不同脉宽激光致光学薄膜元件损伤特性和机理分析
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摘要
本文从理论分析、数值模拟及实验研究方面对脉宽为fs、ns、ms激光致光学薄膜元件的损伤特性和机理进行研究。
在脉宽为ms激光对增透膜和反射膜元件损伤实验的基础上,建立了改进型缺陷分析模型,结合热应力分析得到的结果显示,增透膜损伤由表面缺陷主导,反射膜损伤由内部缺陷主导；进而定义了积分吸收比参量η,并提出当叩<1时,薄膜元件损伤与增透膜类似,当η>1时,薄膜元件与反射膜损伤类似。
建立了脉宽为ns激光辐照光学薄膜元件的一维半无限大模型,结合薄膜系统电场分布,提出了激光辐照多层薄膜元件温度场的数学解法；计算和实验验证结果显示,多层介质反射膜具有分层破坏特性,单层金属膜损伤阈值随膜层厚度递增进而保持不变；所提出的数学解法较常用的有限元算法具有计算快、运算量小、可适合大尺寸模型等特点。
采用fs激光辐照金属膜的双温热传导和介质膜电离理论,结合薄膜中实际电场分布,得到了金属、介质及金属-介质薄膜元件损伤阈值分析方法；研究结果表明,金属-介质薄膜反射元件在超短脉宽激光系统中的应用更具有优势；而金属膜层的材料和厚度均对损伤有影响,且适当增加金属膜层厚度或引入高热导率的附加层均能有效提高元件的损伤阈值。
对fs、ns与ms激光致光学薄膜元件的损伤形貌、阈值及机理进行了研究。结果表明：fs激光损伤金属膜需采用双温热传导模型且损伤阈值与脉宽无关,ns与ms激光可使用单温热传导模型且损伤阈值与脉宽遵循τ1/2规律；百皮秒至纳秒脉宽之间为双温模型向单温模型的过渡阶段；fs激光损伤介质膜主要表现为电离击穿,而ns与ms激光损伤以热效应为主导；脉宽为十皮秒到纳秒之间时,电离击穿与热效应共同作用；热效应分析结果进一步显示,ms激光比ns激光损伤范围广、破坏大,且对缺陷不敏感。
本文结果可为研究ms激光致光学薄膜元件的损伤提供理论与实验基础,为求解ns激光作用于光学薄膜的温度场提供一种方法,进而为fs激光系统中高性能的光学薄膜元件设计提供辅助手段。文中涉及的不同脉宽激光致光学薄膜元件的损伤比较结果可为工业或军事应用中选择激光器提供参考。
The damage characteristics and mechanisms of optical film components induced by pulsed lasers at different regimes (fs, ns, ms) are theoretically investigated, as well as numerical simulations and experiments.
An improved model consist of surface defects and subsurface defects is proposed to describe the millisecond laser damage based on the damage experiments of two different kinds of optical coatings (AR and HR coatings). The thermal and stress analysis shows that AR is damaged by surface defects and HR by subsurface defects. To go further, the integrated absorption rate between films and substrate (η) is used to decide which kind of the defects actually dominates the laser damage for thin films of different structures. The results show that when η<1, surface defects dominate, otherwise subsurface defects dominate.
A one-dimensional semi-infinite model for nanosecond laser interaction with optical film components is built. The temperature profile in the component is solved by a matrix system from Laplace transform of heat transfer equations, while considering about the electric field distribution in the film. The solving results are compared to that of numerical method which is widely acceptable as well as the experimental ones. The results show that our solution method can be applicable to the analysis of laser damage as well as works fast and be useful to big a big size of model.
An approach for the theoretical evaluation of the femtosecond damage threshold in optical interference coatings that combine metal and dielectric films is presented. The model that is used combines a matrix formalism to describe the film system to the two temperature model that describes the energy transfer and the temperatures of electrons and lattice in a solid submitted to a laser irradiation at the femtosecond time scale. With this approach the thermal consequences due to the ultrafast absorption of the metal film can be evaluated in the multilayer stack. Some applications are presented for the case of broadband mirrors for ultrashort pulses. Particularly the impact of the metal film (element, thickness) and the design on the laser induced damage threshold is studied.
Much significant information is derived from comparison of damage morphologies and damage thresholds among three kinds of lasers (femtosecond laser, nanosecond laser and millisecond laser). The results show that one temperature model should be used in femtosecond laser damage of metal films while two temperature model should be used in nanosecond and millisecond lasers. Femtosecond laser cause breakdown of dielectrics while nanosecond and millisecond lasers also cause thermal damage. There are some scale range of laser pulse length in which the damage mechanism for metals change from1-T model to2-T model, and the damage for dielectrics change from breakdown to thermal effects. Moreover, it is found that millisecond laser damage film substrate seriously and is less sensitive to defects than nanosecond laser.
The research results in this paper can be a basis of going further study of damage properties of millisecond laser with optical film components, provide a method to solve heat transfer equations in nanosecond regime more quickly, as well as helping design metal/metal-dielectric mirrors with high damage resistance performance. Moreover, the results of comparison between three lasers can provide a reference for selecting appropriate lasers in an appropriate industrial area or military area.
