电子散斑相移测量物体三维形貌
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摘要
电子散斑干涉法在逆向工程、机器视觉、无损检测、产品的在线监测,特别是物体三维形貌的测量上有着广泛的应用前景,是光学测量的重要分支,具有全场性、高精度、非接触的优点。电子散斑形貌测量技术基于传统的散斑干涉技术,而且具有散斑干涉的一系列优点。
本文就电子散斑干涉法与相移法和傅里叶变换法结合测量物体三维形貌进行了研究与讨论。介绍了散斑的成因和产生方法,回顾了三维形貌测量的发展过程,从理论和实践两个方面对电子散斑干涉法进行了深入的研究。电子散斑干涉测量形貌的基本原理是光的干涉,取两束光强相等的光束分别作为物光和参考光,使物光和参考光发生相干干涉,从而产生明暗相间的散斑干涉条纹。若待测表面是平面,则干涉条纹是间距相等的直条纹。由于物面高度的起伏变化,会使干涉条纹发生弯曲变形,而物面的相位信息就包含在弯曲变形的干涉条纹里。采集系统采用CCD摄像机,计算机针对获取的变形条纹图进行滤波、去噪以及实时相减等一系列图像处理,提取相位信息,进而重构出物体表面的三维形貌。
通过把相移技术和散斑干涉结合起来,本文详细阐述了形貌测量的原理,提出了一种利用电子散斑相移技术测量物体三维形貌的实验方法。该方法以电子散斑为信息载体产生干涉条纹,利用相移技术对待测物面施加相移,实现相位变化。对实验测量中的关键技术,如相位提取、相位解包算法和相移方法进行了深入的探讨。基于理论讨论,本文分别从产生条纹的方法(例如投影栅线和电子散斑干涉)和提取相位的方法(例如相移法和傅里叶变换法)两个方面进行实验研究,以四步相移为例利用计算机模拟了圆柱体的表面形貌;基于电子散斑干涉的原理,分别用相移法和傅里叶变换法两种相位测量方法测量了球冠的表面形貌,得到了较满意的实验结果。
Electronic speckle pattern interferometry in reverse engineering, machine vision, NDT products online monitoring, especially in the measurement of 3-D shape of object has a broad prospect of application. Is an important branch of the optical measurement, with the advantages of whole field, high accuracy and non-contact. Based on the traditional speckle pattern interferomery, Electronic speckle pattern interferometry has a series of advantages of speckle pattern interferomery.
In this paper, the combing with electronic speckle pattern interferometry and phase-shifting and the combing with electronic speckle pattern interferometry with Fourier transform are studied and discussed. In this paper, the cause of formation and generation methods of speckle pattern have been introduced. From two aspects of theory and practice of electronic speckle interfering method is studied, through Reviewing the development of 3-D shape measurement process. The basic principle of measuring 3-D shape with Electronic speckle pattern interferometry is light interference, that is taking two light beams with equal light intensity as object light and reference light respectively. Making object light and reference light interference in order to produce speckle interference fringes. If the measured surface is flat, the interference fringes are straight. Because of the surface height fluctuation the object has, the interference fringes become bend. And the phase information that is included in the bending deformation in the interference fringes. CCD camera is used in Acquisition system. For deformation of the computer access fringe image processing, such as filtering, de-noising and a series of real-time subtraction, then information and extracting phase are worked out, and 3-D surface shape can be reconstructed.
Through combining phase-shifting with speckle pattern interference, this paper explains the principle of the 3-D shape measurement in detail, and put forward a kind of experiment al method that is using electronic speckle phase shift technique to measure object’s 3-D shape. This method takes the electronic speckle pattern for information carrier interfere stripe, and uses the phase-shifting in order to change the measured phase. The key to the experimental measurement technique such as phase extraction, phase unwarping algorithm and phase-shifting method has been thoroughly discussed in the paper. Based on the theoretical discussion, the experiments are taken on two methods such as the methods to produce fringes(e.g. projection line and electronic speckle interference) and extraction phase methods(e.g. phase-shifting and Fourier transform). To four step phase-shifting, for example, a cylinder surface topography can be simulated by using computer. Based on the principle of electronic speckle interference, respectively for phase-shifting and Fourier transform, the methods of measuring the ball surface topography of the crown obtained satisfactory results of the experiment.
