光学式非接触厚度-微位移测量仪的研制
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摘要
在计算机控制下，光、机、电相结合的微厚测量仪，不仅能实现高精度、高效率的非接触测量，不破坏被测物体表面，而且易于实现动态采样、实时处理、在线测量等自动化要求，因而在现代化的工业测量中将具有广泛的应用和前景。
光学式非接触厚度-微位移测量仪是在激光三角测量法的基础上实现的，在本研究方案中，根据象点在PSD上的移动量建立与被测物厚度-微位移变化之间的数学模型，通过对象点位置变化的计算，实现被测物厚度-微位移变化量的测量。
本文重点阐述了光学式非接触厚度-微位移测量仪的工作原理，并对测量仪的工作过程进行了分析；对影响测量精度的因素做了讨论。同时对仪器的软、硬件进行了设计，制成了一台原理样机。应用该测量仪对厚度-微位移测量进行了多项实测，对测试数据作了分析和讨论，取得了比较满意的结果，达到了设计要求。
该测量仪的分辨力小于0.2m，量程1000m。
Optical & noncontact thickness-displacement meter is a high-tech measuring instrument. It is a synthesis combined with optical, mechanical and electrical knowledge. Under the control of computer this meter not only can realize many noncontact measurements in high definition and efficiency without destroying object surface, but also can be easy to fulfill some automatic demands like dynamic sampling, real time processing, on-line measuring. So it will be well used in the modern industry measurement and has a wide prospect in the future.
The meter is based on the triangular measuring principle of laser. In this research scheme, semiconductor laser is used as the light resources, PSD(Position Sensitive Detector)as the sensor, and computer as a system of high speed sampling & processing data. The main idea of this research can be summed up as following words, reflecting light or scattering light upon the surface of measured object formats an image on the photo surface of PSD by a optical system, because of the good relationship between the offset of image point in PSD and the offset of object thickness, a mathematical model can be founded according to this relationship .It can measure the shift of object thickness through these analyses of movement of image point position in PSD, and this device can be tested its reliability with many practical specimens.
This article formulized emphasis on the measuring principle of meter, analyzed the work process of the meter, discussed the factor that affected the measuring definition, designed software & hardware of the apparatus and fashioned a prototype model. In practical measuring, we drew a satisfied conclusion, and reached the designed requirements.
The resolving power of this meter is 0.2 micron and range of measurement is 1000 micron.
光学式非接触厚度-微位移测量仪是在激光三角测量法的基础上实现的，在本研究方案中，根据象点在PSD上的移动量建立与被测物厚度-微位移变化之间的数学模型，通过对象点位置变化的计算，实现被测物厚度-微位移变化量的测量。
本文重点阐述了光学式非接触厚度-微位移测量仪的工作原理，并对测量仪的工作过程进行了分析；对影响测量精度的因素做了讨论。同时对仪器的软、硬件进行了设计，制成了一台原理样机。应用该测量仪对厚度-微位移测量进行了多项实测，对测试数据作了分析和讨论，取得了比较满意的结果，达到了设计要求。
该测量仪的分辨力小于0.2m，量程1000m。
Optical & noncontact thickness-displacement meter is a high-tech measuring instrument. It is a synthesis combined with optical, mechanical and electrical knowledge. Under the control of computer this meter not only can realize many noncontact measurements in high definition and efficiency without destroying object surface, but also can be easy to fulfill some automatic demands like dynamic sampling, real time processing, on-line measuring. So it will be well used in the modern industry measurement and has a wide prospect in the future.
The meter is based on the triangular measuring principle of laser. In this research scheme, semiconductor laser is used as the light resources, PSD(Position Sensitive Detector)as the sensor, and computer as a system of high speed sampling & processing data. The main idea of this research can be summed up as following words, reflecting light or scattering light upon the surface of measured object formats an image on the photo surface of PSD by a optical system, because of the good relationship between the offset of image point in PSD and the offset of object thickness, a mathematical model can be founded according to this relationship .It can measure the shift of object thickness through these analyses of movement of image point position in PSD, and this device can be tested its reliability with many practical specimens.
This article formulized emphasis on the measuring principle of meter, analyzed the work process of the meter, discussed the factor that affected the measuring definition, designed software & hardware of the apparatus and fashioned a prototype model. In practical measuring, we drew a satisfied conclusion, and reached the designed requirements.
