KDP晶体微纳表层缺陷对其激光损伤阈值影响的研究
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摘要
KDP晶体作为一种性能优良的无机非线性光学材料,广泛应用于激光惯性约束核聚变、激光通信等技术领域。惯性约束核聚变光学制造中的一个关键技术问题是KDP晶体零件的抗激光损伤问题,KDP晶体激光损伤阈值的大小直接影响到惯性约束核聚变系统激光输出的能流密度与其自身的使用寿命。现阶段,KDP晶体激光损伤阈值的实际值远低于理论值,而其研究的重点多集中在晶体内部的稳态及瞬态缺陷,有关于晶体微纳加工表层缺陷对其激光损伤阈值的影响研究的较少。因此,深入研究KDP晶体微纳表层缺陷对其激光损伤阈值的影响,将进一步揭示晶体材料的激光损伤机制,为其激光损伤阈值的提高提供相应的理论基础,并为KDP晶体超光滑表面的获取提供理论基础和参数依据。
本文基于有限元分析软件ANSYS,首先根据激光辐照下KDP晶体表面的温度场及热应力场理论,建立了三维晶体模型,研究了在激光照射下,表面未镀膜的、理想的KDP晶体表面的温度场及热应力场的分布情况。其次,针对KDP晶体质软、易潮解、脆性高、对温度敏感和易开裂等不利于光学加工的特点,分别分析了KDP晶体已加工表面存在的残余内应力、微裂纹、微孔及陷穴等多种微纳加工表层缺陷对晶体激光损伤阈值的影响。通过分析发现KDP晶体微纳加工表层缺陷的存在,会影响晶体表面的温度场及热应力场的分布,使入射激光能量积聚在缺陷附近的很小范围内,造成晶体缺陷处产生局部熔融现象,使KDP晶体产生损伤,降低KDP晶体的激光损伤阈值。
最后,根据KDP晶体杂质附近的温度场及热应力场理论,分析了微纳加工表层杂质影响下晶体温度场及热应力场的分布情况,发现杂质离子对激光的强吸收作用是造成KDP晶体损伤的主要原因之一,也是影响KDP晶体激光损伤阈值的最主要因素。通过分析还发现杂质半径对晶体的激光损伤阈值也有影响,并得到一个有害的杂质半径,使得杂质吸收能量最多,温度最高。另外杂质种类及杂质含量的不同也会对晶体的激光损伤阈值产生影响。
As a kind of inorganic nonlinear optical materials with good properties, KDP crystals has widespread applications in technological areas such as laser inertial confinement fusion and laser communication. The damage of KDP crystal is the key technique of the ICF optical manufacturing. The number of KDP crystal laser damage threshold has the direct influence on the laser output energy-flux density and the life of KDP crystal itself. At the moment, the actual laser damage threshold of KDP crystals is far below the theory laser damage threshold, researches on laser damage threshold are mainly centralized on stationary-state and transient-state deficiency inside the crystals, while researches on influences of machined micro-nano superficial layer are less. So, deep research on influences of micro-nano superficial layer deficiency on laser damage threshold will disclosure laser damage mechanisms of crystal materials further, provide the correlative theoretical foundation of increasing laser damage threshold, also provide theoretical foundation and parameter basis to obtain ultra-smooth surfaces.
Firstly, based on finite element analysis software ANSYS, applied with temperature field and thermal stress field theory of KDP crystals surface irradiated by laser, the distribution of temperature field and thermal stress field of surface-uncoated, ideal KDP crystals surfaces is researched in laser irradiation.
Secondly, in terms of such characters disadvantageous for optical machining as soft, easily deliquescent, very brittle, sensible to temperature and easy to crack, influences of various micro-nano superficial layer deficiency of KDP crystals are analyzed individually, which includes residual internal stress, micro-crack, micro-pore and concave etc. It is discovered through analysis that the deficiency of crystal micro-nano machined superficial layer all affects the distribution of temperature field and thermal stress field of crystal surfaces, which makes injected laser centralize inside a small area around deficiency resulting in temperature lifting intensively around the deficiency, cause partial melting phenomena, damage of KDP crystals and lowering of KDP crystals laser damage threshold.
