光注入全内反射型光开关的研究
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摘要
随着光网络和光通讯的发展，以及光交换概念的提出，光开关及开关列阵起着越
来越重要的地位，同时对光开关性能要求也越来越高。
传统的MEMS光开关、热光开光、液晶光开光的开关速度都为ms量级，基本上
达不到光交换的要求，而传统的电光开光有着很高的偏振敏感性，同样很难达到光
交换的要求。光控制光开关的开光速度可以达到ps量级，并且对偏振的敏感性不高，
通过对开光结构的设计和优化，其性能指标也可以达到实用要求，因此对光控制光
开光的研究具有实际的理论意义和应用价值。
本论文首先阐述了光控制光开光的原理、光生载流子的模型，以及光生载流子影
响折射率变化的模型，分析了三维波导的结构对传输光波的影响。从理论上分析了
展宽型多模波导对非对称Y分叉结构的光开关的性能的改善，提出一种设计展宽型
Y分叉全内反射光开关反射区宽度的近似计算方法。然后用FD-BPM对展宽型Y分
叉全内反射光开关进行模拟和分析，设计了全内反射型非对称Y分叉光开关。在展
宽型Y分叉的基础上，提出了隔离型非对称Y分叉全内反射结构，通过对隔离型非
对称Y分叉的结构参数的分析，在理论上可以设计出消光比达到40dB以上的全内
反射型光开光。
采用反刻法和剥离法，完成了光注入非对称Y分叉结构的脊型GaAs光控制光
开关制作。利用红外摄像机采集的光开关输出的近场分布，采用对场光场能量高斯
拟合的近似方法，测得该关注入光开关的直通端的消光比可以达到8dB，而反射端
的消光比则至少可以达到18dB以上。器件的指标的精确测量则需要在芯片封装完
成后作进一步的测量。
With development of optical network and optical communication,and the introduction of conception of optical swap,optical switch and optical switch array is playing an important role.
The speed of traditional MEMS optical switch,heat optical switch,liquid crystal optical switch is several ms,which cannot catch up with the demand of optical swap. The electronic-optical switch is sensitive to polarization,so it is hard to satisfy the demand of optical swap. But the speed of photon induced optical switch can be several ps,and it is independent to polarization. With the optimization of its structure,its performance can be applicable. So study of photon induced optical switch has science research value and application value.'
In this thesis,we described the principle of photon modulation,the model of photon induced careers and the model of carrier-induced index change. We analyzed the effect of 3-D structure of waveguide to the lightwave in the waveguide. At the same time we analyzed the effect of enlarged waveguide to the improvement of asymmetrical Y-branch optical switch performance. We simulated and analyzed Y-branch TIR optical switch with enlarged waveguide with FD-BPM. Based on the enlarged waveguide Y-branch,we introduced the sheared Y-branch TIR structure. After analyzing the structure parameters of the sheared asymmetrical
Y-branch,the extinction ratio of the TIR optical switch can be more than 40dB in theory.
By wet erode,we finished photon-induce total internal reflection Y branch optical switch with GaAs material. We collect distributing of near-field of optical switch output-port. Using Gaussian curve fit,we measure the extinction ratio of "bar channel" is 8dB,and the extinction ratio of "cross channel" is more than 18dB. The precise measurement of the device performance parameters will be finished after the device is packaged.
