激光二极管列阵的光束整形及光强分布理论
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摘要
半导体激光器又称激光二极管(LD),是以半导体材料作为工作介质的一类激光器。半导体激光器具有单色性、高亮度、体积小、响应速度快、效率高、可直接调制等特点,已经在光纤通信、光传感、光信息存储、激光打印、集成光学等领域发挥着重要的作用。
为了实现更高功率的半导体激光器,人们设计了激光二级管列阵(LDA)。激光二极管列阵应用也很广泛,它可以作为激光器的泵浦源,可以实现激光焊接,还可以用来做眼科手术、红外照明等。
但由于激光二极管列阵(LDA)输出光束呈相当严重的扁椭圆形(比如：1μm×10mm),输出的光束不能直接应用,所以改善激光二极管列阵的光束质量显得尤为重要。改善半导体激光光束质量的技术可以分为两类。一类是通过改变半导体激光器本身或者外加谐振腔等方法,内在地改变出射光束质量。而另外一种类型方法是通过对半导体激光器外加折射、反射、衍射等光学系统,外在地改变其出射光束质量。后一种类型更加常见和简便,要对其进行光束整形,首先要知道其远场光强分布理论,但是至今没有一种理论模型满足大功率激光器的出射光场分布。在此基础上,本文一方面对LDA的出射光场分布提出了一种新的理论模型,并通过对其光强分布的实验测试记录了发光性质的资料,并进行理论模型和实验数据对比；同时还对整形方案进行了理论推导,并进行了相关实验结果的记录。
我们采用的光强分布测试系统,可以记录大量的数据,并可获得了LDA的三维光束轮廓分布图(相应的一维图和二维图也可以得到)。这些数据,为下一步的光束整形提供了前提依据。
我们设计的光束整形系统是透镜组合：第一部分是正交双曲柱面-圆柱面微透镜,它的作用是降低快轴和慢轴的发散角；第二部分椭圆柱面-平面透镜和平面-圆柱面透镜组成,其目的是对光束进行压缩,它能将慢轴方向上的光斑压缩到1mm之内。
Semiconductor lasers, also known as laser diode (LD), is a class of laser which used semiconductor material as its working medium. Semiconductor lasers, with the properties of monochromaticity, high intensity, small in size, fast response, high efficiency as well as can be directly modulated, have been already playing an important part in optical fiber communication, optical sensors, optical information storage, laser printing, integrated optics and other fields.
In order to make semiconductor lasers achieve higher power, laser diode array (LDA) has been designed. Laser diode array is widely used, it can be used as laser pump source, carrying out laser welding, and can also be used for ophthalmologic operation, infrared lighting.
However, the output beam of the laser diode array (LDA) presents serious oblate elliptical (such as:1μm×10mm), it can not be directly applied, so to improve the quality of the beam is especially important. The technology of improving the quality of the semiconductor laser beam can be divided into two categories. Due to their relative cheapness, small bulk, light weight, long service time, high transferring efficiency and so on, high power laser diode array (LDA) are wide commercial available. Such as they are becoming increasingly attractive as pump sources for high power solid-state lasers.
Unfortunately, because of the highly elliptical output beam (such as:1μm×10mm), they cannot readily be focused into small, circular spots, which are suitable for efficient pump sources of solid-state lasers, LDA's applications have been limited. To date, many of the pump schemes which have been employed with diode arrays have either produced a large focused beam, or have employed relatively complex designs.To overcome the shortage, above all, it is especial important to make certain the nature distribution of the laser beam emitting from high power laser diode array (LDA),then, on the basis of it,a high-efficient and relative-simple laser beam shaper should be provided. So this paper include following two points:one is to construct a new theoretical model about intensity distribution of LDA beam and it's validity has been attested by test, Meanwhile the first-hand data of LDA beam character have been attained; the other is to provide a shaping scheme which consist of a collimating module and a compression module,we have practice it from fabricate,fixing to experimentation.