Finally, based on the temperature field and thermal stress field theory around inclusions of KDP crystals, the distribution of crystal temperature field and thermal stress field is analyzed under the influence of micro-nano machined superficial layer inclusions. It is found that ions of inclusions make great absorbing of injected laser leading to crystal damages. Inclusions’great absorbing of laser is the main factors causing crystal damages, as well as the main factor influencing KDP crystals laser damage threshold. Also the radius of adverse inclusion is obtained, which makes the energy inclusions absorb highest as well as the temperature. In addition, different kinds and different contents of inclusions also affect the crystal laser damage threshold.
本文基于有限元分析软件ANSYS,首先根据激光辐照下KDP晶体表面的温度场及热应力场理论,建立了三维晶体模型,研究了在激光照射下,表面未镀膜的、理想的KDP晶体表面的温度场及热应力场的分布情况。其次,针对KDP晶体质软、易潮解、脆性高、对温度敏感和易开裂等不利于光学加工的特点,分别分析了KDP晶体已加工表面存在的残余内应力、微裂纹、微孔及陷穴等多种微纳加工表层缺陷对晶体激光损伤阈值的影响。通过分析发现KDP晶体微纳加工表层缺陷的存在,会影响晶体表面的温度场及热应力场的分布,使入射激光能量积聚在缺陷附近的很小范围内,造成晶体缺陷处产生局部熔融现象,使KDP晶体产生损伤,降低KDP晶体的激光损伤阈值。
最后,根据KDP晶体杂质附近的温度场及热应力场理论,分析了微纳加工表层杂质影响下晶体温度场及热应力场的分布情况,发现杂质离子对激光的强吸收作用是造成KDP晶体损伤的主要原因之一,也是影响KDP晶体激光损伤阈值的最主要因素。通过分析还发现杂质半径对晶体的激光损伤阈值也有影响,并得到一个有害的杂质半径,使得杂质吸收能量最多,温度最高。另外杂质种类及杂质含量的不同也会对晶体的激光损伤阈值产生影响。
As a kind of inorganic nonlinear optical materials with good properties, KDP crystals has widespread applications in technological areas such as laser inertial confinement fusion and laser communication. The damage of KDP crystal is the key technique of the ICF optical manufacturing. The number of KDP crystal laser damage threshold has the direct influence on the laser output energy-flux density and the life of KDP crystal itself. At the moment, the actual laser damage threshold of KDP crystals is far below the theory laser damage threshold, researches on laser damage threshold are mainly centralized on stationary-state and transient-state deficiency inside the crystals, while researches on influences of machined micro-nano superficial layer are less. So, deep research on influences of micro-nano superficial layer deficiency on laser damage threshold will disclosure laser damage mechanisms of crystal materials further, provide the correlative theoretical foundation of increasing laser damage threshold, also provide theoretical foundation and parameter basis to obtain ultra-smooth surfaces.
Firstly, based on finite element analysis software ANSYS, applied with temperature field and thermal stress field theory of KDP crystals surface irradiated by laser, the distribution of temperature field and thermal stress field of surface-uncoated, ideal KDP crystals surfaces is researched in laser irradiation.
Secondly, in terms of such characters disadvantageous for optical machining as soft, easily deliquescent, very brittle, sensible to temperature and easy to crack, influences of various micro-nano superficial layer deficiency of KDP crystals are analyzed individually, which includes residual internal stress, micro-crack, micro-pore and concave etc. It is discovered through analysis that the deficiency of crystal micro-nano machined superficial layer all affects the distribution of temperature field and thermal stress field of crystal surfaces, which makes injected laser centralize inside a small area around deficiency resulting in temperature lifting intensively around the deficiency, cause partial melting phenomena, damage of KDP crystals and lowering of KDP crystals laser damage threshold.