The resolving power of this meter is 0.2 micron and range of measurement is 1000 micron.
引文
1 常健生. 检测与转换技术. 机械工业出版社, 1999: 52～60
2 曾庆勇. 微弱信号检测. 浙江大学出版社, 2001：23～41
3 施勇潮. 固体摄像器件在工业检测中应用. 光仪通讯, 1984, (1): 30～32
4 李景生. 利用双端口RAM技术实现数据的高速传输. 电子技术，1998: 89～102
5 沈兰荪. 数据采集技术. 中科大出版社, 2002: 12～45
6 中村常郎著[日]. 最近的精密加工和精密测量. 计量出版社, 1999: 65～78
7 孙培懋, 刘正飞. 光电技术. 机械工业出版社, 2000: 29～35
8 天津大学精密仪器系编. PSD应用技术选集（1、2）. 天津大学出版社，1997: 65～81
9 王庆有, 孙学珠. PSD应用技术. 天津大学出版社, 2001: 43～54
10 袁峰, 丁振良, 强锡富. PSD像感器位置测量的性能分析. 哈尔滨工业大学学报, 1999, 14(4): 46～52
11 张如洲. 微型计算机数据采集与处理. 北京工业学出版社, 2000: 98～132
12 秦积荣. 光电检测原理与应用. 国防工业出版社, 2001: 50～96
13 朗．普尔，马丁．麦可尼夫，史蒂尔．库克. APPLEH微型计算机用户指南. 北京工业出版社, 1997: 61～98
14 姚广大. 数字式涂层测厚仪. 激光杂志, 2002, 9(1): 23～35
15 张健, 吴丽莹. 电荷耦合器件及应用. 仪器与未来, 1999, (2): 53～69
16 张健, 吴丽莹. PSD用于激光衍射动态测量. 哈尔滨科技大学学报, 1997，(4): 66～78
17 马东升. 电荷耦合器件的单片机驱动. 自动化与仪器仪表, 2002, (3): 23～82
18 郑志民, 吕荣. 线阵PSD单板旋切厚度在线测量系统. 电子技术及应用, 1994, (2): 96～103
19 祝杰, 戴立铭, 江潼君. 激光三角测量位移. 仪表技术与传感器, 1998，(1): 30～32
20 戴立铭， 江潼君. 激光三角测量传感器的精密位移测量. 宇航出版社, 2001: 135～160
21 张健, 吴丽莹, 刘泊. 一种利用激光测量厚度的方法. 99全国机械量测试传感技术论文集, 1999: 102～110
22 宋植缇. 覆层测厚方法. 水利出版社, 2000: 32～64
23 赵洪志, 王向周. 一种超高速A／D与微机接口技术. 微型机于应用，1995, (1): 22～24
24李锦飞. 双端口存贮器的设计及其在高速数据采集与处理中的应用. 电子计数应用, 1999, (8): 42～44
25 陈为民, 卞海洋. 激光测厚仪. 发明专利, 1989.3
26 张健, 刘泊. PSD与APPLE之间的数据高速传输. 哈尔滨科技大学学报, 1998, 15(1): 38～45
27张健, 吴丽莹, 刘泊. 用单片机实现PSD信号高速数据采集. 全国第二界PSD应用技术学术讨论会论文集, 北京, 1998: 96～105
28 张以谟. 应用光学. 机械工业出版社, 1998: 36～51
29 强锡富, 郑大生. PSD信号微机数据采集的接口电路. 测试技术, 1996, (28): 150～201
30 E.J.帕沙瑚. 微型计算机接口技术. 重庆出版社, 2000: 99～145
31 周明德. 微型计算机接口电路及应用. 清华大学出版社, 1997: 110～123
32 张风林, 孙学珠. 工程光学. 天津大学出版社, 2002: 85～124
33 杨明. 图形图像特征的一种抽取方法. 南京航空航天大学学报, 1998, (3): 45～49
34 张友德. 单片机原理与应用技术手册. 北京航空航天大学出版社, 1992: 103～181
35 徐爱钧, 彭秀华. 单片机高级语言C51应用程序设计. 电子工业出版社, 1998: 52～76
36 徐家骅. 工程光学基础. 机械工业出版社，1999: 60～70
37 Beynon.J.D.E. and Lamb.D.R.(Ed). Charge Coupled Devices and Their Application. Elsevier Science, 1997: 61～91
38 Dillon.P.et.al. Color Imaging System Using a Single PSD Array. IEEE Trans.on Elec.RCA Vol.ED-25 No.2 Fed 102-107(1978): 99～102
39 Lagnado.I.and Whitehouse. Signal Processing Image Sensor Using Charge Coupled Devices. Proc.Int.eonf.on CCDs(Edinburgh).1994: 198-205
40 Amelio.G.F.M.F.Tompsett and G. Sminth. Experimental verification of the Charge Coupled Device Concept. Bell Syst.Tech.Journ.1995: 593-600
41 Burke.H.K.and G.J.Michon. Charge injection imaging, operating techniques and performance characteristics. IEEE Journal, solid State Circuit SC-11. 1996: 121-129
