微细阵列群孔加工电火花机床宏微复合数控系统的研究
摘要
随着微机电系统的迅速发展,微喷部件在纺织、微电子技术等领域的应用愈来愈广,对其制造精度的要求越来越高。微细电火花加工方法具有宏观作用力小、可控性好等特点,是目前进行微喷阵列孔加工的重要方法之一。国内对微喷阵列孔加工设备的研究较少,目前还没有商业化的微喷阵列孔加工设备,因此研制一台具有自主知识产权的微喷阵列孔电火花加工设备具有重大意义。
论文分析了电火花加工机床控制系统相关技术的研究现状,在查阅大量资料和对多种方案进行对比的基础上,构建了基于PMAC(programmable multi-axes controller)运动控制卡的宏微复合驱动的数控系统。在仔细研究宏微复合驱动控制的特点和微细电火花加工装置的基础上,设计了微细电火花阵列孔加工机床的宏微复合伺服系统,完成了宏微复合进给系统、线电极磨削、电源控制和去离子水装置的控制方案设计。
在方案确定的基础上,完成了控制系统的软件设计:基于VC++6.0和PMAC的动态链接库实现了工控机与PMAC卡之间的通信;根据设计方案划分了数控系统软件的功能模块;编制了PMAC卡的运动程序,实现机床的伺服进给;编写了工控机和电源的串口通信程序,实现了对开路电压和脉冲电源的控制,并设计了脉宽调制电路实现了对磁滞制动器的控制;利用多线程技术和OpenGL技术实现机床状态的实时显示;利用Access2003为数控系统创建了工艺数据库;完成了对去离子水装置的控制等功能。
最后,为数控系统添加了安全性和抗干扰设计,完成了伺服电机调试和控制参数整定;通过宏动和微动的位移特性进行了测试,得到此数控系统满足加工需要,并可以进行稳定运行的结论。
With the rapid development of micro-electro-mechanical system, micro-injection parts in textile, microelectronic technology applications become more and more wide, its manufacturing accuracy is higher. EDM method has small macro-forces and good controllability, and thus is currently an important means of processing micro array holes. For the less study of micro-array holes processing equipment, there is no commercial micro-array-processing equipment, so developing a machine with a proprietary micro array holes EDM equipment has significant significance.
This dissertation analyzes the present situation of EDM control system, on the basis of lookup information and compares a number of schemes, based on PMAC, macro and micro driver system of the CNC is built. The EDM array holes machine control system, macro-micro compound feed system line electrode grinding solutions, power control scheme, deionized water unit's control scheme have been completed after the study features of macro and micro driver control and EDM equipment.
Using VC++6.0 and PMAC’s dynamic link library implement communication of IPC and PMAC; in accordance with the design of the CNC Software divides feature modules; by IPC and DC power and pulse power of serial communication, the open circuit voltage and pulse generator control; the compilation of the motion program of PMAC, enabling the machine tools of servo feed; use pulse width modulation circuit enables hysteresis brake torque control; use of multithread and OpenGL technology implementation machine status of real-time display; use Access2003 to create a technology database and add into the CNC control system; completed the deionized water unit's control.
The last, added security settings to the NC system, complete the tuning of motor and PID of the control system; macro-and micro-displacement properties have been tested, the processing requirements of NC system can be satisfied and it is concluded that the system can stable machine.
论文分析了电火花加工机床控制系统相关技术的研究现状,在查阅大量资料和对多种方案进行对比的基础上,构建了基于PMAC(programmable multi-axes controller)运动控制卡的宏微复合驱动的数控系统。在仔细研究宏微复合驱动控制的特点和微细电火花加工装置的基础上,设计了微细电火花阵列孔加工机床的宏微复合伺服系统,完成了宏微复合进给系统、线电极磨削、电源控制和去离子水装置的控制方案设计。
在方案确定的基础上,完成了控制系统的软件设计:基于VC++6.0和PMAC的动态链接库实现了工控机与PMAC卡之间的通信;根据设计方案划分了数控系统软件的功能模块;编制了PMAC卡的运动程序,实现机床的伺服进给;编写了工控机和电源的串口通信程序,实现了对开路电压和脉冲电源的控制,并设计了脉宽调制电路实现了对磁滞制动器的控制;利用多线程技术和OpenGL技术实现机床状态的实时显示;利用Access2003为数控系统创建了工艺数据库;完成了对去离子水装置的控制等功能。
最后,为数控系统添加了安全性和抗干扰设计,完成了伺服电机调试和控制参数整定;通过宏动和微动的位移特性进行了测试,得到此数控系统满足加工需要,并可以进行稳定运行的结论。
With the rapid development of micro-electro-mechanical system, micro-injection parts in textile, microelectronic technology applications become more and more wide, its manufacturing accuracy is higher. EDM method has small macro-forces and good controllability, and thus is currently an important means of processing micro array holes. For the less study of micro-array holes processing equipment, there is no commercial micro-array-processing equipment, so developing a machine with a proprietary micro array holes EDM equipment has significant significance.