本文就电子散斑干涉法与相移法和傅里叶变换法结合测量物体三维形貌进行了研究与讨论。介绍了散斑的成因和产生方法,回顾了三维形貌测量的发展过程,从理论和实践两个方面对电子散斑干涉法进行了深入的研究。电子散斑干涉测量形貌的基本原理是光的干涉,取两束光强相等的光束分别作为物光和参考光,使物光和参考光发生相干干涉,从而产生明暗相间的散斑干涉条纹。若待测表面是平面,则干涉条纹是间距相等的直条纹。由于物面高度的起伏变化,会使干涉条纹发生弯曲变形,而物面的相位信息就包含在弯曲变形的干涉条纹里。采集系统采用CCD摄像机,计算机针对获取的变形条纹图进行滤波、去噪以及实时相减等一系列图像处理,提取相位信息,进而重构出物体表面的三维形貌。
通过把相移技术和散斑干涉结合起来,本文详细阐述了形貌测量的原理,提出了一种利用电子散斑相移技术测量物体三维形貌的实验方法。该方法以电子散斑为信息载体产生干涉条纹,利用相移技术对待测物面施加相移,实现相位变化。对实验测量中的关键技术,如相位提取、相位解包算法和相移方法进行了深入的探讨。基于理论讨论,本文分别从产生条纹的方法(例如投影栅线和电子散斑干涉)和提取相位的方法(例如相移法和傅里叶变换法)两个方面进行实验研究,以四步相移为例利用计算机模拟了圆柱体的表面形貌;基于电子散斑干涉的原理,分别用相移法和傅里叶变换法两种相位测量方法测量了球冠的表面形貌,得到了较满意的实验结果。
Electronic speckle pattern interferometry in reverse engineering, machine vision, NDT products online monitoring, especially in the measurement of 3-D shape of object has a broad prospect of application. Is an important branch of the optical measurement, with the advantages of whole field, high accuracy and non-contact. Based on the traditional speckle pattern interferomery, Electronic speckle pattern interferometry has a series of advantages of speckle pattern interferomery.
In this paper, the combing with electronic speckle pattern interferometry and phase-shifting and the combing with electronic speckle pattern interferometry with Fourier transform are studied and discussed. In this paper, the cause of formation and generation methods of speckle pattern have been introduced. From two aspects of theory and practice of electronic speckle interfering method is studied, through Reviewing the development of 3-D shape measurement process. The basic principle of measuring 3-D shape with Electronic speckle pattern interferometry is light interference, that is taking two light beams with equal light intensity as object light and reference light respectively. Making object light and reference light interference in order to produce speckle interference fringes. If the measured surface is flat, the interference fringes are straight. Because of the surface height fluctuation the object has, the interference fringes become bend. And the phase information that is included in the bending deformation in the interference fringes. CCD camera is used in Acquisition system. For deformation of the computer access fringe image processing, such as filtering, de-noising and a series of real-time subtraction, then information and extracting phase are worked out, and 3-D surface shape can be reconstructed.
Through combining phase-shifting with speckle pattern interference, this paper explains the principle of the 3-D shape measurement in detail, and put forward a kind of experiment al method that is using electronic speckle phase shift technique to measure object’s 3-D shape. This method takes the electronic speckle pattern for information carrier interfere stripe, and uses the phase-shifting in order to change the measured phase. The key to the experimental measurement technique such as phase extraction, phase unwarping algorithm and phase-shifting method has been thoroughly discussed in the paper. Based on the theoretical discussion, the experiments are taken on two methods such as the methods to produce fringes(e.g. projection line and electronic speckle interference) and extraction phase methods(e.g. phase-shifting and Fourier transform). To four step phase-shifting, for example, a cylinder surface topography can be simulated by using computer. Based on the principle of electronic speckle interference, respectively for phase-shifting and Fourier transform, the methods of measuring the ball surface topography of the crown obtained satisfactory results of the experiment.