42 Rumethart D.Eetal. Parallel-Distributed Processing. MA:MIT Press,1998: 120-145
43 M. J. Anderson, J. A. Hill, C. M. Fortunko. Broadband electrostatic transducers Modeling and experiments. J. Acoust. Soc.Am. 1995, 12(2): 262-272
44 Amir Shemer, David Mendlovic, Gal Shabtay, Pasacala Garcia-Martinez and Javier Garcia. Modified morphological correlation based on bit-map representations. Applied Optics, 1998 ,(5): 781～787
45 Y.Xu, E.M-K.lai. Restoration of images contaminated by mixed Gassing and impulse noise using a recursive minimum-maximum method. IEEE Proc.Vis.Image Signal Process, 1998,(4): 264～270
46 Pal.N.R, Pal S K. A Review on Image Segmentation Techniques. Pattern Recognition, 1993, 26 (9): 1277～1294
47 Yen J C, Chang F J, Chang S. A New Criterion for automatic Multilevel Threshold. IEEE Trans on Image Processing, 1995, 4 (3): 370～377
48 Sahoo P. K, Soltani S, Wang K C, Chen Y C. A Survey of Threshold Techniques. Computer Vision. Graphics and Image Processing, 1988, (41): 233～260
49 Pikaz A, Averbuch A, Digital Image Threshold Based on Topological Stable State. Pattern Recognition, 1996, 29 (5): 829～843
50 Papamarkos N, Gatos B. A New Approach for Multilevel Threshold Selection. CVGIP: Graphic Models and Image Processing, 1994, (56): 357～370
2 曾庆勇. 微弱信号检测. 浙江大学出版社, 2001：23～41
3 施勇潮. 固体摄像器件在工业检测中应用. 光仪通讯, 1984, (1): 30～32
4 李景生. 利用双端口RAM技术实现数据的高速传输. 电子技术，1998: 89～102
5 沈兰荪. 数据采集技术. 中科大出版社, 2002: 12～45
6 中村常郎著[日]. 最近的精密加工和精密测量. 计量出版社, 1999: 65～78
7 孙培懋, 刘正飞. 光电技术. 机械工业出版社, 2000: 29～35
8 天津大学精密仪器系编. PSD应用技术选集（1、2）. 天津大学出版社，1997: 65～81
9 王庆有, 孙学珠. PSD应用技术. 天津大学出版社, 2001: 43～54
10 袁峰, 丁振良, 强锡富. PSD像感器位置测量的性能分析. 哈尔滨工业大学学报, 1999, 14(4): 46～52
11 张如洲. 微型计算机数据采集与处理. 北京工业学出版社, 2000: 98～132
12 秦积荣. 光电检测原理与应用. 国防工业出版社, 2001: 50～96
13 朗．普尔，马丁．麦可尼夫，史蒂尔．库克. APPLEH微型计算机用户指南. 北京工业出版社, 1997: 61～98
14 姚广大. 数字式涂层测厚仪. 激光杂志, 2002, 9(1): 23～35
15 张健, 吴丽莹. 电荷耦合器件及应用. 仪器与未来, 1999, (2): 53～69
16 张健, 吴丽莹. PSD用于激光衍射动态测量. 哈尔滨科技大学学报, 1997，(4): 66～78
17 马东升. 电荷耦合器件的单片机驱动. 自动化与仪器仪表, 2002, (3): 23～82
18 郑志民, 吕荣. 线阵PSD单板旋切厚度在线测量系统. 电子技术及应用, 1994, (2): 96～103
19 祝杰, 戴立铭, 江潼君. 激光三角测量位移. 仪表技术与传感器, 1998，(1): 30～32
20 戴立铭， 江潼君. 激光三角测量传感器的精密位移测量. 宇航出版社, 2001: 135～160
21 张健, 吴丽莹, 刘泊. 一种利用激光测量厚度的方法. 99全国机械量测试传感技术论文集, 1999: 102～110
22 宋植缇. 覆层测厚方法. 水利出版社, 2000: 32～64
23 赵洪志, 王向周. 一种超高速A／D与微机接口技术. 微型机于应用，1995, (1): 22～24
24李锦飞. 双端口存贮器的设计及其在高速数据采集与处理中的应用. 电子计数应用, 1999, (8): 42～44
25 陈为民, 卞海洋. 激光测厚仪. 发明专利, 1989.3
