超短脉冲激光时空特性的仿真研究
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摘要
超短脉冲激光在科学研究和工业生产中具有越来越广泛的应用,这也对脉冲激光光学系统输出的光束质量提出了更多的要求。而光学系统的面形误差和装配误差对脉冲激光光束质量有很大影响。因此对超短脉冲经过光学系统后的光束质量进行仿真,并且分析误差产生的影响,对光束质量的控制具有重要意义。
脉冲激光的光束质量包括时间特性和空间特性两个方面。空间特性主要包括焦斑尺寸,脉冲波前等,而时间特性主要体现在输出脉冲的时间宽度上。对脉冲时空特性的仿真主要有两种方法,一是基于菲涅尔衍射理论和麦克斯韦方程组的数值计算方法,二是基于实际光线追迹和衍射积分相结合的方法。前者无法处理光学系统的像差和各种误差对光束的影响。因此本文采用第二种方法进行仿真。在此基础上,本文进一步对面形误差、装配误差的影响进行了分析,并设计相应实验进行了验证。
作为国家自然科学基金“光学系统实际误差对高能短脉冲激光输出的影响研究”的一部分,本文主要工作内容包括面形误差的Zernike多项式拟合,带误差面型的光线追迹,空间特性仿真,脉冲宽度的计算和实验验证等。
There are more and more applications of ultra-short laser pulse in science research and industrial production. In many applications the output beam quality of laser pulse optical systems needs to be contraled in order to meet these requirements. The surface errors and assembly errors in real optical systems have great influence on the laser pulse beam quality. So it has an important significance to simulate the pulse beam quality through optical systems and analyse the effects of system errors.
The beam quality of laser pulse beam includes spatial characteristics and temporal characteristics. Spatial characteristics include focal spot size, pulse wave front, etc. while the temporal characteristics mainly mean the time width of output laser pulse. There are two ways to simulate the spatio-temporal characteristics. One numerical calculation method bases on Fresnel diffraction theory and Maxwell equations, the other bases on the combining of real ray tracing and diffraction integral. The former can not deal with the influence on pulse beam caused by optical system aberrations and errors. So we use the later method to simulate the pulse beam qulity in the paper. On this basis, this paper further analyses the effects caused by surface errors and assembly errors. Finaly, we design an experiment to verify our simulation.
As a part of the National Natural Science Foundation of China called research of the effects on output high-energy short-pulse laser beam quality caused by actual errors of optical systems, this paper principal research content includes the surface error fitting by Zernike, ray tracing for surface with errors, spatial characteristics simulation, pulse width calculation and experimental verification, etc.
脉冲激光的光束质量包括时间特性和空间特性两个方面。空间特性主要包括焦斑尺寸,脉冲波前等,而时间特性主要体现在输出脉冲的时间宽度上。对脉冲时空特性的仿真主要有两种方法,一是基于菲涅尔衍射理论和麦克斯韦方程组的数值计算方法,二是基于实际光线追迹和衍射积分相结合的方法。前者无法处理光学系统的像差和各种误差对光束的影响。因此本文采用第二种方法进行仿真。在此基础上,本文进一步对面形误差、装配误差的影响进行了分析,并设计相应实验进行了验证。
作为国家自然科学基金“光学系统实际误差对高能短脉冲激光输出的影响研究”的一部分,本文主要工作内容包括面形误差的Zernike多项式拟合,带误差面型的光线追迹,空间特性仿真,脉冲宽度的计算和实验验证等。
There are more and more applications of ultra-short laser pulse in science research and industrial production. In many applications the output beam quality of laser pulse optical systems needs to be contraled in order to meet these requirements. The surface errors and assembly errors in real optical systems have great influence on the laser pulse beam quality. So it has an important significance to simulate the pulse beam quality through optical systems and analyse the effects of system errors.
