光学非接触三维测量仪中瞄准技术的研究
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摘要
几何参数的测量一直是计量领域的重要研究部分。作为基础的长度测量,随着新的测量理论的提出和新测量技术的应用,从一维、二维(2-D)、三维(3-D)以至高维空间,都成为人们关注和研究的内容。光学式测量技术以其非接触、自扫描、高精度、快速获取等手段,正好满足了工业测量和检测方面的需要。
非接触三维测量仪是由CCD图像传感器、PSD位置传感器、光栅传感器、光学成像系统、数据采集系统、激光发射器和计算机及相关的机械结构构成的光学非接触式三维测量装置。众所周知,边缘瞄准的精度的高低决定了一个测量仪器的性能,本文利用光学测量具有的非接触性、全场测量性和高精度性的特点以及光电传感器设计了一种非接触式光学测头。该检测仪将三维测量分为平面二维测量和Z方向的一维测量。平面二维测量主要利用CCD成像技术,图像处理技术,亚像素细分技术等实现了对被测物边缘的自动”描准”,自动计算。文中详细介绍了该检测系统具体的检测方法,设计了相应的机械结构和软件计算系统。在理论部分探讨了和图像处理技术有关的概念和一些基本算法。Z方向的一维测量利用PSD频率响应高、接口电路简单、数据采集快等特点,设计了一种非接触激光测头。和平面二维测量用CCD进行非接触瞄准类似,Z方向的一维测量用激光测头进行非接触瞄准。在理论部分介绍了PSD的相关知识,在实践部分设计了相关的硬件电路和机械结构,最后结合其检测结果,对存在的误差以及造成误差的原因进行了讨论,对测量结果的分析表明了检测方法的正确性。
The geometrical parameter measurement becomes an important part of metrology. As the basement of the measurement, the length measurement has caught people’s attention and become research content from one dimensional, two dimensional(2-D), three dimensional(3-D)to high-dimensional space with the new measurement theory present and the new measurement technologies applied. The measurement technology based on optics is a non-contact, since scanning, high-precision and fast access profile measuring method. And it has been a promising technique in all fields of the industrial measurement and detection.
Non-contact 3-D measure instrument is consisted of a CCD picture sensor, position sensitive detector, an optical grating sensor, an optical image formation system, a data capture system, laser transmitter and an optical non-contacted three-dimensional measurement consisting of computer and interrelated mechanical structure. It is well known that the performance of a measuring instrument is determined by its edge aiming precision. Making use of various photoelectric sensors and the characteristic of optics measurement, such as non-contact, whole-filed measuring and high precision, this paper designs a non-contact optical probe. The detected device divides three dimensional measurement into plane two-dimensional measurement and one-dimensional measurement of Z direction. Plane two-dimensional measurement make mainly use of CCD imaging technology, image processing technology, sub-pixel technology and other technology to achieve automatic aiming, automatic calculation of the edge on measured object. The paper detailed introduces the idiographic measure principle of the measuring system, designs the relevant mechanism and software system. In the part of theory, some image processing and several common computational algorithms of the sub-pixel edge measurement were discussed. PSD is characterized by high frequency responsibility, simple interface circuit, fast data collection and so on. On Z direction one-dimensional measurement, the paper design a non-contact laser probe. Like plane two-dimensional measurement, the device aim the measured object with laser non-contact probe in one-dimensional measurement of Z direction. In theory, the relevant knowledge about PSD is introduced firstly, in practice the relevant design of the hardware circuit and mechanical structure are introduced. At last , the paper discusses the reason causing the error with the measuring results. The analysis of the measuring results indicates the correctness of the measuring method.
