面向光学玻璃的精密加工技术研究
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摘要
随着科学技术的发展,工业领域需要大量的大平面光学玻璃元件。传统的光学加工方法不能满足大平面光学玻璃零件提出的加工效率和加工表面质量两个主要方面的要求,因此研究一种具有高效率和高精度的光学零件加工方法具有重要的实际意义。
弹性射流抛光是一种新型的光学零件精密加工方法,它通过高速旋转的抛光工具控制磨料射流对工件表面的加工过程,使工件表面材料均匀去除,得到超光滑的表面,同时保证了光学玻璃较好的表面质量和较高的抛光效率。本论文的工作内容包括以下几个方面：
(1)阐述了光学玻璃零件的抛光机理,根据水射流的理论基础,结合弹性发射加工技术和磨料水射流抛光技术的机理研究分析了弹性射流抛光的材料去除机理,分析了抛光过程中会对加工效果产生影响的几个主要工艺参数。
(2)根据弹性射流抛光的工艺要求,分析所需设计系统的功能性和实用性,通过对多种设计方案进行对比分析,确定了弹性射流抛光系统的设计原理。其中抛光机构的工作原理基于外圆磨床来实现,射流的形成原理则是对传统的磨料浆体射流方式进行改进。
(3)利用流体仿真软件Fluent模拟研究了弹性射流流场分布,分别分析了喷嘴内、喷嘴外和抛光区域的流场状态。对喷嘴的主要结构参数进行了数值模拟和优化,给喷嘴的设计过程提供依据,研究了喷嘴外自由射流部分和抛光区域弹性射流部分的流场状态。
(4)根据弹性射流抛光系统的原理设计方案,对系统进行详细的结构设计,完成了弹性射流抛光系统的开发。设计了基于外圆磨床实现加工的抛光装置,对射流系统中供压模块、喷射模块和供料模块进行了分模块设计,并分析了射流系统的工作原理和关键技术。
With the development of science and technology, industry need a lot of large plane optical glass components. The traditional optically manufacturing method can't satisfy the processing efficiency and the machined surface quality requirements of large plane optical glass components. Therefore studying a brand-new kind of high-efficiency and high-accuracy processing method of the optical components surface is of great significance.
Elastic jet polishing is a new optical precision processing method, it control abrasive jet machining process of the work piece surface through high-speed polishing tool, it Make the surface of work piece materials evenly remove to get Super-smooth surface, and it can get preferable surface quality and higher polishing efficiency. The main research contents of this paper are listed as follow:
1. Expounds the optical glass polishing mechanism. Based on water jet theory, analyzed removal mechanism of the elastic jet polishing material by Elastic emission machining and water jet polishing. Analyses several main process parameters of polishing process.
2. Analysis the system of practicality and functional in line with the Elastic jet polishing requirements, Determine the elastic jet polishing system design principle by compared and analyzed variety of design schemes. The working principle of polishing institutions based on cylindrical grinder to achieve, and the jet of the forming principle of is traditional abrasive jet way slurry improved.
3. Simulation research of elastic jet flow field distribution through the use of fluid simulation software Fluent, analyzed respectively within the nozzle, nozzles and polished area flow field condition. Numerical simulation and optimization of the nozzle major structure parameters provides the basis of the nozzle of the design process. research Flow state of Free jet and elastic jet.
4. Perform detailed system structure design according to the principle of elastic jet polishing system design scheme, Completed the elastic jet polishing system development. The grinder is designed based on machining polishing devices, for jet system respectively for pressure module, injection module and material feeding module design, and analyses the working principle of the jet system and the key technology.