This dissertation analyzes the present situation of EDM control system, on the basis of lookup information and compares a number of schemes, based on PMAC, macro and micro driver system of the CNC is built. The EDM array holes machine control system, macro-micro compound feed system line electrode grinding solutions, power control scheme, deionized water unit's control scheme have been completed after the study features of macro and micro driver control and EDM equipment.
Using VC++6.0 and PMAC’s dynamic link library implement communication of IPC and PMAC; in accordance with the design of the CNC Software divides feature modules; by IPC and DC power and pulse power of serial communication, the open circuit voltage and pulse generator control; the compilation of the motion program of PMAC, enabling the machine tools of servo feed; use pulse width modulation circuit enables hysteresis brake torque control; use of multithread and OpenGL technology implementation machine status of real-time display; use Access2003 to create a technology database and add into the CNC control system; completed the deionized water unit's control.
The last, added security settings to the NC system, complete the tuning of motor and PID of the control system; macro-and micro-displacement properties have been tested, the processing requirements of NC system can be satisfied and it is concluded that the system can stable machine.
引文
1 H. S. Lim, Y. S. Wong, M. Rahman, M. K. Edwin, Lee. A. Study on the Machining of High-aspect Ratio Micro-structures Using Micro-EDM. Journal of Materials Processing Technology. 2003, (140): 318~325
2 Sheu Dong-Yea, Masuzawa T. Development of large-scale production of microholes by EDM[C]. Proceedings of the 13th International Symposium of Electromachining (ISEM), Bilbao, Spain. 2001:747~758
3 Takahata Ken’ichi, Gianchandani Yogesh B, Batch Mode microelectro-dischange machining [J], Journal of Microelectromechanical Systems. 2002(11):102~111
4赵万生,李文卓,王振龙.高精度微细电火花加工系统的研制.电加工与模具. 2004, (1): 6~8
5 T. Kawakami, M. Kunieda, Study on Factors Determining Limits of Minimum Machinable Size in Micro EDM, CIRP Annals - Manufacturing Technology. 2005, (54): 167~170
6 S. Webzell. That first step into EDM. In Machinery. Finadly Publications Ltd. 2001: 41~45
7王振龙等.微细加工技术.国防工业出版社. 2005: 77~98
8 Yoshihito Imai, Takayuki Nakagawa, Hidetaka Miyake, Hirofumi Hidai, Hitoshi Tokura. Local Actuator Module for Highly Accurate Micro-EDM. Journal of Materials Processing Technology. 2004: 328~333
9 Ehreld Wolfgang, Lethr Heinz, etc. Microeletro-Discharge Machining as a Technology in Micromachining. Proceedings of SPIE–The International Society for Optical Engineering. 1996, 2879(10): 332~337
10李文卓.智能永磁电动操作机构研制及微细喷油孔电火花加工机床研制.上海交通大学.博士后学位论文. 2005: 10~12