Finally, based on the temperature field and thermal stress field theory around inclusions of KDP crystals, the distribution of crystal temperature field and thermal stress field is analyzed under the influence of micro-nano machined superficial layer inclusions. It is found that ions of inclusions make great absorbing of injected laser leading to crystal damages. Inclusions’great absorbing of laser is the main factors causing crystal damages, as well as the main factor influencing KDP crystals laser damage threshold. Also the radius of adverse inclusion is obtained, which makes the energy inclusions absorb highest as well as the temperature. In addition, different kinds and different contents of inclusions also affect the crystal laser damage threshold.
引文
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4杨力.先进光学制造技术.科学出版社. 2001:2~3
5刁立臣,张克从,常新安. KDP晶体激光损伤阈值研究的新进展.人工晶体学报. 2002, 31(2):99~103
6 Shouji Hiyotaa, Hideo Mikib, Keisuke Fukuia, Kouji madea. Coloring and habit modification of dyed KDP crystals as functions of supersaturation and dye concentration. Journal of Crystal Growth. 2002, 235(3):541~546
7孙洵,程秀凤,王正平等.杂质对KDP晶体光学质量的影响.强激光与离子束. 2004, 16(7):830~834
8王坤鹏,房昌水,张建秀等. KDP晶体激光损伤机理研究.人工晶体学报. 2004, 33(1):48~51
9 K Fujioka, S. Matsuo, H. Fujita, M. Nakatsuka. Optical properties of rapidly grown KDP crystal improved by thermal conditioning. Journal of Crystal Growth. 1997, 181:265~271
10 Ming Yan. Rich Torres, Mike Runkel. Bruce Woods, et al. LLNL Report.
11苏根博,曾金波,贺友平,李征东,黄炳荣,江日洪.大截面KDP晶体在激光核聚变研究中的应用.硅酸盐学报. 1997, 14:12-13
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13 English. R. E, Van. Wonterghem. B. M, Seppala. L. G, et al. The Use of an Intermediate Wavelength Laser for Alignment to Inertial Confinement Fusion Targets. SPIE. 1995, 2633:603~608
14 Lowermilk W H, Camphell E M, Camphell J H, et al Superior“Nova”facility. Laser PartiBeams. 1993, 11(2):291
15 Hideo Miki, Ryohel Fukunaga, Yusuke Asakuma, Kouji Maeda, Keisuke Fukui. Distribution of dye into KDP crystal in a continous MSMPR crystallizer. Separa-tion and Purification Technology. 2005, 43(5):77~83
16 Wang Shenglai, Li Lixia, Hu Xiaobo et al. the Effect of thermal Conditioning on Microstructure of KDP Crystals. Journal of Functional Materials. 2003, 3(34):331~333
17 Sun Xun, Gao Zhangshou, Xu Xinguamg et al. Thermal Annerealing on Scatter Particles in KDP Crystal. Journal of Optoelectronics and Laser, 2002, 13(3):264~266
18 Guohui Li, Genbo Su, Xinxin Zhuang, Zhengdong Li, Youping He. Rapid growth of KDP crystal with new additive. Journal of Crystal Growth. 2004, 269:443~447
19 Dongli Xu, Dongfeng Xue, Henryk Ratajczak. Morphology and structure studies of KDP and ADP crystallites in the water and ethanol solutions. Journal of Molecular Structure. 2005, 740:37~45
20 T. A. Ereminaa, V. A. Kuznetsova, N.N. Ereminb, T.M. Okhrimenkoa, N.G. Funmanovaa. On the mechanism of impurity influence on growth kinetics and surface morphology of KDP crystal-II experimental study of influence of bivalent and trivalent impurity ions on growth kinetics and surface morphology of KDP crystals. Journal of Crystal Growth. 2005, 31(2):586~593