弹性射流抛光是一种新型的光学零件精密加工方法,它通过高速旋转的抛光工具控制磨料射流对工件表面的加工过程,使工件表面材料均匀去除,得到超光滑的表面,同时保证了光学玻璃较好的表面质量和较高的抛光效率。本论文的工作内容包括以下几个方面：
(1)阐述了光学玻璃零件的抛光机理,根据水射流的理论基础,结合弹性发射加工技术和磨料水射流抛光技术的机理研究分析了弹性射流抛光的材料去除机理,分析了抛光过程中会对加工效果产生影响的几个主要工艺参数。
(2)根据弹性射流抛光的工艺要求,分析所需设计系统的功能性和实用性,通过对多种设计方案进行对比分析,确定了弹性射流抛光系统的设计原理。其中抛光机构的工作原理基于外圆磨床来实现,射流的形成原理则是对传统的磨料浆体射流方式进行改进。
(3)利用流体仿真软件Fluent模拟研究了弹性射流流场分布,分别分析了喷嘴内、喷嘴外和抛光区域的流场状态。对喷嘴的主要结构参数进行了数值模拟和优化,给喷嘴的设计过程提供依据,研究了喷嘴外自由射流部分和抛光区域弹性射流部分的流场状态。
(4)根据弹性射流抛光系统的原理设计方案,对系统进行详细的结构设计,完成了弹性射流抛光系统的开发。设计了基于外圆磨床实现加工的抛光装置,对射流系统中供压模块、喷射模块和供料模块进行了分模块设计,并分析了射流系统的工作原理和关键技术。
With the development of science and technology, industry need a lot of large plane optical glass components. The traditional optically manufacturing method can't satisfy the processing efficiency and the machined surface quality requirements of large plane optical glass components. Therefore studying a brand-new kind of high-efficiency and high-accuracy processing method of the optical components surface is of great significance.
Elastic jet polishing is a new optical precision processing method, it control abrasive jet machining process of the work piece surface through high-speed polishing tool, it Make the surface of work piece materials evenly remove to get Super-smooth surface, and it can get preferable surface quality and higher polishing efficiency. The main research contents of this paper are listed as follow:
1. Expounds the optical glass polishing mechanism. Based on water jet theory, analyzed removal mechanism of the elastic jet polishing material by Elastic emission machining and water jet polishing. Analyses several main process parameters of polishing process.
2. Analysis the system of practicality and functional in line with the Elastic jet polishing requirements, Determine the elastic jet polishing system design principle by compared and analyzed variety of design schemes. The working principle of polishing institutions based on cylindrical grinder to achieve, and the jet of the forming principle of is traditional abrasive jet way slurry improved.
3. Simulation research of elastic jet flow field distribution through the use of fluid simulation software Fluent, analyzed respectively within the nozzle, nozzles and polished area flow field condition. Numerical simulation and optimization of the nozzle major structure parameters provides the basis of the nozzle of the design process. research Flow state of Free jet and elastic jet.
4. Perform detailed system structure design according to the principle of elastic jet polishing system design scheme, Completed the elastic jet polishing system development. The grinder is designed based on machining polishing devices, for jet system respectively for pressure module, injection module and material feeding module design, and analyses the working principle of the jet system and the key technology.
引文
[1]文秀兰,林宋,谭昕,钟建琳.超精密加工技术与装备[M].北京：化学工业出版社,2006
[2]腾霖,任敬心.超精密光学抛光研究的进展及其发展趋势[J].航空精密制造技术,1996,32(3)：5-8
[3]舒朝濂,川爱玲,杭凌侠,郭忠达.现代光学制造技术[M].北京：国防工业出版社,2008
[4]李长河,侯亚丽,蔡光起,卢秉恒.游离磨粒精密光整加上方法综述[J].精密制造与自动化,2009,(1)：4-9
[5]Ralph W. Dietz and Jean M. Bennet. Bowl feed technique for producing super-smooth optical surface[J]. Applied Optical,1966,5 (5):881-882