引文
[1.1]童竞著.几何量测量
[M].北京:机械工业出版社,1988.
[1.2]周明宝,林大健,郭履容.微结构表面形貌的测量
[J].光学精密工程,1999,7(3):7-13.
[1.3]朴伟英,袁怡宝.叠栅条纹信号细分误差的一种动态补偿方法
[J].光学学报,2008,28(7):1301-1306.
[1.4]毛先富,苏显渝,陈文静等.改进傅里叶变换轮廓术的测量算法研究
[J].光学学报,2008,28(7):1291-1295.
[1.5]陆鹏.应用自动相移影像云纹法测量物体的三维形貌
[J].柴油机,2007,29(2):51-53.
[1.6]孙平,张丽,陶春先.基于LCD数字投影技术的傅里叶变换法测量物体三维形貌
[J].光子学报,2005,34(8):1250-1252.
[1.7]曾毅.激光散斑测量应用研究.硕士学位论文,2005.
[2.1]杨国光主编.近代光学测试技术
[M].北京:机械工业出版社,1986年12月:131-184.
[2.2]曲芳,钟金刚.数字相移技术用于不连续复杂物体的三维面形测量
[J].光学技术,2004,30(4):478-483.
[2.3]王吉元.四步相移干涉测量的相位补偿及仿真
[J].西安工业学院学报,2005,(1).
[2.4]惠梅.相移干涉显微术测量表面微观形貌
[J].光学技术,2003,(1).
[2.5]R.J.Whitefield.Noncontact Optical Profilometer
[J].Appl.Opt.,1975,14(10).
[2.6]吴小庆.微分干涉相移显微术的原理和应用
[J].LSI制造与测试,1983,No.1.
[2.7]Mauro Facchini and Paolo Zanetta.Denvatives of Displacement Obtained by Direct Manipulation for Phase-Shifted Interferograms
[J].Appl.Opt.,1995,34(31):7202-7206.
[2.8]Peter de Groot. Measurement of Transparent Plates with Wavelength-Tuned Phase-Shifting Interferometry
[J].Appl.Opt.,2000,39(16):2658-2663.
[2.9]于复生,司书春,艾兴.一种D/A板输出控制的相移器设计
[J].计量技术,2001,3:29-31.
[2.10]吴一辉,王立鼎.纳米定位控制中消除PZT滞后及蠕变的方法
[J].压电与声光,1996,18(3):207-211.
[2.11]潘新建.相移云纹干涉系统及在界面力学中的实验研究.硕士学位论文,2000.
[2.12]罗印龙.PZT相移系统及其标定方法的研究与应用.硕士学位论文,2004.
[2.13]宋鹏,刘瑞金,吕安延,马志芳,孙平.电子散斑干涉载频调制形貌测量方法的分析
[J].应用光学,2009,30(3):472-476.
[2.14]郝煜栋,赵洋,李达成.光学投影式三维轮廓测量技术综述
[J].光学技术,1998,5:57-60.
[2.15]Lin Fu,Anzhi He.New phase ,measurement by grating projection
[J].Optical Engineering,2006,45(7):3601-3604.
[2.16]刘诚,阎长春,高淑梅.一种改进的载波电子散斑干涉处理方法
[J].光子学报,2005,34(2):214-217.
[2.17]姚启钧著.光学教程
[M].北京:高等教育出版社,2002年9月:19-73.
[2.18]黄梦涛,田爱玲,蒋庄德.用变频条纹图扫描技术测量陡峭物体的三维轮廓
[J].西安交通大学学报,2005,39(7):749-752.
[2.19]吴新民,陈进榜,高志山.利用子区域拼接法实现大型物体的3D面形测量
[J].南京理工大学学报,2001,25(3):269-272.
[2.20]Cheng WM,Chen MY.Transformation and connection of subapertures in the multiaperture overlap-scanning technique for large optics tests
[J].Opt.Eng.,1993,32(8):1947-1950.
[2.21]陈明仪,吴德柱,程维明等.用条纹图形拼接法测量三维大型物体面形
[J].光学学报,1998,18(1):74-79.