We use the light intensity distribution test system, large amounts of data can be recorded and available to the LDA's three-dimensional beam profile distribution (include:two-dimension and one-dimension if necessarily).The data for the next beam shaping to provide a basis for the premise.
Our beam-shaping system which consist of two parts. The first part is orthogonal hyperbolic cylinder-cylinder micro-lens, its role is to reduce the fast axis and slow axis divergence angle; second part of the ellipse-plane lens and plane-cylinder lens, whose objective is to beam compressed, it will slow axis of the beam compressed to within lmm.
为了实现更高功率的半导体激光器,人们设计了激光二级管列阵(LDA)。激光二极管列阵应用也很广泛,它可以作为激光器的泵浦源,可以实现激光焊接,还可以用来做眼科手术、红外照明等。
但由于激光二极管列阵(LDA)输出光束呈相当严重的扁椭圆形(比如：1μm×10mm),输出的光束不能直接应用,所以改善激光二极管列阵的光束质量显得尤为重要。改善半导体激光光束质量的技术可以分为两类。一类是通过改变半导体激光器本身或者外加谐振腔等方法,内在地改变出射光束质量。而另外一种类型方法是通过对半导体激光器外加折射、反射、衍射等光学系统,外在地改变其出射光束质量。后一种类型更加常见和简便,要对其进行光束整形,首先要知道其远场光强分布理论,但是至今没有一种理论模型满足大功率激光器的出射光场分布。在此基础上,本文一方面对LDA的出射光场分布提出了一种新的理论模型,并通过对其光强分布的实验测试记录了发光性质的资料,并进行理论模型和实验数据对比；同时还对整形方案进行了理论推导,并进行了相关实验结果的记录。
我们采用的光强分布测试系统,可以记录大量的数据,并可获得了LDA的三维光束轮廓分布图(相应的一维图和二维图也可以得到)。这些数据,为下一步的光束整形提供了前提依据。
我们设计的光束整形系统是透镜组合：第一部分是正交双曲柱面-圆柱面微透镜,它的作用是降低快轴和慢轴的发散角；第二部分椭圆柱面-平面透镜和平面-圆柱面透镜组成,其目的是对光束进行压缩,它能将慢轴方向上的光斑压缩到1mm之内。
Semiconductor lasers, also known as laser diode (LD), is a class of laser which used semiconductor material as its working medium. Semiconductor lasers, with the properties of monochromaticity, high intensity, small in size, fast response, high efficiency as well as can be directly modulated, have been already playing an important part in optical fiber communication, optical sensors, optical information storage, laser printing, integrated optics and other fields.
In order to make semiconductor lasers achieve higher power, laser diode array (LDA) has been designed. Laser diode array is widely used, it can be used as laser pump source, carrying out laser welding, and can also be used for ophthalmologic operation, infrared lighting.
However, the output beam of the laser diode array (LDA) presents serious oblate elliptical (such as:1μm×10mm), it can not be directly applied, so to improve the quality of the beam is especially important. The technology of improving the quality of the semiconductor laser beam can be divided into two categories. Due to their relative cheapness, small bulk, light weight, long service time, high transferring efficiency and so on, high power laser diode array (LDA) are wide commercial available. Such as they are becoming increasingly attractive as pump sources for high power solid-state lasers.
Unfortunately, because of the highly elliptical output beam (such as:1μm×10mm), they cannot readily be focused into small, circular spots, which are suitable for efficient pump sources of solid-state lasers, LDA's applications have been limited. To date, many of the pump schemes which have been employed with diode arrays have either produced a large focused beam, or have employed relatively complex designs.To overcome the shortage, above all, it is especial important to make certain the nature distribution of the laser beam emitting from high power laser diode array (LDA),then, on the basis of it,a high-efficient and relative-simple laser beam shaper should be provided. So this paper include following two points:one is to construct a new theoretical model about intensity distribution of LDA beam and it's validity has been attested by test, Meanwhile the first-hand data of LDA beam character have been attained; the other is to provide a shaping scheme which consist of a collimating module and a compression module,we have practice it from fabricate,fixing to experimentation.
