新型透射光栅谱仪支撑调节机构总体方案研究
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摘要
新型透射光栅谱仪支撑调节机构作为激光装置运行配套的基本研究项目,主要功能是测量激光装置X射线光谱。将狭缝、光栅、衰减片和X光CCD相机按光学设计布局进行合理整合,起到避光和支撑调节作用;通过离线预先准直,在不破坏激光装置靶室真空的前提条件下,进行精确瞄准并测量X射线光谱。
国内目前关于透射光栅谱仪支撑调节机构的资料较少,针对新型透射光栅谱仪光学元件的手动、电动旋转调节,光栅的三自由度精确调节,误差的测量与补偿等新功能、新要求,开展新型透射光栅谱仪支撑调节机构的关键技术研究,对于研制新型透射光栅谱仪具有重要意义。
总体方案设计方面,全面分析了新型透射光栅谱仪的调节环境及对象、各光学元件的安装调试流程。提出了由步进电机、失电制动器以及光电式接近开关组合方式解决前置狭缝的绕光轴旋转、让开光路问题;由步进电机、旋转编码器、滚珠丝杠副以及十字滑轨副的实现方式解决光栅的沿X、Y向平移,绕光轴旋转问题以及衰减片的沿Y向平移问题。
针对新型透射光栅谱仪关于定轴旋转元件的精度要求,建立定轴旋转理论模型,分析结果表明以高精度调节螺纹副和压缩弹簧的实现方式能够很好的满足其精度要求。针对前后屏蔽管组件的通气避光性要求,引入‘光迷宫孔’式设计,实践表明此方式能完全满足其打靶试验要求。针对谱仪整体的气密性和真空控制要求,提出在所有真空-大气接触面处使用O型密封圈、铜圈密封以及在所有由真空引至大气环境的电线使用电连接器的方式来实现。
误差控制方面,分析了系统的误差源,并针对各光学元件的误差来源,提出各光学元件的误差补偿方案。建立误差补偿方程,经过多次试验得出最佳补偿值,较好的解决了各光学元件的精度问题。
以光栅调节底板、衰减片调节底板为例,对新型透射光栅谱仪支撑调节机构关键件运用Pro/E软件进行三维建模,运用ANSYS Workbench有限元软件进行动静态分析,得到两者的整体变形云图、等效应力云图和前4阶模态振型云图。结果表明关键件的刚度、强度均满足设计要求,前4阶固有频率均大于靶室环境基频20Hz,不会发生共振。
As the essential researchful projection of laser installation, the primary function of new-style transmission grating spectrograph was measuring X-ray spectrum of laser installation. Collocate slit, grating, attenuation slice and X-rays’charge coupled device camera reasonablly according as optical layout, the functions were avoiding the rays, sustaining and adjusting. On the premise of no-breakaging the laser installation target chamber vacuum condition, throngh the abaxial beforehand collimation, it collimate and metrrage accurately x-ray spectrum.
Currently, actual resources about transmission grating spectrograph were very exiguous in our country. In allusion to the new function and technical requirements of new-style transmission grating spectrograph, optical elements’manual and dynamoelectric revolving adjustment, three-degree of fredom accurate adjustment of grating, error measuring and compensation, developping pivotal technology investigation of new-style transmission grating spectrograph was very important for it’s research and manufacture.
In respect of collective projection design, this article comprehensively analysis the adjustive circumstance and object of new-style transmission grating spectrograph, installation and debug flow of each optical element. A model made up of step motor, electromagnetic power lost brakes and photoelectric proximity switch were advanced to solve the problems of prepositive slit’s revolving and avoidding round the optical axis. The resolvent measure made up of step motor, absolute type encoder, ballscrew, decussate linear guideway were advanced to solve the problem of grating’s translation along the directions of X and Y, revolving round the optical axis, attenuation slice’s translation along the directions of Y.
In allusion to aptotic axes rotary components’precision request of new-style transmission grating spectrograph to establish aptotic axes rotary theoretical model. The analytic outcome indicated that the actualization quomodo made up of high-accuracy regulative screw pairs and constringent spring could commendably satisfy their precision request. In allusion to the request of fore and after shield cannulation subassemblies’ventilating and avoidding light, the quomodo of labyrinthic optical was introduced. The practice testified that this quomodo could satisfy the target practice testing request. In allusion to holistic airproof and vacuum restraining request of new-style transmission grating spectrograph, the quomodo made up of junk ring, copper band airproof and electric connector between atmosphere and vacuum was used to actualize it.