The beam quality of laser pulse beam includes spatial characteristics and temporal characteristics. Spatial characteristics include focal spot size, pulse wave front, etc. while the temporal characteristics mainly mean the time width of output laser pulse. There are two ways to simulate the spatio-temporal characteristics. One numerical calculation method bases on Fresnel diffraction theory and Maxwell equations, the other bases on the combining of real ray tracing and diffraction integral. The former can not deal with the influence on pulse beam caused by optical system aberrations and errors. So we use the later method to simulate the pulse beam qulity in the paper. On this basis, this paper further analyses the effects caused by surface errors and assembly errors. Finaly, we design an experiment to verify our simulation.
As a part of the National Natural Science Foundation of China called research of the effects on output high-energy short-pulse laser beam quality caused by actual errors of optical systems, this paper principal research content includes the surface error fitting by Zernike, ray tracing for surface with errors, spatial characteristics simulation, pulse width calculation and experimental verification, etc.
引文
[1]陈钰清,王静环,激光原理[M],杭州：浙江大学出版社,2005.
[2]陈家璧,激光原理及应用[M],北京：电子工业出版社,2007.
[3]Strickland Donna, Mourou Gerard, Compression of amplified chirped optical pulses [J], Optics Communications,1985 (55):447-449.
[4]李隆,黄圣鸿,穆参军,白晋涛,侯洵,高功率飞秒脉冲激光器的进展[J],光学技术,2002(28)：528-532.
[5]王科伟,孙晓泉,马超杰,高能激光武器系统中的光束质量评价及应用[J],激光与光电子学进展,2005,42(8).
[6]任寰,蒋晓东,黄祖鑫等,高功率激光光学元件面形参数表征[J],强激光与粒子束,2005,17(3)：409-411.
[7]黄敏,飞秒激光脉冲展宽技术研究[D],北京工业大学硕士学位论文,2003(5)
[8]刘军,超短脉冲激光放大理论与实验研究[D],西北大学硕士学位论文,2003(6)
[9]G. M. Gale, G. Gallot, F. Hache, N.Lascoux, Femtosecond Dynamics of Hydrogen Bonds in Liquid Water:A Real Time Study[J], Phys. Rev. Lett.,1999(82):1068-1071.
[10]A. H. Zewail, Laser Femtosecond Chemistry[J], Science,1988 (242):1645-1653.
[11]罗乐,麻晓敏,李建设,黄英,邓善熙,飞秒激光和大功率激光的发展与应用[J],合肥工业大学学报(自然科学版),2005(12)：1610-1613.
[12]S. Nolte, M. Will, J. Burghoff, and A. Tunnermann, Ultrafast laser processing: new options for three-dimensional photonic structures [J], Journal of Modern Optics, 2004 (51):2533-2542.
[13]王云萍,黄建余,乔广林,高能激光光束质量的评价方法[J],光电子·激光,2010(12)：1029-1033
[14]肖书立,激光传输过程的虚拟仿真技术研究[D],华中科技大学硕士学位论文,2006(4).
[15]刘俊国,吕志伟,王雨雷,一种研究不均匀介质中激光传输的新方法[J],激光技术,2008(32)：441-444.
[16]M. Kempe, U. Stamm, B. Wilhelmi, W. Rudolpht, Spatial and temporal transformation of femtosecond laser pulses by lenses and lens system[J]s, OSA,1992,9(7):1158-1165.
[17]M. Kempe, W. Rudolpht, Femtosecond pulses in the focal regions of lens[J], physical review,1993,6 (6):4721-4729.
[18]白林,激光大气传输理论研究及应用[D],北京邮电大学硕士研究生学位论文,2008(3).
[19]Ulrike Fuchs, UweD. Zeitner and Andreas Tunnermann, Ultra-short pulse propagation in complex optical systems[J], Optics Express,2005 (13),5 (10).