We use the light intensity distribution test system, large amounts of data can be recorded and available to the LDA's three-dimensional beam profile distribution (include:two-dimension and one-dimension if necessarily).The data for the next beam shaping to provide a basis for the premise.
Our beam-shaping system which consist of two parts. The first part is orthogonal hyperbolic cylinder-cylinder micro-lens, its role is to reduce the fast axis and slow axis divergence angle; second part of the ellipse-plane lens and plane-cylinder lens, whose objective is to beam compressed, it will slow axis of the beam compressed to within lmm.
引文
[1]何华伟,硕士毕业论文,重庆师范大学,2009年4月
[2]李适民,黄维玲等,激光器件原理与设计,国防工业出版社,2005年1月第二版
[3]半导体激光器的发展及其应用 王路威；成都大学学报(自然科学版),2003年03期
[4]吕百达,激光光学,高等教育出版社,2003年5月第二版
[5]刘敬海、徐荣甫,激光器件与技术,北京理工大学出版社,1995年12月第一版
[6]周炳琨,高以智,激光原理,国防工业出版社.1995
[7]虞丽生,半导体异质结构物理,科学出版社.2006年5月第二版
[8]W.koecher solid-state laser engineering世界图书出版公司北京公司2006年6月第五版
[9]俞宽新,江铁良,赵启大,激光原理与激光技术,北京工业出版社,1998年3月第一版
[10]戴特力、季小玲,《新光学教程》,重庆大学出版社,1996年6月第一版
[11]罗亚梅,梁一平,熊玲玲,球状光纤耦合器的原理和参数设计,重庆师范大学学报(自然科学版)2006.第1期
[12]梁一平,戴特力,圆柱透镜对半导体激光光束准直性能的改进,中国激光,2004,31(11)：1305-1311
[13]熊玲玲,罗亚梅,梁一平,双曲柱面—平面透镜对半导体激光束的准直性能,激光杂志,2006.4出刊
[14]姚建铨,徐德刚,全固态激光及非线性光学频率变换技术,2007-6-1,
[15]熊玲玲,何华伟,戴特力等.二极管激光线阵光束的远场特性[J].强激光与粒子束,2008,20(12)：1971-1974
[16](美)G.R.福尔斯.现代光学导论[M],上海科学技术出版社,上海：1980：
[17]Zeng X D,Amir N.Far-field distribution of double-heterostructure diode laser beams[J]. Appl.Opt.1993,32(24)
[18]W.W.Anderson.Mode confinement and gain in junction Lasers[J].IEEE,.Quantum Electron. QE-1,1965
[19]T. H.Zachos and J.E.Ripper.Resonant modes of GaAs junction lasers[J] IEEE,.Quantum Electron.QE-5,1969
[20]T.L.Paoli..Waveguiding in a stripe-geometry junction laser[J].IEEE,.Quantum Electron. QE-13,1977
[21]Xiaodong Zeng,Zhejun Feng,and Yuying An.Far-field expression of a high-power laser diode[J].Appl Opt,2004,43(27):5168-5172
[22]王强,曾晓东,安毓英.大功率激光二极管双峰结构远场分布模型[J]..光学学报,2005,25(5)
[23]陈锡辉,张银鸿编著labview8.2程序设计从入门到精通 清华大学出版社2007年07月
[24]张桐,陈国顺,王正林编著Lab VIEW 8.2.1与DAQ数据采集电子工业出版社2008年12月
[25]康小平,何伸 激光光束质量评价概论上海科学技术文献出版社2007.6
[26]耿蕊,张帆,王春灿,童治,宁提纲,简水生,条形激光二极管阵列光束整形方法研究,光学技术 2008.9
[27]激光束空间整形的研究现状 激光与光电子学进展 2005年9月