非接触三维测量仪是由CCD图像传感器、PSD位置传感器、光栅传感器、光学成像系统、数据采集系统、激光发射器和计算机及相关的机械结构构成的光学非接触式三维测量装置。众所周知,边缘瞄准的精度的高低决定了一个测量仪器的性能,本文利用光学测量具有的非接触性、全场测量性和高精度性的特点以及光电传感器设计了一种非接触式光学测头。该检测仪将三维测量分为平面二维测量和Z方向的一维测量。平面二维测量主要利用CCD成像技术,图像处理技术,亚像素细分技术等实现了对被测物边缘的自动”描准”,自动计算。文中详细介绍了该检测系统具体的检测方法,设计了相应的机械结构和软件计算系统。在理论部分探讨了和图像处理技术有关的概念和一些基本算法。Z方向的一维测量利用PSD频率响应高、接口电路简单、数据采集快等特点,设计了一种非接触激光测头。和平面二维测量用CCD进行非接触瞄准类似,Z方向的一维测量用激光测头进行非接触瞄准。在理论部分介绍了PSD的相关知识,在实践部分设计了相关的硬件电路和机械结构,最后结合其检测结果,对存在的误差以及造成误差的原因进行了讨论,对测量结果的分析表明了检测方法的正确性。
The geometrical parameter measurement becomes an important part of metrology. As the basement of the measurement, the length measurement has caught people’s attention and become research content from one dimensional, two dimensional(2-D), three dimensional(3-D)to high-dimensional space with the new measurement theory present and the new measurement technologies applied. The measurement technology based on optics is a non-contact, since scanning, high-precision and fast access profile measuring method. And it has been a promising technique in all fields of the industrial measurement and detection.
Non-contact 3-D measure instrument is consisted of a CCD picture sensor, position sensitive detector, an optical grating sensor, an optical image formation system, a data capture system, laser transmitter and an optical non-contacted three-dimensional measurement consisting of computer and interrelated mechanical structure. It is well known that the performance of a measuring instrument is determined by its edge aiming precision. Making use of various photoelectric sensors and the characteristic of optics measurement, such as non-contact, whole-filed measuring and high precision, this paper designs a non-contact optical probe. The detected device divides three dimensional measurement into plane two-dimensional measurement and one-dimensional measurement of Z direction. Plane two-dimensional measurement make mainly use of CCD imaging technology, image processing technology, sub-pixel technology and other technology to achieve automatic aiming, automatic calculation of the edge on measured object. The paper detailed introduces the idiographic measure principle of the measuring system, designs the relevant mechanism and software system. In the part of theory, some image processing and several common computational algorithms of the sub-pixel edge measurement were discussed. PSD is characterized by high frequency responsibility, simple interface circuit, fast data collection and so on. On Z direction one-dimensional measurement, the paper design a non-contact laser probe. Like plane two-dimensional measurement, the device aim the measured object with laser non-contact probe in one-dimensional measurement of Z direction. In theory, the relevant knowledge about PSD is introduced firstly, in practice the relevant design of the hardware circuit and mechanical structure are introduced. At last , the paper discusses the reason causing the error with the measuring results. The analysis of the measuring results indicates the correctness of the measuring method.
引文
[1]张国雄.三坐标测量机[M].天津:天津大学出版社,1999:25-34.
[2]胡仲翔,康健.基于CCD技术的万能工具显微镜再制造[J].装甲兵工程学院学报,2007,21(5):70-73.
[3] Jarvus, R.A.A laser time-of-flight range scanner for robotic vision.IEEE Transactions on PAMI,1983,5(5):505-512.
[4] Lavigne Pierre, McCarthy Nathalie, Parent Andre, et al. Improved optical resonator for laser radars. Proceedings of SPIE,1986,663:124-131.
[5]殷纯永.现代干涉测量技术[M].天津:天津大学出版社,1999:8-11.
[6] C. T. Reid. Automatic fringe pattern analysis[J]: a review. Optics and Lasers in Eingineering,1986, 7: 37-86.
[7] Leith E., Upatneks. Reconstructed wave fronts and communication theory[J]. Journal of Optical Society of America, 1982, 54:1123-1130.
[8] Yuchi Liang, Gu Jihua, Liu Wei, Tao Zhi. An image digital watermark technique based on digital holography and discrete cosine transform [J]. Acta Optica Sinica, 2006, 3:55-61.
[9] HashimotoT,MuraiS.Traffic Flow Measurement by Video Image Processing[C]. ProcSPIE,1990,1395:802-808.
[10]候立周,强锡富.数字散斑干涉技术在形貌测量中的应用及进展[J].宇航技测技术,1999, 19(3):45-50.
[11] Hongjun Dai, Xianyu Su. Shape measurement by digital speckle temporal sequence correlation with digital light projector. Optical Engineering, 2001, 40(5):793-800.
[12] S.R.McNeill,M.A.Sutton,Z.Miao,et al. Measurement of surface profile using digital image correlation. Experimental Mechanics, 1997,37(1):13-20.
[13] Riorx M. Laser range finder based upon synchronized scanners. Applied Optics,1984,23(21):3837-3844.
