基于压电厚膜的MEMS振动能量采集器研究
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摘要
微机械加工、微电子以及无线传感等技术发展迅速，使得射频识别系统、嵌入式系统、无线传感器以及它们形成的无线传感网络广泛地应用于日常生活中。这类微器件的功耗越来越低，能够低至微瓦量级。但要求相应的供电部件体积小、集成度高、寿命长甚至无人看管、无需更换等。传统的化学电池供电方式由于存在体积和质量较大、供能时间有限等缺点，已经无法满足这些微器件的供能要求。借助于能量采集技术将自然界广泛存在的各种振动能量转换为电能，从而为微电子器件持久供电是一种有效的解决方案。基于MEMS技术制备的能量采集器能够与各种微器件集成加工在一起，可以实现微器件的集成化和自供能，因此，正受到国内外许多研究小组的关注和重视。
本文主要围绕基于压电厚膜的MEMS能量采集器展开研究。在分析总结国内外相关研究工作的基础上，提出一种基于压电厚膜的MEMS振动能量采集器设计方案，建立了压电式振动能量采集器的机电耦合模型，优化了器件的结构参数，在基于键合和减薄技术制备性能优异的压电厚膜基础上，采用成本较低的体硅微加工技术等MEMS工艺制作了高性能的压电能量采集器实验样机，最后对所制备的实验样机进行了测试，并对实验结果进行了详细分析和讨论。论文的主要研究工作包括：
1、提出了基于压电厚膜的MEMS压电振动能量采集器设计方案。针对MEMS压电能量采集器，从结构类型、材料选用、工作模式等方面进行分析，在此基础上结合实际制备工艺，设计了以PZT和PMNT单晶材料作为压电功能层，压电悬臂梁作为能量采集器的主体结构，并在梁自由端部添加镍金属质量块的两种压电能量采集器结构共三类器件，即铜梯形结构PZT压电能量采集器、硅矩形结构PZT和PMNT压电能量采集器。
2、建立了压电式振动能量采集器的机电耦合模型，分析了压电能量采集器的结构参数（主要有压电悬臂梁和质量块长度、支撑层和压电材料厚度、悬臂梁宽度和质量块高度）对器件谐振频率和负载输出功率密度的影响，讨论了各参数之间的相互耦合关系；此外，分析了环氧树脂键合层厚度对器件输出性能的影响以及器件结构稳定性问题，最后给出了合理的压电能量采集器的结构参数。
3、研究了一种基于键合和减薄技术的高性能压电厚膜制备及其图形化方法。论文采用导电环氧树脂作为中间粘接层实现PZT（PMNT）和Si基片的结合，在键合压力为0.1Mpa、固化温度175℃的优化键合参数条件下，可获得15Mpa以上的键合强度；采用机械研磨与湿法刻蚀相结合方法实现压电体材的减薄，成功制备出了厚度可控（PZT:10～100μm，PMNT:5～100μm）、结构致密以及性能优异的压电厚膜。采用湿法刻蚀或机械微切割方法实现压电厚膜微图形化问题，其中，湿法化学刻蚀方法刻蚀压电厚膜后图形边缘过刻蚀严重，适用于对压电厚膜图形化要求不高的场所，而机械微切割方法具有简单、快速、准确等优点，适用于矩形结构悬臂梁的图形化。
4、研究了微压电能量采集器的MEMS加工方法及其实现过程，包括金属质量块、铜梯形压电悬臂梁和硅矩形压电悬臂梁的加工制备。所涉及的MEMS工艺主要包括光刻、溅射、刻蚀、基于UV-LIGA的SU8胶工艺、微电镀等，探讨了具体的工艺参数及其测控方法。最后根据设计的工艺方案，制备了三种MEMS压电能量采集器样机。
5、采用由激振系统、振动监测系统和电学测试系统构成的能量采集器测试系统对实验样机性能进行测试研究，包括谐振频率、电压输出、功率输出、整流与电容存储等相关参量和特性，研究了振源加速度和频率等因素对器件输出性能的影响规律，并就有关数据与理论计算结果进行了对比，结果表明理论和实验值所得规律一致，数值比较吻合。根据测试，铜梯形结构的实验样机的最佳输出：在1.0g加速度、1010Hz的振动激励下，最大负载输出功率为1.43μW，相应的功率密度为7889.7μW/cm~3；硅矩形结构PZT实验样机最佳性能：1.0g加速度、514.1Hz的振动激励下，输出交流开路电压5.04VP-P，最大负载输出功率11.56μW，功率密度约28856.7μW/cm~3；硅矩形结构PMNT实验样机最佳性能：1.0g加速度、237.4Hz的振动激励下，器件的最大负载输出功率为2.704μW，功率密度达5352.3μW/cm~3。
6、研究了压电能量采集器样机在液体（硅油）环境中的输出特性。对比分析了器件在硅油和空气两种环境中的输出性能。测试表明，在1g振源加速度条件下，器件在硅油液体环境中的阻尼比约为其在空气环境中2倍，这使得器件在硅油环境中的谐振频率和输出功率更低，分别较空气环境中减少了28.16%和85.89%，但有效频带宽度提高了52.98%。因此，可以利用改变器件的运行环境来增加能量采集器的工作带宽，从而为实现能量采集器的宽频带工作提供了一种可能的解决方案。
With the rapid development of microelectronics, micro-machining technology andwireless sensing technology, the embedded systems, radio frequency identification systemsand wireless sensor network have been widely used in daily life. The power consumptionof these devices is very low and even with the level of microwatts. However, their powersupply should be featured with small/micro volume, long life, replacing needless andself-service. Traditional battery can’t satisfy all the