11 T.Masuzwa, M.Fujino, K.Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34 (1): 431~434
12 Song Xiaozhong, Reynaerts Dominiek, Meeusen Wim, Brussel Hendrik. Investigation of Micro-EDM for Silicon Microstructure Fabrication. Society of Photo-Optical Instruction Engineers, 1999, 2(3680): 792~799
13 J. Fleischera, T. Masuzawa b, J. Schmidt, M. Knoll, New applications for micro-EDM, Journal of Materials Processing Technology, 149 (2004) : 246~249
14王振龙.微细电火花加工关键技术工艺研究.哈尔滨工业大学博士学位论文. 2000, (8):1~33
15李文卓.微细电火花加工系统及其相关技术研究.哈尔滨工业大学学位论文. 2002, 12: 64-79
16 Xiaodong Yang. Masahito Kimori. Masanori Kunieda. Sadao Sano and Ichiro Araie. Machining Properties of Micro EDM Using Electrostatic Induction Feeding. Proceedings Of The 15th International Symposium On Electromachining. 2007: 232~234
17古文才,郭钟宁,于兆勤,刘小康.微细阵列孔加工技术及其应用.机电工程技术. 2008, (10):13~17
18董德生,曾伟梁,杭观荣等.群孔的微细电火花加工技术研究[J].电加工与模具,2006(2):47~49
19陈明君,郭伟星,李旦.基于PMAC开放式数控系统的研究与应用新进展.航空精密制造技术. 2005, 4:28~31
20林金兰.数控系统的发展趋势—开放式数控系统.机床与液压. 2003, 5: 24~26
21胡玉景,张建华,霍孟友等.开放式控制器及其在特种加工中的应用.机电一体化. 2005, (2): 20~23
22赖国庭,吴玉厚,富大伟.开放式数控系统的发展及性能研究.机械与电子. 2003, 2: 3~5
23吴义荣,何超龙.我国数控技术的现状及发展趋势. CAD/CAM与制造业信息化. 2002, 6: 75~76
24石宏,蔡光起,史家顺.开放式数控系统的现状及发展.机械制造. 2005, 6: 18~21
25白建华,黄海峰.开放式CNC与现代运动控制技术的发展.机电工程. 2001, 18(4): 1~4
26姜荣.一种基于运动控制卡的伺服电机控制系统.机电产品开放与创新. 2006, 5: 47~50
27刘恒娟,高志宏.开放式NC嵌入PC型数控系统的研究.中国制造业信息化. 2004, 11: 10~12
28吴希让,吴国玥.新型CNC机床控制系统的设计.兵工自动化. 2000, 3: 23~26
29王建林,胡小唐.纳米定位技术研究现状.机械设计与研究. 2000, (1): 43~44
30林德教,吴健,殷纯水.具有纳米级分辨率的超精密定位工作台.光学技术. 2001, (11): 556~559
31 A. A. Elmustafa , Max G.Lagally. Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations. Precision Engineering, 2001 , 11(25): 49~52
32 SANGJOO K, WAN K C, YOUNGIL Y. On the coarse/fine dual-stagemanipulators with perturbation compensator[C] .Proceedings of the 2001 IEEE International Conference on Robotics and Automation. Seoul, Korea. May, 2001 : 121~126
33 CANNON D W, MAGEE D P, BOOK W J, et al. Experimental study on micro/macro manipulator vibration control [C]. Proceedings of the 1996 IEEE International Conference on Robotics and Automation. Minneapolis, Minnesota. April, 1996:2549~2554
34 KWON S J, CHUNG W K. Robust and time-optimal control strategy for coarse/fine dual-stage manipulators[C].Proceedings of the2000IEEE International Conference on Robotics and Automation. San Francisco, CA. April, 2000:4051~4056
35张强,卢泽生.宏/微结合双驱动进给控制系统的建模与仿真研究.机械传动. 2006, 4: 16~19
36赵万生,刘维东,王振龙.差动往复式微型电火花加工装置的研究.机械工程报. 2000, 36(9): 65~68
37 Yong Li, Min Guo, Zhaoying Zhou, Min Hu. Micro Electro Discharge Machine with an Inchworm Type of Micro Feed Mechanism. Precision Engineering, 2002, 26: 7~14
38袁松梅,赵万生.压电驱动技术在电火花加工中的应用.中国机械工程. 2001, 12(9): 1079~1081
39彭玉海.基于PMAC的数控系统研究与开发.西安理工大学硕士论文. 2007:7~8
40李华峰,丁洪生,何小妹等. BKX-I型变轴数控机床的开放式数控系统.组合机床与自动化加工技术. 2005, (5): 61~64
