压电陶瓷（PZT）特性测试与分析
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摘要
自1880年居里兄弟发现晶体的压电效应以来,压电器件已在水声、超声、传感技术及新型作动器等领域得到了广泛的应用。随着科学技术的发展,航空航天、光学精密工程等新技术领域对压电器件的特性要求也越来越高。特别是在相移干涉技术中,作为核心部分的压电陶瓷(PZT)受到越来越多的重视。由于PZT具有体积小、响应快、位移量大及精度高等优点,已成为目前应用非常广泛的微位移执行器。但由于材料自身的特性及制造工艺上的缺陷,PZT的位移与驱动电压之间总有一定的非线性。
在光学精密测量中,PZT常作为移相驱动器用于各类干涉仪,作为纳米精度的微位移执行器驱动各种精密平移台,以及用于精密位移或压力传感器等。因此,PZT的非线性将直接影响到相移的精度。为了改善PZT的非线性,人们提出了各种各样的方法,包括设计压电陶瓷微位移反馈控制电路、利用傅立叶变换复原干涉条纹相位以及建立数学模型采取对非线性误差不敏感的算法等。采用上述方法可以明显改善PZT的非线性,但他们或者需要复杂的控制电路、较多的仪器设备,或者需要精确的数学算法,因此在实际运用中有诸多的不便。
基于实验室的基本情况,本着简单、方便及精确的原则,本文设计的PZT非线性测量系统只需要光电探测器及数据采集卡等设备,运用光的干涉原理把PZT的位移量转换成干涉条纹移动的次数,方便准确的测出了不同驱动电压条件下PZT的位移特性曲线,并且达到了很好的精度。实验数据分析表明,对于DWY-3型PZT,电压步长为0.20v～0.60v、时间问隔为10ms～80ms的驱动参数比较理想,在上述条件下其位移线性度较好,由此为PZT的精确瘦用提供了充分的科学依据。
Since the Mile brothers discovered the piezoelectricity in 1880,the equipments of piezoelectricity have already been used in the sonar, ultrasonic, sensor technique and new type motion machine etc. With the development of the Science, the higher level has been requested in the fields of aviation and optical engineering etc. As the core of interfere technology, PZT have been more important than before. Because of minuteness, quickly responding and precision, today the PZT has become the applied very extensively tiny motion machine currently. But because of the characteristic of the material oneself and the technology of the manufacturing , PZT has the shortcoming of nonlinearity.In the measurement of optical, PZT is often used as driving machine to the interference instruments, then the nonlinearity should affect the precision of the measurement. Therefore, the PZT is not the accuracy that line will affect directly to move mutually. For the sake of the improvement PZT nonlinearity, people put forward to the method of various kinds, including the design to press or get an electric shock to the tiny of porcelain and ceramics moves the feedback control electric circuit and makes use of the to sign leaf's transformation to restore to original to interfere with the grain mutually and establish mathematics models adopt to not impressionable calculate way of the line error margin. All the above-mentioned methods can obviously improve the PZT's nonlinearity, but need complicated control electric circuit, more instrument equipments or mathematics calculate way etc.According to the actual conditions of the laboratory, thinking about the simple, convenience and precision, the System of PZT testing Characteristic only need the light electricity locator and collecting card , based on the light of interference principle, the PZT measures the conversion interference and calculates the number of stripes to find out the dissimilarity under the voltage condition. The characteristic curve gain a good accuracy. The experiment data shows that the voltage tread
long for 0.20 v~0.60 v, time partition for 10 ms~ the 80 ms are more ideal. The linearity of the PZT is better under the condition of above mentioned and provide theorization for the PZT accurate application.
在光学精密测量中,PZT常作为移相驱动器用于各类干涉仪,作为纳米精度的微位移执行器驱动各种精密平移台,以及用于精密位移或压力传感器等。因此,PZT的非线性将直接影响到相移的精度。为了改善PZT的非线性,人们提出了各种各样的方法,包括设计压电陶瓷微位移反馈控制电路、利用傅立叶变换复原干涉条纹相位以及建立数学模型采取对非线性误差不敏感的算法等。采用上述方法可以明显改善PZT的非线性,但他们或者需要复杂的控制电路、较多的仪器设备,或者需要精确的数学算法,因此在实际运用中有诸多的不便。
基于实验室的基本情况,本着简单、方便及精确的原则,本文设计的PZT非线性测量系统只需要光电探测器及数据采集卡等设备,运用光的干涉原理把PZT的位移量转换成干涉条纹移动的次数,方便准确的测出了不同驱动电压条件下PZT的位移特性曲线,并且达到了很好的精度。实验数据分析表明,对于DWY-3型PZT,电压步长为0.20v～0.60v、时间问隔为10ms～80ms的驱动参数比较理想,在上述条件下其位移线性度较好,由此为PZT的精确瘦用提供了充分的科学依据。
Since the Mile brothers discovered the piezoelectricity in 1880,the equipments of piezoelectricity have already been used in the sonar, ultrasonic, sensor technique and new type motion machine etc. With the development of the Science, the higher level has been requested in the fields of aviation and optical engineering etc. As the core of interfere technology, PZT have been more important than before. Because of minuteness, quickly responding and precision, today the PZT has become the applied very extensively tiny motion machine currently. But because of the characteristic of the material oneself and the technology of the manufacturing , PZT has the shortcoming of nonlinearity.In the measurement of optical, PZT is often used as driving machine to the interference instruments, then the nonlinearity should affect the precision of the measurement. Therefore, the PZT is not the accuracy that line will affect directly to move mutually. For the sake of the improvement PZT nonlinearity, people put forward to the method of various kinds, including the design to press or get an electric shock to the tiny of porcelain and ceramics moves the feedback control electric circuit and makes use of the to sign leaf's transformation to restore to original to interfere with the grain mutually and establish mathematics models adopt to not impressionable calculate way of the line error margin. All the above-mentioned methods can obviously improve the PZT's nonlinearity, but need complicated control electric circuit, more instrument equipments or mathematics calculate way etc.According to the actual conditions of the laboratory, thinking about the simple, convenience and precision, the System of PZT testing Characteristic only need the light electricity locator and collecting card , based on the light of interference principle, the PZT measures the conversion interference and calculates the number of stripes to find out the dissimilarity under the voltage condition. The characteristic curve gain a good accuracy. The experiment data shows that the voltage tread
long for 0.20 v~0.60 v, time partition for 10 ms~ the 80 ms are more ideal. The linearity of the PZT is better under the condition of above mentioned and provide theorization for the PZT accurate application.
引文
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