[28]Diode Laser Bar Beam Shaping Technique W.A. Clarkson, A.B. Neilson and D.C. Hanna
[29]Ultra-precision machining of reflector array for laser diode beam shaping FANG F. Z., XIONG Z.and HU X. T. OPTOELECTRONICS LETTERS Vol.3 No.2,15 Mar.2007
[30]High-efficiency high-power diode laser beam shaping and focusing with constant optical-path length equalization Stefano Bonora and Paolo Villoresi Semiconductor Lasers and Laser Dynamics 11,2008
[31]Incoherent beam shaping with freeform mirror Dirk Michaelis, Sergey Kudaev*, Ralf Steinkopf, Andreas Gebhardt,Peter Schreiber,Andreas Brauer Nonimaging Optics and Efficient Illumination Systems V,2008(spie)
[32]李春霞,张爱红,左保军,孙东松,用于半导体激光器的等共轭距双曲柱面镜系统 光学技术1999.9
[33]何华伟,椭圆柱面-平面和平面-圆柱面组合透镜对准直光束的压缩性能分析,重庆师范大学学报(自然科学版),2008年第2期
[34]梁一平,戴特力,熊玲玲,双曲线和椭圆焦点的光学意义,重庆师范大学学报—自然科学版2004,第3期
[35]戴特力,半导体激光二极管泵浦全固态激光器[M].成都：四川大学出版社,1993
[36]蓝信钜,激光技术(第二版)科学出版社2006.1
[37郭明秀 沈冠群 陆雨田,激光二极管光束整形技术 激光技术 2003.8
[38]蔡君 刘外喜 光纤合束器的研制与应用 光纤与电缆及其应用技术 2007.3
[39]龚华平 吕志伟 林殿阳 激光束空间整形的研究现状 激光与光电子学进展2005年9月
[40]姚建铨,徐德刚著 全固态激光及非线性光学频率变换技术 2007-6-1,
[41]耿蕊,张帆,王春灿,童治,宁提纲,简水生,条形激光二极管阵列光束整形方法研究 光学技术
[42]傅汝廉一,秦华,史新刚 LDA端泵浦固体激光器的新型耦合系统—圆锥形导管 郜洪云, 光电子 激光2006.4
[43]张彪,陈檬,李港 面阵半导体激光器的耦合理论设计 2005.8
[44]李丽娜、吴金辉、宋俊峰,大功率半导体激光器远场特性研究,发光学报,2004.2,25(1),95-97
[45]王强、曾晓东、安毓英,大功率激光二极管双峰结构远场分布模型,光学学报,2005.5
[46]蔡君、刘外喜,光纤合束器的研制与应用,光纤与电缆及其应用技术,2007.3
[47]黄伟、曾晓东、安毓英,Study on the beam shaping of high--power laser diode bars CHINESE OPTICS LETTERS August 20,2003
[48]熊玲玲,吕百达.描述激光二极管远场光强分布的理论模型[J].强激光与粒子束,2008,20(2)：201-206
[49](美)H.C.凯西,M.B.帕尼什.异质结构激光器,下册[M],国防工业出版社,北京：1985：261
[50]Yang Jiong Chen Tingting Ding Guilin et al, Focusing of diode laser beams:a partially coherent Lorentz model[J]. Proc. of SPIE (2007) Vol.6824,68240A-1
[2]李适民,黄维玲等,激光器件原理与设计,国防工业出版社,2005年1月第二版
[3]半导体激光器的发展及其应用 王路威；成都大学学报(自然科学版),2003年03期
[4]吕百达,激光光学,高等教育出版社,2003年5月第二版
[5]刘敬海、徐荣甫,激光器件与技术,北京理工大学出版社,1995年12月第一版
[6]周炳琨,高以智,激光原理,国防工业出版社.1995
[7]虞丽生,半导体异质结构物理,科学出版社.2006年5月第二版
[8]W.koecher solid-state laser engineering世界图书出版公司北京公司2006年6月第五版
[9]俞宽新,江铁良,赵启大,激光原理与激光技术,北京工业出版社,1998年3月第一版
[10]戴特力、季小玲,《新光学教程》,重庆大学出版社,1996年6月第一版
[11]罗亚梅,梁一平,熊玲玲,球状光纤耦合器的原理和参数设计,重庆师范大学学报(自然科学版)2006.第1期