[20]Ulrike Fuchs, Uwe D. Zeitner, Hybrid optics for focusing ultrashort laser pulses [J], OPTICS LETTERS,2006,31 (10):1516-1518
[21]Li Xiaotong, Cen Zhaofeng, Deng Shitao, Pulse Transmission simulation in the systems including diffraction components by real ray trace [A], Proc. of SPIE Vol. 6823,68230J,2007.
[22]Dawn Schafer, Wafa Amir, Charles G. Durfee and Jeff Squier,Emily A. Gibson, Lauren Kost and Ralph Jimenez, Linear, Spatio-Temporal Characterization of UV Microscope Objectives for Nonlinear Imaging and Spectroscopy[A], OSA,2007
[23]王栋,杨洪波,陈长征,光学表面面形的计算机仿真[J],计算机仿真,2006,24(2)：298-301.
[24]刘家国,李林,光机热集成分析中数据转换接口研究[J],北京理工大学学报,2007,27(5)：427-431
[25]黄忠伦,郭劲,付有余,评价激光光束质量的各种方法[J],激光杂志,2004(25),3：1-3.
[26]牛燕雄,汪岳峰,刘新,等,激光束质量M2因子及其测量[J],激光技术,1999(23),2(1)：38-41
[27]吴晗平,激光光束质量的评价与应用分析[J],光学精密工程,200(8),4(2)：128-132.
[28]陈哲,胡永明,廖延彪,等,高功率激光束光束质量的数值评价方法[J],光电子·激光,1998(5),10(5)：377-380.
[29]宋振明,飞秒激光脉冲在温度控制的惰性气体中传输的理论与实验研究[D],天津大学硕士学位论文.
[30]杜祥琬,实际强激光远场靶面上光束质量的评价因素[J],中国激光,1997,24(4)：327-322.
[31]季小玲,陶向阳,吕百达,光束控制系统热效应与球差对激光光束质量的影响[J],物理学报,2004,53(3)：952-960.
[32]SUHAS POYYIL VEETIL, HAGEN SCHIMMEL, FRANK WYROWSKI C. VIJAYAN, Wave optical modelling of focusing of an ultra short pulse[J], Journal of Modern Optics,2006, 53 (15):2187-2194.
[33]杨怿,陈时锦,张伟,空间光学遥感器光机热集成分析技术综述[J],光学技术,2005,31(6)：913-920.
[34]玻恩,沃耳夫,光学原理[M],北京：电子工业出版社,2009.
[35]单宝忠,王淑岩,牛憨笨,等,Zernike多项式拟合方法及应用[J],光学精密工程,2002,10(3)：318-322.
[36]田秀云,吴时彬,伍凡,等,环形大口径平面镜圆Zernike多项式拟合精度分析[J],光学技术,2008(34)：21-23.
[37]杨怿,张伟,陈时锦,光机热集成分析中数据转换接口的研究[J],宇航学报,2005,26(2)：201-205.
[38]刘家国,李林,光机热集成分析中数据转换接口研究[J],北京理工大学学报,2007,27(5)：427-431.
[39]鄢静舟,雷凡,周必方,等,用Zernike多项式进行波面拟合的几种算法[J],光学精密工程,1999,7(5)：021-821.
[40]史建亮,任戈,光机系统集成分析中光机接口的实现[J],四川大学学报(工程科学版),2009,41(2)：221-225.
[41]莫卫东,光学干涉波面数字化处理方法与应用[J],计算物理,2003,20(6)：514-520.
[42]GPI XP, GPI XPHR,GPI HS Interferometer System Operating Manual OMP-0351M[M], Zygo Corporation.
[43]李晓彤,岑兆丰,几何光学·像差·光学设计[M],杭州：浙江大学出版社,2007.
[44]韩丹夫,吴庆标编著,数值计算方法[M],杭州：浙江大学出版社,2006,6：145-151.
[45]徐小蓉,傅里叶变换及其应用[J],教育战线·论文版,138-140.
[46]吕乃光,傅里叶光学[M],北京：机械工业出版社,2006.