demands apparently for its largevolume, high weight, the limited energy supply time and other shortcomings. Energyharvester can convert vibrational energy from environment into electrical energy andreplace the conventional power source for micro devices. On the other hand, the vibrationenergy harvester based on MEMS technology can be well integrated with manymicro-electronic chips, micro-sensors and micro-actuators, and supply micro-devices withlasting, stable and clean electric energy. At present, the MEMS piezoelectric energyharvester has become the research hotspot of many international research groups due to itsbroad application.
This dissertation mainly focuses on piezoelectric MEMS energy harvester based onpiezoelectric thick film. On the basis of domestic and international research work, a designscheme of MEMS vibration energy harvester based on piezoelectric thick film is presentedin this work. The electromechanical coupling model of piezoelectric vibration energyharvester is established and the structural parameters of the device are optimized. Inaddition, piezoelectric thick film with superior performance is prepared by using bondingand thinning techniques and then the energy harvester prototype is fabricated by MEMSprocess. Finally, the performance of the fabricated prototype is characterized and analyzedtotally. The detailed work and the conclusion of this dissertation are as following:
1. A design scheme of MEMS vibration energy harvester based on piezoelectric thick film is presented. Based on the design requirement of MEMS piezoelectric energyharvester, the structural type, material selection and operating mode are analyzed. On thisbasis, three types of the piezoelectric energy harvester with cantilever/mass compositestructure are proposed, namely, copper-based trapezoidal PZT cantilever, silicon-basedPZT and PMNT cantilevers.
2. The electromechanical coupling model of the piezoelectric vibration energyharvester is created. The effect of the structural parameters on the natural frequency andpower density output is analyzed. These main parameters include the length ofpiezoelectric cantilever beam and proof mass, the thickness of supporting layer andpiezoelectric layer and the width of cantilever beam and proof mass. In addition, the effectof epoxy resin as the bonding layer is also discussed and structural stability of the device isanalyzed. Finally, the energy harvester structure dimensions are determined based on theanalytical results and the feasibility of fabrication techniques.