[12]梁一平,戴特力,圆柱透镜对半导体激光光束准直性能的改进,中国激光,2004,31(11)：1305-1311
[13]熊玲玲,罗亚梅,梁一平,双曲柱面—平面透镜对半导体激光束的准直性能,激光杂志,2006.4出刊
[14]姚建铨,徐德刚,全固态激光及非线性光学频率变换技术,2007-6-1,
[15]熊玲玲,何华伟,戴特力等.二极管激光线阵光束的远场特性[J].强激光与粒子束,2008,20(12)：1971-1974
[16](美)G.R.福尔斯.现代光学导论[M],上海科学技术出版社,上海：1980：
[17]Zeng X D,Amir N.Far-field distribution of double-heterostructure diode laser beams[J]. Appl.Opt.1993,32(24)
[18]W.W.Anderson.Mode confinement and gain in junction Lasers[J].IEEE,.Quantum Electron. QE-1,1965
[19]T. H.Zachos and J.E.Ripper.Resonant modes of GaAs junction lasers[J] IEEE,.Quantum Electron.QE-5,1969
[20]T.L.Paoli..Waveguiding in a stripe-geometry junction laser[J].IEEE,.Quantum Electron. QE-13,1977
[21]Xiaodong Zeng,Zhejun Feng,and Yuying An.Far-field expression of a high-power laser diode[J].Appl Opt,2004,43(27):5168-5172
[22]王强,曾晓东,安毓英.大功率激光二极管双峰结构远场分布模型[J]..光学学报,2005,25(5)
[23]陈锡辉,张银鸿编著labview8.2程序设计从入门到精通 清华大学出版社2007年07月
[24]张桐,陈国顺,王正林编著Lab VIEW 8.2.1与DAQ数据采集电子工业出版社2008年12月
[25]康小平,何伸 激光光束质量评价概论上海科学技术文献出版社2007.6
[26]耿蕊,张帆,王春灿,童治,宁提纲,简水生,条形激光二极管阵列光束整形方法研究,光学技术 2008.9
[27]激光束空间整形的研究现状 激光与光电子学进展 2005年9月
[28]Diode Laser Bar Beam Shaping Technique W.A. Clarkson, A.B. Neilson and D.C. Hanna
[29]Ultra-precision machining of reflector array for laser diode beam shaping FANG F. Z., XIONG Z.and HU X. T. OPTOELECTRONICS LETTERS Vol.3 No.2,15 Mar.2007
[30]High-efficiency high-power diode laser beam shaping and focusing with constant optical-path length equalization Stefano Bonora and Paolo Villoresi Semiconductor Lasers and Laser Dynamics 11,2008
[31]Incoherent beam shaping with freeform mirror Dirk Michaelis, Sergey Kudaev*, Ralf Steinkopf, Andreas Gebhardt,Peter Schreiber,Andreas Brauer Nonimaging Optics and Efficient Illumination Systems V,2008(spie)
[32]李春霞,张爱红,左保军,孙东松,用于半导体激光器的等共轭距双曲柱面镜系统 光学技术1999.9
[33]何华伟,椭圆柱面-平面和平面-圆柱面组合透镜对准直光束的压缩性能分析,重庆师范大学学报(自然科学版),2008年第2期
[34]梁一平,戴特力,熊玲玲,双曲线和椭圆焦点的光学意义,重庆师范大学学报—自然科学版2004,第3期
[35]戴特力,半导体激光二极管泵浦全固态激光器[M].成都：四川大学出版社,1993
[36]蓝信钜,激光技术(第二版)科学出版社2006.1
[37郭明秀 沈冠群 陆雨田,激光二极管光束整形技术 激光技术 2003.8
[38]蔡君 刘外喜 光纤合束器的研制与应用 光纤与电缆及其应用技术 2007.3
[39]龚华平 吕志伟 林殿阳 激光束空间整形的研究现状 激光与光电子学进展2005年9月
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