21 Tiffany N. Thomas, Terry A. Land, Michael Johnson, William H. Casey. Molecular properties of adsorbates that affect the growth kinetics of archerite (KDP). Journal of Colloid and Interface Science. 2004, 280:18~26
22孙洵,张艳珍,高顺清等.包裹体对KDP晶体光损伤阈值的影响.压电与声光. 2004, 31(2):586~593
23 Maret Liiria, Yuko Enqvistb, Juha Kallasb, Juhani Aittamaaa. CFD modelling of single crystal growth of potassium dihydrogen phosphate (KDP) from binary water solution at 30. Journal of Crystal Growth. 2006, 286:413~423
24 Runkel M, Jennings R, et al. An Overview of Recent KDP Damage Experiments and Implications for NIF Tripler Performance. SPIE. 1999, 84(2):247~250
25 Atherton L J, Rainer F, et al. Thermal and Laser Conditioning of Production and Rapid-growth KDP and DKDP Crystal. SPIE. 1994, 36(2):63~66
26 Mike Runkel, Jim De Yoreo, et al. Laser Conditioning Study of on the Optical Science Laser Using Large Area Beams. SPIE. 1998, 75(2):113~117
27王坤鹏,房昌水,张建秀等. KDP(KD*P)晶体结构研究进展.人工晶体学报.2004, 33(2):262~265
28钟维卓,于锡铃,程振翔等. KDP晶体生长基元与形成机理[J].中国科学, 1998, 28(4):320~324
29谢英明,李新政,郑滨,杨兰兰. KDP(KH2PO4)晶体材料的研究进展.河北工业科技, 2006, 23(6):377~380
30 A. Stark, A. Bernhardt, Laser Damage Threshold Measurement According to ISO 11254: Experimental Realisation at 1064 nm. SPIE. 1994:212~219
31孙承伟等.激光辐照效应.国防工业出版社. 2002:264~289
32王勖成,邵敏.有限单元法基本原理和数值方法[M].清华大学出版社. 1996:98~103
33齐文宗,黄伟,张彬, et al.红外连续激光反射镜热畸变的有限元分析[J].强激光与粒子束. 2004, 16(8):953~956
34 Kerr N C, Emmony D C. The effect of laser annealing o laser induced damage threshold. Laser induced damage in optical materials, NIST SPIE. 1990:164~179
35 R.W. Hopper, D. R. Uhlmann, Mechanism of inclusion damage in laser glass. Jour of Appl Phys. 1970, 41(10):4023~4037
36 Steve G, Jr. Floed E, et al. Beyond perfection: The need for understanding contamination effects on real-world optics. Proc of SPIE. Laser-induced Damage in Optic Materials. 1994, 505~511
37 V. Gruzdev, A. Gruzdev, Blow-up behaviour of high-power laser field in tiny nanabsorbing defects in transparent material. Proc of SPIE. 1998:634~640
38 Bennett H. E, Guenther A H, Kozlowski M. R, et al. Blew-up behavior of high-power laser field in tiny nanabsorbing defects in transparent material. Proc of SPIE. Laser-Induced Damage in Optical Materials. 1998:634~640
39 Papernov S, Schmid A W, Correlatins between embedded single gold nanoparticles in SiO2 thin film and nanoscale crater formation induced by pulsed-laser radiation. Appl Phys B. 2002, 92(10):5720~5728
40龚辉等,连续CO2激光对红外窗口材料损伤研究.光学学报. 1996, 16(3):332~335
41李仲伢,李成富,程雷. KDP晶体激光损伤的研究.中国激光. 1996:126~128
42 T. A Eremina, V. A. Kunznetsov, N. N. Eremin, T. M. Okhrimenko, N. G. Furmanova, E. P. Efremova, Mirosawa Rak. On the mechanism of impurity influence on growth kinetics and surface morphology of KDP crystals-II:experimental study of influence of bivalent and trivalent impurity ions on growth kinetics and surface morphology of KDP crystals. Journal of Crystal Growth. 2005:260~264