[14] Will P M., Pennington, K. S. Grid coding: A novel technique for image processing[C]. Proceedings of the IEEE,1972, 60(6):669-680.
[15] Hall E. L. Measuring curved surfaces for robot vision[J]. Computer, 1982,15(12):42-45.
[16] Haeluser Gerd, Ritter Dieter. Parallel three-dimensional sensing by color-coded triangulation[J]. Applied Optics, 1993,32:7164-7169.
[17] Paul M. Griffin, Lakshmi S, Narasimhan, et al. Generation of uniquely encoded light patterns for range data acquisition[J]. Pattern Recognition, 1992, 25(6):609-616.
[18]刘维一,王肇沂,母国光.彩色组合编码条纹光栅轮廓术[J].光学学报,2000,20 (9): 18-123.
[19]董斌,尤政,李颖鹏.基于空间二进制编码的3-D形貌测量方法[J].光学技术,1999,5(1):33-36.
[20] Minoru Ito, Akira Ishii. A three-level checkerboard pattern (TCP) projection method for curved surface measurement[J]. Pattern Recognition, 1995, 28(1):27-40.
[21]陶国智,邾继贵,叶声华.光栅式结构光传感器的编码方法[J].航空精密制造技术,1999,35(3):18-20.
[22] Giovanna Sansoni, Matteo Carocci, Roberto Rodella. Three-dimensional vision bases on a combination of gray-code and phase-shift light projection:analysis and compensation of the systematic errors[J]. Applied Optics. 1999,38(31):6565-6573.
[23] V Srinivasan, H. C. Liu, M. Halioua. Automated phase measuring profilometry of 3-D diffuse object[J]. Applied Optics, 1984, 23(18):3105-3108.
[24] Z. Jason Geng. Rainbow three-dimensional camera: new concept of high-speed three-dimensional vision systems[J]. Optical Engineering, 1996, 35(2): 376-383.
[25]武彬.一种离焦模糊图像的复原方法[J].计算机技术与发展, 2008,18(1):74-76.
[26] Pentland, Alex Paul. A new sense for depth of field[J]. IEEE Transactions on PAMI, 1997, 9(4): 523-531.
[27] B.F.Buxton,H.Buxton. Computation of optic flow from the motion of edge features in image sequences[J]. Image Vision Computation, 1998,2:59-75.
[28]章毓晋.图像处理和分析[M].清华大学出版社,2001:34-45.
[29]孙长库,叶声华.激光测量技术[M].天津大学出版社,2001:11-13.
[30]马明建,周长城.数据采集与处理技术[M].西安交通大学出社,1998:52-55.
[31]沈庭芝.含噪声图像恢复方法的研究[J].北京理工大学学报,1996,16(6):626-630.
[32]谢向花.光电传感器检测技术研究[J].中国科技信息,2005,(7):7-15.
[33]程开富.全球CCD图像传感器生产状况分析[J].电子元器件应用,2006,(6):98-99.
[34]陈育荣,杨旭东,谢铁邦.一种新型精密三维工作台的设计及其应用[J].湖北汽车工业学院学报,2007,21(3):25-28.
[35]吕海雷,雷志勇.亚像素级细分在CCD光耙中的应用研究[J].科学技术与工程,2008,8(3):634-637.
[36]杨亚莉.基于CCD的图像采集系统设计[J].武汉科技学院学报,2007,20(9):42-45.
[37]林守杰.CCD摄像器件的发展现状及其应用前景[J].信息电子与自动化仪表,2004,(1):6-12.
[38]章毓晋.图像处理和分析[M].清华大学电子工程系.1997:40-52.
[39]李介谷.图像处理技术[M].上海:上海交通大学出版社,1998: 65-71.
[40]凌旭峰,杨杰,叶晨洲.彩色序列图像的人脸检测和识别系统[J].电子学报,2003,31(4):544-547.
[41]郑浩.基于目标边缘的图像二值化方法的研究[J].计量技术,2002,2(4):3-5.
[42]赵宇明,李介谷.序列图像(亚)像素级点目标的DP算法[J].上海交通大学学报,1995,29(6):56-60.
[43] P.Seitz,T.Spring. Smart sensing using custom photo-application-specific inte- grated circuits and charge-coupled device technology. Optical engineer,1995, 34(8):2299-2308.
[44]杨朝霞,途峰,李岳生.图像梯度与散度计算及在边缘提取中的应用.中山大学学报[J].2002,41(6):16-19.