[6]Stner AJ, Thwaite E G et al. Polishing study using teflon and pitch laps to produce flat and supersmooth surface.Appl.Opt.,1992,31(10):1472-1481
[7]高宏刚,曹健林,陈斌.浮法抛光超光滑表面加工技术[J].光学技术,1995,(3)：40-43
[8]周忆,米林,廖强,梁德沛.基于超声研磨的超精密加工[J].航空精密制造技术,2003,39(1)：1-4
[9]郑开陵.离子束抛光技术[J].现代兵器,1982,(9)：21-25
[10]王颖男,杭凌侠,胡敏达.等离子体加工光学元件工艺研究[J].表面技术,2008,37(1)：51-53
[11]张峰,余景池,张学军,王权陡.磁流变抛光技术[J].光学精密工程,1999,7(5)：1-8
[12]Mori.Y, Ikawa.N. Okuda.T,Yamagata.K. Numerically Controlled Elastic Emission Machining[J].Technology Reports of the Osaka University,1976,26:283-294
[13]Mori.Y, Yamauchi.K, Endo.K. Elastic Emission Machining[J]. Precision Engineering,1987,9 (3):123-128
[14]Higashi.Y, Meike.T, Suzuki.J, Mori.Y, Yamauchi.K, Endo.K, Namba.H. New machining method for making precise and very smooth mirror surfaces made from Cu and Al alloys for synchrotron radiation optics[J].American Institute of physics,1989,60 (7):2120-2123
[15]Yaw-Terng Su, Shuh-Yi Wang, Ping-Yi Chao, Yeong-Dong Hwang, Jar-Sian Hsiaut. Investigation of elastic emission machining process:lubrication effects[J]. Precision Engineering,1995,17:164-172
[16]Yamauchi.K, Hirose.K, Goto.H, Sugiyama.K, Inagaki.K, Yamamura.K, Sano.Y, Mori.Y. First-principles simulations of removal process in EEM (Elastic Emission Machining)[J] Computational Materials Science,1999,14:232-235
[17]Jeong-Du Kim. Motion analysis of powder particles in EEM using cylindrical polyurethane wheel[J]. International Journal of Machine Tools & Manufacture,2002,42:21-28
[18]Yamauchi.K, Mimura.H, Inagaki.K, Mori.Y. Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining[J]. American Institute of physics,2002,73(11):4028-4033
[19]Kubota.A, Shinbayashi.Y, Mimura.H, Sano.Y, Inagaki.K, Mori.Y, Yamauchi.K. Investigation of the surface removal process of silicon carbide in elastic emission machining[J]. Electronic Materiais,2007,36(1):92-97
[20]Kanaoka.M, Takino.H, Nomura.K, Mori.Y, Mimura.H, Yamauchi.K. Removal properties of low-thermal-expansion materials with rotating-sphere elastic emission machining[J]. Science and Technology of Advanced Materials,2007, (8):170-172
[21]李长河,蔡光起,刘枫.砂轮约束磨粒喷射精密光整加工工艺特性研究[J].金刚石与磨料磨具工程,2005,149(5)：41-44
[22]曹志强,赵继,詹建明,张富.液流悬浮超光滑纳米加工试验[J].农业机械学报,2007,38(3)：153-155
[23]张运祺.高压水射流切割原理及其应用[J].武汉工业大学学报.1994,16(4)：13-18
[24]朱派龙,周锦进.高压水射流切割技术原理和应用前景[J].电加工与模具.1997,(6)：1-6
[25]车翠莲,黄传真,朱洪涛,李全来,刘丽芳.磨料水射流抛光技术的研究现状[J].工具技术.2007,41(10)：14-16
[26]邵飞.用于SLA原型的磨料水射流抛光工艺研究[D].兰州：兰州理工大学,2007
[27]方慧,郭培基,余景池.液体喷射抛光时各工艺参数对材料去除量的影响[J].光学技术.2004,30(4)：440-442
[28]查立豫,林鸿海.光学零件工艺学[M].北京：兵器工业出版社,1985
[29]M Brokate, J Sprekels. Hysteresis and phase transitions[M]. Springer Verlag, Berlin,1989
[30]庄艳.利用液流悬浮研抛技术加工光学玻璃K9的研究[D].长春：吉林大学,2005
[31]贾世奎,李成贵,熊昌友,张庆荣.抛光液pH值对玻璃超光滑表面完整性影响[J].新技术新工艺.2008,(3)：32-35
[32]Kaller, Adolf. Properties of polishing media for precision optics[J]. Glass science and technology Frankfurt.1998,27(6):174-183
[33]孙家俊.水射流切割技术[M].徐州：中国矿业大学出版社.1992
[34]沈忠厚.水射流理论与技术[M].东营：石油大学出版社.1998
[35]万云进,王佑君,侯立安.一种可回收式洗消装置喷头的设计思路和射流参数计算[J].机电产品开发与创新.2008,21(4)：22-24
[36]宋孝宗.纳米颗粒胶体射流抛光机理及实验研究[D].哈尔滨：哈尔滨上业大学,2010
[37]李长河,蔡光起,李琦,刘枫.砂轮约束磨粒喷射精密光整加工表面形貌的创成机理[J].东北大学学报,2005,26(6)：578-581
[38]刘小健,俞涛,刘林生,王文斌.磨料浆体射流切割技术的研究[J].润滑与密封,2005,(3)：31-33
[39]贾明峰,俞涛,方明伦,林金生.磨料水射流数控机床的研究与开发[J].机械工程师,2001,11(4)：15-17.