43 Ian M. Thomas. Optical and Enviromentally Protective Coatings for Potassium Dihydrogen Phosphate (KDP) Harmonic Converter Crystals. Electro-optics, Frequency Conversion. 1991
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47庄欣欣,谭奇光,林翔,苏根博,李征东. KDP晶体的杂质与光学性能分析.强激光与粒子束. 2001, 13(4):389~392
48 Rashkovich L N, Kronshgy N V. Influence of Fe and Al Ions on the Kinetic of Step on the {100} Faces of KDP. Journal of Crystal Growth. 1978, 182:434~441
49 SelemaniSeif, Kamala Bhat Effect of Cr (III) Impurity on the Growth Kinetics of Potassium Dihydrogen Phosphate and Triglycine Sulfate Crystal Grown from Aqueous Solution. Materials Letters. 2004, 58:991~994
2陈春荣,王学荣,库黎明. KDP晶体电光调制器件的研制及性能测试.长春理工大学学报. 2003, 28(3):2~3
3杨福兴. KDP晶体超精密加工技术的研究.制造技术与机床. 2003, 3~5
4杨力.先进光学制造技术.科学出版社. 2001:2~3
5刁立臣,张克从,常新安. KDP晶体激光损伤阈值研究的新进展.人工晶体学报. 2002, 31(2):99~103
6 Shouji Hiyotaa, Hideo Mikib, Keisuke Fukuia, Kouji madea. Coloring and habit modification of dyed KDP crystals as functions of supersaturation and dye concentration. Journal of Crystal Growth. 2002, 235(3):541~546
7孙洵,程秀凤,王正平等.杂质对KDP晶体光学质量的影响.强激光与离子束. 2004, 16(7):830~834
8王坤鹏,房昌水,张建秀等. KDP晶体激光损伤机理研究.人工晶体学报. 2004, 33(1):48~51
9 K Fujioka, S. Matsuo, H. Fujita, M. Nakatsuka. Optical properties of rapidly grown KDP crystal improved by thermal conditioning. Journal of Crystal Growth. 1997, 181:265~271
10 Ming Yan. Rich Torres, Mike Runkel. Bruce Woods, et al. LLNL Report.
11苏根博,曾金波,贺友平,李征东,黄炳荣,江日洪.大截面KDP晶体在激光核聚变研究中的应用.硅酸盐学报. 1997, 14:12-13
12丁耀南.我国激光核聚变实验研究概述.核物理动态. 1995, 12(4):21~26
13 English. R. E, Van. Wonterghem. B. M, Seppala. L. G, et al. The Use of an Intermediate Wavelength Laser for Alignment to Inertial Confinement Fusion Targets. SPIE. 1995, 2633:603~608
14 Lowermilk W H, Camphell E M, Camphell J H, et al Superior“Nova”facility. Laser PartiBeams. 1993, 11(2):291
15 Hideo Miki, Ryohel Fukunaga, Yusuke Asakuma, Kouji Maeda, Keisuke Fukui. Distribution of dye into KDP crystal in a continous MSMPR crystallizer. Separa-tion and Purification Technology. 2005, 43(5):77~83
16 Wang Shenglai, Li Lixia, Hu Xiaobo et al. the Effect of thermal Conditioning on Microstructure of KDP Crystals. Journal of Functional Materials. 2003, 3(34):331~333
17 Sun Xun, Gao Zhangshou, Xu Xinguamg et al. Thermal Annerealing on Scatter Particles in KDP Crystal. Journal of Optoelectronics and Laser, 2002, 13(3):264~266
18 Guohui Li, Genbo Su, Xinxin Zhuang, Zhengdong Li, Youping He. Rapid growth of KDP crystal with new additive. Journal of Crystal Growth. 2004, 269:443~447
19 Dongli Xu, Dongfeng Xue, Henryk Ratajczak. Morphology and structure studies of KDP and ADP crystallites in the water and ethanol solutions. Journal of Molecular Structure. 2005, 740:37~45
20 T. A. Ereminaa, V. A. Kuznetsova, N.N. Ereminb, T.M. Okhrimenkoa, N.G. Funmanovaa. On the mechanism of impurity influence on growth kinetics and surface morphology of KDP crystal-II experimental study of influence of bivalent and trivalent impurity ions on growth kinetics and surface morphology of KDP crystals. Journal of Crystal Growth. 2005, 31(2):586~593