[45]徐翠薇.计算方法引论[M].高等教育出版社.2001:59-67.
[46]王忠礼,穆志纯.边缘检测在外耳识别技术中的应用[J].电脑开发与应用,2002,2(12):5-9.
[47] Zhang,Y.J.Influence of segmentation over feature measurement[J]. Opticalengineer,1995,16(2):201-206.
[48]吴晓波,钟先信.应用多项式插值函数提高面阵CCD尺寸测量的分辨力[J].仪器仪表学报,1996,17(2):154-158.
[49]蔡明知,宁洪侠,曹铁泽.基于PSD的高精度激光位移传感器设计与分析[J].机电产品开发与创新.2007,20(5):150-152.
[50]黄梅珍,唐九耀,陈钰清.基于半导体横向光电效应的位置敏感探测器[J].电光与控制,2003,(2):34-38.
[51]贺安之.现代传感器原理及应用[M].北京:宇航出版社,1994:93-106.
[52]戴立铭,江撞军.激光三角测量传感器的精密位移测量[J].仪器仪表学报,1994,15 (4):400-404.
[53]江舟,周建瑜.三维几何量非接触测量技术[J].航空制造技术,2007,(12):114-116.
[54]张国雄,金篆芷.测控电路[M].北京:机械土业出版社,2001:48-56.
[55]梁凤超,续志军.基于PSD的微位移传感器[J].传感器与微系统,2007,26(3):59-61.
[2]胡仲翔,康健.基于CCD技术的万能工具显微镜再制造[J].装甲兵工程学院学报,2007,21(5):70-73.
[3] Jarvus, R.A.A laser time-of-flight range scanner for robotic vision.IEEE Transactions on PAMI,1983,5(5):505-512.
[4] Lavigne Pierre, McCarthy Nathalie, Parent Andre, et al. Improved optical resonator for laser radars. Proceedings of SPIE,1986,663:124-131.
[5]殷纯永.现代干涉测量技术[M].天津:天津大学出版社,1999:8-11.
[6] C. T. Reid. Automatic fringe pattern analysis[J]: a review. Optics and Lasers in Eingineering,1986, 7: 37-86.
[7] Leith E., Upatneks. Reconstructed wave fronts and communication theory[J]. Journal of Optical Society of America, 1982, 54:1123-1130.
[8] Yuchi Liang, Gu Jihua, Liu Wei, Tao Zhi. An image digital watermark technique based on digital holography and discrete cosine transform [J]. Acta Optica Sinica, 2006, 3:55-61.
[9] HashimotoT,MuraiS.Traffic Flow Measurement by Video Image Processing[C]. ProcSPIE,1990,1395:802-808.
[10]候立周,强锡富.数字散斑干涉技术在形貌测量中的应用及进展[J].宇航技测技术,1999, 19(3):45-50.
[11] Hongjun Dai, Xianyu Su. Shape measurement by digital speckle temporal sequence correlation with digital light projector. Optical Engineering, 2001, 40(5):793-800.
[12] S.R.McNeill,M.A.Sutton,Z.Miao,et al. Measurement of surface profile using digital image correlation. Experimental Mechanics, 1997,37(1):13-20.
[13] Riorx M. Laser range finder based upon synchronized scanners. Applied Optics,1984,23(21):3837-3844.
[14] Will P M., Pennington, K. S. Grid coding: A novel technique for image processing[C]. Proceedings of the IEEE,1972, 60(6):669-680.
[15] Hall E. L. Measuring curved surfaces for robot vision[J]. Computer, 1982,15(12):42-45.
[16] Haeluser Gerd, Ritter Dieter. Parallel three-dimensional sensing by color-coded triangulation[J]. Applied Optics, 1993,32:7164-7169.
[17] Paul M. Griffin, Lakshmi S, Narasimhan, et al. Generation of uniquely encoded light patterns for range data acquisition[J]. Pattern Recognition, 1992, 25(6):609-616.
[18]刘维一,王肇沂,母国光.彩色组合编码条纹光栅轮廓术[J].光学学报,2000,20 (9): 18-123.
[19]董斌,尤政,李颖鹏.基于空间二进制编码的3-D形貌测量方法[J].光学技术,1999,5(1):33-36.
[20] Minoru Ito, Akira Ishii. A three-level checkerboard pattern (TCP) projection method for curved surface measurement[J]. Pattern Recognition, 1995, 28(1):27-40.