[47]南京工学院教学教研组,积分变换[M],北京：高等教育出版社,1989.
[48]杨丽娟,张白桦,叶旭桢,快速傅里叶变换FFT及其应用[J],光电工程,2004,31(sup)：1-7.
[49]周耀华,王凯仁,数字信号处理[M],上海：复旦大学出版社,1991.
[50]韩英魁,飞秒激光脉冲宽度测量的研究[D], 天津大学硕士学位论文,2004.
[2]陈家璧,激光原理及应用[M],北京：电子工业出版社,2007.
[3]Strickland Donna, Mourou Gerard, Compression of amplified chirped optical pulses [J], Optics Communications,1985 (55):447-449.
[4]李隆,黄圣鸿,穆参军,白晋涛,侯洵,高功率飞秒脉冲激光器的进展[J],光学技术,2002(28)：528-532.
[5]王科伟,孙晓泉,马超杰,高能激光武器系统中的光束质量评价及应用[J],激光与光电子学进展,2005,42(8).
[6]任寰,蒋晓东,黄祖鑫等,高功率激光光学元件面形参数表征[J],强激光与粒子束,2005,17(3)：409-411.
[7]黄敏,飞秒激光脉冲展宽技术研究[D],北京工业大学硕士学位论文,2003(5)
[8]刘军,超短脉冲激光放大理论与实验研究[D],西北大学硕士学位论文,2003(6)
[9]G. M. Gale, G. Gallot, F. Hache, N.Lascoux, Femtosecond Dynamics of Hydrogen Bonds in Liquid Water:A Real Time Study[J], Phys. Rev. Lett.,1999(82):1068-1071.
[10]A. H. Zewail, Laser Femtosecond Chemistry[J], Science,1988 (242):1645-1653.
[11]罗乐,麻晓敏,李建设,黄英,邓善熙,飞秒激光和大功率激光的发展与应用[J],合肥工业大学学报(自然科学版),2005(12)：1610-1613.
[12]S. Nolte, M. Will, J. Burghoff, and A. Tunnermann, Ultrafast laser processing: new options for three-dimensional photonic structures [J], Journal of Modern Optics, 2004 (51):2533-2542.
[13]王云萍,黄建余,乔广林,高能激光光束质量的评价方法[J],光电子·激光,2010(12)：1029-1033
[14]肖书立,激光传输过程的虚拟仿真技术研究[D],华中科技大学硕士学位论文,2006(4).
[15]刘俊国,吕志伟,王雨雷,一种研究不均匀介质中激光传输的新方法[J],激光技术,2008(32)：441-444.
[16]M. Kempe, U. Stamm, B. Wilhelmi, W. Rudolpht, Spatial and temporal transformation of femtosecond laser pulses by lenses and lens system[J]s, OSA,1992,9(7):1158-1165.
[17]M. Kempe, W. Rudolpht, Femtosecond pulses in the focal regions of lens[J], physical review,1993,6 (6):4721-4729.
[18]白林,激光大气传输理论研究及应用[D],北京邮电大学硕士研究生学位论文,2008(3).
[19]Ulrike Fuchs, UweD. Zeitner and Andreas Tunnermann, Ultra-short pulse propagation in complex optical systems[J], Optics Express,2005 (13),5 (10).
[20]Ulrike Fuchs, Uwe D. Zeitner, Hybrid optics for focusing ultrashort laser pulses [J], OPTICS LETTERS,2006,31 (10):1516-1518
[21]Li Xiaotong, Cen Zhaofeng, Deng Shitao, Pulse Transmission simulation in the systems including diffraction components by real ray trace [A], Proc. of SPIE Vol. 6823,68230J,2007.