In respect of error control, the article analysed systemic error origin and put forward various error compensation schemes in allusion to various optical components’error origin. It established the error compensation equation, a first-rank numerical value was elicitted times without number, preferably solved each optical components’precision problem.
As the key part of new-style transmission grating spectrograph for example, by applying the Pre/E software established the three-dimensional model of grating and attenuation slice adjustive motherboard and a static and dynamic analysis were carried out by applying the ANASYS Workbench software to get the total deformation plot, equivalent stress plot and the preceding four mode shape plot. The results indicated that the key parts’rigidity and strength all statisfied design demands, and the preceding 4 ordered inherent frequency were all greater than 20Hz, so they would not produce resonance.
国内目前关于透射光栅谱仪支撑调节机构的资料较少,针对新型透射光栅谱仪光学元件的手动、电动旋转调节,光栅的三自由度精确调节,误差的测量与补偿等新功能、新要求,开展新型透射光栅谱仪支撑调节机构的关键技术研究,对于研制新型透射光栅谱仪具有重要意义。
总体方案设计方面,全面分析了新型透射光栅谱仪的调节环境及对象、各光学元件的安装调试流程。提出了由步进电机、失电制动器以及光电式接近开关组合方式解决前置狭缝的绕光轴旋转、让开光路问题;由步进电机、旋转编码器、滚珠丝杠副以及十字滑轨副的实现方式解决光栅的沿X、Y向平移,绕光轴旋转问题以及衰减片的沿Y向平移问题。
针对新型透射光栅谱仪关于定轴旋转元件的精度要求,建立定轴旋转理论模型,分析结果表明以高精度调节螺纹副和压缩弹簧的实现方式能够很好的满足其精度要求。针对前后屏蔽管组件的通气避光性要求,引入‘光迷宫孔’式设计,实践表明此方式能完全满足其打靶试验要求。针对谱仪整体的气密性和真空控制要求,提出在所有真空-大气接触面处使用O型密封圈、铜圈密封以及在所有由真空引至大气环境的电线使用电连接器的方式来实现。
误差控制方面,分析了系统的误差源,并针对各光学元件的误差来源,提出各光学元件的误差补偿方案。建立误差补偿方程,经过多次试验得出最佳补偿值,较好的解决了各光学元件的精度问题。
以光栅调节底板、衰减片调节底板为例,对新型透射光栅谱仪支撑调节机构关键件运用Pro/E软件进行三维建模,运用ANSYS Workbench有限元软件进行动静态分析,得到两者的整体变形云图、等效应力云图和前4阶模态振型云图。结果表明关键件的刚度、强度均满足设计要求,前4阶固有频率均大于靶室环境基频20Hz,不会发生共振。
As the essential researchful projection of laser installation, the primary function of new-style transmission grating spectrograph was measuring X-ray spectrum of laser installation. Collocate slit, grating, attenuation slice and X-rays’charge coupled device camera reasonablly according as optical layout, the functions were avoiding the rays, sustaining and adjusting. On the premise of no-breakaging the laser installation target chamber vacuum condition, throngh the abaxial beforehand collimation, it collimate and metrrage accurately x-ray spectrum.
Currently, actual resources about transmission grating spectrograph were very exiguous in our country. In allusion to the new function and technical requirements of new-style transmission grating spectrograph, optical elements’manual and dynamoelectric revolving adjustment, three-degree of fredom accurate adjustment of grating, error measuring and compensation, developping pivotal technology investigation of new-style transmission grating spectrograph was very important for it’s research and manufacture.
In respect of collective projection design, this article comprehensively analysis the adjustive circumstance and object of new-style transmission grating spectrograph, installation and debug flow of each optical element. A model made up of step motor, electromagnetic power lost brakes and photoelectric proximity switch were advanced to solve the problems of prepositive slit’s revolving and avoidding round the optical axis. The resolvent measure made up of step motor, absolute type encoder, ballscrew, decussate linear guideway were advanced to solve the problem of grating’s translation along the directions of X and Y, revolving round the optical axis, attenuation slice’s translation along the directions of Y.