26 张健, 刘泊. PSD与APPLE之间的数据高速传输. 哈尔滨科技大学学报, 1998, 15(1): 38～45
27张健, 吴丽莹, 刘泊. 用单片机实现PSD信号高速数据采集. 全国第二界PSD应用技术学术讨论会论文集, 北京, 1998: 96～105
28 张以谟. 应用光学. 机械工业出版社, 1998: 36～51
29 强锡富, 郑大生. PSD信号微机数据采集的接口电路. 测试技术, 1996, (28): 150～201
30 E.J.帕沙瑚. 微型计算机接口技术. 重庆出版社, 2000: 99～145
31 周明德. 微型计算机接口电路及应用. 清华大学出版社, 1997: 110～123
32 张风林, 孙学珠. 工程光学. 天津大学出版社, 2002: 85～124
33 杨明. 图形图像特征的一种抽取方法. 南京航空航天大学学报, 1998, (3): 45～49
34 张友德. 单片机原理与应用技术手册. 北京航空航天大学出版社, 1992: 103～181
35 徐爱钧, 彭秀华. 单片机高级语言C51应用程序设计. 电子工业出版社, 1998: 52～76
36 徐家骅. 工程光学基础. 机械工业出版社，1999: 60～70
37 Beynon.J.D.E. and Lamb.D.R.(Ed). Charge Coupled Devices and Their Application. Elsevier Science, 1997: 61～91
38 Dillon.P.et.al. Color Imaging System Using a Single PSD Array. IEEE Trans.on Elec.RCA Vol.ED-25 No.2 Fed 102-107(1978): 99～102
39 Lagnado.I.and Whitehouse. Signal Processing Image Sensor Using Charge Coupled Devices. Proc.Int.eonf.on CCDs(Edinburgh).1994: 198-205
40 Amelio.G.F.M.F.Tompsett and G. Sminth. Experimental verification of the Charge Coupled Device Concept. Bell Syst.Tech.Journ.1995: 593-600
41 Burke.H.K.and G.J.Michon. Charge injection imaging, operating techniques and performance characteristics. IEEE Journal, solid State Circuit SC-11. 1996: 121-129
42 Rumethart D.Eetal. Parallel-Distributed Processing. MA:MIT Press,1998: 120-145
43 M. J. Anderson, J. A. Hill, C. M. Fortunko. Broadband electrostatic transducers Modeling and experiments. J. Acoust. Soc.Am. 1995, 12(2): 262-272
44 Amir Shemer, David Mendlovic, Gal Shabtay, Pasacala Garcia-Martinez and Javier Garcia. Modified morphological correlation based on bit-map representations. Applied Optics, 1998 ,(5): 781～787
45 Y.Xu, E.M-K.lai. Restoration of images contaminated by mixed Gassing and impulse noise using a recursive minimum-maximum method. IEEE Proc.Vis.Image Signal Process, 1998,(4): 264～270
46 Pal.N.R, Pal S K. A Review on Image Segmentation Techniques. Pattern Recognition, 1993, 26 (9): 1277～1294
47 Yen J C, Chang F J, Chang S. A New Criterion for automatic Multilevel Threshold. IEEE Trans on Image Processing, 1995, 4 (3): 370～377
48 Sahoo P. K, Soltani S, Wang K C, Chen Y C. A Survey of Threshold Techniques. Computer Vision. Graphics and Image Processing, 1988, (41): 233～260
49 Pikaz A, Averbuch A, Digital Image Threshold Based on Topological Stable State. Pattern Recognition, 1996, 29 (5): 829～843
50 Papamarkos N, Gatos B. A New Approach for Multilevel Threshold Selection. CVGIP: Graphic Models and Image Processing, 1994, (56): 357～370