[22]Dawn Schafer, Wafa Amir, Charles G. Durfee and Jeff Squier,Emily A. Gibson, Lauren Kost and Ralph Jimenez, Linear, Spatio-Temporal Characterization of UV Microscope Objectives for Nonlinear Imaging and Spectroscopy[A], OSA,2007
[23]王栋,杨洪波,陈长征,光学表面面形的计算机仿真[J],计算机仿真,2006,24(2)：298-301.
[24]刘家国,李林,光机热集成分析中数据转换接口研究[J],北京理工大学学报,2007,27(5)：427-431
[25]黄忠伦,郭劲,付有余,评价激光光束质量的各种方法[J],激光杂志,2004(25),3：1-3.
[26]牛燕雄,汪岳峰,刘新,等,激光束质量M2因子及其测量[J],激光技术,1999(23),2(1)：38-41
[27]吴晗平,激光光束质量的评价与应用分析[J],光学精密工程,200(8),4(2)：128-132.
[28]陈哲,胡永明,廖延彪,等,高功率激光束光束质量的数值评价方法[J],光电子·激光,1998(5),10(5)：377-380.
[29]宋振明,飞秒激光脉冲在温度控制的惰性气体中传输的理论与实验研究[D],天津大学硕士学位论文.
[30]杜祥琬,实际强激光远场靶面上光束质量的评价因素[J],中国激光,1997,24(4)：327-322.
[31]季小玲,陶向阳,吕百达,光束控制系统热效应与球差对激光光束质量的影响[J],物理学报,2004,53(3)：952-960.
[32]SUHAS POYYIL VEETIL, HAGEN SCHIMMEL, FRANK WYROWSKI C. VIJAYAN, Wave optical modelling of focusing of an ultra short pulse[J], Journal of Modern Optics,2006, 53 (15):2187-2194.
[33]杨怿,陈时锦,张伟,空间光学遥感器光机热集成分析技术综述[J],光学技术,2005,31(6)：913-920.
[34]玻恩,沃耳夫,光学原理[M],北京：电子工业出版社,2009.
[35]单宝忠,王淑岩,牛憨笨,等,Zernike多项式拟合方法及应用[J],光学精密工程,2002,10(3)：318-322.
[36]田秀云,吴时彬,伍凡,等,环形大口径平面镜圆Zernike多项式拟合精度分析[J],光学技术,2008(34)：21-23.
[37]杨怿,张伟,陈时锦,光机热集成分析中数据转换接口的研究[J],宇航学报,2005,26(2)：201-205.
[38]刘家国,李林,光机热集成分析中数据转换接口研究[J],北京理工大学学报,2007,27(5)：427-431.
[39]鄢静舟,雷凡,周必方,等,用Zernike多项式进行波面拟合的几种算法[J],光学精密工程,1999,7(5)：021-821.
[40]史建亮,任戈,光机系统集成分析中光机接口的实现[J],四川大学学报(工程科学版),2009,41(2)：221-225.
[41]莫卫东,光学干涉波面数字化处理方法与应用[J],计算物理,2003,20(6)：514-520.
[42]GPI XP, GPI XPHR,GPI HS Interferometer System Operating Manual OMP-0351M[M], Zygo Corporation.
[43]李晓彤,岑兆丰,几何光学·像差·光学设计[M],杭州：浙江大学出版社,2007.
[44]韩丹夫,吴庆标编著,数值计算方法[M],杭州：浙江大学出版社,2006,6：145-151.
[45]徐小蓉,傅里叶变换及其应用[J],教育战线·论文版,138-140.
[46]吕乃光,傅里叶光学[M],北京：机械工业出版社,2006.
[47]南京工学院教学教研组,积分变换[M],北京：高等教育出版社,1989.
[48]杨丽娟,张白桦,叶旭桢,快速傅里叶变换FFT及其应用[J],光电工程,2004,31(sup)：1-7.
[49]周耀华,王凯仁,数字信号处理[M],上海：复旦大学出版社,1991.
[50]韩英魁,飞秒激光脉冲宽度测量的研究[D], 天津大学硕士学位论文,2004.