来越重要的地位，同时对光开关性能要求也越来越高。
传统的MEMS光开关、热光开光、液晶光开光的开关速度都为ms量级，基本上
达不到光交换的要求，而传统的电光开光有着很高的偏振敏感性，同样很难达到光
交换的要求。光控制光开关的开光速度可以达到ps量级，并且对偏振的敏感性不高，
通过对开光结构的设计和优化，其性能指标也可以达到实用要求，因此对光控制光
开光的研究具有实际的理论意义和应用价值。
本论文首先阐述了光控制光开光的原理、光生载流子的模型，以及光生载流子影
响折射率变化的模型，分析了三维波导的结构对传输光波的影响。从理论上分析了
展宽型多模波导对非对称Y分叉结构的光开关的性能的改善，提出一种设计展宽型
Y分叉全内反射光开关反射区宽度的近似计算方法。然后用FD-BPM对展宽型Y分
叉全内反射光开关进行模拟和分析，设计了全内反射型非对称Y分叉光开关。在展
宽型Y分叉的基础上，提出了隔离型非对称Y分叉全内反射结构，通过对隔离型非
对称Y分叉的结构参数的分析，在理论上可以设计出消光比达到40dB以上的全内
反射型光开光。
采用反刻法和剥离法，完成了光注入非对称Y分叉结构的脊型GaAs光控制光
开关制作。利用红外摄像机采集的光开关输出的近场分布，采用对场光场能量高斯
拟合的近似方法，测得该关注入光开关的直通端的消光比可以达到8dB，而反射端
的消光比则至少可以达到18dB以上。器件的指标的精确测量则需要在芯片封装完
成后作进一步的测量。
With development of optical network and optical communication,and the introduction of conception of optical swap,optical switch and optical switch array is playing an important role.
The speed of traditional MEMS optical switch,heat optical switch,liquid crystal optical switch is several ms,which cannot catch up with the demand of optical swap. The electronic-optical switch is sensitive to polarization,so it is hard to satisfy the demand of optical swap. But the speed of photon induced optical switch can be several ps,and it is independent to polarization. With the optimization of its structure,its performance can be applicable. So study of photon induced optical switch has science research value and application value.'
In this thesis,we described the principle of photon modulation,the model of photon induced careers and the model of carrier-induced index change. We analyzed the effect of 3-D structure of waveguide to the lightwave in the waveguide. At the same time we analyzed the effect of enlarged waveguide to the improvement of asymmetrical Y-branch optical switch performance. We simulated and analyzed Y-branch TIR optical switch with enlarged waveguide with FD-BPM. Based on the enlarged waveguide Y-branch,we introduced the sheared Y-branch TIR structure. After analyzing the structure parameters of the sheared asymmetrical
Y-branch,the extinction ratio of the TIR optical switch can be more than 40dB in theory.
By wet erode,we finished photon-induce total internal reflection Y branch optical switch with GaAs material. We collect distributing of near-field of optical switch output-port. Using Gaussian curve fit,we measure the extinction ratio of "bar channel" is 8dB,and the extinction ratio of "cross channel" is more than 18dB. The precise measurement of the device performance parameters will be finished after the device is packaged.
引文
[1] 徐宝强 杨秀峰 夏秀兰等， 《光纤通信及其网络技术》[M]，北京航空航天 大学出版社，1999
[2] 程晓飞，方来付，王健全，顾碗义． 光开关技术综述[J]通讯世界2001， 50(7) ，．pp：11～16
[3] Fernandez M. Kruglic E. " MEMS technology ushers in new age in optical switching"[J]. Lightwave, 2000, August, pp: 146