In allusion to aptotic axes rotary components’precision request of new-style transmission grating spectrograph to establish aptotic axes rotary theoretical model. The analytic outcome indicated that the actualization quomodo made up of high-accuracy regulative screw pairs and constringent spring could commendably satisfy their precision request. In allusion to the request of fore and after shield cannulation subassemblies’ventilating and avoidding light, the quomodo of labyrinthic optical was introduced. The practice testified that this quomodo could satisfy the target practice testing request. In allusion to holistic airproof and vacuum restraining request of new-style transmission grating spectrograph, the quomodo made up of junk ring, copper band airproof and electric connector between atmosphere and vacuum was used to actualize it.
In respect of error control, the article analysed systemic error origin and put forward various error compensation schemes in allusion to various optical components’error origin. It established the error compensation equation, a first-rank numerical value was elicitted times without number, preferably solved each optical components’precision problem.
As the key part of new-style transmission grating spectrograph for example, by applying the Pre/E software established the three-dimensional model of grating and attenuation slice adjustive motherboard and a static and dynamic analysis were carried out by applying the ANASYS Workbench software to get the total deformation plot, equivalent stress plot and the preceding four mode shape plot. The results indicated that the key parts’rigidity and strength all statisfied design demands, and the preceding 4 ordered inherent frequency were all greater than 20Hz, so they would not produce resonance.
引文
[1]姚实颖.基于620~6200—eV能区X射线探测的双通道椭圆弯晶谱仪的研究[M].重庆:重庆大学出版社,2003,4.
[2]朱士尧.核聚变原理[M].合肥:中国科学技术大学出版社,1992,6.
[3] [日]菅井秀朗著.张海波,张丹译.等离子体电子工程学.北京:科学技术出版社,2002,1.
[4] B.格劳斯,B.格里兹,K.密克劳西著.过增元,傅维标译.等离子体技术.北京:科学出版社,1980,4.
[5]邓健,钟方川,覃岭等.透射光栅谱仪光谱仪法测量ICF辐射温度[J].激光与光电子学进展,1999(2):1-6.
[6] Feng X,Liu M H,Lee S.A transmission grating spectrograph and its application in both laser plasma and plasma focus [J].Rev.Sci.Instrum.1997,68(8):3068-3073.
[7]孙岚,韩申生,徐至展等.线状等离子体测量中的晶体谱仪及其在X射线试验中的应用[J].光学学报,1994(1):62-67.
[8]肖沙理.用于激光等离子体X射线诊断的椭圆弯晶谱仪研究[M].重庆:重庆大学出版社,2004,9.
[9] G.R.Harrison,R.C.Lord,J.R.Loofborrow.Pratical spectroscopy.Prentice-HALL.Inc.1963:15-25.
[10]陈志伟,王占山,牛惠辉.软X射线狭缝透射光栅谱仪的研制[J].光学精密工程,2000,8(3):254-257.
[11]孙可煦,崔延莉,易荣清等.多种材料软X光平面镜反射率编订[J].光学精密工程,2003,11(4):349-353.
[12] Stephen P.Renwick,Steven D.Slonaker,et al.Size-dependent flare and its effect on imaging[J].Proc.SPIE.2003,Vol.5040:24-32.
[13] B.L.Fontaine,M Dusa,A Acheta,et al.Analysis of Flare and its Impact on Low-kl Krf and ArF Lithography[J].Proc SPIE.2002,Vol.4691:44-56.
[14]张飞.浸没式ArF光刻CD均匀性研究[M].北京:中国科学院电工研究所,2006,5.
[15]王军平.高性能运动控制及在数控系统中的应用[M].西安:西北工业大学出版社,2002,12.
[16]沈金华.数控机床误差补偿关键技术及其应用[M].上海:上海交通大学出版社,2008,11.
[17]赵昌龙.高速加工中心主轴及刀具系统热误差综合补偿技术[M].长春:吉林大学出版社,2010,6.
[18]刘战强,黄传真,郭培全.先进切削加工技术及其应用[M].北京:机械工业出版社,2005.
[19]孙莹.小型航天级光电编码器细分误差补偿方法研究[M].长春:中国科学院长春光学精密机械与物理研究所,2010,5.
[20]王爱玲.现代数控机床[M].北京:国防工业出版社,2003.
[21]范超毅,范巍.步进电机的选型与计算[J].机床与液压,2008,36(5):310-313.