41梅洪,单家元. PMAC控制板在转台控制系统中的应用.微计算机信息, 2003,19(6): 8~10
42苏海新,韩宝玲,罗庆生等.基于PMAC的工业码垛机器人控制特性研究.机械与电子. 2009, 9: 57~60
43周青松,张铁.基于PMAC的喷涂机器人实时状态监控.机械设计与制造. 2009, 12: 155~156
44王小娟,杨玲玲.基于PMAC的五轴数控铣床系统设计.山西农业大学学报(自然科学版). 2009, 29(6), 513~516
45梁春苗,黄玉美,王小波.基于PMAC的自动导引运输车智能控制.机电工程. 2009, 29(8): 97~99
46陈洪涛,程光明,肖献强,于保军,杨志刚.宏/微双重驱动技术的研究和应用现状.机械设计与制造. 2007,1: 153~155
47 TZOU H S. Design of a piezoelectric exciter/actuator for micro-displacement controltheory and Experiment [J]. Journal of the American Society of Precision Engineering, 1991, 13 (2):104~110
48 JIE D G, SUN L N. Fuzzy—reasoning based self—tuning PID control for piezoelectric micro~displacement system. Journal of Harbin Institute of Technology, 2005, 37(2): 145~147
49 Delta Tau Data System Inc. PMAC Introduction Manual. Delta Tau Data Systems Inc.2008: 20~22
50张勇,王振龙,胡富强等.微细电火花加工中微细电极的制作与检测技术研究.制造技术与机床工艺与检测. 2004, 8: 96~98
51 T. Masuzawa, M. Fujino, K. Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP.1985, 34(1): 431~434
52陈家凤,陈越.基于VC和OpenGL的三维图形的开发.武汉科技学院学报. 2005, 5: 49~51
53冷汹涛.数控机床定位精度和重复定位精度的检验.机床与液压. 2008, 36(8): 191~192
2 Sheu Dong-Yea, Masuzawa T. Development of large-scale production of microholes by EDM[C]. Proceedings of the 13th International Symposium of Electromachining (ISEM), Bilbao, Spain. 2001:747~758
3 Takahata Ken’ichi, Gianchandani Yogesh B, Batch Mode microelectro-dischange machining [J], Journal of Microelectromechanical Systems. 2002(11):102~111
4赵万生,李文卓,王振龙.高精度微细电火花加工系统的研制.电加工与模具. 2004, (1): 6~8
5 T. Kawakami, M. Kunieda, Study on Factors Determining Limits of Minimum Machinable Size in Micro EDM, CIRP Annals - Manufacturing Technology. 2005, (54): 167~170
6 S. Webzell. That first step into EDM. In Machinery. Finadly Publications Ltd. 2001: 41~45
7王振龙等.微细加工技术.国防工业出版社. 2005: 77~98
8 Yoshihito Imai, Takayuki Nakagawa, Hidetaka Miyake, Hirofumi Hidai, Hitoshi Tokura. Local Actuator Module for Highly Accurate Micro-EDM. Journal of Materials Processing Technology. 2004: 328~333
9 Ehreld Wolfgang, Lethr Heinz, etc. Microeletro-Discharge Machining as a Technology in Micromachining. Proceedings of SPIE–The International Society for Optical Engineering. 1996, 2879(10): 332~337
10李文卓.智能永磁电动操作机构研制及微细喷油孔电火花加工机床研制.上海交通大学.博士后学位论文. 2005: 10~12
11 T.Masuzwa, M.Fujino, K.Kobayashi. Wire Electro-Discharge Grinding for Micro-Machining. Annals of the CIRP. 1985,34 (1): 431~434
12 Song Xiaozhong, Reynaerts Dominiek, Meeusen Wim, Brussel Hendrik. Investigation of Micro-EDM for Silicon Microstructure Fabrication. Society of Photo-Optical Instruction Engineers, 1999, 2(3680): 792~799
13 J. Fleischera, T. Masuzawa b, J. Schmidt, M. Knoll, New applications for micro-EDM, Journal of Materials Processing Technology, 149 (2004) : 246~249