在脉宽为ms激光对增透膜和反射膜元件损伤实验的基础上,建立了改进型缺陷分析模型,结合热应力分析得到的结果显示,增透膜损伤由表面缺陷主导,反射膜损伤由内部缺陷主导；进而定义了积分吸收比参量η,并提出当叩<1时,薄膜元件损伤与增透膜类似,当η>1时,薄膜元件与反射膜损伤类似。
建立了脉宽为ns激光辐照光学薄膜元件的一维半无限大模型,结合薄膜系统电场分布,提出了激光辐照多层薄膜元件温度场的数学解法；计算和实验验证结果显示,多层介质反射膜具有分层破坏特性,单层金属膜损伤阈值随膜层厚度递增进而保持不变；所提出的数学解法较常用的有限元算法具有计算快、运算量小、可适合大尺寸模型等特点。
采用fs激光辐照金属膜的双温热传导和介质膜电离理论,结合薄膜中实际电场分布,得到了金属、介质及金属-介质薄膜元件损伤阈值分析方法；研究结果表明,金属-介质薄膜反射元件在超短脉宽激光系统中的应用更具有优势；而金属膜层的材料和厚度均对损伤有影响,且适当增加金属膜层厚度或引入高热导率的附加层均能有效提高元件的损伤阈值。
对fs、ns与ms激光致光学薄膜元件的损伤形貌、阈值及机理进行了研究。结果表明：fs激光损伤金属膜需采用双温热传导模型且损伤阈值与脉宽无关,ns与ms激光可使用单温热传导模型且损伤阈值与脉宽遵循τ1/2规律；百皮秒至纳秒脉宽之间为双温模型向单温模型的过渡阶段；fs激光损伤介质膜主要表现为电离击穿,而ns与ms激光损伤以热效应为主导；脉宽为十皮秒到纳秒之间时,电离击穿与热效应共同作用；热效应分析结果进一步显示,ms激光比ns激光损伤范围广、破坏大,且对缺陷不敏感。
本文结果可为研究ms激光致光学薄膜元件的损伤提供理论与实验基础,为求解ns激光作用于光学薄膜的温度场提供一种方法,进而为fs激光系统中高性能的光学薄膜元件设计提供辅助手段。文中涉及的不同脉宽激光致光学薄膜元件的损伤比较结果可为工业或军事应用中选择激光器提供参考。
The damage characteristics and mechanisms of optical film components induced by pulsed lasers at different regimes (fs, ns, ms) are theoretically investigated, as well as numerical simulations and experiments.
An improved model consist of surface defects and subsurface defects is proposed to describe the millisecond laser damage based on the damage experiments of two different kinds of optical coatings (AR and HR coatings). The thermal and stress analysis shows that AR is damaged by surface defects and HR by subsurface defects. To go further, the integrated absorption rate between films and substrate (η) is used to decide which kind of the defects actually dominates the laser damage for thin films of different structures. The results show that when η<1, surface defects dominate, otherwise subsurface defects dominate.
A one-dimensional semi-infinite model for nanosecond laser interaction with optical film components is built. The temperature profile in the component is solved by a matrix system from Laplace transform of heat transfer equations, while considering about the electric field distribution in the film. The solving results are compared to that of numerical method which is widely acceptable as well as the experimental ones. The results show that our solution method can be applicable to the analysis of laser damage as well as works fast and be useful to big a big size of model.
An approach for the theoretical evaluation of the femtosecond damage threshold in optical interference coatings that combine metal and dielectric films is presented. The model that is used combines a matrix formalism to describe the film system to the two temperature model that describes the energy transfer and the temperatures of electrons and lattice in a solid submitted to a laser irradiation at the femtosecond time scale. With this approach the thermal consequences due to the ultrafast absorption of the metal film can be evaluated in the multilayer stack. Some applications are presented for the case of broadband mirrors for ultrashort pulses. Particularly the impact of the metal film (element, thickness) and the design on the laser induced damage threshold is studied.
Much significant information is derived from comparison of damage morphologies and damage thresholds among three kinds of lasers (femtosecond laser, nanosecond laser and millisecond laser). The results show that one temperature model should be used in femtosecond laser damage of metal films while two temperature model should be used in nanosecond and millisecond lasers. Femtosecond laser cause breakdown of dielectrics while nanosecond and millisecond lasers also cause thermal damage. There are some scale range of laser pulse length in which the damage mechanism for metals change from1-T model to2-T model, and the damage for dielectrics change from breakdown to thermal effects. Moreover, it is found that millisecond laser damage film substrate seriously and is less sensitive to defects than nanosecond laser.
The research results in this paper can be a basis of going further study of damage properties of millisecond laser with optical film components, provide a method to solve heat transfer equations in nanosecond regime more quickly, as well as helping design metal/metal-dielectric mirrors with high damage resistance performance. Moreover, the results of comparison between three lasers can provide a reference for selecting appropriate lasers in an appropriate industrial area or military area.
引文
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