正交偏振激光干涉振动测量方法与实验研究
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摘要
在纳米精密定位和位移监测领域中,激光干涉技术是应用最为广泛的一种非接触式精密测量技术,它可用于精密机床、大规模集成电路加工设备等的在线测量、误差修正和控制,因此在精密测量中占据着重要地位。其中非线性误差是影响干涉仪测量精度的主要因素之一,也是本文对干涉仪性能的主要评价方法。
本文研究了一种零差偏振激光干涉仪,它可以用于纳米级的微小位移测量,具有高分辨率、高精度的特点。干涉仪中光学元件的参数误差和位置误差是引入非线性误差的主要原因,也是本文研究的重点。
本文基于偏振光的琼斯矩阵理论,研究了正交偏振激光干涉仪的误差产生原因和作用机理,深入研究了光路的调整及其误差的补偿。主要的研究内容和取得的成果可归纳如下:
首先建立了正交偏振激光干涉仪中光学元件的误差模型,对各偏振元器件对干涉测量的误差影响进行了计算与仿真,其中,各元件中波片对干涉仪系统的影响最大,其参数在1°～5°的误差范围内系统非线性误差最大可达8.8nm。根据仿真所得的误差范围可以选择性能符合实验要求的器件参数,并且其计算结果对光路的调整也具有理论指导作用;
其次在理论分析的基础上选择了性能符合要求的光学元件和机械结构,搭建了正交偏振激光干涉仪的光路系统,在搭建过程中提出了元件参数的在线评价方法,从而简化了干涉仪的搭建过程。根据元件对光路中各处光强的影响和信号构成的李萨如图形,总结出一套干涉仪元器件的调整方法,这种方法可以有效地降低系统的非线性误差。
最后应用调整好的干涉仪进行实际测量,并计算出调整后的系统非线性误差为10nm,较调整前降低了80%,为后续的信号处理提供了良好的测量信号,使干涉仪的测量精度达到了纳米量级。
In the field of monitors of nanometer precise localization and displacement, the laser interferometer is non-contact and high precision measurement technology which is widely applied. It has been used in online measure, error compensating and control of exactitude machine tools, equipment applied in Large Scale Integration Circuit. It takes up an important position in the area of high precision measurement because of its reliability and practicability . Nonlinear error is an important factor which affects interferometer, and it is also important as an evaluation method in this paper.
In this paper, a homodyne polarized laser interferometer had been researched. It could be used in high resolution, and high precision measurement of nanometer precise displacement.Parameter error and position error of optical components were important factors which affect nonlinear, so they were the key in this paper.
Based on Jones matrices theory, the error source and action mechanism of polarized interferometer are analyzed by using four-channel orthogonal signals in nanometer level measurement. The main works and contributions achieved in this dissertation are concluded as follows:
Firstly, an error model of the orthogonal polarize laser interferometer had been founded; and the effect and error of the polarization caused by each optical component were calculated and evaluated, in which wave plates affected interferometer the most. When its parameter error was 1°～5°, the system error was up to 8.8nm.We can select the the optical components and adjust optimal based on simulation results.
Secondly, all the optical components and mechanical structures were selected based on theoretical analisis, the optical system was put up. And on-line evaluation had been used durting setting up the optical system, which simplified the process. The method of optimal adjusting was summarized on the base of the effect on the intensity and the lissajous figure.This method could decrease the nonlinear effectively.
Lastly, the displacement measurement experiment had been done, and the nonlinear error after adjusting was 10nm, 80% lower than before, which applied good messuring signals to the signal processing system,and made the measuring precision of system reached nanometer magnitude.
本文研究了一种零差偏振激光干涉仪,它可以用于纳米级的微小位移测量,具有高分辨率、高精度的特点。干涉仪中光学元件的参数误差和位置误差是引入非线性误差的主要原因,也是本文研究的重点。
本文基于偏振光的琼斯矩阵理论,研究了正交偏振激光干涉仪的误差产生原因和作用机理,深入研究了光路的调整及其误差的补偿。主要的研究内容和取得的成果可归纳如下:
首先建立了正交偏振激光干涉仪中光学元件的误差模型,对各偏振元器件对干涉测量的误差影响进行了计算与仿真,其中,各元件中波片对干涉仪系统的影响最大,其参数在1°～5°的误差范围内系统非线性误差最大可达8.8nm。根据仿真所得的误差范围可以选择性能符合实验要求的器件参数,并且其计算结果对光路的调整也具有理论指导作用;
其次在理论分析的基础上选择了性能符合要求的光学元件和机械结构,搭建了正交偏振激光干涉仪的光路系统,在搭建过程中提出了元件参数的在线评价方法,从而简化了干涉仪的搭建过程。根据元件对光路中各处光强的影响和信号构成的李萨如图形,总结出一套干涉仪元器件的调整方法,这种方法可以有效地降低系统的非线性误差。
最后应用调整好的干涉仪进行实际测量,并计算出调整后的系统非线性误差为10nm,较调整前降低了80%,为后续的信号处理提供了良好的测量信号,使干涉仪的测量精度达到了纳米量级。
In the field of monitors of nanometer precise localization and displacement, the laser interferometer is non-contact and high precision measurement technology which is widely applied. It has been used in online measure, error compensating and control of exactitude machine tools, equipment applied in Large Scale Integration Circuit. It takes up an important position in the area of high precision measurement because of its reliability and practicability . Nonlinear error is an important factor which affects interferometer, and it is also important as an evaluation method in this paper.