14王振龙.微细电火花加工关键技术工艺研究.哈尔滨工业大学博士学位论文. 2000, (8):1~33
15李文卓.微细电火花加工系统及其相关技术研究.哈尔滨工业大学学位论文. 2002, 12: 64-79
16 Xiaodong Yang. Masahito Kimori. Masanori Kunieda. Sadao Sano and Ichiro Araie. Machining Properties of Micro EDM Using Electrostatic Induction Feeding. Proceedings Of The 15th International Symposium On Electromachining. 2007: 232~234
17古文才,郭钟宁,于兆勤,刘小康.微细阵列孔加工技术及其应用.机电工程技术. 2008, (10):13~17
18董德生,曾伟梁,杭观荣等.群孔的微细电火花加工技术研究[J].电加工与模具,2006(2):47~49
19陈明君,郭伟星,李旦.基于PMAC开放式数控系统的研究与应用新进展.航空精密制造技术. 2005, 4:28~31
20林金兰.数控系统的发展趋势—开放式数控系统.机床与液压. 2003, 5: 24~26
21胡玉景,张建华,霍孟友等.开放式控制器及其在特种加工中的应用.机电一体化. 2005, (2): 20~23
22赖国庭,吴玉厚,富大伟.开放式数控系统的发展及性能研究.机械与电子. 2003, 2: 3~5
23吴义荣,何超龙.我国数控技术的现状及发展趋势. CAD/CAM与制造业信息化. 2002, 6: 75~76
24石宏,蔡光起,史家顺.开放式数控系统的现状及发展.机械制造. 2005, 6: 18~21
25白建华,黄海峰.开放式CNC与现代运动控制技术的发展.机电工程. 2001, 18(4): 1~4
26姜荣.一种基于运动控制卡的伺服电机控制系统.机电产品开放与创新. 2006, 5: 47~50
27刘恒娟,高志宏.开放式NC嵌入PC型数控系统的研究.中国制造业信息化. 2004, 11: 10~12
28吴希让,吴国玥.新型CNC机床控制系统的设计.兵工自动化. 2000, 3: 23~26
29王建林,胡小唐.纳米定位技术研究现状.机械设计与研究. 2000, (1): 43~44
30林德教,吴健,殷纯水.具有纳米级分辨率的超精密定位工作台.光学技术. 2001, (11): 556~559
31 A. A. Elmustafa , Max G.Lagally. Flexural-hinge guided motion nanopositioner stage for precision machining: finite element simulations. Precision Engineering, 2001 , 11(25): 49~52
32 SANGJOO K, WAN K C, YOUNGIL Y. On the coarse/fine dual-stagemanipulators with perturbation compensator[C] .Proceedings of the 2001 IEEE International Conference on Robotics and Automation. Seoul, Korea. May, 2001 : 121~126
33 CANNON D W, MAGEE D P, BOOK W J, et al. Experimental study on micro/macro manipulator vibration control [C]. Proceedings of the 1996 IEEE International Conference on Robotics and Automation. Minneapolis, Minnesota. April, 1996:2549~2554
34 KWON S J, CHUNG W K. Robust and time-optimal control strategy for coarse/fine dual-stage manipulators[C].Proceedings of the2000IEEE International Conference on Robotics and Automation. San Francisco, CA. April, 2000:4051~4056
35张强,卢泽生.宏/微结合双驱动进给控制系统的建模与仿真研究.机械传动. 2006, 4: 16~19
36赵万生,刘维东,王振龙.差动往复式微型电火花加工装置的研究.机械工程报. 2000, 36(9): 65~68
37 Yong Li, Min Guo, Zhaoying Zhou, Min Hu. Micro Electro Discharge Machine with an Inchworm Type of Micro Feed Mechanism. Precision Engineering, 2002, 26: 7~14
38袁松梅,赵万生.压电驱动技术在电火花加工中的应用.中国机械工程. 2001, 12(9): 1079~1081
39彭玉海.基于PMAC的数控系统研究与开发.西安理工大学硕士论文. 2007:7~8
40李华峰,丁洪生,何小妹等. BKX-I型变轴数控机床的开放式数控系统.组合机床与自动化加工技术. 2005, (5): 61~64
41梅洪,单家元. PMAC控制板在转台控制系统中的应用.微计算机信息, 2003,19(6): 8~10
42苏海新,韩宝玲,罗庆生等.基于PMAC的工业码垛机器人控制特性研究.机械与电子. 2009, 9: 57~60
43周青松,张铁.基于PMAC的喷涂机器人实时状态监控.机械设计与制造. 2009, 12: 155~156
44王小娟,杨玲玲.基于PMAC的五轴数控铣床系统设计.山西农业大学学报(自然科学版). 2009, 29(6), 513~516
45梁春苗,黄玉美,王小波.基于PMAC的自动导引运输车智能控制.机电工程. 2009, 29(8): 97~99
46陈洪涛,程光明,肖献强,于保军,杨志刚.宏/微双重驱动技术的研究和应用现状.机械设计与制造. 2007,1: 153~155
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