3. The piezoelectric thick film with excellent piezoelectric properties is developedbased on bonding and thinning technique and its patterning technique is proposed.Conductive epoxy resin is used as the intermediate adhesive layer for a low temperaturePZT (PMNT)-Si bonding. A bonding strength of more than15Mpa has been obtainedunder the optimum bonding parameters with0.1Mpa bonding pressure and175°C bondedcuring temperature. The mechanical lapping and wet-etching combined method isproposed to thin bulk PZT and the thickness of PZT and PMNT film can be controlled atthe range of10~100μm and5~100μm, respectively. The fabricated piezoelectric thickfilms are characterized and the testing results show that the ferroelectric and dielectricproperties of the PZT thick films obtained here is close to that of bulk materials. Inaddition, wet etching and mechanical dicing methods are deployed to pattern the preparedpiezoelectric thick film.
4. The piezoelectric vibration energy harvester prototypes are fabricated by MEMSmicromachining technique. The involved technologies include piezoelectric thick filmpreparation, electrode deposition, optical lithography, and etching process, UV-LIGA basedSU8process, micro-electroforming, etc. The detail process parameters are studied, andrelated process control and improvement issues are discussed.
5. The output performance of the energy harvester prototype is measured by the testing platform including excitation system, vibration monitoring system and electricaltest system. The natural frequency, output voltage, maximum output power andrectification and capacitance storage experiment are measured or carried out. Goodagreement between theory analysis and testing results is obtained. The maximal outputpower and power density for the prototype with Cu trapezoidal beam structure are1.43μWand7889.7μW/cm~3under1.0g acceleration and1010Hz resonant frequency, respectively.The output voltage, power and power density of the silicon-based PZT cantilever prototypeare5.04VP-P,11.56μW and28856.7μW/cm~3under1.0g acceleration and514.1Hz resonantfrequency, respectively. The output voltage, power and power density of silicon-basedPMNT cantilever prototype are2.08VP-P,2.704μW and5352.3μW/cm~3under the vibrationexcitation of1.0g acceleration and237.4Hz, respectively.
6. The output performance of piezoelectric energy harvester prototype in liquidenvironment (silicone oil) is studied. The testing results show that the damping ratio of thedevice in the silicone oil environment is about two times larger than that in the airenvironment at the vibration excitation of1.0g acceleration, which results in lower outputvoltage, resonant frequency and broad bandwidth. The resonant frequency and outputpower of the device in the liquid environment is decreased by28.16%and85.89%respectively, while the effective bandwidth is increased by52.98%, compared with that ofthe device in the air environment. So the liquid environment can be used to realize thewideband operation of energy harvester.