[2.22]徐建强,王蕴栅,司书春,高成勇,云大真.三维形貌测量的扫描相移法研究
[J].光子学报,2004,33(10):1210-1213.
[3.1]Yo shikawa.N.Spatial position detection of three-dimensional objects by effective three-dimensional correlation based on Fourier transform profilometry
[J].Optical Review,2005,12(5):378-382.
[3.2]Yamaguchi.I,Jun-i chi kato.Measurement of surface shape and deformation by phase-shifting imaging digital holography
[J].Proceedings of the SPIE-The International Society for Optical Engineering,2003,4829(1):546-565.
[3.3]Carre.P.Installation et utilization du comparateur photoeletrique interferentiedl du Burear International Poids et Measures
[C].Metrologia,1996,2:13-23.
[3.4]J.Schwider,R.Burow et al..Digital wave-front measuring interferometry:some systematic error sources
[J].Appl.Opt.,1983,22:3421-3431.
[3.5]G.Stoilov,T.Dragostinov.Phase-stepping Interferometry: Five-frame Algorithm with an Arbitry step
[J].Optics and Lasers in Engineering,1997,28:61-69.
[3.6]钱克矛,伍小平.相移技术中五步等步长Stoilov算法的性能分析
[J].光学技术,2001,27(1):13-16.
[4.1]崔鹏.数字全息面形测量中的相位解包裹技术研究.硕士学位论文,2007.
[4.2]K.Itoh.Anaiysis of the phase unwrapping algorithm
[J].Appl.Opt.,1982,21(14):2740.
[4.3]杨锋涛,罗印龙,刘志强,吕晓旭.相位展开的6种算法比较
[J].激光技术,2008,32(3):323-326.
[4.4]杨锋涛,吕晓旭,王殿元,江长双.基于二阶差分的加权最小费用流相位展开算法
[J].激光技术,2006,30(6):667-669.
[4.5]黄文宇,龚建伟,陆际联.基于调制度分析的加权最小二乘位相展开方法
[J].北京理工大学学报,2001,21(2):247-251.
[4.6]岳慧敏,苏显渝.时间位相展开方法研究进展
[J].激光杂志,2004,25(3):9-12.
[M].北京:机械工业出版社,1988.
[1.2]周明宝,林大健,郭履容.微结构表面形貌的测量
[J].光学精密工程,1999,7(3):7-13.
[1.3]朴伟英,袁怡宝.叠栅条纹信号细分误差的一种动态补偿方法
[J].光学学报,2008,28(7):1301-1306.
[1.4]毛先富,苏显渝,陈文静等.改进傅里叶变换轮廓术的测量算法研究
[J].光学学报,2008,28(7):1291-1295.
[1.5]陆鹏.应用自动相移影像云纹法测量物体的三维形貌
[J].柴油机,2007,29(2):51-53.
[1.6]孙平,张丽,陶春先.基于LCD数字投影技术的傅里叶变换法测量物体三维形貌
[J].光子学报,2005,34(8):1250-1252.
[1.7]曾毅.激光散斑测量应用研究.硕士学位论文,2005.
[2.1]杨国光主编.近代光学测试技术
[M].北京:机械工业出版社,1986年12月:131-184.
[2.2]曲芳,钟金刚.数字相移技术用于不连续复杂物体的三维面形测量
[J].光学技术,2004,30(4):478-483.
[2.3]王吉元.四步相移干涉测量的相位补偿及仿真
[J].西安工业学院学报,2005,(1).
[2.4]惠梅.相移干涉显微术测量表面微观形貌
[J].光学技术,2003,(1).
[2.5]R.J.Whitefield.Noncontact Optical Profilometer
[J].Appl.Opt.,1975,14(10).
[2.6]吴小庆.微分干涉相移显微术的原理和应用
[J].LSI制造与测试,1983,No.1.
[2.7]Mauro Facchini and Paolo Zanetta.Denvatives of Displacement Obtained by Direct Manipulation for Phase-Shifted Interferograms
[J].Appl.Opt.,1995,34(31):7202-7206.
[2.8]Peter de Groot. Measurement of Transparent Plates with Wavelength-Tuned Phase-Shifting Interferometry
[J].Appl.Opt.,2000,39(16):2658-2663.
