声悬浮抛光装置研制及磨粒流场研究
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摘要
纳米力学性能是研究纳米材料、器件与结构的重要参数之一，已成为纳米技术的重要研究内容。随着微电子、信息、智能系统等逐步向微型化发展、纳米器件的广泛应用、纳米系统性能的深入研究，都迫切需要纳米力学来提供可靠性设计的理论基础。因此高质量，无污染纳米力学试样的制备成为亟待解决的难题。
为此本文以制备高质量的纳米力学试样为目的，采取了一种全新的以声悬浮为基础的抛光方法，经过声悬浮抛光的试样表面粗糙度达到0.287nm，且表面无腐蚀，比传统抛光方法制备的试样质量要高，损伤层有所降低。本文主要的研究内容有：
1．根据理论分析设计了一套声悬浮抛光实验平台，包括超声波发生系统、悬浮抛光容器以及机架结构部分。选择了超声波换能器种类以及结构，根据超声频率以及波长设计了超声变幅杆。并通过ANSYS模态分析验证所选换能器以及变幅杆的可行性。
2.根据研制的声悬浮抛光装置，对抛光容器内的磨粒流场进行研究，并对磨料粒子冲蚀工件表面的能量进行研究，建立磨料冲蚀工件表面的理论模型。同时对抛光液的性能进行研究。
3．通过不同抛光方法进行试样制备，对比不同试样制备方法的加工效果，并通过SEM、AFM等测试方法对试样表面形貌观察对比，从而验证声悬浮抛光的有效性。
Nanomechanical properties is one of the important parameters to study of nanophasematerials, components and structure. It has been become an important content ofnanotechnology. With the development of microelectronics, information, intelligent systemgradually to miniaturization, the wide application of nano-device and thorough research ofnanosecond science and technology, they are need to nanomechanics to provide theory basisof reliability design. Therefore, prepare a nanomechanics model of high quality and nocontamination has been a difficult problem need to solve
For the purpose of prepare a nanomechanics model of high quality, this paper adopt anew polishing method based on acoustic levitation. The surface roughness is 0.287nm afteracoustic levitation polishing, and no contamination in the surface. It has a high-qualitysample preparation than traditional polishing method.
The main research content of this article as follows:
1. According to the theoretical analysis, this article design a set of acoustic levitationpolishing experimental platform, including the occurrence of ultrasound systems, containerfor suspension polishing and frame structure. At the same time, choose the type of ultrasonictransducer and the structure. According to the ultrasonic frequency and wavelength, designthe ultrasonic horn. Through ANSYS model analysis to verify the feasibility of horn.
2. According to the development of acoustic levitation polishing device, to study theabrasive flow field in the container. this article research the erosion energy of the abrasiveparticle to the surface, and establish a theoretical model. At the same time to study theperformance of slurry.
3. By different polishing method for sample preparation, and comparing differentmethods of sample preparation processing effects. Through SEM, TEM and other tests toobserve the surface morphology on the specimen, to verity the effectiveness of acoustic levitation polishing.
为此本文以制备高质量的纳米力学试样为目的，采取了一种全新的以声悬浮为基础的抛光方法，经过声悬浮抛光的试样表面粗糙度达到0.287nm，且表面无腐蚀，比传统抛光方法制备的试样质量要高，损伤层有所降低。本文主要的研究内容有：
1．根据理论分析设计了一套声悬浮抛光实验平台，包括超声波发生系统、悬浮抛光容器以及机架结构部分。选择了超声波换能器种类以及结构，根据超声频率以及波长设计了超声变幅杆。并通过ANSYS模态分析验证所选换能器以及变幅杆的可行性。
2.根据研制的声悬浮抛光装置，对抛光容器内的磨粒流场进行研究，并对磨料粒子冲蚀工件表面的能量进行研究，建立磨料冲蚀工件表面的理论模型。同时对抛光液的性能进行研究。
3．通过不同抛光方法进行试样制备，对比不同试样制备方法的加工效果，并通过SEM、AFM等测试方法对试样表面形貌观察对比，从而验证声悬浮抛光的有效性。
Nanomechanical properties is one of the important parameters to study of nanophasematerials, components and structure. It has been become an important content ofnanotechnology. With the development of microelectronics, information, intelligent systemgradually to miniaturization, the wide application of nano-device and thorough research ofnanosecond science and technology, they are need to nanomechanics to provide theory basisof reliability design. Therefore, prepare a nanomechanics model of high quality and nocontamination has been a difficult problem need to solve
For the purpose of prepare a nanomechanics model of high quality, this paper adopt anew polishing method based on acoustic levitation. The surface roughness is 0.287nm afteracoustic levitation polishing, and no contamination in the surface. It has a high-qualitysample preparation than traditional polishing method.
The main research content of this article as follows:
1. According to the theoretical analysis, this article design a set of acoustic levitationpolishing experimental platform, including the occurrence of ultrasound systems, containerfor suspension polishing and frame structure. At the same time, choose the type of ultrasonictransducer and the structure. According to the ultrasonic frequency and wavelength, designthe ultrasonic horn. Through ANSYS model analysis to verify the feasibility of horn.
2. According to the development of acoustic levitation polishing device, to study theabrasive flow field in the container. this article research the erosion energy of the abrasiveparticle to the surface, and establish a theoretical model. At the same time to study theperformance of slurry.
3. By different polishing method for sample preparation, and comparing differentmethods of sample preparation processing effects. Through SEM, TEM and other tests toobserve the surface morphology on the specimen, to verity the effectiveness of acoustic levitation polishing.