[4] Lin L Y, Goldstein E L, Tkach R W. "Free-space micromachined optical switchs or optical networking" [J] IEEE J. of Selected Topics in Quantum electron 1998 ,5(1) ,pp: 4-9
[5] Morito K. "Dynamic analysis of MZI-SOA all optical switches for balanced switching" [A], 23rd European Conference on Optical Communications [C],1997,2,pp: 81-84
[6] Earnshaw M P. "Compact low-loss 4/spl times/4 optical switch matrix using multimode interferometers"[J] Electron. Lett., 2001 37,pp: 115-116
[7] 禹培栋 王国忠 陈明华 谢世钟， “光网络中的光开关技术”[J]通信与计 算机，2001 6(A)，pp：63～64
[8] LoeS S Huangl-S KimC.-I ectal "2×2MEMS Fiber Optic Switches with Silicon Submount for Low-Cost Packaging.Solid-State Sensor and Actualor Workshop"[A], Hilton Head Is Land South Carolina, 1998,pp:281-284
[9] Riza N,Yuan S. "Low optical interchannel crosstalk , fast switching speed, polarisation independent 2-by-2 fibre optic switch using ferroelectric liquid crystals"[J]. Electron.Lett. ,1998,34(13) ,pp: 1341-1342
[10] 杨建议 江晓清 王明华“用于光纤通信的光开关研究进展”[J]光通信研 究2000，100(4) ，pp：42-48
[11] 占恒正，尹锐，王明华，江晓清 “改进的非对称Y分叉全内反射型开关
特性分析”[A]OFCIO’2001，pp：612～615
[12] Mistuhiro Makihara, Makoto Sato, Fusao Shimokawa, and Yasuhide Nishida "Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate".[J] IEEE Journal of Lightwave Technology 1999 17(1) ,pp:14-18
[13] Sato M. "Waveguide optical switch for 8:1 standby system of optical line terminals"[A] OFC '98[C] ,pp: 194-195
[14] Satoshi Baba,Kazuhiko Shimomura, and Shigehisa Arai "A Novel Integrated-Twin-Guide(ITG) Optical Switch with a Built-in TIR Region" [J] IEEE Photonics Technology Letters 1992 4(5) ,pp: 468-469
[15] Norbert K,Huihai Yao,Crispin Z, "A Novel Type of 2×2 Digital Optical Switch Realized by Polymer waveguide Technology"[A], ECOC'96 Oslo,2,pp:71-74
[16] U.Siebel,R.Hauffe,K.Peterman, "An Improved Polymer Digital Optical Switch with Cross Talk of-46dB"[A],OFC2001,pp:WR4/1-4/3
[17] K.Sakuma,D.Fujita,H.Hosoya,etal, "Low Insert-Loss and High Isolation Polymeric Y-Branching Thermo-optic Switch with Partitioned Heater"[A], OFC2001,pp:WR3/1-3/3
[18] Albert B,Tsjerk H,Mart D, "Polymeric 8×8 Digital Optical Switch Matrix"[A], ECOC'96 Oslo,pp:5:59-62
[19] GA.Fish, L.A.Coldren and S.P.DenBaars "Compact InGaAsP/InP 1×2 Optical Switch Based on Carrier Induced Supression of Modal"[J] Electronics Letters 1997 22(33) pp: 1898-1900
[20] 王秀彦，吴重庆，陶蕴，李卓毅，“光控光开关的研究进展”，半导体光电， 2000 vol．21(6) ，pp：377～380
[21] H. Feng, X. Li, Z. Yang, and M. Wang, "2×2 GaAs asymmertric Mach-Zehnder interferometer switch", Appl. Phys. Lett., 1992 vol. 60(3) , pp: 2843-2845,
[22] 冯浩，李锡华，王明华，杨左娅，“GaAs 2×2 Mach-Zehnder光波导开关／． 调制器”，光学学报1992 vol．12(11) ，pp：1043～1047
[23] 冯浩，王明华，“GaAs 1×2 Mach-Zehnder波导开关／调制器”，半导体学 报，1993 vol．15(2) ，pp：102
[24] 庄婉如，林雯华，杨培生，李任，“载流子注入全内反射型GaAs／GaAlAs 光波导开关”，光电子器件与集成技术年会论文集(北京)，1989 pp．505～509
[25] 刘恩科，刘育梁，张声良，李国正，周帆，程美乔，李秉臣，葛璜，赵长 威，王昕，沈宏，“非对称全内反射型硅红外波导光开关”，光电子器件与集 成技术年会论文集(杭州)，1994 pp：165～166，