[21]陶国智,邾继贵,叶声华.光栅式结构光传感器的编码方法[J].航空精密制造技术,1999,35(3):18-20.
[22] Giovanna Sansoni, Matteo Carocci, Roberto Rodella. Three-dimensional vision bases on a combination of gray-code and phase-shift light projection:analysis and compensation of the systematic errors[J]. Applied Optics. 1999,38(31):6565-6573.
[23] V Srinivasan, H. C. Liu, M. Halioua. Automated phase measuring profilometry of 3-D diffuse object[J]. Applied Optics, 1984, 23(18):3105-3108.
[24] Z. Jason Geng. Rainbow three-dimensional camera: new concept of high-speed three-dimensional vision systems[J]. Optical Engineering, 1996, 35(2): 376-383.
[25]武彬.一种离焦模糊图像的复原方法[J].计算机技术与发展, 2008,18(1):74-76.
[26] Pentland, Alex Paul. A new sense for depth of field[J]. IEEE Transactions on PAMI, 1997, 9(4): 523-531.
[27] B.F.Buxton,H.Buxton. Computation of optic flow from the motion of edge features in image sequences[J]. Image Vision Computation, 1998,2:59-75.
[28]章毓晋.图像处理和分析[M].清华大学出版社,2001:34-45.
[29]孙长库,叶声华.激光测量技术[M].天津大学出版社,2001:11-13.
[30]马明建,周长城.数据采集与处理技术[M].西安交通大学出社,1998:52-55.
[31]沈庭芝.含噪声图像恢复方法的研究[J].北京理工大学学报,1996,16(6):626-630.
[32]谢向花.光电传感器检测技术研究[J].中国科技信息,2005,(7):7-15.
[33]程开富.全球CCD图像传感器生产状况分析[J].电子元器件应用,2006,(6):98-99.
[34]陈育荣,杨旭东,谢铁邦.一种新型精密三维工作台的设计及其应用[J].湖北汽车工业学院学报,2007,21(3):25-28.
[35]吕海雷,雷志勇.亚像素级细分在CCD光耙中的应用研究[J].科学技术与工程,2008,8(3):634-637.
[36]杨亚莉.基于CCD的图像采集系统设计[J].武汉科技学院学报,2007,20(9):42-45.
[37]林守杰.CCD摄像器件的发展现状及其应用前景[J].信息电子与自动化仪表,2004,(1):6-12.
[38]章毓晋.图像处理和分析[M].清华大学电子工程系.1997:40-52.
[39]李介谷.图像处理技术[M].上海:上海交通大学出版社,1998: 65-71.
[40]凌旭峰,杨杰,叶晨洲.彩色序列图像的人脸检测和识别系统[J].电子学报,2003,31(4):544-547.
[41]郑浩.基于目标边缘的图像二值化方法的研究[J].计量技术,2002,2(4):3-5.
[42]赵宇明,李介谷.序列图像(亚)像素级点目标的DP算法[J].上海交通大学学报,1995,29(6):56-60.
[43] P.Seitz,T.Spring. Smart sensing using custom photo-application-specific inte- grated circuits and charge-coupled device technology. Optical engineer,1995, 34(8):2299-2308.
[44]杨朝霞,途峰,李岳生.图像梯度与散度计算及在边缘提取中的应用.中山大学学报[J].2002,41(6):16-19.
[45]徐翠薇.计算方法引论[M].高等教育出版社.2001:59-67.
[46]王忠礼,穆志纯.边缘检测在外耳识别技术中的应用[J].电脑开发与应用,2002,2(12):5-9.
[47] Zhang,Y.J.Influence of segmentation over feature measurement[J]. Opticalengineer,1995,16(2):201-206.
[48]吴晓波,钟先信.应用多项式插值函数提高面阵CCD尺寸测量的分辨力[J].仪器仪表学报,1996,17(2):154-158.
[49]蔡明知,宁洪侠,曹铁泽.基于PSD的高精度激光位移传感器设计与分析[J].机电产品开发与创新.2007,20(5):150-152.
[50]黄梅珍,唐九耀,陈钰清.基于半导体横向光电效应的位置敏感探测器[J].电光与控制,2003,(2):34-38.
[51]贺安之.现代传感器原理及应用[M].北京:宇航出版社,1994:93-106.
[52]戴立铭,江撞军.激光三角测量传感器的精密位移测量[J].仪器仪表学报,1994,15 (4):400-404.
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