[22]杜平安.有限元法:原理、建模及应用[M].北京:国防工业出版社,1-11,167-175.
[23]李兵,何正嘉,陈雪峰.ANSYS Workbench设计、仿真与优化[M].北京:清华大学出版社,2008:1-4,96-98.
[24]曹数谦,张文德,萧龙翔.振动结构模态分析[M].天津:天津大学出版社,2002:1-3.
[25]张丝雨,马维全,马雁冰等.最新金属材料牌号、性能、用途及中外牌号对照速用速查使用手册[M].北京:中国科技文化出版社,2005:141-147.
[26]庄茁,张帆等.非线性有限元分析及实例[M].北京:科学出版社,2005:167-169.
[2]朱士尧.核聚变原理[M].合肥:中国科学技术大学出版社,1992,6.
[3] [日]菅井秀朗著.张海波,张丹译.等离子体电子工程学.北京:科学技术出版社,2002,1.
[4] B.格劳斯,B.格里兹,K.密克劳西著.过增元,傅维标译.等离子体技术.北京:科学出版社,1980,4.
[5]邓健,钟方川,覃岭等.透射光栅谱仪光谱仪法测量ICF辐射温度[J].激光与光电子学进展,1999(2):1-6.
[6] Feng X,Liu M H,Lee S.A transmission grating spectrograph and its application in both laser plasma and plasma focus [J].Rev.Sci.Instrum.1997,68(8):3068-3073.
[7]孙岚,韩申生,徐至展等.线状等离子体测量中的晶体谱仪及其在X射线试验中的应用[J].光学学报,1994(1):62-67.
[8]肖沙理.用于激光等离子体X射线诊断的椭圆弯晶谱仪研究[M].重庆:重庆大学出版社,2004,9.
[9] G.R.Harrison,R.C.Lord,J.R.Loofborrow.Pratical spectroscopy.Prentice-HALL.Inc.1963:15-25.
[10]陈志伟,王占山,牛惠辉.软X射线狭缝透射光栅谱仪的研制[J].光学精密工程,2000,8(3):254-257.
[11]孙可煦,崔延莉,易荣清等.多种材料软X光平面镜反射率编订[J].光学精密工程,2003,11(4):349-353.
[12] Stephen P.Renwick,Steven D.Slonaker,et al.Size-dependent flare and its effect on imaging[J].Proc.SPIE.2003,Vol.5040:24-32.
[13] B.L.Fontaine,M Dusa,A Acheta,et al.Analysis of Flare and its Impact on Low-kl Krf and ArF Lithography[J].Proc SPIE.2002,Vol.4691:44-56.
[14]张飞.浸没式ArF光刻CD均匀性研究[M].北京:中国科学院电工研究所,2006,5.
[15]王军平.高性能运动控制及在数控系统中的应用[M].西安:西北工业大学出版社,2002,12.
[16]沈金华.数控机床误差补偿关键技术及其应用[M].上海:上海交通大学出版社,2008,11.
[17]赵昌龙.高速加工中心主轴及刀具系统热误差综合补偿技术[M].长春:吉林大学出版社,2010,6.
[18]刘战强,黄传真,郭培全.先进切削加工技术及其应用[M].北京:机械工业出版社,2005.
[19]孙莹.小型航天级光电编码器细分误差补偿方法研究[M].长春:中国科学院长春光学精密机械与物理研究所,2010,5.
[20]王爱玲.现代数控机床[M].北京:国防工业出版社,2003.
[21]范超毅,范巍.步进电机的选型与计算[J].机床与液压,2008,36(5):310-313.
[22]杜平安.有限元法:原理、建模及应用[M].北京:国防工业出版社,1-11,167-175.
[23]李兵,何正嘉,陈雪峰.ANSYS Workbench设计、仿真与优化[M].北京:清华大学出版社,2008:1-4,96-98.
[24]曹数谦,张文德,萧龙翔.振动结构模态分析[M].天津:天津大学出版社,2002:1-3.
[25]张丝雨,马维全,马雁冰等.最新金属材料牌号、性能、用途及中外牌号对照速用速查使用手册[M].北京:中国科技文化出版社,2005:141-147.
[26]庄茁,张帆等.非线性有限元分析及实例[M].北京:科学出版社,2005:167-169.