[26] 曾庆济，黄勇，钟祖平，“一种新型德LD增益光门空分矩阵光开关”，光电 子器件与集成技术年会论文集(杭州)，1994 pp：171～172，
[27] Ce Zhou Zhao, Ai Hua Chen, E. K. Lin, and G. Z. Li, "Silicon-on-Insulator Asymmetric Optical Switch Based on Total Internal Reflection", IEEE Photon. Technol. Lett., 1997 vol. 9(8) , pp: 1113-1115．
[28] 杨建义，江晓清，杨方辉，王明华，Ray T．Chen“1×2全内反射型有机 聚合物光开关的研制”，半导体学报2002 vol 23(7) ，pp：741～745
[29] 刘爱明，吴重庆，王秀彦“光控光开关的发展和应用”，光通信研究2002 vol．26(1) ，pp：24～27
[30] S.Nakamura, K. Tajima, N. Hamao, and Y. Sugimoto, " High-speed all-optical switching experiment in Mach-Zehnder configuration using GaAs waveguide", Appl. Phys. Lett., 1993 Vol.62, pp:925-927
[31] 杨建义，周强，吴志武，吴通锡，王明华，高桥芳浩，多田邦雄， "GaAs／GaAlAs定向耦合器型行波调制器"，光学学报， 1997， Vol．17(5) ，pp：581～585，Vol．17(6) ，pp：782～785
[32] 杨建义，孙一翎，周强，王明华，“MMI型GaAs光功分器的研制”，光 学学报，1999，Vol．19(8) pp：1 123～1 129
[33] Yin Rui, Yang Jianyi, Zhou Qiang, Wang Minhua, "Design of 4×4 GaAs/GaAlAs carrier-injected total internal reflect Optical switch array", SPIE, 1998 ,Vol. 3551, pp:112-115
[34] 尹锐，江晓清，王明华，“High performance MMI devices with Low index contrast structure：analysis and design”，Proceedings of SPIE，2000 4225，
255～258
[35] 杨建义，冯浩，周强，江晓清，周伟勤，孙一翎，王明华，”GaAs 1×4 Mach-Zehnder型光开关列阵的研究”，光学学报，1996，Vol．16(10) ， pp1521～1525
[2] 程晓飞，方来付，王健全，顾碗义． 光开关技术综述[J]通讯世界2001， 50(7) ，．pp：11～16
[3] Fernandez M. Kruglic E. " MEMS technology ushers in new age in optical switching"[J]. Lightwave, 2000, August, pp: 146
[4] Lin L Y, Goldstein E L, Tkach R W. "Free-space micromachined optical switchs or optical networking" [J] IEEE J. of Selected Topics in Quantum electron 1998 ,5(1) ,pp: 4-9
[5] Morito K. "Dynamic analysis of MZI-SOA all optical switches for balanced switching" [A], 23rd European Conference on Optical Communications [C],1997,2,pp: 81-84
[6] Earnshaw M P. "Compact low-loss 4/spl times/4 optical switch matrix using multimode interferometers"[J] Electron. Lett., 2001 37,pp: 115-116
[7] 禹培栋 王国忠 陈明华 谢世钟， “光网络中的光开关技术”[J]通信与计 算机，2001 6(A)，pp：63～64
[8] LoeS S Huangl-S KimC.-I ectal "2×2MEMS Fiber Optic Switches with Silicon Submount for Low-Cost Packaging.Solid-State Sensor and Actualor Workshop"[A], Hilton Head Is Land South Carolina, 1998,pp:281-284
[9] Riza N,Yuan S. "Low optical interchannel crosstalk , fast switching speed, polarisation independent 2-by-2 fibre optic switch using ferroelectric liquid crystals"[J]. Electron.Lett. ,1998,34(13) ,pp: 1341-1342
[10] 杨建议 江晓清 王明华“用于光纤通信的光开关研究进展”[J]光通信研 究2000，100(4) ，pp：42-48
[11] 占恒正，尹锐，王明华，江晓清 “改进的非对称Y分叉全内反射型开关
特性分析”[A]OFCIO’2001，pp：612～615
[12] Mistuhiro Makihara, Makoto Sato, Fusao Shimokawa, and Yasuhide Nishida "Micromechanical Optical Switches Based on Thermocapillary Integrated in Waveguide Substrate".[J] IEEE Journal of Lightwave Technology 1999 17(1) ,pp:14-18
