelectricactuation[J]. Sensors and Actuators, 1998, A70: 98-103
[14] R.Zengerle etal. A bidirectional silicon micropump[J]. Sensors and Actuators, 1995,A50: 81-86
[15] STEPHEN F.BART. Microfabricated electrohydrodynamic pumps[J]. Sensors and Actuators, A21-A23 (1990):193-197
[16] Si-Hong Ahn etal. A micromachined electrohydrodynamic pump[J]. Sensors and Actuators, 1995, A50: 81-86
[17] J. Darabi, M.M.Ohadi, and D.DeVoe. An electrohydrodynamic polarization micropump for electronic cooling[J]. Journal of microelectromechanical systems, 10(1)March 2001
[18] R.Rapp,W.K.Schomburg,D.Maas,J.Schulz,and W.Stark. LIGA micropump for gases and liquids[J].Sensors and Actuators, A, 40 (1994): 57-61
[19] F.C.M.VANDEPOL. A thermo-pneumatic actuation principle for a microminiature pump and other micromechanical devices[J]. Sensors and Actuators, 17 (1989): 139-143
[20] F.C.M.VANDEPOL. A thermopneumatic micropump based on micro-engineering techniques [J]. Sensors and Actuators, A21-A23 (1990): 198-202
[21] P. Krulevitch, A.P. Lee, P.B. Ramsey et al. Thin film shape memory alloy microactuators[J]. Journal of Microelectromechanical System, a5(4), 1996:270-281
[22] Benard W L.Kabo H,Hemer A H.etal. Thin film shape memory actuated micropump[J].J.of Micro Electro Mechanical Systems, 1998,7(2):245-249
[23] AnsonHatch. A ferrofluidic magneticmicropump[J]. Journal of MEMS 2001 IEEE, 10(2)
[24] 白韶红．微型阀和微型泵的原理与应用[J]．传感器世界，(4)2000：1-8
[25] Eeik Stemme. A valveless diffuser/nozzle-based fluid pump[J]. Sensors and Actuators, A, (39)1993:159-167
[26] A. Ullman. The piezoelectric valve-less pump-performance enhancement analysis[J]. Sensors and Actuators, vol. A69 (1998): 97-105.
[27] Anders olsson, Goran Stemme and Erik Stemme. The first valve-less diffuser gas pump[J]. 1997 IEEE International Workshop on MEMS,1997
[28] Torsen Geriach, Helmut Wurmus. Dynamic micropump[J].1995 IEEE International Workshop on MEMS, 1995
[29] M.stehr,S.Messner, H.Sandmaler, R.Zengerle. A new micropump with bidirectional fluid transport and selfblocking effect[J]. 1996 IEEE International Workshop on MEMS,1996
[30]J. Ulrich, M. Stehr, and R. Zengerle. Simulation of a bidirectional pumping microvalve using FEM[J]. Eurosensor X, Leuven, Belgium, Sept. 8-11, 1996: 1241-1244.
[31]Anders olsson. Valve-less diffuser micropumps fabricated using thermoplastic replication[J]. 1997 IEEE International Workshop on MEMS, 1997
[32]Anders olsson. A valveless plar fluid with two pump chambers[J]. Sensors and Actuators, 1995,A47:549-556
[33]Anders olsson, Goran Stemme and Erik Stemme. Micromachined diffuser/nozzle elements for valve-less pumps[J]. 1996 IEEE International Workshop on MEMS ,1996
[34]SHUICHI SHOJI. Micropump and sample-injector for integrated chemical analyzing systems[J]. Sensors and Actuators, A21-A23 (1990): 189-192
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