本文主要围绕基于压电厚膜的MEMS能量采集器展开研究。在分析总结国内外相关研究工作的基础上，提出一种基于压电厚膜的MEMS振动能量采集器设计方案，建立了压电式振动能量采集器的机电耦合模型，优化了器件的结构参数，在基于键合和减薄技术制备性能优异的压电厚膜基础上，采用成本较低的体硅微加工技术等MEMS工艺制作了高性能的压电能量采集器实验样机，最后对所制备的实验样机进行了测试，并对实验结果进行了详细分析和讨论。论文的主要研究工作包括：
1、提出了基于压电厚膜的MEMS压电振动能量采集器设计方案。针对MEMS压电能量采集器，从结构类型、材料选用、工作模式等方面进行分析，在此基础上结合实际制备工艺，设计了以PZT和PMNT单晶材料作为压电功能层，压电悬臂梁作为能量采集器的主体结构，并在梁自由端部添加镍金属质量块的两种压电能量采集器结构共三类器件，即铜梯形结构PZT压电能量采集器、硅矩形结构PZT和PMNT压电能量采集器。
2、建立了压电式振动能量采集器的机电耦合模型，分析了压电能量采集器的结构参数（主要有压电悬臂梁和质量块长度、支撑层和压电材料厚度、悬臂梁宽度和质量块高度）对器件谐振频率和负载输出功率密度的影响，讨论了各参数之间的相互耦合关系；此外，分析了环氧树脂键合层厚度对器件输出性能的影响以及器件结构稳定性问题，最后给出了合理的压电能量采集器的结构参数。
3、研究了一种基于键合和减薄技术的高性能压电厚膜制备及其图形化方法。论文采用导电环氧树脂作为中间粘接层实现PZT（PMNT）和Si基片的结合，在键合压力为0.1Mpa、固化温度175℃的优化键合参数条件下，可获得15Mpa以上的键合强度；采用机械研磨与湿法刻蚀相结合方法实现压电体材的减薄，成功制备出了厚度可控（PZT:10～100μm，PMNT:5～100μm）、结构致密以及性能优异的压电厚膜。采用湿法刻蚀或机械微切割方法实现压电厚膜微图形化问题，其中，湿法化学刻蚀方法刻蚀压电厚膜后图形边缘过刻蚀严重，适用于对压电厚膜图形化要求不高的场所，而机械微切割方法具有简单、快速、准确等优点，适用于矩形结构悬臂梁的图形化。
4、研究了微压电能量采集器的MEMS加工方法及其实现过程，包括金属质量块、铜梯形压电悬臂梁和硅矩形压电悬臂梁的加工制备。所涉及的MEMS工艺主要包括光刻、溅射、刻蚀、基于UV-LIGA的SU8胶工艺、微电镀等，探讨了具体的工艺参数及其测控方法。最后根据设计的工艺方案，制备了三种MEMS压电能量采集器样机。
5、采用由激振系统、振动监测系统和电学测试系统构成的能量采集器测试系统对实验样机性能进行测试研究，包括谐振频率、电压输出、功率输出、整流与电容存储等相关参量和特性，研究了振源加速度和频率等因素对器件输出性能的影响规律，并就有关数据与理论计算结果进行了对比，结果表明理论和实验值所得规律一致，数值比较吻合。根据测试，铜梯形结构的实验样机的最佳输出：在1.0g加速度、1010Hz的振动激励下，最大负载输出功率为1.43μW，相应的功率密度为7889.7μW/cm~3；硅矩形结构PZT实验样机最佳性能：1.0g加速度、514.1Hz的振动激励下，输出交流开路电压5.04VP-P，最大负载输出功率11.56μW，功率密度约28856.7μW/cm~3；硅矩形结构PMNT实验样机最佳性能：1.0g加速度、237.4Hz的振动激励下，器件的最大负载输出功率为2.704μW，功率密度达5352.3μW/cm~3。
6、研究了压电能量采集器样机在液体（硅油）环境中的输出特性。对比分析了器件在硅油和空气两种环境中的输出性能。测试表明，在1g振源加速度条件下，器件在硅油液体环境中的阻尼比约为其在空气环境中2倍，这使得器件在硅油环境中的谐振频率和输出功率更低，分别较空气环境中减少了28.16%和85.89%，但有效频带宽度提高了52.98%。因此，可以利用改变器件的运行环境来增加能量采集器的工作带宽，从而为实现能量采集器的宽频带工作提供了一种可能的解决方案。
With the rapid development of microelectronics, micro-machining technology andwireless sensing technology, the embedded systems, radio frequency identification systemsand wireless sensor network have been widely used in daily life. The power consumptionof these devices is very low and even with the level of microwatts. However, their powersupply should be featured with small/micro volume, long life, replacing needless andself-service. Traditional battery can’t satisfy all the demands apparently for its largevolume, high weight, the limited energy supply time and other shortcomings. Energyharvester can convert vibrational energy from environment into electrical energy andreplace the conventional power source for micro devices. On the other hand, the vibrationenergy harvester based on MEMS technology can be well integrated with manymicro-electronic chips, micro-sensors and micro-actuators, and supply micro-devices withlasting, stable and clean electric energy. At present, the MEMS piezoelectric energyharvester has become the research hotspot of many international research groups due to itsbroad application.