[13] Sato M. "Waveguide optical switch for 8:1 standby system of optical line terminals"[A] OFC '98[C] ,pp: 194-195
[14] Satoshi Baba,Kazuhiko Shimomura, and Shigehisa Arai "A Novel Integrated-Twin-Guide(ITG) Optical Switch with a Built-in TIR Region" [J] IEEE Photonics Technology Letters 1992 4(5) ,pp: 468-469
[15] Norbert K,Huihai Yao,Crispin Z, "A Novel Type of 2×2 Digital Optical Switch Realized by Polymer waveguide Technology"[A], ECOC'96 Oslo,2,pp:71-74
[16] U.Siebel,R.Hauffe,K.Peterman, "An Improved Polymer Digital Optical Switch with Cross Talk of-46dB"[A],OFC2001,pp:WR4/1-4/3
[17] K.Sakuma,D.Fujita,H.Hosoya,etal, "Low Insert-Loss and High Isolation Polymeric Y-Branching Thermo-optic Switch with Partitioned Heater"[A], OFC2001,pp:WR3/1-3/3
[18] Albert B,Tsjerk H,Mart D, "Polymeric 8×8 Digital Optical Switch Matrix"[A], ECOC'96 Oslo,pp:5:59-62
[19] GA.Fish, L.A.Coldren and S.P.DenBaars "Compact InGaAsP/InP 1×2 Optical Switch Based on Carrier Induced Supression of Modal"[J] Electronics Letters 1997 22(33) pp: 1898-1900
[20] 王秀彦，吴重庆，陶蕴，李卓毅，“光控光开关的研究进展”，半导体光电， 2000 vol．21(6) ，pp：377～380
[21] H. Feng, X. Li, Z. Yang, and M. Wang, "2×2 GaAs asymmertric Mach-Zehnder interferometer switch", Appl. Phys. Lett., 1992 vol. 60(3) , pp: 2843-2845,
[22] 冯浩，李锡华，王明华，杨左娅，“GaAs 2×2 Mach-Zehnder光波导开关／． 调制器”，光学学报1992 vol．12(11) ，pp：1043～1047
[23] 冯浩，王明华，“GaAs 1×2 Mach-Zehnder波导开关／调制器”，半导体学 报，1993 vol．15(2) ，pp：102
[24] 庄婉如，林雯华，杨培生，李任，“载流子注入全内反射型GaAs／GaAlAs 光波导开关”，光电子器件与集成技术年会论文集(北京)，1989 pp．505～509
[25] 刘恩科，刘育梁，张声良，李国正，周帆，程美乔，李秉臣，葛璜，赵长 威，王昕，沈宏，“非对称全内反射型硅红外波导光开关”，光电子器件与集 成技术年会论文集(杭州)，1994 pp：165～166，
[26] 曾庆济，黄勇，钟祖平，“一种新型德LD增益光门空分矩阵光开关”，光电 子器件与集成技术年会论文集(杭州)，1994 pp：171～172，
[27] Ce Zhou Zhao, Ai Hua Chen, E. K. Lin, and G. Z. Li, "Silicon-on-Insulator Asymmetric Optical Switch Based on Total Internal Reflection", IEEE Photon. Technol. Lett., 1997 vol. 9(8) , pp: 1113-1115．
[28] 杨建义，江晓清，杨方辉，王明华，Ray T．Chen“1×2全内反射型有机 聚合物光开关的研制”，半导体学报2002 vol 23(7) ，pp：741～745
[29] 刘爱明，吴重庆，王秀彦“光控光开关的发展和应用”，光通信研究2002 vol．26(1) ，pp：24～27
[30] S.Nakamura, K. Tajima, N. Hamao, and Y. Sugimoto, " High-speed all-optical switching experiment in Mach-Zehnder configuration using GaAs waveguide", Appl. Phys. Lett., 1993 Vol.62, pp:925-927
[31] 杨建义，周强，吴志武，吴通锡，王明华，高桥芳浩，多田邦雄， "GaAs／GaAlAs定向耦合器型行波调制器"，光学学报， 1997， Vol．17(5) ，pp：581～585，Vol．17(6) ，pp：782～785
[32] 杨建义，孙一翎，周强，王明华，“MMI型GaAs光功分器的研制”，光 学学报，1999，Vol．19(8) pp：1 123～1 129
[33] Yin Rui, Yang Jianyi, Zhou Qiang, Wang Minhua, "Design of 4×4 GaAs/GaAlAs carrier-injected total internal reflect Optical switch array", SPIE, 1998 ,Vol. 3551, pp:112-115
[34] 尹锐，江晓清，王明华，“High performance MMI devices with Low index contrast structure：analysis and design”，Proceedings of SPIE，2000 4225，
255～258
[35] 杨建义，冯浩，周强，江晓清，周伟勤，孙一翎，王明华，”GaAs 1×4 Mach-Zehnder型光开关列阵的研究”，光学学报，1996，Vol．16(10) ， pp1521～1525