[40]韩惠霖.喷射理论及其应用[M].杭州：浙江大学出版社,1990
[41]程谟栋.微磨料水射流加工装置设计与工艺研究[D].广州：广东工业大学,2007
[42]侯荣国.磨料水射流切割性能和喷嘴内外流场的仿真研究[D].济南：山东大学,2006
[43]刘增文,黄传真.精密磨料微水射流加工系统研究[J].机械工程师.2006,(9)：21--23
[44]施春燕,袁家虎,伍凡,万勇健.射流抛光喷嘴的设计[J].光电工程,2008,35(12)：131-135
[45]马艳洁,梁政,陈卓.磨料射流切割钻杆的喷嘴设计[J].机械设计与制造,2009(5)：24-26.
[46]陈德祥.硅晶片液流悬浮加工技术的研究[D].长春：吉林大学,2006
[2]腾霖,任敬心.超精密光学抛光研究的进展及其发展趋势[J].航空精密制造技术,1996,32(3)：5-8
[3]舒朝濂,川爱玲,杭凌侠,郭忠达.现代光学制造技术[M].北京：国防工业出版社,2008
[4]李长河,侯亚丽,蔡光起,卢秉恒.游离磨粒精密光整加上方法综述[J].精密制造与自动化,2009,(1)：4-9
[5]Ralph W. Dietz and Jean M. Bennet. Bowl feed technique for producing super-smooth optical surface[J]. Applied Optical,1966,5 (5):881-882
[6]Stner AJ, Thwaite E G et al. Polishing study using teflon and pitch laps to produce flat and supersmooth surface.Appl.Opt.,1992,31(10):1472-1481
[7]高宏刚,曹健林,陈斌.浮法抛光超光滑表面加工技术[J].光学技术,1995,(3)：40-43
[8]周忆,米林,廖强,梁德沛.基于超声研磨的超精密加工[J].航空精密制造技术,2003,39(1)：1-4
[9]郑开陵.离子束抛光技术[J].现代兵器,1982,(9)：21-25
[10]王颖男,杭凌侠,胡敏达.等离子体加工光学元件工艺研究[J].表面技术,2008,37(1)：51-53
[11]张峰,余景池,张学军,王权陡.磁流变抛光技术[J].光学精密工程,1999,7(5)：1-8
[12]Mori.Y, Ikawa.N. Okuda.T,Yamagata.K. Numerically Controlled Elastic Emission Machining[J].Technology Reports of the Osaka University,1976,26:283-294
[13]Mori.Y, Yamauchi.K, Endo.K. Elastic Emission Machining[J]. Precision Engineering,1987,9 (3):123-128
[14]Higashi.Y, Meike.T, Suzuki.J, Mori.Y, Yamauchi.K, Endo.K, Namba.H. New machining method for making precise and very smooth mirror surfaces made from Cu and Al alloys for synchrotron radiation optics[J].American Institute of physics,1989,60 (7):2120-2123
[15]Yaw-Terng Su, Shuh-Yi Wang, Ping-Yi Chao, Yeong-Dong Hwang, Jar-Sian Hsiaut. Investigation of elastic emission machining process:lubrication effects[J]. Precision Engineering,1995,17:164-172
[16]Yamauchi.K, Hirose.K, Goto.H, Sugiyama.K, Inagaki.K, Yamamura.K, Sano.Y, Mori.Y. First-principles simulations of removal process in EEM (Elastic Emission Machining)[J] Computational Materials Science,1999,14:232-235
[17]Jeong-Du Kim. Motion analysis of powder particles in EEM using cylindrical polyurethane wheel[J]. International Journal of Machine Tools & Manufacture,2002,42:21-28