In this paper, a homodyne polarized laser interferometer had been researched. It could be used in high resolution, and high precision measurement of nanometer precise displacement.Parameter error and position error of optical components were important factors which affect nonlinear, so they were the key in this paper.
Based on Jones matrices theory, the error source and action mechanism of polarized interferometer are analyzed by using four-channel orthogonal signals in nanometer level measurement. The main works and contributions achieved in this dissertation are concluded as follows:
Firstly, an error model of the orthogonal polarize laser interferometer had been founded; and the effect and error of the polarization caused by each optical component were calculated and evaluated, in which wave plates affected interferometer the most. When its parameter error was 1°～5°, the system error was up to 8.8nm.We can select the the optical components and adjust optimal based on simulation results.
Secondly, all the optical components and mechanical structures were selected based on theoretical analisis, the optical system was put up. And on-line evaluation had been used durting setting up the optical system, which simplified the process. The method of optimal adjusting was summarized on the base of the effect on the intensity and the lissajous figure.This method could decrease the nonlinear effectively.
Lastly, the displacement measurement experiment had been done, and the nonlinear error after adjusting was 10nm, 80% lower than before, which applied good messuring signals to the signal processing system,and made the measuring precision of system reached nanometer magnitude.
引文
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[4]黎永前.纳米精度测量与校准系统关键技术研究[D].西安:西北工业大学,2003.
[5]Wenmei Hou.Optical parts and the nonlinearity in heterodyne interferometers[J].Precision Engineering,2006,30(3):337-346P
[6]杜振辉,蒋诚志,桂垣,王斌.激光干涉仪测量长度[J].河北建筑工程学院学报,2003,21(2):1-37页
[7]Wen Hou,Zhao Xian-bin.Drift of nonlinearity in heterodyne interferometer [J].Precision Engineering,1994,16:25-35P
[8]Wen Hou,Wilkening G.Investigation and compensation of the Nonlinearity of heterodyne interferometer[J].Precision Engineering,1992,14:91-98P
[9]陈洪芳,丁雪梅,钟志等.激光外差干涉检偏器旋转误差对非线性误差的影响.中国激光,2005,32(9):1281-1285页
[10]钟志,谭久彬,陈洪芳等.偏振分光镜传输系数不等对非线性误差的影响.光电工程,2005,32(9):27-30页
[11]赵美蓉,曲兴华,陆伯印.光程差倍增的纳米级精度激光干涉仪.中国激光,2000,24(5):431-434页
[12]韩旭东,艾华.光路移相单频激光干涉测长系统.光学技术,2004,30(2):195-198页
[13]Xinqun Liu,Warwick Clegg,David F.L.Jenkins,et.al.Polarization Interferometer for Measuring Small Displacement.IEEE Transactions on instrumentation and measurement 2001,50(4):868-871P
[14]郭新军,王霁,严家骅等.一种纳米精度偏振干涉仪光学系统的研究.红 外与激光工程,2004,33(1):21-24页
[15]基于Koester棱镜的单频干涉仪.王力,侯文玫.计量技术,2006(11):29-32页
[16]Greco V,Iemmi C,Ledesma S,et.al.Three2channel homo2dyne interferometer[J].Appl Opt,1994,33(34):8115-8116P
[17]单频激光干涉仪四通道信号接收系统.王力,侯文玫.计量学报,2006,10,27(4):313-316页
[18]ZYGO公司主页.http://www.zygo.com.2003.
[19]双频激光干涉仪技术现状与发展.所睿,范志军.激光与红外,2004,8,34(4):251-253页
[20]Renishaw公司主页.http://www.renishaw.com.2003.
[21]石顺祥,物理光学与应用光学.西安:西安电子科技大学出版社,2000.23-24页
[22]廖延彪.偏振光学.北京:科学出版社,2003.57页
[23]偏光棱镜透射比研究.孔凡震.曲阜师范大学,2006.4,9页
[24]赵凯华,钟锡华.光学[M]北京:北京大学出版社,2001.257页
[25]柳清菊,林理忠,普小云等.一种新型高偏振度的偏振分光棱镜[J].LASER JOURNAL,1997,118:25-28页
[26]多入射方向的偏振分光棱镜的结构及其应用.孙远航,王维列,真空电子技术,2007,3:69页
[27]杨国光.近代光学测试技术[M].杭州:浙江大学出版社,1997.
[28]谢敬辉,赵达尊,阎吉祥.物理光学教程[M].北京:北京理工大学出版社,2005.
[29]严家骅.纳米校准技术研究[R].北京:长城计量测试研究所,2000.
[30]Downs MJ,Nunn J W.Verification of the sub-nanometric of an NPL differential plane mirror interferometer with a capacitance probe[J].Meas Sci Technol,1998,9(7-9):1437-1440P
[31]一种纳米精度偏振干涉仪光学系统的研究.郭新军,王霁.红外与激光工程,2004,2,33(1):21-22页
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