引文
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[37]李长河，修世超，李琦，蔡光起.磨料喷射光整加工机理及在机械领域中的应用[J].机械制造，2004,42(8);18-21
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[2] Manhong Zhao.Nanoindentation：Mechanisms and applications[D].Columbia University, doctoralthesis,2007.10
[3]张泰华.微纳米力学测试技术及其应用[M].机械工业出版社，2005.1
[4] Anthony C.Fischer Cripps[M]. Nanoindentation. Springer,2004
[5] http:// www.nsm.cam.ac.uk/wjc/[EB/DL]
[6] http:// www.nanoindentation.cornell.edu/home_main.htm[EB/DL]
[7] Hainsworth S V, Chandler H W , Page T F. A naly2sis of N ano indentat ion Load-DisplacementLoading Curves[J]. J. M ater. Res. , 1996, 11(8):1987～1995
[8] http:// www.buhler.com[EB/DL]
[9] http:// www.camm.ohio-state.edu[EB/DL]
[10] http:// www.ceramic.hanyang.ac.kr[EB/DL]
[11] J.Mayer, L.A.Giannuzzi, T.Kamino, J.Michael. TEM sample preparation and FIB-induced damage[J].Material Research Society Bulletin,2007,32:400-407
[12] T.Kamino,T.Yaguchi,Y.Kuroda et al.Evaluation of TEM sample of an Mg-Al alloy prepared usingFBI milling at the operating voltages of 10 Kv and 40Kv[J].Journal of Electron Microscopy, 2004,53(5):456-463
[13]韩涛，徐宗伟，房丰洲等.应用聚焦离子束/电子束技术的碳纳米管探针制备工艺研究[J].现代制造工程，2010(3)：118-120
[14]宋云，陆海纬，王振雄等.聚焦离子束在精细加工中引起损伤的分析[J].复旦学报（自然科学版），2007,46(1)：117-122
[15] Lu Shen, Tianxi Liu, Pengfei Lv.Polishing effect on nanoindentation behavior of nylon 66 and itsnanocomposites.Polymer[J] Testing,2005,24(6):746-749
[16] S.P.Ho,H.Goodis,M.Balooch et al.The effect of sample preparation technique on determination ofdetermination of structure and nanomechanical properties of human cementum hard tissue[J].Biomaterials,2004,25(19):4847-4857
[17] R.Kumer,W.M.Cross,L.Kjerengtroen,J.J.Kellar.Fiber bias in nanoindentation of polymer matrixcomposites[J].Composite Interfaces,2004,11(5-6):431-440
[18] L.E.Samuels.Metallographic polishing by mechanical methods[J].Fourth Edition,ASM International,2003.1
[19] J.R.Grim,M.Skowronski,W.J.Everson,V.D.Heydemann. Selectivity and residual damage of collidalsilicachemi-mechanical polishing of silicon carbide[J]. Materials Science Forum,2006,527-529:1095-1098
[20] T.Satio, T.Hirayama.Lattice strain and dislocations in polished surfaces on sapphire[J]. J.Am. Ceram.Soc.2005,88(8):2277-2285
[21] T.A.Ring, P.Feeney, D.Boldridge et al. Brittle and ductile fracture mechanics analysis of surfacedamage caused during CMP[J].Journal of The Electrochemaical Society, 2007, 154(3): H239-H248
[22]袁巨龙.功能陶瓷超精密加工技术[M].哈尔滨工业大学出版社，20005
[23]罗胜益。精密加工原理。台湾华梵大学讲义，http://mechatronic.me.hfu.edu.tw/Luol/Lo.pdf[EB/DL]
[24]徐圣博.抑制抛光刀具磨耗影响之探讨—摇摆运动之规划[D].国立中山大学硕士学位论文，2006
[25]曹志强.硬脆材料液流悬浮超光滑加工的理论与实验研究[D].吉林大学，2007
[26]张恩忠.液流悬浮超光滑加工不同材料的对比研究[D]。吉林大学，2006
[27]洪泉，王贵成.精密加工表面完整性的研究及其进展[J].现代制造工程，2004(8):12-15
[28]张耿维.磁力研磨与电解磁力研磨之抛光特性研究[D].国立中央大学，2003
[29]张峰，潘守甫，张学军.磁流变抛光材料去除的研究[J].光学技术，2001,27:522-525
[30]程灏波，冯之敬，王英伟.超光滑光学表面的磁性类Bingham流体确定性抛光[J].科学通报，2005,50(1):84-91
[31]康桂文，张飞虎.精密磁流变抛光机床的研制[J].制造技术与机床，2005，（7）：47-49
[32]彭小强。确定性磁流变抛光的关键技术研究[D].国防科学技术大学，2004
[33]张学成，戴一帆，李圣怡.磁射流抛光中磁场的分析与设计[J].航空精密制造技术，2006,42(1):12-15
[34]毕非凡.电流变液辅助精细加工机理研究[D].广东工业大学，2005
[35]姜健.使用磁体抛光的抛光方法[D].大连理工大学硕士学位论文，2005
[36]方慧.液体喷射抛光技术[D].苏州大学，2004
[37]李长河，修世超，李琦，蔡光起.磨料喷射光整加工机理及在机械领域中的应用[J].机械制造，2004,42(8);18-21
[38]汤勇，周德明，夏伟等.磨料流加工壁面滑动特性的研究[J].华南理工大学学报（自然科学版），2001,34-36
[39]何根旺.液粒两相螺旋流光整加工技术的理论研究及螺旋流仿真分析[D].太原理工大学，2006
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