[18]Yamauchi.K, Mimura.H, Inagaki.K, Mori.Y. Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining[J]. American Institute of physics,2002,73(11):4028-4033
[19]Kubota.A, Shinbayashi.Y, Mimura.H, Sano.Y, Inagaki.K, Mori.Y, Yamauchi.K. Investigation of the surface removal process of silicon carbide in elastic emission machining[J]. Electronic Materiais,2007,36(1):92-97
[20]Kanaoka.M, Takino.H, Nomura.K, Mori.Y, Mimura.H, Yamauchi.K. Removal properties of low-thermal-expansion materials with rotating-sphere elastic emission machining[J]. Science and Technology of Advanced Materials,2007, (8):170-172
[21]李长河,蔡光起,刘枫.砂轮约束磨粒喷射精密光整加工工艺特性研究[J].金刚石与磨料磨具工程,2005,149(5)：41-44
[22]曹志强,赵继,詹建明,张富.液流悬浮超光滑纳米加工试验[J].农业机械学报,2007,38(3)：153-155
[23]张运祺.高压水射流切割原理及其应用[J].武汉工业大学学报.1994,16(4)：13-18
[24]朱派龙,周锦进.高压水射流切割技术原理和应用前景[J].电加工与模具.1997,(6)：1-6
[25]车翠莲,黄传真,朱洪涛,李全来,刘丽芳.磨料水射流抛光技术的研究现状[J].工具技术.2007,41(10)：14-16
[26]邵飞.用于SLA原型的磨料水射流抛光工艺研究[D].兰州：兰州理工大学,2007
[27]方慧,郭培基,余景池.液体喷射抛光时各工艺参数对材料去除量的影响[J].光学技术.2004,30(4)：440-442
[28]查立豫,林鸿海.光学零件工艺学[M].北京：兵器工业出版社,1985
[29]M Brokate, J Sprekels. Hysteresis and phase transitions[M]. Springer Verlag, Berlin,1989
[30]庄艳.利用液流悬浮研抛技术加工光学玻璃K9的研究[D].长春：吉林大学,2005
[31]贾世奎,李成贵,熊昌友,张庆荣.抛光液pH值对玻璃超光滑表面完整性影响[J].新技术新工艺.2008,(3)：32-35
[32]Kaller, Adolf. Properties of polishing media for precision optics[J]. Glass science and technology Frankfurt.1998,27(6):174-183
[33]孙家俊.水射流切割技术[M].徐州：中国矿业大学出版社.1992
[34]沈忠厚.水射流理论与技术[M].东营：石油大学出版社.1998
[35]万云进,王佑君,侯立安.一种可回收式洗消装置喷头的设计思路和射流参数计算[J].机电产品开发与创新.2008,21(4)：22-24
[36]宋孝宗.纳米颗粒胶体射流抛光机理及实验研究[D].哈尔滨：哈尔滨上业大学,2010
[37]李长河,蔡光起,李琦,刘枫.砂轮约束磨粒喷射精密光整加工表面形貌的创成机理[J].东北大学学报,2005,26(6)：578-581
[38]刘小健,俞涛,刘林生,王文斌.磨料浆体射流切割技术的研究[J].润滑与密封,2005,(3)：31-33
[39]贾明峰,俞涛,方明伦,林金生.磨料水射流数控机床的研究与开发[J].机械工程师,2001,11(4)：15-17.
[40]韩惠霖.喷射理论及其应用[M].杭州：浙江大学出版社,1990
[41]程谟栋.微磨料水射流加工装置设计与工艺研究[D].广州：广东工业大学,2007
[42]侯荣国.磨料水射流切割性能和喷嘴内外流场的仿真研究[D].济南：山东大学,2006
[43]刘增文,黄传真.精密磨料微水射流加工系统研究[J].机械工程师.2006,(9)：21--23
[44]施春燕,袁家虎,伍凡,万勇健.射流抛光喷嘴的设计[J].光电工程,2008,35(12)：131-135
[45]马艳洁,梁政,陈卓.磨料射流切割钻杆的喷嘴设计[J].机械设计与制造,2009(5)：24-26.
[46]陈德祥.硅晶片液流悬浮加工技术的研究[D].长春：吉林大学,2006