摘要
自光纤传感器问世以来,由于其具有高可靠性、抗腐蚀、不受电磁干扰、复用能力强、传输损耗低、传输距离长等传统电式传感器无法比拟的优点而备受关注,成为近几十年发展最快的传感器技术之一。相对于其它光纤传感器而言,光纤珐珀传感器在体积、分辨率、精度、动态范围以及实现方式等方面优势明显,是发展最为成熟、应用最为广泛的光纤传感器之一,在传感领域显示了良好的应用前景。随着研究的深入,人们对光纤珐珀传感器件的微型化、轻量化、耐高温能力、易燃易爆等恶劣环境下可靠性等方面提出了新的迫切要求。光纤珐珀传感器的微型化成为光纤传感领域的国际前沿研究热点之一。
本课题是国家自然科学重点基金项目(批准号:60537040)“新一代微纳光纤传感器基础研究”的一部分。导师饶云江教授及其团队于2006年在国际上首次提出了一种封闭型微光纤珐珀传感器结构并成功地利用157nm准分子激光器在光纤上实现了该传感器。本课题就是以这种封闭型微光纤珐珀传感器为基础,对它的应变基础特性进行实验研究并探索其应用。主要工作和成果如下:
I.概述了157nm准分子激光微加工技术和基于该技术制作的封闭型微光纤珐珀传感器。研究了反射率对光纤珐珀传感器的反射信号强度以及干涉条纹对比度的影响。提出了结合镀膜和157nm准分子激光微加工技术的封闭型光纤珐珀传感器制作方法,经实验验证,基于此方法制作的传感器具有反射功率高、对比度强等优点。
II.研究了该封闭型微光纤法珀传感器在常温下的应变特性以及温度特性。研究结果表明,这种新结构的微光纤珐珀传感器具有良好的线性应变传感特性(线性系数达0.9992)和温度不敏感性(灵敏度为0.001nm/℃),可望用于制作常规应变传感器,应用于健康监测领域。
III.研究了实时应变传感器系统的实现方法,设计了一套光源,采用双光路干涉强度自补偿方法,实现了微光纤珐珀传感器应变信号的解调。
Ever since the appreance of fiber sensor, it has become a fastest developing industry of fiber passive device and aroused researchers’wide concern due to its high realibility, immunity to electromagnetic interference, capacity of multiplexing, low attenuation and long distance transmission. Among various fiber sensors, fiber Fabry-Perot (F-P) interferometer is one of the most mature fiber sensors, widely used in a large number of applications, and it will have a wonderful prospect in sensing field. As significant efforts been exerted to fabricate small, light, and high-temperature-resistant sensors and sensors which could work in flammable environment, the microstructure sensor has become one of the hot research spots.
A novel self-closed micro-fiber F-P sensor was proposed by our project team under the guidance of Pro. Yunjiang Rao in 2006, and was successfully fabricated by a 157nm excimer laser on the end face of fiber. This dissertation is based on the self-closed fiber F-P sensor, its basic strain property was studied and its applications were explored. The main work and accomplishments were as follows
1. The 157nm excimer laser micro-machining technique and the process of fabricating self-closed micro-fiber F-P sensor were described. Computer simulation indicated that the signal quality could be improved by increasing the reflectivity of fiber ends in the F-P cavity. This thesis presents a self-enclosed micro extrinsic fiber-optic Fabry- Pérot Interferometric (MEFPI) sensor, fabricated by laser micro-machining a hole on the end surface of a single-mode pure silica fiber and then coated by a Cr film and finally spliced to another coated fiber by using a fusion splicing machine. This type of sensor has the advantages of high reflective signal level, good visibility, insensitive to temperature change, et al. and is quite suitable to precise strain measurement.
2. The basic strain property of this sensor in the range of 0με-550μεunder room temperature, and temperature property in the range of -20℃-110℃were studied. The experiment result showed the novel structure fiber F-P sensor employed good strain linear response (linearity of 0.9992) and insensitivity to temperature (sensitivity of 13.8pm/℃). It could be used as a regular strain sensor, applied in healthy monitoring of large buildings such as high way, bridge and dam.
3. Demodulation system for dynamic strain signal was studied, by using the self-calibrated interferometric-intensity-based method (SCIIB). The experimental results showed self-calibration dual channel intensity demodulation system could be used to develop simple, low cost, miniature, reliable and sensitive detecting systems.
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