This dissertation mainly focuses on piezoelectric MEMS energy harvester based onpiezoelectric thick film. On the basis of domestic and international research work, a designscheme of MEMS vibration energy harvester based on piezoelectric thick film is presentedin this work. The electromechanical coupling model of piezoelectric vibration energyharvester is established and the structural parameters of the device are optimized. Inaddition, piezoelectric thick film with superior performance is prepared by using bondingand thinning techniques and then the energy harvester prototype is fabricated by MEMSprocess. Finally, the performance of the fabricated prototype is characterized and analyzedtotally. The detailed work and the conclusion of this dissertation are as following:
1. A design scheme of MEMS vibration energy harvester based on piezoelectric thick film is presented. Based on the design requirement of MEMS piezoelectric energyharvester, the structural type, material selection and operating mode are analyzed. On thisbasis, three types of the piezoelectric energy harvester with cantilever/mass compositestructure are proposed, namely, copper-based trapezoidal PZT cantilever, silicon-basedPZT and PMNT cantilevers.
2. The electromechanical coupling model of the piezoelectric vibration energyharvester is created. The effect of the structural parameters on the natural frequency andpower density output is analyzed. These main parameters include the length ofpiezoelectric cantilever beam and proof mass, the thickness of supporting layer andpiezoelectric layer and the width of cantilever beam and proof mass. In addition, the effectof epoxy resin as the bonding layer is also discussed and structural stability of the device isanalyzed. Finally, the energy harvester structure dimensions are determined based on theanalytical results and the feasibility of fabrication techniques.
3. The piezoelectric thick film with excellent piezoelectric properties is developedbased on bonding and thinning technique and its patterning technique is proposed.Conductive epoxy resin is used as the intermediate adhesive layer for a low temperaturePZT (PMNT)-Si bonding. A bonding strength of more than15Mpa has been obtainedunder the optimum bonding parameters with0.1Mpa bonding pressure and175°C bondedcuring temperature. The mechanical lapping and wet-etching combined method isproposed to thin bulk PZT and the thickness of PZT and PMNT film can be controlled atthe range of10~100μm and5~100μm, respectively. The fabricated piezoelectric thickfilms are characterized and the testing results show that the ferroelectric and dielectricproperties of the PZT thick films obtained here is close to that of bulk materials. Inaddition, wet etching and mechanical dicing methods are deployed to pattern the preparedpiezoelectric thick film.
4. The piezoelectric vibration energy harvester prototypes are fabricated by MEMSmicromachining technique. The involved technologies include piezoelectric thick filmpreparation, electrode deposition, optical lithography, and etching process, UV-LIGA basedSU8process, micro-electroforming, etc. The detail process parameters are studied, andrelated process control and improvement issues are discussed.
5. The output performance of the energy harvester prototype is measured by the testing platform including excitation system, vibration monitoring system and electricaltest system. The natural frequency, output voltage, maximum output power andrectification and capacitance storage experiment are measured or carried out. Goodagreement between theory analysis and testing results is obtained. The maximal outputpower and power density for the prototype with Cu trapezoidal beam structure are1.43μWand7889.7μW/cm~3under1.0g acceleration and1010Hz resonant frequency, respectively.The output voltage, power and power density of the silicon-based PZT cantilever prototypeare5.04VP-P,11.56μW and28856.7μW/cm~3under1.0g acceleration and514.1Hz resonantfrequency, respectively. The output voltage, power and power density of silicon-basedPMNT cantilever prototype are2.08VP-P,2.704μW and5352.3μW/cm~3under the vibrationexcitation of1.0g acceleration and237.4Hz, respectively.
6. The output performance of piezoelectric energy harvester prototype in liquidenvironment (silicone oil) is studied. The testing results show that the damping ratio of thedevice in the silicone oil environment is about two times larger than that in the airenvironment at the vibration excitation of1.0g acceleration, which results in lower outputvoltage, resonant frequency and broad bandwidth. The resonant frequency and outputpower of the device in the liquid environment is decreased by28.16%and85.89%respectively, while the effective bandwidth is increased by52.98%, compared with that ofthe device in the air environment. So the liquid environment can be used to realize thewideband operation of energy harvester.
引文
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