[2.9]于复生,司书春,艾兴.一种D/A板输出控制的相移器设计
[J].计量技术,2001,3:29-31.
[2.10]吴一辉,王立鼎.纳米定位控制中消除PZT滞后及蠕变的方法
[J].压电与声光,1996,18(3):207-211.
[2.11]潘新建.相移云纹干涉系统及在界面力学中的实验研究.硕士学位论文,2000.
[2.12]罗印龙.PZT相移系统及其标定方法的研究与应用.硕士学位论文,2004.
[2.13]宋鹏,刘瑞金,吕安延,马志芳,孙平.电子散斑干涉载频调制形貌测量方法的分析
[J].应用光学,2009,30(3):472-476.
[2.14]郝煜栋,赵洋,李达成.光学投影式三维轮廓测量技术综述
[J].光学技术,1998,5:57-60.
[2.15]Lin Fu,Anzhi He.New phase ,measurement by grating projection
[J].Optical Engineering,2006,45(7):3601-3604.
[2.16]刘诚,阎长春,高淑梅.一种改进的载波电子散斑干涉处理方法
[J].光子学报,2005,34(2):214-217.
[2.17]姚启钧著.光学教程
[M].北京:高等教育出版社,2002年9月:19-73.
[2.18]黄梦涛,田爱玲,蒋庄德.用变频条纹图扫描技术测量陡峭物体的三维轮廓
[J].西安交通大学学报,2005,39(7):749-752.
[2.19]吴新民,陈进榜,高志山.利用子区域拼接法实现大型物体的3D面形测量
[J].南京理工大学学报,2001,25(3):269-272.
[2.20]Cheng WM,Chen MY.Transformation and connection of subapertures in the multiaperture overlap-scanning technique for large optics tests
[J].Opt.Eng.,1993,32(8):1947-1950.
[2.21]陈明仪,吴德柱,程维明等.用条纹图形拼接法测量三维大型物体面形
[J].光学学报,1998,18(1):74-79.
[2.22]徐建强,王蕴栅,司书春,高成勇,云大真.三维形貌测量的扫描相移法研究
[J].光子学报,2004,33(10):1210-1213.
[3.1]Yo shikawa.N.Spatial position detection of three-dimensional objects by effective three-dimensional correlation based on Fourier transform profilometry
[J].Optical Review,2005,12(5):378-382.
[3.2]Yamaguchi.I,Jun-i chi kato.Measurement of surface shape and deformation by phase-shifting imaging digital holography
[J].Proceedings of the SPIE-The International Society for Optical Engineering,2003,4829(1):546-565.
[3.3]Carre.P.Installation et utilization du comparateur photoeletrique interferentiedl du Burear International Poids et Measures
[C].Metrologia,1996,2:13-23.
[3.4]J.Schwider,R.Burow et al..Digital wave-front measuring interferometry:some systematic error sources
[J].Appl.Opt.,1983,22:3421-3431.
[3.5]G.Stoilov,T.Dragostinov.Phase-stepping Interferometry: Five-frame Algorithm with an Arbitry step
[J].Optics and Lasers in Engineering,1997,28:61-69.
[3.6]钱克矛,伍小平.相移技术中五步等步长Stoilov算法的性能分析
[J].光学技术,2001,27(1):13-16.
[4.1]崔鹏.数字全息面形测量中的相位解包裹技术研究.硕士学位论文,2007.
[4.2]K.Itoh.Anaiysis of the phase unwrapping algorithm
[J].Appl.Opt.,1982,21(14):2740.
[4.3]杨锋涛,罗印龙,刘志强,吕晓旭.相位展开的6种算法比较
[J].激光技术,2008,32(3):323-326.
[4.4]杨锋涛,吕晓旭,王殿元,江长双.基于二阶差分的加权最小费用流相位展开算法
[J].激光技术,2006,30(6):667-669.
[4.5]黄文宇,龚建伟,陆际联.基于调制度分析的加权最小二乘位相展开方法
[J].北京理工大学学报,2001,21(2):247-251.
[4.6]岳慧敏,苏显渝.时间位相展开方法研究进展
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