21 Tiffany N. Thomas, Terry A. Land, Michael Johnson, William H. Casey. Molecular properties of adsorbates that affect the growth kinetics of archerite (KDP). Journal of Colloid and Interface Science. 2004, 280:18~26
22孙洵,张艳珍,高顺清等.包裹体对KDP晶体光损伤阈值的影响.压电与声光. 2004, 31(2):586~593
23 Maret Liiria, Yuko Enqvistb, Juha Kallasb, Juhani Aittamaaa. CFD modelling of single crystal growth of potassium dihydrogen phosphate (KDP) from binary water solution at 30. Journal of Crystal Growth. 2006, 286:413~423
24 Runkel M, Jennings R, et al. An Overview of Recent KDP Damage Experiments and Implications for NIF Tripler Performance. SPIE. 1999, 84(2):247~250
25 Atherton L J, Rainer F, et al. Thermal and Laser Conditioning of Production and Rapid-growth KDP and DKDP Crystal. SPIE. 1994, 36(2):63~66
26 Mike Runkel, Jim De Yoreo, et al. Laser Conditioning Study of on the Optical Science Laser Using Large Area Beams. SPIE. 1998, 75(2):113~117
27王坤鹏,房昌水,张建秀等. KDP(KD*P)晶体结构研究进展.人工晶体学报.2004, 33(2):262~265
28钟维卓,于锡铃,程振翔等. KDP晶体生长基元与形成机理[J].中国科学, 1998, 28(4):320~324
29谢英明,李新政,郑滨,杨兰兰. KDP(KH2PO4)晶体材料的研究进展.河北工业科技, 2006, 23(6):377~380
30 A. Stark, A. Bernhardt, Laser Damage Threshold Measurement According to ISO 11254: Experimental Realisation at 1064 nm. SPIE. 1994:212~219
31孙承伟等.激光辐照效应.国防工业出版社. 2002:264~289
32王勖成,邵敏.有限单元法基本原理和数值方法[M].清华大学出版社. 1996:98~103
33齐文宗,黄伟,张彬, et al.红外连续激光反射镜热畸变的有限元分析[J].强激光与粒子束. 2004, 16(8):953~956
34 Kerr N C, Emmony D C. The effect of laser annealing o laser induced damage threshold. Laser induced damage in optical materials, NIST SPIE. 1990:164~179
35 R.W. Hopper, D. R. Uhlmann, Mechanism of inclusion damage in laser glass. Jour of Appl Phys. 1970, 41(10):4023~4037
36 Steve G, Jr. Floed E, et al. Beyond perfection: The need for understanding contamination effects on real-world optics. Proc of SPIE. Laser-induced Damage in Optic Materials. 1994, 505~511
37 V. Gruzdev, A. Gruzdev, Blow-up behaviour of high-power laser field in tiny nanabsorbing defects in transparent material. Proc of SPIE. 1998:634~640
38 Bennett H. E, Guenther A H, Kozlowski M. R, et al. Blew-up behavior of high-power laser field in tiny nanabsorbing defects in transparent material. Proc of SPIE. Laser-Induced Damage in Optical Materials. 1998:634~640
39 Papernov S, Schmid A W, Correlatins between embedded single gold nanoparticles in SiO2 thin film and nanoscale crater formation induced by pulsed-laser radiation. Appl Phys B. 2002, 92(10):5720~5728
40龚辉等,连续CO2激光对红外窗口材料损伤研究.光学学报. 1996, 16(3):332~335
41李仲伢,李成富,程雷. KDP晶体激光损伤的研究.中国激光. 1996:126~128
42 T. A Eremina, V. A. Kunznetsov, N. N. Eremin, T. M. Okhrimenko, N. G. Furmanova, E. P. Efremova, Mirosawa Rak. On the mechanism of impurity influence on growth kinetics and surface morphology of KDP crystals-II:experimental study of influence of bivalent and trivalent impurity ions on growth kinetics and surface morphology of KDP crystals. Journal of Crystal Growth. 2005:260~264
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